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JPH0497602A - Frequency variable resonator - Google Patents

Frequency variable resonator

Info

Publication number
JPH0497602A
JPH0497602A JP2215207A JP21520790A JPH0497602A JP H0497602 A JPH0497602 A JP H0497602A JP 2215207 A JP2215207 A JP 2215207A JP 21520790 A JP21520790 A JP 21520790A JP H0497602 A JPH0497602 A JP H0497602A
Authority
JP
Japan
Prior art keywords
ring
frequency
magnetic field
resonator
josephson junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2215207A
Other languages
Japanese (ja)
Other versions
JP2780462B2 (en
Inventor
Yasushi Tono
靖 東野
Toshimasa Umezawa
俊匡 梅沢
Katsuo Mizobuchi
溝渕 勝男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP2215207A priority Critical patent/JP2780462B2/en
Publication of JPH0497602A publication Critical patent/JPH0497602A/en
Application granted granted Critical
Publication of JP2780462B2 publication Critical patent/JP2780462B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To realize a resonance frequency with a high Q and to vary the frequency even at a frequency of 10kHz or below by forming an equivalent inductance of Josephson junction in a ring and varying the equivalent inductance with an external magnetic field so as to change the resonance frequency. CONSTITUTION:The resonator consists of a substrate 1, a superconducting ground plane 2, a dielectric film 3, a string line 4, a ring 5, a Josephson junction 6 and a magnetic field generating means (coil) 7. Since an equivalent inductance of a Josephson junction whose inductance varies with an external magnetic field is formed in a ring resonator, the frequency variable resonator is realized by varying the inductance of the ring with the magnetic field. Thus, the resonance frequency with a high Q is obtained and the resonance frequency is changed in a small range as a frequency of 10kHz or below.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、高周波測定器等で利用されるマイクロストリ
ップ型共振器に関し、さらに詳しくは共振周波数を変え
ることが可能な共振器に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a microstrip type resonator used in high frequency measuring instruments and the like, and more particularly to a resonator whose resonant frequency can be changed.

〈従来の技術〉 第3図(a>、(b)、(c)は従来より使用されてい
るマイクロストリップライン型の構成を示すもので、(
a)は線形共振器、(b)図はU型共振器、(C)は円
板共振器である。これらの共振器はスIへリップライン
10の近傍に各種の形状の共振体11a、llb、ll
cを配置することにより共振周波数を得ているが1共振
波長は形状によって決まる固定共振器である。
<Prior art> Figures 3(a), (b), and (c) show the configuration of a conventionally used microstrip line type.
Figure (a) shows a linear resonator, (b) shows a U-shaped resonator, and (C) shows a disk resonator. These resonators have various shapes of resonators 11a, llb, ll in the vicinity of the lip line 10.
The resonant frequency is obtained by arranging the resonator c, but one resonant wavelength is determined by the shape of the fixed resonator.

第4図はストリップライン10の一端に可変コンデンサ
11を接続し、その容量を変化させることにより共振周
波数を可変としている。また、バラクタダイオードを用
いることにより800MH7〜IGHz程度の周波数を
可変としたものが知られている。
In FIG. 4, a variable capacitor 11 is connected to one end of a strip line 10, and by changing the capacitance, the resonant frequency is made variable. Furthermore, a device is known in which the frequency of about 800 MHz to IGHz is made variable by using a varactor diode.

〈発明が解決しようとする課題〉 しかしながら、上記従来技術においては第3図に示すも
のは共振周波数が固定されたものであり。
<Problems to be Solved by the Invention> However, in the above-mentioned prior art, the resonance frequency shown in FIG. 3 is fixed.

第4図に示すものにおいてはQ値の高い共振周波数を得
ることが離しいという問題があった。なお。
The device shown in FIG. 4 has a problem in that it is difficult to obtain a resonant frequency with a high Q value. In addition.

Q値の高い共振器を得るために超伝導部材を用いるとい
う報告もあるが1例えば金属系の超伝導膜の場合、10
に以下の環境下でその共振周波数を変化させるのは難し
いという間肪があった。
There are also reports of using superconducting materials to obtain resonators with high Q values.1 For example, in the case of metallic superconducting films, 10
However, it is difficult to change the resonant frequency under the following conditions.

