JPH05107402A - Optical member having antireflection film - Google Patents
Optical member having antireflection filmInfo
- Publication number
- JPH05107402A JPH05107402A JP3298456A JP29845691A JPH05107402A JP H05107402 A JPH05107402 A JP H05107402A JP 3298456 A JP3298456 A JP 3298456A JP 29845691 A JP29845691 A JP 29845691A JP H05107402 A JPH05107402 A JP H05107402A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- refractive index
- antireflection film
- optical member
- tio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 239000010408 film Substances 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 22
- 239000000057 synthetic resin Substances 0.000 claims abstract description 22
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 16
- 239000001301 oxygen Substances 0.000 claims abstract description 16
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 230000001678 irradiating effect Effects 0.000 claims abstract description 9
- 229920005749 polyurethane resin Polymers 0.000 claims abstract description 7
- 239000012788 optical film Substances 0.000 claims abstract description 3
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 41
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 12
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 230000000007 visual effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229920002635 polyurethane Polymers 0.000 description 8
- 239000004814 polyurethane Substances 0.000 description 8
- 230000037303 wrinkles Effects 0.000 description 8
- -1 oxygen ions Chemical class 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 238000004040 coloring Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- SYFOAKAXGNMQAX-UHFFFAOYSA-N bis(prop-2-enyl) carbonate;2-(2-hydroxyethoxy)ethanol Chemical compound OCCOCCO.C=CCOC(=O)OCC=C SYFOAKAXGNMQAX-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RTTZISZSHSCFRH-UHFFFAOYSA-N 1,3-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC(CN=C=O)=C1 RTTZISZSHSCFRH-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- VKEQBMCRQDSRET-UHFFFAOYSA-N Methylone Chemical compound CNC(C)C(=O)C1=CC=C2OCOC2=C1 VKEQBMCRQDSRET-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- KELHQGOVULCJSG-UHFFFAOYSA-N n,n-dimethyl-1-(5-methylfuran-2-yl)ethane-1,2-diamine Chemical compound CN(C)C(CN)C1=CC=C(C)O1 KELHQGOVULCJSG-UHFFFAOYSA-N 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 229920001558 organosilicon polymer Polymers 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920006295 polythiol Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000003405 preventing effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は反射防止膜を有する光学
部材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical member having an antireflection film.
【0002】[0002]
【従来の技術】合成樹脂基材の表面反射を低下させるた
めに、合成樹脂基材上に反射防止膜を施すことはよく知
られている。また、できる限り低い視感反射率を得るた
めに高屈折率物質であるTiO2 層が膜厚λ/2の高屈
折率層として用いられ、さらにTiO2 層を形成する際
には、酸素イオンビームを合成樹脂基材に照射しながら
TiO2 を蒸着させることも知られている。合成樹脂基
材上にTiO2 層を備えた反射防止効果のある光学部材
の例として例えば、特開平2−39101号公報には基
板をポリウレタンレンズとし、このポリウレタンレンズ
上に、SiO2 からなる第1層〔屈折率1.47、膜厚
3/2λ(λは550nmである。以下同様)、ZrO
2 とSiO2 の2層等価膜からなる第2層〔屈折率1.
80、膜厚λ/4〕、基材に酸素イオンビームを照射し
ながら形成されたTiO2 層からなる第3層〔屈折率
2.40、膜厚λ/2〕、SiO2からなる第4層〔屈
折率1.47、膜厚λ/4〕を順に積層してなる反射防
止膜を設けた光学部材が開示されている。この発明の特
徴は、第3層のTiO2 層の膜厚をλ/2、屈折率を上
限の2.40にして、低視感反射率を得ている。2. Description of the Related Art It is well known to provide an antireflection film on a synthetic resin substrate in order to reduce the surface reflection of the synthetic resin substrate. Further, in order to obtain a luminous reflectance as low as possible, a TiO 2 layer which is a high refractive index material is used as a high refractive index layer having a thickness of λ / 2, and when forming a TiO 2 layer, oxygen ions are used. It is also known to deposit TiO 2 while irradiating a synthetic resin substrate with a beam. As an example of an optical member having a reflection preventing effect provided with a TiO 2 layer on a synthetic resin substrate, for example, in Japanese Patent Laid-Open No. 2-39101, a substrate is a polyurethane lens, and a SiO 2 layer is formed on the polyurethane lens. 1 layer [refractive index 1.47, film thickness 3/2 λ (λ is 550 nm; the same applies hereinafter), ZrO
2 and a second layer of SiO 2 equivalent film [refractive index 1.
