JPH05157931A - Optical functional element coupling member and manufacturing method thereof - Google Patents

Abstract

PURPOSE:To obtain a coupling member which enables high-precision positioning and its manufacturing method in the optical coupling between an optical fiber and an optical functional element. CONSTITUTION:This optical functional element coupling member is equipped with a 1st connector element 3, a 2nd connector element 4, a base substrate 5 which has a mounting space 51 for the optical function element 6 at an intermediate part in a coupling direction and fitting spaces 52 for both the connector elements at both end parts and a guide pin 8 which is interposed between the base substrate and both the connector elements and enables the positioning of the optical axes of both optical fiber end surfaces; and the connector element 3 has a fiber fixing groove 31 and a guiding groove 32 with which the guide pin couples, the connector element 4 has a fiber fixation groove 41 and a guide groove 41, and the base substrate has a guiding groove 53 with which its connector guiding pin is engaged.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical functional element for optically coupling an optical functional element such as an optical switch, an optical filter, an optical coupler, etc., which performs an optical conversion function, and an optical fiber in optical communication technology. The present invention relates to a connecting member and a manufacturing method thereof.

[0002]

2. Description of the Related Art An optical functional element that enables optical conversion processing such as optical multiplexing / branching, optical multiplexing / demultiplexing, polarization separation, and reflection is used by being interposed between optical fibers whose end faces face each other. , Optical filters, optical couplers, etc.

Conventionally, an optical connector is generally used for optical coupling between the optical fiber and the optical functional element. In particular, when a tape-shaped multi-fiber optical fiber is used, the optical connector positions the optical fiber by inserting a guide pin provided therein into a pin hole of the mating connector.

[0004]

Since the conventional optical coupling method using such an optical connector uses a pin hole having a hole formed therein, the positioning between the respective optical fibers and the optical functional elements and between the optical fibers is performed. It was difficult to perform with high precision.

By the way, as a means for supplementing the positioning accuracy between the optical fiber and the optical functional element, for example, the optical fiber is a single mode type optical fiber (hereinafter referred to as "SM optical fiber").
In this case, a short cut graded index optical fiber (hereinafter referred to as “GI optical fiber”) is fusion-spliced at the tip of this SM optical fiber to expand the light beam and reduce the deviation of the optical axis and the coupling loss. There is also a method. However, it has been difficult to cut the GI optical fiber to a predetermined length or to cut the end faces of the multi-core SM optical fiber by aligning them accurately.

The present invention has been made to overcome the above problems, and provides an optical functional element coupling member and a method for manufacturing the optical functional element coupling member, which enables highly accurate positioning when optically coupling an optical fiber and an optical functional element. Its purpose is to provide.

[0007]

In order to achieve the above object, the invention of claim 1 fixes the end faces of one optical fiber and the end face of the other optical fiber so as to face each other with a desired gap. Along with this, an optical functional element coupling member that forms an optical functional element mounting space in the gap and enables optical coupling between one optical fiber and the other optical fiber via various optical functional elements mounted in the mounting space In, a first connector element to which one end of one optical fiber is fixed, a second connector element to which the other end of the optical fiber is fixed, and a mounting space for an optical functional element in an intermediate portion in the coupling direction are provided. At the same time, a base substrate having mounting spaces for the first and second connector elements at both ends, and an end face of both optical fibers through the base substrate, which is interposed between the base substrate and the first and second connector elements. Between The first connector element includes a fiber fixing groove that extends in the coupling direction when one end of one optical fiber is fixed to the surface on the base substrate side, and a guide pin that enables positioning of the shaft. A guide groove formed in parallel with which the guide pin engages;
Of the connector element has a fiber fixing groove and a guide groove having the same arrangement and the same shape as the first connector element on its base substrate side surface, and the base substrate extends in the coupling direction on its connector element side surface. It is characterized by having a guide groove with which the guide pin engages.

In this case, both optical fibers are single mode type optical fibers, and the single mode type optical fiber and the optical axis are aligned between the mounting spaces of the first and second connector elements and the optical function element. It is preferable that a connection device incorporating the graded index optical fiber is interposed.

Further, the guide groove of the first and second connector elements and the guide groove of the base substrate have a cross section "V" at the same groove angle.
It is preferable that the guide pin is formed in a letter shape and the guide pin is formed in a round bar shape.

Further, it is preferable that both the first and second connector elements and the base substrate are formed by cutting a single material in which the grooves for forming the fiber fixing groove and the guide groove are formed in advance.

