JPH05114594A - Method and device for draining and drying article - Google Patents
Method and device for draining and drying articleInfo
- Publication number
- JPH05114594A JPH05114594A JP27284991A JP27284991A JPH05114594A JP H05114594 A JPH05114594 A JP H05114594A JP 27284991 A JP27284991 A JP 27284991A JP 27284991 A JP27284991 A JP 27284991A JP H05114594 A JPH05114594 A JP H05114594A
- Authority
- JP
- Japan
- Prior art keywords
- article
- liquid
- boiling
- draining
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000007788 liquid Substances 0.000 claims abstract description 55
- 238000009835 boiling Methods 0.000 claims abstract description 39
- 150000001875 compounds Chemical class 0.000 claims description 49
- 239000002904 solvent Substances 0.000 abstract description 7
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000926 separation method Methods 0.000 description 7
- 238000011282 treatment Methods 0.000 description 6
- -1 perfluoro organic compounds Chemical class 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 229960004624 perflexane Drugs 0.000 description 3
- ZJIJAJXFLBMLCK-UHFFFAOYSA-N perfluorohexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZJIJAJXFLBMLCK-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- UVWPNDVAQBNQBG-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-icosafluorononane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F UVWPNDVAQBNQBG-UHFFFAOYSA-N 0.000 description 1
- LATSTSCBAMMVLW-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4,5,5-undecafluoro-5-(1,1,2,2,3,3,4,4,5,5,5-undecafluoropentoxy)pentane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)OC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F LATSTSCBAMMVLW-UHFFFAOYSA-N 0.000 description 1
- RKIMETXDACNTIE-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorocyclohexane Chemical compound FC1(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)F RKIMETXDACNTIE-UHFFFAOYSA-N 0.000 description 1
- JDCMOHAFGDQQJX-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octafluoronaphthalene Chemical compound FC1=C(F)C(F)=C(F)C2=C(F)C(F)=C(F)C(F)=C21 JDCMOHAFGDQQJX-UHFFFAOYSA-N 0.000 description 1
- PTMMGFDDNKDPDM-UHFFFAOYSA-N 1,2,3,4,5,6,8-heptafluoro-7-(trifluoromethyl)naphthalene Chemical compound FC1=C(C(F)(F)F)C(F)=C(F)C2=C(F)C(F)=C(F)C(F)=C21 PTMMGFDDNKDPDM-UHFFFAOYSA-N 0.000 description 1
- LALVQFXNRXDTGV-UHFFFAOYSA-N 1,2,3,5-tetrafluoro-4,6-bis(trifluoromethyl)benzene Chemical group FC1=C(F)C(C(F)(F)F)=C(F)C(C(F)(F)F)=C1F LALVQFXNRXDTGV-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 231100000053 low toxicity Toxicity 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229950008618 perfluamine Drugs 0.000 description 1
- BPHQIXJDBIHMLT-UHFFFAOYSA-N perfluorodecane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F BPHQIXJDBIHMLT-UHFFFAOYSA-N 0.000 description 1
- LGUZHRODIJCVOC-UHFFFAOYSA-N perfluoroheptane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F LGUZHRODIJCVOC-UHFFFAOYSA-N 0.000 description 1
- 125000005005 perfluorohexyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 1
- YVBBRRALBYAZBM-UHFFFAOYSA-N perfluorooctane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YVBBRRALBYAZBM-UHFFFAOYSA-N 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- JAJLKEVKNDUJBG-UHFFFAOYSA-N perfluorotripropylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)F JAJLKEVKNDUJBG-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000005437 stratosphere Substances 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子部品等の物品を水
洗した後、この水洗された電子部品等の物品に付着した
水分を水切りした後、電子部品等の物品を乾燥させる物
品の水切り・乾燥方法及び装置、更に詳しくは、パーフ
ルオロ有機化合物を用いた物品の水切り・乾燥方法及び
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an article for draining an article such as an electronic component after the article is washed with water and then water adhering to the article washed with the electronic article is drained. -Drying method and apparatus, and more specifically, to a method and apparatus for draining and drying articles using a perfluoroorganic compound.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】電子部
品、機械部品等の物品は、例えば、メッキ工程あるいは
研磨工程において水洗が行なわれるが、水洗後の物品は
水切り及び乾燥（水切り・乾燥）を行なう必要がある。
このような水切り・乾燥には現在のところその溶剤とし
て界面活性剤またはアルコールを含む１、１、２−トリ
クロロ−１、２、２−トリフルオロエタン（フロン１１
３）が広く用いられている。2. Description of the Related Art Items such as electronic parts and mechanical parts are washed with water, for example, in a plating process or a polishing process, but the washed products are drained and dried (draining / drying). Need to do.