80, film thickness λ / 4], a third layer composed of a TiO 2 layer formed while irradiating the substrate with an oxygen ion beam [refractive index 2.40, film thickness λ / 2], a fourth layer composed of SiO 2 . An optical member having an antireflection film formed by sequentially laminating layers [refractive index 1.47, film thickness λ / 4] is disclosed. A feature of the present invention is that the third TiO 2 layer has a thickness of λ / 2 and a refractive index of 2.40, which is an upper limit, to obtain a low luminous reflectance.
【0003】[0003]
【発明が解決しようとする課題】しかしながら特開平2
−39101号公報に開示されている光学部材は、Ti
O2 層の屈折率を上限の2.40にしていることにより
高エネルギーの酸素イオンビームを基板に照射する必要
がある。そのため高エネルギーの酸素イオンビームの照
射により合成樹脂基板が着色しやすい問題を有する。ま
たTiO2 層の屈折率を2.40にしておくと、層のT
iO2 の分子間の距離が短くなることにより、層のTi
O2 の分子状態は密な状態になるためTiO2 層内に強
い内部応力が生じ、ポリウレタン樹脂のような経時的に
微小変形しやすい合成樹脂では反射防止膜に無数のくぼ
み、しわが発生しやすく外観上また光学上好ましくない
問題を有している。このため前述した光学部材は眼鏡用
レンズなどには適用しにくい問題を有している。本発明
は上述した課題を解決するためになされたものでその目
的は高屈折率層であるTiO2 層を形成した場合でも合
成樹脂基板が着色せず、またポリウレタン樹脂のように
経時的に微小変形しやすい合成樹脂からなる光学基板に
TiO2 層を形成した場合でも反射防止膜に無数のくぼ
み、しわが発生しにくく、さらに低視感反射特性を示す
TiO2 層を有する光学部材を提供することにある。[Patent Document 1] Japanese Unexamined Patent Application Publication No.
The optical member disclosed in Japanese Unexamined Patent Publication No. 39101 is Ti
Since the refractive index of the O 2 layer is set to the upper limit of 2.40, it is necessary to irradiate the substrate with a high energy oxygen ion beam. Therefore, there is a problem that the synthetic resin substrate is easily colored by the irradiation of the high energy oxygen ion beam. If the refractive index of the TiO 2 layer is set to 2.40, the T
Due to the shorter intermolecular distance of iO 2 , the Ti
Since the molecular state of O 2 is dense, a strong internal stress is generated in the TiO 2 layer, and in the case of a synthetic resin such as polyurethane resin that is susceptible to microdeformation over time, countless dents and wrinkles occur in the antireflection film. It has a problem in that it is easy to look and is not preferable in terms of optics. Therefore, the above-mentioned optical member has a problem that it is difficult to apply it to a lens for eyeglasses. The present invention has been made to solve the above-mentioned problems, and its purpose is to prevent the synthetic resin substrate from being colored even when a TiO 2 layer, which is a high refractive index layer, is formed, and to be minute over time like a polyurethane resin. Provided is an optical member having a TiO 2 layer which is resistant to countless dents and wrinkles in an antireflection film even when an TiO 2 layer is formed on an optical substrate made of a synthetic resin which is easily deformed, and which further exhibits a low luminous reflectance property. Especially.
【0004】[0004]
【課題を解決するための手段】上述した目的は以下に記
す発明によって達成された。その発明は合成樹脂基板上
に設計波長が500nm〜550nmとしたときの光学
膜厚がλ/2のTiO2 層を有する多層反射防止膜を施
した光学部材であって、前記TiO2 層は前記基板に酸
素イオンビームを照射しながら形成され、その層の屈折
率の範囲が2.25〜2.35であることを特徴とする
反射防止膜を有する光学部材である。The above-mentioned objects have been achieved by the invention described below. That invention is an optical member which has been subjected to multilayer antireflection film having a TiO 2 layer of the optical film thickness of lambda / 2 at the time when the design wavelength to the synthetic resin substrate was 500 nm and 550 nm, the TiO 2 layer is the An optical member having an antireflection film, which is formed while irradiating an oxygen ion beam on a substrate and has a refractive index range of 2.25 to 2.35.