Further, it is also preferable that the first and second connector elements and the base substrate are composed of silicon semiconductor chips.

According to a sixth aspect of the present invention, there is provided a first connector element having a fiber fixing groove to which one end of one optical fiber is fixed and a positioning guide groove to which a guide pin engages, and the other optical element. A second connector element in which a fiber fixing groove for fixing the end portion of the fiber and a positioning guide groove for engaging with a guide pin are formed, and a mounting space for the optical functional element is provided in the middle portion. Mounting spaces for both connector elements are formed at both ends, and a base substrate having positioning guide grooves for engaging guide pins is provided between the base substrate mounting space and the mounting space. A method of manufacturing an optical functional element coupling member, comprising: a connecting device to which an optical fiber for connecting to a functional element is fixed; at least a first and a second connector element are added to a base substrate. A first raw material having a length is used, and a first groove forming a guide groove and a second groove forming a fiber fixing groove are formed parallel to each other on the surface of the single material. And a second step of processing the surface of a single material to a desired thickness, leaving a portion constituting the connecting device in the middle portion and a portion constituting both optical fiber elements at both ends, And a third step of separating the parts forming the both optical fiber elements.

In this case, the single material is preferably a chip cut from a silicon semiconductor wafer.

[0014]

According to the structure of the present invention, the first connector element has the fiber fixing groove and the guide groove with which the guide pin engages on the surface on the base substrate side, and the second connector element comprises: The base substrate side surface has a fiber fixing groove and a guide groove that are the same as the first connector element and have the same shape, and the base substrate has a guide groove with which the guide pin engages on the connector element side surface. Therefore, if the guide pins are engaged with the respective guide grooves so as to be sandwiched between both connector elements and the base substrate, the first connector element and the second connector element will be interposed via the base substrate. Be positioned accurately. In other words, the optical fiber of the first connector element and the optical fiber of the second connector element can be made to face each other in an accurate positioning state with a space for mounting the optical functional element. Further, since the optical fiber is fixed in the fiber fixing groove of the connector element, it can be held in the guide groove portion by a jig having a pin similar to the guide pin, and the tip of the connector element and the connector element can be accurately ground in the direction orthogonal to the pin. ..

In this case, a connection device is interposed between the first and second connector elements and the mounting space for the optical functional element, and the GI optical fiber is incorporated into this connection device, so that the GI optical fiber is connected to both ends of the connection device. Can be precisely polished, and the light beam of the SM optical fiber can be expanded and transmitted to the subsequent optical functional element without waste.

Further, the guide groove of both connector elements and the guide groove of the base substrate are formed in a V-shaped cross section, and the guide pin is formed in a round bar shape so that the surface orthogonal to the length direction of the optical fiber. Positioning in the inside is performed with high accuracy by positioning at two points by the V groove in the X-axis direction and by using a round bar-shaped guide pin in the Y-axis direction.

In addition, both connector elements and the base substrate,
By cutting and forming a single material in which the grooves for forming the fiber fixing groove and the guide groove are formed in advance, grooves having exactly the same position and shape can be provided in these members, and positioning accuracy can be improved. Is greatly improved.

Further, by forming both the connector elements and the base substrate with silicon semiconductor chips, the optical functional element coupling member can be made excellent in workability and weather resistance.

According to the structure of claim 6, a single material having a length obtained by adding both connector elements to the base substrate is used.
A first groove forming a guide groove and a second groove forming a fiber fixing groove are formed on the surface of a single material, and then a portion forming a connection device and an optical fiber element are formed. The base substrate in which various grooves having exactly the same position and shape are formed by processing the surface of a single material to a desired thickness leaving parts and parts and finally separating the parts constituting both optical fiber elements. Also, the optical function element coupling member can be configured by both connector elements. Therefore, if both the SM and GI optical fibers are incorporated into this, the end faces of these optical fibers can be easily processed, and highly precise positioning can be performed between the optical fibers. Moreover, since the light beam of the SM optical fiber is expanded by both the GI optical fibers, even if a gap is created between the both GI optical fibers and the optical functional element, the optical coupling can be performed without any trouble.