Currently, 1,1,2-trichloro-1,2,2-trifluoroethane (CFC 11) containing a surfactant or an alcohol as a solvent is used for such draining and drying.
3) is widely used.
【０００３】しかしながら、フロン１１３は、成層圏の
オゾン層を破壊し、オゾン層の紫外線遮蔽機能等を低下
させて生態系に重大な影響を及ぼすことが、近年指摘さ
れている。そのため、１９８９年７月からフロン１１３
の放出規制が国際的に開始され、２０００年１月までに
その使用が全廃されることになっている。However, it has been pointed out in recent years that CFC 113 seriously affects the ecosystem by destroying the ozone layer in the stratosphere and lowering the ultraviolet shielding function of the ozone layer. Therefore, since July 1989, CFC113
The emission control of is released internationally, and its use will be completely abolished by January 2000.
【０００４】そのため、フロン１１３に代わる新たな溶
剤を用いた物品の水切り・乾燥方法の開発が望まれてい
る。このような中、フロン１１３の代替品としてパーフ
ルオロ有機化合物が注目を浴びている。パーフルオロ有
機化合物は有機化合物の水素原子が全てフッ素原子によ
って置換された化合物で、このような化合物としては、
例えば、パーフルオロヘキサン、パーフルオロシクロヘ
キサン、パーフルオロヘプタン、パーフルオロオクタ
ン、パーフルオロノナン、パーフルオロデカン、パーフ
ルオロ−ｍ−キシレン、パーフルオロナフタレン、パー
フルオロ−β−メチルナフタレン、パーフルオロトリプ
ロピルアミン、パーフルオロトリブチルアミン、パーフ
ルオロペンチルエーテル、パーフルオロヘキシルエーテ
ルト等がある。Therefore, development of a draining / drying method for articles using a new solvent in place of CFC 113 is desired. Under such circumstances, perfluoro organic compounds have been attracting attention as substitutes for Freon 113. A perfluoro organic compound is a compound in which all hydrogen atoms of an organic compound are replaced by fluorine atoms, and as such a compound,
For example, perfluorohexane, perfluorocyclohexane, perfluoroheptane, perfluorooctane, perfluorononane, perfluorodecane, perfluoro-m-xylene, perfluoronaphthalene, perfluoro-β-methylnaphthalene, perfluorotripropylamine. , Perfluorotributylamine, perfluoropentyl ether, perfluorohexyl etherate and the like.
【０００５】上記のパーフルオロ有機化合物は、オゾン
層を破壊しないばかりか、人体に対する毒性も低く、不
燃性且つ不活性な液体であるため、各種の金属や各種の
プラスチックからなる上記物品に悪影響を与えることが
なく、また、熱的にも安定しているため、水切り・乾燥
用の溶剤として用いても寿命が長く、その管理が容易で
あるなど多くの利点がある。更に、これらのパーフルオ
ロ有機化合物は、その物理的性質がフロン１１３の性質
に類似しており、特に、その表面張力、比重及び蒸発熱
等の物性が水切り・乾燥用の溶剤として好適であること
が判っている。The above-mentioned perfluoroorganic compound not only destroys the ozone layer, has low toxicity to the human body, is a nonflammable and inert liquid, and therefore adversely affects the above-mentioned articles made of various metals and various plastics. Since it is not given and is thermally stable, it has many advantages such as long life even if used as a solvent for draining / drying and easy management. Furthermore, the physical properties of these perfluoroorganic compounds are similar to those of CFC 113, and in particular, physical properties such as surface tension, specific gravity and heat of vaporization are suitable as a solvent for draining and drying. Is known.
【０００６】しかしながら、上記のパーフルオロ有機化
合物は、殆どの有機化合物に溶解せず、従って、物品の
水切り性能を高めるための界面活性剤やアルコールを用
いることができないという課題があった。However, the above-mentioned perfluoroorganic compound is insoluble in most of the organic compounds, so that there is a problem that a surfactant or alcohol for improving the drainage performance of the article cannot be used.
【０００７】従って、本発明の目的は、水切り・乾燥用
の溶剤としてパーフルオロ有機化合物単独で用いて物品
から水分を確実に除去することができる物品の水切り・
乾燥方法及び装置を提供することにある。Therefore, an object of the present invention is to drain water from an article which can reliably remove water from the article by using a perfluoroorganic compound alone as a solvent for draining and drying.
It is to provide a drying method and apparatus.