【0005】本発明者は膜厚λ/2の高屈折率層である
TiO2 層の屈折率を2.25〜2.35にすることに
よって合成樹脂基板へのイオンビームの照射エネルギー
量を屈折率2.40のTiO2 層に比べ小さくすること
が可能となり、合成樹脂基板の着色を押さえることを見
い出した。また、TiO2 層の屈折率を2.25〜2.
35にすることによって屈折率2.40のTiO2 層に
比べて、TiO2 の分子間の距離が長くなることより層
のTiO2 の分子状態は疎の状態になり、TiO2 層の
内部応力を低く抑えることができることを見い出した。
これにより経時的に微小変化しやすいポリウレタン樹脂
の上にTiO2 層を有する反射防止膜を施しても視感反
射特性を損なわず、反射防止膜にくぼみ、しわの発生を
防ぐことができることを見い出した。The present inventor refracts the irradiation energy amount of the ion beam to the synthetic resin substrate by setting the refractive index of the TiO 2 layer, which is a high refractive index layer having a thickness of λ / 2, to 2.25 to 2.35. It has been found that the TiO 2 layer having a rate of 2.40 can be made smaller than the TiO 2 layer, and the coloring of the synthetic resin substrate can be suppressed. Further, the refractive index of the TiO 2 layer is 2.25 to 2.
Compared to the TiO 2 layer having a refractive index 2.40 by 35, the molecular state of the layer of TiO 2 than the distance between the TiO 2 molecules becomes longer becomes sparse state, the internal stress of the TiO 2 layer I found that I can keep it low.
It has been found that by doing so, even if an antireflection film having a TiO 2 layer is applied on a polyurethane resin that is susceptible to minute changes over time, it is possible to prevent the formation of dents and wrinkles in the antireflection film without impairing the luminous reflection properties. It was
【0006】次に前述した膜厚λ/2で屈折率2.25
〜2.35のTiO2 層について説明する。この層は、
合成樹脂基板を50〜120℃に加熱した状態で基板に
酸素イオンビームを照射しながらチタン又はその酸化物
(一酸化チタン、二酸化チタン等)を基材方向に飛ばし
て、二酸化チタンを蒸着させる方法により形成される。
この形成方法において合成樹脂基板を50〜120℃に
加熱することが好ましい理由は、50℃未満であると、
形成されるTiO2層の硬度が不十分になりやすく、一
方、120℃を超えるとプラスチック基材が熱変形し歪
みなどが発生する恐れがあるからである。この形成方法
の他の条件(例えば基材への酸素イオンビームの照射方
法、原料であるチタン又はその酸化物の蒸発方法など)
は通常採用されている条件の中から適宜選択されるが、
基材へのイオンビームの照射時の酸素イオン電流密度は
TiO2 層の屈折率2.25〜2.35にするために5
〜15μA/cm2 の範囲が好ましい。本発明でいうλ
/2の膜厚とは、例えばλ/4−λ/2−λ/4の3層
膜でいうλ/2の高屈折率層の膜厚に該当し、その実質
的な膜厚は0.42λ〜0.58λの範囲にある。この
TiO2 層の膜厚をλ/2に特定した理由は、他の屈折
率層との屈折率、膜厚との組み合わせにより良好な低視
感反射特性を有する反射防止膜を得ることができるから
である。Next, with the above-mentioned film thickness λ / 2, the refractive index is 2.25.
The TiO 2 layer of 2.35 will be described. This layer is
A method of depositing titanium dioxide by blasting titanium or an oxide thereof (titanium monoxide, titanium dioxide, etc.) toward the substrate while irradiating the substrate with an oxygen ion beam while heating the synthetic resin substrate at 50 to 120 ° C. Is formed by.
The reason why it is preferable to heat the synthetic resin substrate to 50 to 120 ° C. in this forming method is that the temperature is less than 50 ° C.
This is because the hardness of the formed TiO 2 layer is likely to be insufficient, and on the other hand, when the temperature exceeds 120 ° C., the plastic base material may be thermally deformed and distortion or the like may occur. Other conditions of this forming method (for example, a method of irradiating a substrate with an oxygen ion beam, a method of vaporizing titanium or its oxide as a raw material, etc.)
Is appropriately selected from the conditions usually adopted,
The oxygen ion current density at the time of irradiating the substrate with the ion beam is 5 in order to make the refractive index of the TiO 2 layer 2.25 to 2.35.