In this case, by using a single material as a chip cut from a silicon semiconductor wafer, it is possible to construct an optical functional element coupling member which is easy to process and has excellent weather resistance.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An optical functional element coupling member according to an embodiment of the present invention will be described below with reference to the accompanying drawings with reference to FIGS. FIG. 1 is an exploded perspective view showing this optical functional element coupling member, and FIG. 2 is a vertical cross-sectional view of the main part thereof.
FIG. 6 is a side view showing a coupling state of optical fibers in an optical functional element coupling member.

In this optical functional element coupling member, the end surface of one multi-core optical fiber and the end surface of the other multi-core optical fiber are opposed to each other with a desired gap, and various optical functional elements are placed in the gap. By interposing it, optical conversion processing such as optical multiplexing / branching, optical multiplexing / demultiplexing, polarization separation, and reflection can be performed between one multi-core optical fiber and the other multi-core optical fiber, and between the opposing optical fibers. , Optical switches, optical filters, optical couplers, etc. .

As shown in FIGS. 1 and 2, the optical functional element coupling member 1 includes a first connector element 3 to which an end portion of one multi-core optical fiber 2 is fixed, and another optical element coupling member 1 facing the first connector element 3. Second connector element 4 to which the end of the optical fiber 2 is fixed
And a base substrate 5 in which the first and second connector elements 3 and 4 are set at both ends, and a multi-fiber optical fiber 2 and an optical functional element 6 formed in an intermediate portion of the base substrate 5. It is provided with a pair of connection devices 7 and 7 for effective optical coupling, and a pair of guide pins 8 and 8 interposed between the first and second connector elements 3 and 4 and the base substrate 5. ..

First connector element 3 and second connector element 4
And have exactly the same shape and are made of the same material.
Therefore, the first connector element 3 will be described here, and the second connector element 4 will not be described and the corresponding reference numerals will be used. The first connector element 3 (4) has a fiber fixing groove 31 (41) extending in the coupling direction at an intermediate portion of the surface on the base substrate 5 side, and a fiber fixing groove 31.
A pair of left and right guide grooves 32 on both sides of (41),
32 (42, 42) is formed. The fiber fixing groove 31 (41) is composed of five V-grooves 31a (41a) corresponding to the multi-core optical fiber 2 (five cores in the embodiment). The ends are allowed to adhere with the coating removed.
In this case, the fixing of the multi-core optical fiber 2 may be performed by aligning the multi-core optical fiber 2 in the fiber fixing groove 31 (41) and then adhering it with the holding plate 33 (43), or in advance by the first connector element 3 (4). After adhering the holding plate 33 (43) to the optical fiber, the multi-core optical fiber 2 is inserted into the fiber fixing groove 31 (41). The fiber fixing groove 31 (41) has five V grooves 31.
a (41a), each groove 31a (41
Since the pitch of a) can be accurately ground and each optical fiber 2a is supported and fixed in each groove at two points, it can be positioned with high precision.

On the other hand, each guide groove 32 (42) is a V groove for positioning with which the guide pin 8 is engaged, and is formed in parallel with the fiber fixing groove 31 (41). The guide groove 32 (42) is formed at the same groove angle as the guide groove 53 of the base substrate 5 which will be described later.
The positioning between (4) and the base substrate 5 can be accurately performed. Further, the guide groove 32 (42) is
Based on this, the end portions of the multi-core optical fiber 2 can be cut and aligned, and the polishing finish thereafter can be performed.
The end face of can be finished with high precision.

The base substrate 5 has its connector elements 3, 4
A mounting space 51 for the optical functional element 6 is formed in the middle portion on the side, and mounting spaces 52, 52 for the first and second connector elements are formed in both end portions. Further, a pair of left and right guide grooves 53, 53 extending in the coupling direction are formed so as to vertically cut through both the mounting and mounting spaces 51, 52. Each of the guide grooves 53 is a V groove for positioning with which the guide pin 8 is engaged, and the guide grooves 32, 4 of both connector elements 3, 4 are provided.
It is formed in the same line as 2 and at the same groove angle. Therefore, both connector elements 3 and 4 have a pair of guide grooves 53,
Accurately positioned via 53.