【０００８】[0008]
【課題を解決するための手段】本発明は、パーフルオロ
有機化合物の液体中に水分が付着した物品を浸漬し、こ
の物品に超音波を照射してこの物品に付着した水分を除
去して物品の水切りを行なった後、この物品を上記液体
から引き上げてパーフルオロ有機化合物の沸騰液中に移
し、この沸騰液中において上記物品に付着した残余の水
分を除去した後、更に、この物品を沸騰液からパーフル
オロ有機化合物の蒸気中に移してこの蒸気中において上
記物品の乾燥を行ない、上記パーフルオロ有機化合物の
蒸気を回収して循環使用することを特徴とする物品の水
切り・乾燥方法を提供することにより上記目的を達成し
たものである。DISCLOSURE OF THE INVENTION According to the present invention, an article on which water is attached is immersed in a liquid of a perfluoroorganic compound, and the article is irradiated with ultrasonic waves to remove the water attached to the article to remove the article. After removing the water from the product, the product is taken out of the liquid and transferred into a boiling liquid of a perfluoroorganic compound, and after removing the residual water adhering to the product in the boiling liquid, the product is further boiled. Provided is a draining / drying method for an article, which comprises transferring the liquid into a vapor of a perfluoroorganic compound, drying the article in the vapor, and recovering the vapor of the perfluoroorganic compound for recycling. By doing so, the above object is achieved.
【０００９】また、本発明は、上記発明方法に好ましく
用いることができる装置として、水分の付着した物品を
浸漬するパーフルオロ有機化合物の液体を収納し、且つ
この液体中に浸漬された物品に超音波を照射してこの物
品に付着した水分を除去して物品の水切りを行なう、超
音波装置を有する水切り槽と、水切り槽から引き上げた
物品をパーフルオロ有機化合物の沸騰液に浸漬してこの
沸騰液中において上記物品から残余の水分を除去する、
パーフルオロ有機化合物の液体を収納し且つこの液体を
沸騰させる沸騰浴槽と、沸騰浴槽から移された上記物品
をパーフルオロ有機化合物の蒸気中で乾燥させる、パー
フルオロ有機化合物の蒸気を発生させる蒸気槽とを備
え、且つ上記沸騰浴槽と上記蒸気槽との間で上記パーフ
ルオロ有機化合物を循環使用するようになしてあること
を特徴とする物品の水切り・乾燥装置を併せて提供する
ものである。Further, the present invention is an apparatus which can be preferably used in the above-mentioned method of the present invention, which contains a liquid of a perfluoroorganic compound for immersing an article to which water has adhered and which is superposed on the article immersed in the liquid. Irradiate sound waves to remove water adhering to this article and drain the article. A draining tank having an ultrasonic device and an article pulled out from the draining tank are immersed in a boiling liquid of a perfluoroorganic compound to boil Removing residual water from the article in liquid,
A boiling bath containing a liquid of a perfluoroorganic compound and boiling the liquid, and a steam tank for generating a vapor of the perfluoroorganic compound for drying the above-mentioned article transferred from the boiling bath in the vapor of the perfluoroorganic compound. And a device for draining / drying articles, characterized in that the perfluoroorganic compound is circulated between the boiling bath and the steam bath.
【００１０】[0010]
【作用】本発明によれば、水切り槽のパーフルオロ有機
化合物の液体中に水分が付着した物品を浸漬し、このこ
の状態下の物品に超音波を照射すると、この物品に付着
した水分の大部分が除去されて水切りが行なわれ、水切
り後の物品を上記液体から引き上げて沸騰浴槽のパーフ
ルオロ有機化合物の沸騰液中に移せば、この物品に付着
した残余の水分が除去され、水分が除去された物品を蒸
気槽のパーフルオロ有機化合物の蒸気中に移してこの蒸
気によって物品を加熱してこの物品にパーフルオロ有機
化合物が凝縮しない乾燥状態にしてこの物品をこの蒸気
中から除去すれば、この物品を確実に乾燥することがで
きる。According to the present invention, when an article with moisture attached is immersed in the liquid of the perfluoroorganic compound in the draining tank and the article under this condition is irradiated with ultrasonic waves, the amount of moisture attached to this article is increased. Draining is performed by removing the part, and after removing the drained article from the above liquid and transferring it to the boiling liquid of the perfluoroorganic compound in the boiling bath, the residual water adhering to this article is removed and the water is removed. If the article is removed from the vapor in a vapor tank, the article is transferred to the vapor of the perfluoroorganic compound and the vapor is used to heat the article so that the article does not condense the perfluoroorganic compound into a dry state. This article can be reliably dried.
【００１１】[0011]
【実施例】以下、図１に示す実施例に基づいて本発明の
物品の水切り・乾燥装置及び装置について説明する。
尚、図１は本発明の物品の水切り・乾燥方法に好ましく
用いることができる物品の水切り・乾燥装置の一実施例
を示す構成図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An article draining / drying apparatus and apparatus of the present invention will be described below based on the embodiment shown in FIG.