The range of ˜15 μA / cm 2 is preferable. Λ in the present invention
The film thickness of / 2 corresponds to the film thickness of the high refractive index layer of λ / 2, which is a three-layer film of λ / 4-λ / 2-λ / 4, and the substantial film thickness is 0. It is in the range of 42λ to 0.58λ. The reason why the thickness of this TiO 2 layer is specified to be λ / 2 is that an antireflection film having good low luminous reflectance characteristics can be obtained by combining the refractive index with other refractive index layers and the film thickness. Because.
【0007】本発明の反射防止膜の膜構成は上記条件を
満たしていれば特に限定されないが、実用的なことを考
えると、λ/4−λ/2−λ/4の3層膜、λ/4−λ
/2−λ/4を変形させた多層膜が好ましい。このλ/
4−λ/2−λ/4を変形させた多層膜の例として、3
層膜の基板から数えて第1層のλ/4が3層対称等価
膜、あるいは2膜のコンポジット膜であることが挙げら
れる。また、λ/4−λ/2−λ/4の各層の屈折率、
基板の屈折率、媒質の屈折率との間には以下の式に示す
関係があり、基板の屈折率が変化しても反射防止膜の基
板から数えて第1層のλ/4または第3層のλ/4の屈
折率を調整することより良好な低視感反射特性を有する
光学部材を得ることができる。 N1 2 No = N3 2 Ns N0 :基板の屈折率 N1 :基板から数えた反射防止膜の第1層の屈折率 N3 :基板から数えた反射防止膜の第3層の屈折率 Ns:媒質の屈折率 尚、前述したTiO2 層以外の層の形成法は特に限定さ
れず、真空蒸着法、イオンビームアシスト法、スパッタ
リング法などが用いられる。The film constitution of the antireflection film of the present invention is not particularly limited as long as the above conditions are satisfied, but in view of practical use, a three-layer film of λ / 4-λ / 2-λ / 4, λ / 4-λ
A multilayer film in which / 2-λ / 4 is modified is preferable. This λ /
As an example of a multilayer film in which 4-λ / 2-λ / 4 is modified, 3
It can be mentioned that λ / 4 of the first layer counted from the layer film substrate is a three-layer symmetrical equivalent film or a two-layer composite film. Also, the refractive index of each layer of λ / 4-λ / 2-λ / 4,
There is a relationship between the refractive index of the substrate and the refractive index of the medium as shown in the following formula. Even if the refractive index of the substrate changes, λ / 4 or the third layer of the first layer is counted from the substrate of the antireflection film. By adjusting the refractive index of λ / 4 of the layer, it is possible to obtain an optical member having a good low luminous reflectance property. N 1 2 No = N 3 2 Ns N 0 : Refractive index of substrate N 1 : Refractive index of first layer of antireflection film counted from substrate N 3 : Refractive index of third layer of antireflection film counted from substrate Ns: Refractive index of medium Incidentally, the method for forming layers other than the TiO 2 layer described above is not particularly limited, and a vacuum deposition method, an ion beam assist method, a sputtering method, or the like is used.
【0008】本発明の光学部材に用いる合成樹脂として
は、メチルメタクリレート単独重合体、メチルメタクリ
レートと1種以上の他のモノマーとをモノマー成分とす
る共重合体、ジエチレングリコールビスアリルカーボネ
ート単独重合体、ジエチレングリコールビスアリルカー
ボネートと1種以上の他のモノマーとをモノマー成分と
する共重合体、イオウ含有共重合体、ハロゲン含有共重
合体、ポリカーボネート、ポリスチレン、ポリ塩化ビニ
ル、不飽和ポリエステル、ポリエチレンテレフタレー
ト、ポリウレタンなどの重合体が挙げられる。尚、ここ
でいうポリウレタンの共重合体とは、ポリイソシアネー
ト化合物とポリチオール化合物および/またはポリオー
ル化合物とが反応してできた共重合体をいう。Examples of the synthetic resin used in the optical member of the present invention include methyl methacrylate homopolymer, copolymers containing methyl methacrylate and one or more other monomers as monomer components, diethylene glycol bisallyl carbonate homopolymer, and diethylene glycol. Copolymers containing bisallyl carbonate and one or more other monomers as monomer components, sulfur-containing copolymers, halogen-containing copolymers, polycarbonate, polystyrene, polyvinyl chloride, unsaturated polyester, polyethylene terephthalate, polyurethane, etc. Polymers of The polyurethane copolymer referred to here is a copolymer formed by reacting a polyisocyanate compound with a polythiol compound and / or a polyol compound.