On the other hand, between the mounting space 51 and the mounting space 52 of the base substrate 5, both multi-core optical fibers 2 and 2 are provided.
A pair of connecting devices 7, 7 for optically coupling the optical function element 6 with the optical functional element 6 are formed in a block shape so as to avoid the guide grooves 53, 53. Each connection device 7 is formed with a fiber fixing groove 71 which is exactly the same as that of the first and second connector elements 3 and 4, and the optical fiber 9 fixed to this is fixed.
The pressing plate 72 is adhered so as to fix the.
In this case, both the multi-core optical fibers 2 and 2 fixed to the first and second connector elements 3 and 4 are SM optical fibers, but each optical fiber 9 fixed to the connection device 7 Is composed of a GI optical fiber. That is, as shown in FIG. 3, when the first and second connector elements 3 and 4 are mounted on the base substrate 5, one SM optical fiber (multicore optical fiber) 2 has one GI optical fiber ( (Optical fiber) 9 is optically coupled by abutting, and the other GI optical fiber 9 is optically coupled by abutting to the tip of the other SM optical fiber 2 so that the optical functional element 6 is provided between the two GI optical fibers 9, 9. It will be arranged. G
The I optical fiber 9 has a larger core diameter than the SM optical fiber 2, and the optical signal is expanded by the GI optical fiber 9, so that the gap loss between the I optical fiber 9 and the optical functional element 6 can be minimized. Therefore, by interposing the GI optical fiber 9 between the SM optical fiber 2 and the optical functional element 6, the coupling loss can be reduced even if a gap is generated between the SM optical fiber 2 and the various optical functional elements 6.

The guide pin 8 is formed in a round bar shape,
When the first and second connector elements 3 and 4 are mounted on the base substrate 5, the first and second connector elements are engaged with the respective guide grooves 53, 32 and 42 and the base substrate 5 is interposed therebetween. Mutual positioning between 3 and 4 is possible. The arrangement direction of the facing multi-core optical fibers 2 and 2, that is, the X-axis direction in the plane orthogonal to the coupling direction is determined by the engagement of the guide pin 8 and the respective guide grooves 32 and 42, and the GI light Guide pin 8 in Y-axis direction with fiber 9
Positioned by changing the diameter of. The positioning of the multi-core optical fiber 2 and the GI optical fiber 9 in the X-axis direction can be achieved by groove processing by the same processing device and by a method of manufacturing the optical functional element coupling member 1 described later.

Here, a method of manufacturing the optical functional element coupling member will be described with reference to FIGS. The optical functional device coupling member 1 is composed of a chip (single material) 10 cut out from a silicon semiconductor wafer, and this chip 10 has a length equal to the base substrate 5 plus the first and second connector elements 3 and 4. I am using one.

First, the guide groove 32,
A pair of large grooves forming 42, 53 and five small grooves forming the fiber fixing grooves 31, 41, 71 are ground in parallel with each other. After forming these grooves, plates to be the pressing plates 33, 43, 72 are adhered to the entire surface of the chip 10 so as to close the grooves (FIG. 4).
(A)).

Next, the surface of the chip 10 is ground to a desired thickness, leaving the portions constituting the connecting devices 7, 7 in the middle portion and the portions constituting both the optical fiber elements 3, 4 at both ends. To do. That is, the mounting spaces 52, 52 for both optical fiber elements 3, 4 and the mounting space 51 for the optical functional element 6 are formed by grinding. Further, the boundary portions between the both optical fiber elements 3 and 4 and the respective mounting spaces 52 and 52 are cut to form the first and second both connector elements 3 and 4 and the base substrate 5 (see FIG. )).

Then, the multi-core optical fibers (SM optical fibers) 2 and 2 from which the coatings on the ends are removed are inserted into the fiber fixing grooves 31 and 41 of the respective connector elements 3 and 4, and an adhesive is poured into them. Adhere and fix. Similarly, the GI optical fibers 9 and 9 are fixed to the fiber fixing grooves 71 and 71 of the respective connection devices 7 and 7 (FIG. 4C).

Finally, the respective guide grooves 32, 42,
The end faces of the SM optical fiber 2 and the GI optical fiber 9 are polished on the basis of 53, and a guide pin 8 having a diameter that allows the Y-axis directions of both fibers 2 and 9 to coincide with each other is selected as shown in FIG.

As described above, the chip 10 is grooved so that the X-axis directions of both fibers 2 and 9 are matched, and the Y-axis direction is matched by selecting the desired guide pin 8. Positioning (optical axis alignment) of the end faces of both GI optical fibers 2 and 9 can be performed with high accuracy.

As described above, according to this embodiment, the optical functional device coupling member 1 can be constructed by the base substrate 5 and the two connector elements 3 and 4 in which various grooves having exactly the same position and shape are formed. Therefore, both the SM and GI optical fibers 2 and 9 can be accurately positioned, and the end faces of these optical fibers 2 and 9 can be easily processed.
The optical coupling loss between the optical functional elements 6 as well as the optical fibers 2 and 9 can be made extremely small.