1 is a block diagram showing an embodiment of an article draining / drying apparatus which can be preferably used in the article draining / drying method of the present invention.
【００１２】まず、本発明の物品の水切り・乾燥装置の
一実施例について説明する。本実施例の物品の水切り・
乾燥装置は、所定の加工を終えた電子部品、機械部品等
の物品を水洗した後、パーフルオロ有機化合物を用いて
物品の水切り・乾燥を行なう装置である。本実施例装置
Ｅは、図１に示すように、物品（図示せず）に付着した
水分を除去する水切り槽１と、水切り槽１に隣接し、水
切り槽１において除去されなかった物品の残余の水分を
除去する沸騰槽２と、沸騰槽２に隣接し、沸騰槽２から
移された物品を乾燥させる蒸気槽３と、これらの槽１〜
３を一体的に収納する外槽４とを備え、各槽１〜３には
前述したパーフルオロ有機化合物の液体が収納されてい
る。更に、上記外槽４には上記沸騰槽２とで上記水切り
槽１を挟むように位置して隣接する水分離槽５が収納さ
れ、上記水切り槽１から溢流したパーフルオロ有機化合
物から水分を分離する水分離槽５を備えている。First, an embodiment of the draining / drying apparatus for articles according to the present invention will be described. Draining of the article of this embodiment
The drying device is a device for washing articles such as electronic parts and machine parts that have been subjected to predetermined processing with water, and then draining and drying the articles using a perfluoro organic compound. As shown in FIG. 1, the apparatus E of the present embodiment includes a drainer tank 1 that removes moisture adhering to an article (not shown), and a residue of an article that is adjacent to the drainer tank 1 and that is not removed in the drainer tank 1. Boiling tank 2 for removing the water of, a steam tank 3 adjacent to the boiling tank 2 for drying the article transferred from the boiling tank 2, and these tanks 1 to
An outer tank 4 that integrally stores 3 is provided, and each of the tanks 1 to 3 contains the liquid of the perfluoroorganic compound described above. Further, the outer tank 4 accommodates a water separation tank 5 which is positioned adjacent to the boiling tank 2 so as to sandwich the water draining tank 1, and absorbs water from the perfluoroorganic compound overflowing from the water draining tank 1. A water separation tank 5 for separation is provided.
【００１３】而して、上記水切り槽１は、その底部に超
音波装置１Ａを有し、上述のように水分の付着した物品
を浸漬するパーフルオロ有機化合物の液体Ｌを満杯状態
になるように収納し、且つこの液体Ｌ中に浸漬された物
品に上記超音波装置１Ａから超音波を照射してこの物品
に付着した水分を除去して水切りを行なうように構成さ
れている。そして、水切りによって除去された水は上記
液体Ｌに混入して混合液として水切り槽１から上記水分
離槽５へ溢流するように構成されている。Thus, the draining tank 1 has the ultrasonic device 1A at the bottom thereof so that the liquid L of the perfluoroorganic compound for immersing the article to which the water adheres as described above becomes full. The article stored and immersed in the liquid L is irradiated with ultrasonic waves from the ultrasonic device 1A to remove water adhering to the article and drain the article. The water removed by draining is mixed with the liquid L and overflows from the draining tank 1 to the water separating tank 5 as a mixed liquid.
【００１４】また、上記沸騰浴槽２は、その底部に加熱
コイル２Ａを有し、これに収納されたパーフルオロ有機
化合物の液体を沸騰させて沸騰液Ｌ1 を作り、上記水切
り槽１から引き上げた物品をこの沸騰液Ｌ1に浸漬して
この物品から残余の微量の水分を除去するように構成さ
れている。Further, the boiling bath 2 has a heating coil 2A at the bottom thereof, and the liquid of the perfluoroorganic compound contained therein is boiled to prepare a boiling liquid L 1, which is pulled out from the draining tank 1. The article is soaked in this boiling liquid L 1 to remove residual traces of water from the article.
【００１５】また、上記蒸気槽３は、その底部に加熱コ
イル３Ａを有し、これに収納されたパーフルオロ有機化
合物の液体Ｌ2 を沸騰させてその蒸気を作り、上記沸騰
浴槽２から移された上記物品をパーフルオロ有機化合物
の蒸気中でパーフルオロ有機化合物が凝縮しない温度ま
で加熱して、乾燥させるように構成されている。Further, the steam tank 3 has a heating coil 3A at the bottom thereof, and the liquid L 2 of the perfluoroorganic compound contained therein is boiled to form the steam, which is then transferred from the boiling bath 2. The article is heated in the vapor of the perfluoroorganic compound to a temperature at which the perfluoroorganic compound does not condense and is dried.