【0009】本発明では、合成樹脂基板と反射防止膜と
の間に有機ケイ素重合体を含むハードコート層、通常知
られている下地層を介在することができる。本発明の反
射防止膜を有する光学部材は、眼鏡レンズのほか、カメ
ラ用レンズ、自動車の窓ガラス、ワードプロセッサーの
ディスプレイに付設する光学フィルターなどに使用する
ことが可能である。In the present invention, a hard coat layer containing an organosilicon polymer and a commonly known underlayer can be interposed between the synthetic resin substrate and the antireflection film. The optical member having the antireflection film of the present invention can be used not only for spectacle lenses, but also for camera lenses, automobile window glasses, optical filters attached to displays of word processors, and the like.
【0010】[0010]
【実施例】以下、実施例により本発明を詳細に説明する
が、本発明はこれらの実施例に限定されるものではな
い。なお、実施例及び比較例で得られた反射防止膜を有
する光学部材は、以下に示す試験方法により、諸物性を
測定した。The present invention will be described in detail below with reference to examples, but the present invention is not limited to these examples. The physical properties of the optical members having the antireflection film obtained in Examples and Comparative Examples were measured by the test methods described below.
【0011】(a)耐擦傷性試験 #0000のスチールウールにより表面を往復回数で1
0回こすって耐擦傷性を次のように判定した。 A:わずかに傷がつく B:多く傷がつく C:膜のはがれが生じる(A) Scratch resistance test: # 0000 steel wool was used to reciprocate the surface 1 times.
The scratch resistance was evaluated by rubbing 0 times as follows. A: Slightly scratched B: Many scratches C: Film peeling occurs
【0012】(b)視感反射率、視感透過率 日立製作所製U3410型自記分光光度計を用い、視感
反射率、視感透過率を求めた。(B) Luminous reflectance and luminous transmittance Luminous reflectance and luminous transmittance were determined by using Hitachi U3410 type self-recording spectrophotometer.
【0013】(c)着色率 以下の式によって着色率(%)を求めた。 着色率(%)=100(%)−〔視感反射率(%)+視
感透過率(%)〕(C) Coloring rate The coloring rate (%) was determined by the following formula. Coloring rate (%) = 100 (%)-[luminous reflectance (%) + luminous transmittance (%)]
【0014】(d)外観 目視により以下の項目をチェックし、項目に該当しない
ものを良、該当するものを不良とした。 (i) 光学部材が着色していること。 (ii) 反射防止膜にくぼみ、しわが見えること。(D) Appearance The following items were visually inspected, and those not corresponding to the items were judged to be good, and those corresponding to them were judged to be defective. (I) The optical member is colored. (Ii) Dimples and wrinkles are visible in the antireflection film.
【0015】(e)密着性試験 JIS−Z−1522に従いゴバン目を10×10個作
りセロファン粘着テープにより剥離試験を3回行い、残
ったゴバン目の数を数えた。(E) Adhesion test In accordance with JIS-Z-1522, 10 × 10 goggles were made, and a peeling test was performed three times with a cellophane adhesive tape, and the number of gobangs remaining was counted.
【0016】実施例1 まず反射防止膜を施す合成樹脂基板として、m−キシレ
ンジイソシアネートと、ペンタエリスリトールテトラキ
スプロピルピオネートとを重合してなるポリウレタンレ
ンズ(nd=1.60、νd=36)を用意した。Example 1 First, a polyurethane lens (nd = 1.60, νd = 36) obtained by polymerizing m-xylene diisocyanate and pentaerythritol tetrakispropyl pionate was prepared as a synthetic resin substrate on which an antireflection film was applied. did.
【0017】(i) ハードコート層の形成 前記ポリウレタンレンズを、50モル%の酸化タングス
テンゾルで被覆した酸化スズゾルと50モル%のγ−グ
リシドキシプロピルトリメトキシシランを含有するコー
ティング液に浸漬し、その後硬化してハードコート層を
設けた。(I) Formation of Hard Coat Layer The polyurethane lens is dipped in a coating solution containing tin oxide sol coated with 50 mol% of tungsten oxide sol and 50 mol% of γ-glycidoxypropyltrimethoxysilane. Then, it was cured to provide a hard coat layer.