FIG. 6 shows an example of a 2 × 2 multi-core type optical switch constructed by using the optical functional element coupling member of the embodiment. In the optical function element 6, the deflection separation plate 61 and the total reflection plate 62 are alternately arranged at a desired pitch in a state where the deflection separation plate 61 and the total reflection plate 62 are held at an angle of 45 ° inside the optical member 63, and the deflection is performed at an intermediate portion thereof. The surface switching element 64, for example, a liquid crystal, a magneto-optical element or the like is laminated so as to be sandwiched. The polarization separating plate 61 transmits so-called S waves and reflects P waves.
On the other hand, the deflection surface switching element 64 exerts an optical switching function by inputting an electric field or magnetic field from the outside. For example, in the case of liquid crystal, if the electric field applied to the liquid crystal is below a predetermined level, the deflection surface of the light incident thereon is changed, that is, the S wave is changed to the P wave or the P wave is changed to the S wave, and the electric field is changed. If the level is equal to or higher than a predetermined level, there is a property that the deflection component is not changed.

The path through which light is transmitted from the GI optical fiber (SM optical fiber 2) 9 of reference numeral A1 to the GI optical fiber (SM optical fiber 2) 9 of reference numeral C1 shown in FIG.
In the F state, the path through which light is transmitted from the GI optical fiber (SM optical fiber 2) 9 of reference numeral A1 to the GI optical fiber (SM optical fiber 2) 9 of reference numeral D1 shown in FIG.
It is in the N state. In the OFF state (FIG. 6A), an electric field of a predetermined level or higher is applied to the deflection surface switching element 64, and first, the SM optical fiber 2 is passed through the GI optical fiber 9.
The optical signal that is incident from is separated into an S wave and a P wave by the polarization separation plate 61. The S wave goes straight and enters the deflecting surface switching element 64, where the total reflecting plate 6 continues without changing the deflecting surface.
The light is reflected at 2, further transmitted through the polarization separation plate 61, finally reflected at the total reflection plate 62, and emitted toward the GI optical fiber 9 of C1. On the other hand, the P wave is reflected by the total reflection plate 62 and then enters the deflection surface switching element 64, where it is reflected by the following polarization separation plate 61 without changing the deflection surface and further reflected by the total reflection plate 62. And is emitted toward the GI optical fiber 9 of C1.

On the other hand, in the ON state (FIG. 6B),
An electric field of a predetermined level or less is applied to the deflecting surface switching element 64, and the optical signal incident on the deflecting surface switching element 64 is changed into an S wave into a P wave and a P wave into an S wave. Therefore, the S wave incident on the deflecting surface switching element 64 is changed to the P wave, reflected by the subsequent total reflection plate 62, further reflected by the polarization separation plate 61, and emitted toward the GI optical fiber 9 of D1. On the other hand, the P wave incident on the deflecting surface switching element 64 is changed to the S wave, passes through the polarization separating plate 61, and passes through the GI optical fiber 9 of D1.
It is emitted toward.

Thus, with respect to the deflection surface switching element 64,
By changing the electric field applied to this, the optical signals incident from the same optical fiber 2 can be transmitted to different optical fibers 2 and can function as an optical switch.

[0040]

As described above, according to the invention of claim 1,
The first connector element has a fiber fixing groove and a guide groove with which the guide pin engages on the surface on the base substrate side, and the second connector element has the first connector element on the surface on the base substrate side. Since the base substrate has a guide groove with which the guide pin engages, the base substrate has a fiber fixing groove and a guide groove which are the same as those of the first connector element and the second connector element. The optical fibers can be accurately positioned with their ends sandwiching the mounting space for the optical functional element, and the coupling loss can be minimized. Further, by using the guide groove at the tip of the optical fiber, the end face can be processed with high accuracy, and the coupling loss can be reduced.

According to the structure of claim 6, a single material having a length obtained by adding both connector elements to the base substrate is processed to form the base substrate, both connector elements and the connection device. Since it has a SM
The end faces of both GI optical fibers can be easily and accurately processed, and highly accurate positioning can be performed between the optical fibers and between the optical functional elements, and the coupling loss can be minimized.

[0042]

[Brief description of drawings]

FIG. 1 is a perspective view showing an optical active device coupling member according to an embodiment of the present invention.