【００１６】更に、本実施例装置Ｅは、上記水分離槽５
と上記水切り槽１とを連通するように配設された配管６
Ａと、この配管６Ａの途上に配設されたポンプ７と、上
記水分離槽５に配設された水抜き配管６Ｂとを備え、上
記水分離槽５において比重差によって分離したパーフル
オロ有機化合物の液体を配管６Ａ及びポンプ７によって
上記水分離槽５から上記水切り槽１へ還流させると共
に、分離した水を水抜き配管６Ｂによって排出するよう
に構成されている。Further, the apparatus E of this embodiment is the same as the water separation tank 5 described above.
And a pipe 6 arranged to connect the drainage tank 1 and
A, a pump 7 arranged on the way of the pipe 6A, and a drainage pipe 6B arranged in the water separation tank 5, and the perfluoroorganic compound separated by the specific gravity difference in the water separation tank 5 The liquid is recirculated from the water separation tank 5 to the draining tank 1 by the pipe 6A and the pump 7, and the separated water is discharged by the water draining pipe 6B.
【００１７】また、本実施例装置Ｅは、上記沸騰槽２と
上記蒸気槽３とを連通するように配設された配管６Ｃ
と、この配管６Ｃの途上に配設された電磁バルブ８と、
電磁バルブ８を開放駆動させるように上記蒸気槽３に配
設された液面計（図示せず）とを備え、上記蒸気槽３の
液体Ｌ2 の液面が所定のレベル以下になった時に液面計
がそれを検出して電磁バルブを開放駆動させて上記沸騰
槽２の沸騰液Ｌ1 を配管６Ｃを介して上記蒸気槽３へ補
充し、この槽３の液体Ｌ2 の液面が所定のレベルに達し
た時に液面計を介して電磁バルブを閉止駆動するように
構成されている。In the apparatus E of this embodiment, the pipe 6C is arranged so as to connect the boiling tank 2 and the steam tank 3 to each other.
And an electromagnetic valve 8 arranged on the way of the pipe 6C,
A liquid level gauge (not shown) disposed in the steam tank 3 so as to open and drive the electromagnetic valve 8 is provided, and when the liquid level of the liquid L 2 in the steam tank 3 falls below a predetermined level. The liquid level gauge detects this and drives the electromagnetic valve to open to replenish the boiling liquid L 1 in the boiling tank 2 to the steam tank 3 through the pipe 6C, and the liquid level of the liquid L 2 in the tank 3 is changed. It is configured to drive the electromagnetic valve to be closed via a liquid level gauge when a predetermined level is reached.
【００１８】更にまた、本実施例装置Ｅは、上記外槽４
の内壁にはその全周に亘って配設され、上記各槽１〜３
及び５から蒸発したパーフルオロ有機化合物及び水を冷
却する冷却コイル９と、この冷却コイル９の下方に沿っ
て上記外槽４の内壁に配設され、冷却後のパーフルオロ
有機化合物及び水分の混合液を回収する回収部１０と、
この回収部１０に配管６Ｄを介して連通するように配設
され、回収部１０からの混合液をパーフルオロ有機化合
物と水とに分離する水分離器１１と、この水分離器１１
から分岐し、パーフルオロ有機化合物を沸騰槽２へ還流
させる還流配管６Ｅ及び水を排出する水抜き配管６Ｆと
を備えて構成されている。Furthermore, the apparatus E of this embodiment is the same as the outer tank 4 described above.
Is provided over the entire circumference of the inner wall of the
And a cooling coil 9 for cooling the perfluoroorganic compound and water evaporated from 5, and a cooling coil 9 disposed below the cooling coil 9 on the inner wall of the outer tub 4 for mixing the cooled perfluoroorganic compound and water. A collection unit 10 for collecting the liquid,
A water separator 11 which is disposed so as to communicate with the recovery unit 10 via a pipe 6D, and which separates the mixed liquid from the recovery unit 10 into a perfluoroorganic compound and water, and the water separator 11.
And a reflux pipe 6E for refluxing the perfluoro organic compound to the boiling tank 2 and a drainage pipe 6F for discharging water.
【００１９】次に、上記実施例装置を用いた本発明の物
品の水抜き・乾燥方法の好ましい実施態様について説明
する。Next, a preferred embodiment of the method for draining and drying the article of the present invention using the apparatus of the above embodiment will be described.