【0018】(ii) 下地層および反射防止膜の形成 前記ハードコート層を有するプラスチックレンズを80
℃に加熱し、前記ハードコート層の上に真空蒸着法(真
空度2×10-5Torr)により、SiO2 層(屈折率
1.46、膜厚0.103λ)、TiO2 層(屈折率
2.30、膜厚0.030λ)、SiO2 層(屈折率
1.46、膜厚0.596λ)からなる下地層、この下
地層の上にTiO2層(屈折率2.30、膜厚0.05
7λ)、SiO2 層(屈折率1.46、膜厚0.058
λ)の2層等価膜からなる第1の低屈折率層、この第1
の低屈折率層の上にTiO2 層(屈折率2.30、膜厚
0.466λ)からなる高屈折率層、この高屈折率層の
上にSiO2 層からなる第2の低屈折率層(屈折率1.
44、膜厚0.25λ)を積層して反射防止膜を有する
光学部材を作製した。TiO2 層を形成する際には、前
記ポリウレタンレンズ基材に酸素イオンビームを酸素イ
オン電流密度10μA/cm2 にして照射しながらTi
O2 を基材方向に飛ばしてTiO2 層を形成した。その
結果を表2に示す。表2から判るように耐擦傷性に優
れ、さらに視感反射率が0.18%と反射防止効果に優
れ、またレンズに着色、反射防止膜にくぼみ、しわが確
認されないものであった。尚、設計波長はλ=520n
mで行なった。(Ii) Formation of Underlayer and Antireflection Film A plastic lens having the hard coat layer is formed into a layer of 80
After heating to ℃, by vacuum evaporation method (vacuum degree 2 × 10 -5 Torr), SiO 2 layer (refractive index 1.46, film thickness 0.103λ), TiO 2 layer (refractive index 2.30, film thickness 0.030λ), an underlayer consisting of a SiO 2 layer (refractive index 1.46, film thickness 0.596λ), and a TiO 2 layer (refractive index 2.30, film thickness) on this underlayer. 0.05
7λ), SiO 2 layer (refractive index 1.46, film thickness 0.058
λ) a first low-refractive index layer formed of a two-layer equivalent film,
On top of this low refractive index layer, a high refractive index layer consisting of a TiO 2 layer (refractive index 2.30, film thickness 0.466λ), and a second low refractive index consisting of a SiO 2 layer on this high refractive index layer. Layer (refractive index 1.
44, and a film thickness of 0.25λ) were laminated to produce an optical member having an antireflection film. When forming the TiO 2 layer, the polyurethane lens substrate is irradiated with an oxygen ion beam at an oxygen ion current density of 10 μA / cm 2 while irradiating Ti.
O 2 was blown toward the substrate to form a TiO 2 layer. The results are shown in Table 2. As can be seen from Table 2, the abrasion resistance was excellent, the luminous reflectance was 0.18%, which was also excellent in the antireflection effect, and the lens was not colored, and the antireflection film had no dents or wrinkles. The design wavelength is λ = 520n
m.
【0019】比較例1 実施例1の比較として比較例1を挙げる。高屈折率層の
TiO2 層の屈折率を2.40にして実施例1との比較
を行なった。このTiO2 層を形成する際には、実施例
1で用いた同じ材質のポリウレタン樹脂基材に酸素イオ
ンビームを酸素イオン電流密度25μA/cm2 にして
照射して屈折率2.40の高屈折率層であるTiO2 層
を形成した以外は実施例1と同じにして反射防止膜を有
するプラスチックレンズを作製した。その結果を表1に
示す。表1から判るように視感反射率は0.18%と反
射防止効果には優れているが、レンズに着色、反射防止
膜にくぼみ、しわが確認され外観上好ましくないもので
あった。Comparative Example 1 As a comparison of Example 1, Comparative Example 1 will be given. A comparison with Example 1 was performed by setting the refractive index of the TiO 2 layer of the high refractive index layer to 2.40. When forming this TiO 2 layer, a polyurethane resin base material of the same material used in Example 1 was irradiated with an oxygen ion beam at an oxygen ion current density of 25 μA / cm 2 to obtain a high refractive index of 2.40. A plastic lens having an antireflection film was produced in the same manner as in Example 1 except that a TiO 2 layer as a refractive index layer was formed. The results are shown in Table 1. As can be seen from Table 1, the luminous reflectance was 0.18%, which was excellent in the antireflection effect, but the lens was colored, and the antireflection film had dents and wrinkles, which were unfavorable in appearance.