FIG. 2 is a vertical sectional view of an optical active element coupling member.

FIG. 3 is an explanatory view showing a structure of an abutting portion of an optical fiber.

FIG. 4 is a side view showing a manufacturing process of the optical active device coupling member.

FIG. 5 is a cross-sectional view of FIG. 5 cut along line AA and line BB.

FIG. 6 is an explanatory diagram of an optical switch in which a polarization plane switching element is incorporated in the optically active element coupling member of the present invention.

[Explanation of symbols]

1 ... Optical functional element coupling member, 2 ... Multi-core optical fiber (SM optical fiber), 3 ... First connector element, 4 ... Second connector element, 5 ... Base substrate, 6 ... Optical functional element, 7 ... Connection device, 8 ... Guide pin, 9 ... GI optical fiber, 10 ... Chip, 31, 41, 71 ... Fiber fixing groove, 32, 4
2, 53 ... Guide groove, 51 ... Mounting space, 52 ... Mounting space.

Front page continuation (72) Inventor Tadashi Haibara 1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation

Claims (7)

[Claims] 1. An end face of one optical fiber and an end face of the other optical fiber are fixed so as to face each other with a desired gap, and a mounting space for an optical functional element is formed in the gap, and the mounting is performed. In an optical functional element coupling member that enables optical coupling between the one optical fiber and the other optical fiber via various optical functional elements mounted in a space, an end portion of the one optical fiber is fixed. A first connector element, a second connector element to which an end of the other optical fiber is fixed, a mounting space for the optical functional element at an intermediate portion in the coupling direction, and the first and the second end portions at both ends. A base substrate having a space for mounting the two connector elements, and an optical fiber between the end faces of the both optical fibers, which is interposed between the base substrate and the first and second connector elements and through the base substrate. And a guide pin for enabling positioning of the first connector element, wherein the first connector element has a fiber fixing groove extending in a coupling direction with an end portion of the one optical fiber fixed to a surface on the base substrate side, and the fiber fixing portion. And a guide groove formed in parallel with the groove and engaged with the guide pin, wherein the second connector element has a fiber having the same arrangement and the same shape as the first connector element on its base substrate side surface. An optical functional element coupling member having a fixing groove and a guide groove, wherein the base substrate has a guide groove on a surface of the connector element side that extends in the coupling direction and engages with the guide pin. 2. The both optical fibers are single mode optical fibers, and the single mode optical fiber and the optical axis are provided between the first and second connector elements and the mounting space of the optical functional element. The optical functional device coupling member according to claim 1, wherein a connection device incorporating the graded index type optical fiber in which the above is matched is interposed. 3. The guide grooves of the first and second connector elements and the guide groove of the base substrate are formed in a V-shaped cross section at the same groove angle, and the guide pin is formed in a round bar shape. The optical functional element coupling member according to claim 1, wherein 4. The first and second connector elements and the base substrate are formed by cutting a single material in which grooves forming the fiber fixing groove and the guide groove are formed in advance. The optical functional element coupling member according to claim 1, wherein: 5. The optical functional element coupling member according to claim 1, wherein the first and second connector elements and the base substrate are each composed of a silicon semiconductor chip. 6. A first connector element having a fiber fixing groove to which one end of one optical fiber is fixed and a positioning guide groove to which a guide pin engages, and an end of the other optical fiber. A second connector element in which a fiber fixing groove to be fixed and a positioning guide groove to which the guide pin engages are formed, and a mounting space for an optical functional element is provided in an intermediate portion, and the first and second
A mounting space for both connector elements is formed at both ends, and a base substrate having positioning guide grooves for engagement with the guide pins is provided between the mounting space and the mounting space of the base substrate. And a connecting device to which an optical fiber for connecting to an optical functional element is fixed, wherein a length obtained by adding at least the first and second connector elements to at least the base substrate is provided. Using a single material having a thickness, the first groove forming the guide groove on the surface of the single material.
Step of forming parallel to each other the groove groove and the second groove groove forming the fiber fixing groove, and a portion forming the connecting device in the intermediate portion and the optical fiber elements in both end portions A second step of processing the surface of the single material into a desired thickness, and a third step of separating the parts forming the both optical fiber elements. A method for manufacturing an optical functional device coupling member. 7. The method of manufacturing an optical functional device coupling member according to claim 6, wherein the single material is a chip cut out from a silicon semiconductor wafer.