【００２０】本実施態様では、まず、水切り槽１のパー
フルオロ有機化合物の液体Ｌ中に水分が付着した物品
（水洗後のもの）を浸漬する。この状態で超音波装置１
Ａからの超音波を物品に所定時間照射すると、この物品
に付着した水分が物品から除去されて物品の水切りが行
なわれる。水切り後、この物品を上記液体Ｌから引き上
げて沸騰浴槽２へ移してパーフルオロ有機化合物の沸騰
液Ｌ1 中に浸漬する。この沸騰液Ｌ1 中に物品を所定時
間浸漬すると水切り槽１では除去できなかった微量の水
分が沸騰液Ｌ1 の作用を受けて物品から除去される。然
る後、この物品を沸騰浴槽２から引き上げて蒸気槽３の
パーフルオロ有機化合物の蒸気中に移して所定時間蒸気
中に保持すると、この物品はこの蒸気によって加熱され
てこの蒸気が凝縮しない温度に達して乾燥状態になる。
次いで、乾燥した物品を蒸気槽３から引き上げて外槽４
から引き出せば、物品は付着した水分が完全に除去され
て乾燥した状態になる。In this embodiment, first, the article (after washing with water) to which water is attached is immersed in the liquid L of the perfluoroorganic compound in the drainage tank 1. In this state, the ultrasonic device 1
When the ultrasonic wave from A is irradiated on the article for a predetermined time, the moisture adhering to the article is removed from the article and the article is drained. After draining the water, the article is pulled up from the liquid L, transferred to the boiling bath 2 and immersed in the boiling liquid L 1 of the perfluoroorganic compound. When the article is dipped in the boiling liquid L 1 for a predetermined time, a small amount of water that could not be removed in the draining tank 1 is removed from the article by the action of the boiling liquid L 1 . Then, when the article is pulled up from the boiling bath 2 and transferred into the vapor of the perfluoroorganic compound in the vapor tank 3 and kept in the vapor for a predetermined time, the article is heated by the vapor and the temperature at which the vapor is not condensed. And reaches a dry state.
Then, the dried article is pulled up from the steam tank 3 and the outer tank 4
When pulled out of the article, the article is in a dry state with the attached moisture completely removed.
【００２１】次に、本実施例を具体的に説明する。Next, this embodiment will be specifically described.
【００２２】実施例１ 本実施例では、上記実施例装置Ｅの各槽１〜３に下記表
１に示すようにパーフルオロヘキサンを収納し、上記実
施態様に従ってニッケルメッキ製のライター外枠部品
（構造的に各部品要素間に重なった部分がある）を乾燥
させ、その水切り状態、乾燥状態を目視で観察し、その
結果を下記表１に示した。この際、ライター外枠部品を
ステンレス製の網篭に１０個入れ、この網篭を水切り槽
１、沸騰浴槽２においてそれぞれ３０秒間処理し、その
後蒸気槽３において６０秒間処理してライター外枠部品
を乾燥させた。Example 1 In this example, perfluorohexane was stored in each of the tanks 1 to 3 of the apparatus E of the above-described embodiment as shown in Table 1 below, and according to the above-mentioned embodiment, a nickel-plated lighter outer frame part ( Structurally, there is an overlapping portion between each component), and the drained state and the dried state were visually observed, and the results are shown in Table 1 below. At this time, 10 pieces of lighter outer frame parts were put in a stainless steel basket, and these baskets were treated in the drainer tank 1 and the boiling bath tank 30 for 30 seconds respectively, and then in the steam tank 3 for 60 seconds to prepare the lighter outer frame parts. Was dried.
【００２３】実施例２〜４ 実施例２〜４では、実施例１におけるパーフルオロヘキ
サンを下記表１に示す各パーフルオロ有機化合物にそれ
ぞれ代えて実施例１と同様の処理を行なってそれぞの水
切り状態、乾燥状態を目視で観察し、それぞれの結果を
下記表１に示した。Examples 2 to 4 In Examples 2 to 4, the perfluorohexane in Example 1 was replaced with the perfluoro organic compounds shown in Table 1 below, and the same treatments as in Example 1 were carried out. The drained state and the dried state were visually observed, and the respective results are shown in Table 1 below.
【００２４】比較例１〜５ 比較例１〜４では、超音波を照射しないこと以外は実施
例１〜４とそれぞれ同様の処理を行ない、また、実施例
５では従来から用いられているフロン１１３を用いて比
較例１〜４と同様の処理を行ない、これらについて実施
例１〜４と同様の観察を行なって、それぞれの結果を下
記表１に示した。Comparative Examples 1 to 5 In Comparative Examples 1 to 4, the same treatments as those of Examples 1 to 4 were carried out except that the ultrasonic wave was not applied, and in Example 5, CFC 113 conventionally used. Was used to perform the same treatments as in Comparative Examples 1 to 4, and the same observations as in Examples 1 to 4 were performed. The results are shown in Table 1 below.