【0020】実施例2 実施例1で用いたポリウレタンレンズの代わりにジエチ
レングリコールビスアリルカーボネートレンズ(nd=
1.499、νd=49)を用い、さらにコーティング
液を50モル%のγ−グリシドキシプロピルトリメトキ
シシランと50モル%のコロイダルシリカにした以外は
実施例1と同じにして反射防止膜を有するプラスチック
レンズを得た。その結果を表2に示す。表2から判るよ
うに実施例1の反射防止膜を有するプラスチックレンズ
同様、耐擦傷性に優れ、さらに視感反射率が0.18%
と反射防止効果に優れ、またレンズに着色、反射防止膜
にくぼみ、しわが確認されないものであった。Example 2 Instead of the polyurethane lens used in Example 1, diethylene glycol bisallyl carbonate lens (nd =
1.499, νd = 49), and the antireflection film was formed in the same manner as in Example 1 except that 50 mol% γ-glycidoxypropyltrimethoxysilane and 50 mol% colloidal silica were used as the coating liquid. A plastic lens having is obtained. The results are shown in Table 2. As can be seen from Table 2, like the plastic lens having the antireflection film of Example 1, it has excellent scratch resistance and a luminous reflectance of 0.18%.
And the antireflection effect was excellent, and the lens was not colored, and the antireflection film had no dents or wrinkles.
【0021】比較例2 実施例2の比較として比較例2を挙げる。高屈折率層の
TiO2 層の屈折率を2.40にして実施例1との比較
を行なった。高屈折率層のTiO2 層を形成する際に
は、実施例2で用いた同じ材質のジエチレングリコール
ビスアリルカーボネートレンズ基材に酸素イオンビーム
を酸素イオン電流密度25μA/cm2 にして照射して
屈折率2.40のTiO2 層を形成した以外は実施例2
と同じにして反射防止膜を有するプラスチックレンズを
作製した。その結果を表2に示す。表2から判るように
視感反射率は0.18%と反射防止効果には優れている
が、レンズに着色が確認され外観上好ましくないもので
あった。Comparative Example 2 Comparative Example 2 will be given as a comparison with Example 2. A comparison with Example 1 was performed by setting the refractive index of the TiO 2 layer of the high refractive index layer to 2.40. When forming the TiO 2 layer of the high refractive index layer, the diethylene glycol bisallyl carbonate lens base material of the same material used in Example 2 was irradiated with an oxygen ion beam at an oxygen ion current density of 25 μA / cm 2 to be refracted. Example 2 except that a TiO 2 layer having a rate of 2.40 was formed.
A plastic lens having an antireflection film was prepared in the same manner as in. The results are shown in Table 2. As can be seen from Table 2, the luminous reflectance was 0.18%, which was excellent in the antireflection effect, but the lens was colored, which was unfavorable in appearance.
【0022】[0022]
【表1】 [Table 1]
【0023】[0023]
【表2】 [Table 2]
【0024】[0024]
【発明の効果】本発明によって高屈折率物質であるTi
O2 を蒸着物質として使用した場合でも基板が着色せ
ず、またポリウレタン樹脂のように経時的に微小変形し
やすい合成樹脂基板にTiO2 層を形成した場合でも反
射防止膜に無数のくぼみ、しわが発生しにくく、さらに
低視感反射特性を示す反射防止膜を有する光学部材を提
供することができた。According to the present invention, Ti which is a high refractive index material
Even when O 2 is used as a vapor deposition material, the substrate does not become colored, and even when a TiO 2 layer is formed on a synthetic resin substrate that is susceptible to microdeformation over time, such as polyurethane resin, countless dents and dents are formed in the antireflection film. It was possible to provide an optical member having an antireflection film that is less likely to generate wrinkles and exhibits low luminous reflectance properties.
Claims (4)
0nmを設計波長としたときの光学膜厚がλ/2のTi
O2 層を有する多層反射防止膜を施した光学部材であっ
て、 前記TiO2 層は前記基板に酸素イオンビームを照射し
ながら形成され、その層の屈折率の範囲が2.25〜
2.35であることを特徴とする反射防止膜を有する光
学部材。1. λ = 500 nm to 55 on a synthetic resin substrate.
Ti with an optical film thickness of λ / 2 when the design wavelength is 0 nm
An optical member provided with a multilayer antireflection film having an O 2 layer, wherein the TiO 2 layer is formed while irradiating the substrate with an oxygen ion beam, and the refractive index range of the layer is 2.25 to.
An optical member having an antireflection film, which is 2.35.
を高屈折率層とし、低屈折率層としてSiO2 層を備え
ていることを特徴とする請求項1記載の反射防止膜を有
する光学部材。2. The antireflection film according to claim 1, wherein the multilayer antireflection film includes the TiO 2 layer as a high refractive index layer and a SiO 2 layer as a low refractive index layer. Optical member.
あることを特徴とする請求項1または2記載の反射防止
膜を有する光学部材。3. The optical member having an antireflection film according to claim 1, wherein the synthetic resin substrate is a polyurethane resin.
を特徴とする請求項1〜3いずれか1項記載の光学部
材。4. The optical member according to claim 1, wherein the optical member is an eyeglass lens.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3298456A JP2724260B2 (en) | 1991-10-17 | 1991-10-17 | Optical member having antireflection film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3298456A JP2724260B2 (en) | 1991-10-17 | 1991-10-17 | Optical member having antireflection film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05107402A true JPH05107402A (en) | 1993-04-30 |
JP2724260B2 JP2724260B2 (en) | 1998-03-09 |
Family
ID=17859943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3298456A Expired - Fee Related JP2724260B2 (en) | 1991-10-17 | 1991-10-17 | Optical member having antireflection film |
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Country | Link |
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JP (1) | JP2724260B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009541808A (en) * | 2006-06-28 | 2009-11-26 | エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック | Optical article having a heat resistant antireflection coating in which the thickness ratio of the low refractive index layer and the high refractive index layer is optimized |
CN102738704A (en) * | 2011-03-30 | 2012-10-17 | 索尼公司 | Multi-wavelength semiconductor laser device |
KR20160117459A (en) * | 2014-02-04 | 2016-10-10 | 토카이 옵티칼 주식회사 | Optical product, glasses lens and glasses |
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JPS61189431A (en) * | 1985-02-19 | 1986-08-23 | Fujitsu Ltd | Appreciating method for non-reflecting film |
JPS61250601A (en) * | 1985-04-30 | 1986-11-07 | Toray Ind Inc | Optical material having antireflection property and its production |
JPS63309901A (en) * | 1987-06-11 | 1988-12-19 | Nikon Corp | Spectacles lens made of plastic |
JPH0239101A (en) * | 1988-07-29 | 1990-02-08 | Hoya Corp | Antireflection film |
-
1991
- 1991-10-17 JP JP3298456A patent/JP2724260B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61189431A (en) * | 1985-02-19 | 1986-08-23 | Fujitsu Ltd | Appreciating method for non-reflecting film |
JPS61250601A (en) * | 1985-04-30 | 1986-11-07 | Toray Ind Inc | Optical material having antireflection property and its production |
JPS63309901A (en) * | 1987-06-11 | 1988-12-19 | Nikon Corp | Spectacles lens made of plastic |
JPH0239101A (en) * | 1988-07-29 | 1990-02-08 | Hoya Corp | Antireflection film |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009541808A (en) * | 2006-06-28 | 2009-11-26 | エシロール アテルナジオナール カンパニー ジェネラーレ デ オプティック | Optical article having a heat resistant antireflection coating in which the thickness ratio of the low refractive index layer and the high refractive index layer is optimized |
KR101410433B1 (en) * | 2006-06-28 | 2014-07-01 | 에실러에떼르나쇼날(꽁빠니제네랄돕띠끄) | Optical article having a temperature-resistant anti-reflection coating with optimized thickness ratio of low index and high index layers |
CN102738704A (en) * | 2011-03-30 | 2012-10-17 | 索尼公司 | Multi-wavelength semiconductor laser device |
JP2012216742A (en) * | 2011-03-30 | 2012-11-08 | Sony Corp | Multi-wavelength semiconductor laser element |
KR20160117459A (en) * | 2014-02-04 | 2016-10-10 | 토카이 옵티칼 주식회사 | Optical product, glasses lens and glasses |
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---|---|
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