【００２５】実施例５〜８ 本実施例では、実施例１〜４のライター外枠部品に代え
て真鍮製の置時計部品（幅５０ｍｍ、長さ８０ｍｍ、厚
さ３ｍｍ、内径２ｍｍのビス穴（４箇所））を乾燥させ
た以外は全て実施例１〜実施例４と同様の処理を行なっ
てそれぞの水切り状態、乾燥状態を目視で観察し、それ
ぞれの結果を下記表２に示した。但し、置時計部品はス
テンレス製のラックに１０個入れて処理した。更に、実
施例５〜８では、乾燥後の各置時計部品にアクリル樹脂
塗料をそれぞれ塗布し、それぞれの塗装状態を目視で観
察し、それぞれの結果を下記表２に示した。Examples 5 to 8 In this example, the clock parts made of brass (width 50 mm, length 80 mm, thickness 3 mm, inner diameter 2 mm, screw holes (4 The same treatment as in Examples 1 to 4 was carried out except that the portions)) were dried, and the drained state and the dried state were visually observed, and the respective results are shown in Table 2 below. However, 10 clock parts were placed in a stainless steel rack for processing. Further, in Examples 5 to 8, acrylic resin paint was applied to each of the clock parts after drying, and the coating state of each was visually observed, and the respective results are shown in Table 2 below.
【００２６】比較例６〜９ 比較例６〜９では、超音波を照射しないこと以外は実施
例５〜８とそれぞれ同様の処理を行ない、また、比較例
１０では従来から用いられているフロン１１３を用いて
比較例６〜９と同様の処理を行ない、これらについて実
施例５〜８と同様の観察を行なって、それぞれの結果を
下記表２に示した。Comparative Examples 6 to 9 In Comparative Examples 6 to 9, the same treatments as in Examples 5 to 8 were carried out except that the ultrasonic wave was not applied, and in Comparative Example 10, the CFC 113 conventionally used. Was used to perform the same treatments as in Comparative Examples 6 to 9, and the same observations as in Examples 5 to 8 were performed. The results are shown in Table 2 below.
【００２７】下記表１及び表２に示す結果によれば、水
を溶解しないパーフルオロ有機化合物の液体と超音波の
作用を利用する本実施例１〜８では、物品に付着した水
分を完全に除去することができるが、パーフルオロ有機
化合物及びフロン１１３を用いても超音波を照射しない
比較例１〜１０では、水分を除去できないことが判っ
た。According to the results shown in Tables 1 and 2 below, in Examples 1 to 8 in which the liquid of the perfluoroorganic compound that does not dissolve water and the action of ultrasonic waves are utilized, the moisture adhering to the article is completely removed. Although it can be removed, it was found that water cannot be removed in Comparative Examples 1 to 10 in which ultrasonic waves are not applied even if the perfluoroorganic compound and Freon 113 are used.
【００２８】[0028]
【表１】 但し、水切り状態：○は良好、×は水滴有り 乾燥状態 ：○は良好、×はシミ、変色有り[Table 1] However, drained state: ○ is good, × is water drop Dry state: ○ is good, × is stain, discoloration
【００２９】[0029]
【表２】 但し、水切り状態：○は良好、×は水滴有り 乾燥状態 ：○は良好、×はシミ、変色有り 塗装状態 ：○は良好、×は塗装ムラ有り[Table 2] However, drained state: ○ is good, × is water drop Dry state: ○ is good, × is stain, discoloration Painted state: ○ is good, × is uneven coating
【００３０】尚、本発明は、上記実施例に何等制限され
るものではなく、パーフルオロ有機化合物と超音波照射
とを組み合わせて物品の水切り・乾燥を行なう本発明の
方法及び装置であれば、全て本発明に包含される。The present invention is not limited to the above-mentioned embodiments, and any method and apparatus of the present invention for draining and drying an article by combining a perfluoroorganic compound and ultrasonic irradiation can be used. All are included in the present invention.
【００３１】[0031]
【発明の効果】本発明の物品の水切り・乾燥装置を用い
た本発明方法によれば、水切り・乾燥用の溶剤としてパ
ーフルオロ有機化合物を用いて物品から水分を確実に除
去することができる。According to the method of the present invention using the apparatus for draining and drying the article of the present invention, it is possible to reliably remove water from the article by using the perfluoroorganic compound as a solvent for draining and drying.
【図１】本発明の物品の水切り・乾燥方法に好ましく用
いることができる物品の水切り・乾燥装置の一実施例を
示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of an article draining / drying apparatus that can be preferably used in the article draining / drying method of the present invention.
１ 水切り槽 １Ａ 超音波装置 ２ 沸騰浴槽 ２Ａ 加熱コイル ３ 蒸気槽 ３Ａ 加熱コイル Ｅ 水切り・乾燥装置 1 Drainer 1A Ultrasonic device 2 Boiling bath 2A Heating coil 3 Steam tank 3A Heating coil E Drainer / dryer
Claims (2)
が付着した物品を浸漬し、この物品に超音波を照射して
この物品に付着した水分を除去して物品の水切りを行な
った後、この物品を上記液体から引き上げてパーフルオ
ロ有機化合物の沸騰液中に移し、この沸騰液中において
上記物品に付着した残余の水分を除去した後、更に、こ
の物品を沸騰液からパーフルオロ有機化合物の蒸気中に
移してこの蒸気中において上記物品の乾燥を行ない、上
記パーフルオロ有機化合物の蒸気を回収して循環使用す
ることを特徴とする物品の水切り・乾燥方法。1. An article to which water is attached is dipped in a liquid of a perfluoroorganic compound, the article is irradiated with ultrasonic waves to remove the water attached to the article, and the article is drained. The article is taken out of the liquid and transferred into a boiling liquid of the perfluoroorganic compound, and after removing the residual water adhering to the article in the boiling liquid, the article is further vaporized from the boiling liquid of the perfluoroorganic compound. A draining / drying method for an article, characterized in that the article is transferred to the inside and the article is dried in the vapor, and the vapor of the perfluoroorganic compound is recovered and circulated for use.
オロ有機化合物の液体を収納し、且つこの液体中に浸漬
された物品に超音波を照射してこの物品に付着した水分
を除去して物品の水切りを行なう、超音波装置を有する
水切り槽と、水切り槽から引き上げた物品をパーフルオ
ロ有機化合物の沸騰液に浸漬してこの沸騰液中において
上記物品から残余の水分を除去する、パーフルオロ有機
化合物の液体を収納し且つこの液体を沸騰させる沸騰浴
槽と、沸騰浴槽から移された上記物品をパーフルオロ有
機化合物の蒸気中で乾燥させる、パーフルオロ有機化合
物の蒸気を発生させる蒸気槽とを備え、且つ上記沸騰浴
槽と上記蒸気槽との間で上記パーフルオロ有機化合物を
循環使用するようになしてあることを特徴とする物品の
水切り・乾燥装置。2. An article in which a liquid of a perfluoroorganic compound for immersing an article to which water is attached is stored, and the article immersed in the liquid is irradiated with ultrasonic waves to remove the moisture attached to the article. A draining tank having an ultrasonic device, and an article pulled out from the draining tank is immersed in a boiling solution of a perfluoroorganic compound to remove residual water from the article in the boiling solution. A boiling bath for containing a liquid of the compound and boiling the liquid; and a steam tank for generating a vapor of the perfluoroorganic compound for drying the article transferred from the boiling bath in the vapor of the perfluoroorganic compound. An apparatus for draining and drying articles, characterized in that the perfluoroorganic compound is circulated between the boiling bath and the steam bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03272849A JP3109871B2 (en) | 1991-10-21 | 1991-10-21 | Method and apparatus for draining and drying articles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03272849A JP3109871B2 (en) | 1991-10-21 | 1991-10-21 | Method and apparatus for draining and drying articles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05114594A true JPH05114594A (en) | 1993-05-07 |
| JP3109871B2 JP3109871B2 (en) | 2000-11-20 |
Family
ID=17519632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03272849A Expired - Fee Related JP3109871B2 (en) | 1991-10-21 | 1991-10-21 | Method and apparatus for draining and drying articles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3109871B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5727578A (en) * | 1993-07-16 | 1998-03-17 | Legacy Systems, Inc. | Apparatus for the treatment and drying of semiconductor wafers in a fluid |
| US6559408B2 (en) | 1997-06-26 | 2003-05-06 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
| JP2005230798A (en) * | 2004-01-22 | 2005-09-02 | Sankyo Seiki Mfg Co Ltd | Washing apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5927602B2 (en) | 2011-10-06 | 2016-06-01 | 株式会社Ｊｏｌｅｄ | Manufacturing method of display device |
-
1991
- 1991-10-21 JP JP03272849A patent/JP3109871B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5727578A (en) * | 1993-07-16 | 1998-03-17 | Legacy Systems, Inc. | Apparatus for the treatment and drying of semiconductor wafers in a fluid |
| US5776296A (en) * | 1993-07-16 | 1998-07-07 | Legacy Systems, Inc. | Apparatus for the treatment of semiconductor wafers in a fluid |
| US6559408B2 (en) | 1997-06-26 | 2003-05-06 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
| JP2005230798A (en) * | 2004-01-22 | 2005-09-02 | Sankyo Seiki Mfg Co Ltd | Washing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3109871B2 (en) | 2000-11-20 |
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