本発明は上記従来技術の問題を解決するために成された
もので、高いQの共振周波数を得るとともにIOK以下
でも周波数を変化させることが可能な共振器を提供する
ことを目的とする。
The present invention has been made to solve the problems of the prior art described above, and an object of the present invention is to provide a resonator that can obtain a high Q resonance frequency and change the frequency even below IOK.

く課題を解決するための手段〉 上記従来技術の問題を解決する為の本発明の構成は、基
板上に形成された超伝導グランドプレーンと、この超伝
導グランドプレーン上に形成された誘電体膜と、この誘
電体膜上に形成されたジョセフソン接合を有する超伝導
薄膜からなるリング及びこのリングの近傍に設けられた
ストリップラインと、前記リングの上方に所定の距離を
隅てて磁界発生手段を設けたことを特徴とするものであ
る。
Means for Solving the Problems> The configuration of the present invention for solving the problems of the prior art described above includes a superconducting ground plane formed on a substrate and a dielectric film formed on the superconducting ground plane. A ring made of a superconducting thin film having a Josephson junction formed on the dielectric film, a strip line provided near this ring, and a magnetic field generating means placed a predetermined distance above the ring. It is characterized by having the following.

く作用〉 リング内にジョセフソン接合の等価インダクタンスが構
成されているので、この等価インダクタンスを外部磁界
により変化させれば共振周波数が変化する。そしてコイ
ルによる磁界は温度に依存しない。
Effect> Since the equivalent inductance of the Josephson junction is configured within the ring, if this equivalent inductance is changed by an external magnetic field, the resonant frequency will change. And the magnetic field from the coil is independent of temperature.

〈実施例〉 以下1図面に従い本発明を説明する。第1図は本発明の
一実施例を示すもので、(a)は平面図。
<Example> The present invention will be described below with reference to one drawing. FIG. 1 shows an embodiment of the present invention, and (a) is a plan view.

(b)は(a)図のA−A断面図である。これらの図に
おいて、1は例えばMgOやLaAl2O3等の誘電率
の低い基板であり、2は超伝導部材からなるグランドプ
レーン((G−P)、3はG・P上に形成されたS i
 O2やAl2O3等からなる誘電体膜である。4は超
伝導部材からなる入出力用のストリップライン、5は超
伝導部材からなるリングであり、このリングの途中には
ジョセフソン接合6が形成されている。7はリングの上
方に所定の距離を隔てて配置された磁界発生手段(コイ
ル)である。
(b) is a sectional view taken along the line AA in the figure (a). In these figures, 1 is a substrate with a low dielectric constant such as MgO or LaAl2O3, 2 is a ground plane ((G-P) made of a superconducting material, and 3 is a Si formed on G-P.
It is a dielectric film made of O2, Al2O3, etc. 4 is a strip line for input/output made of a superconducting material, 5 is a ring made of a superconducting material, and a Josephson junction 6 is formed in the middle of this ring. 7 is a magnetic field generating means (coil) arranged above the ring at a predetermined distance.

上記構成において、リング5の半径なaとしジョセフソ
ン接合6がない場合のインダクタンスをLO、リングの
静電容量をC,ストリップライン4での電磁波の位相速
度をVpとすると、この場合の共振周波数f0とvpの
関係は次式により表わすことができる。
In the above configuration, if the radius of the ring 5 is a, the inductance without the Josephson junction 6 is LO, the capacitance of the ring is C, and the phase velocity of the electromagnetic wave in the strip line 4 is Vp, then the resonant frequency in this case is The relationship between f0 and vp can be expressed by the following equation.

f o  = V D/λ=  (Vl)/ (2za
)I  ・ n・・−■λ;共振周波数の波長 (n=1.2.3.・・・) Vp=1/F「て       ・・・■。
f o = V D / λ = (Vl) / (2za
) I ・ n...-■λ; Wavelength of resonance frequency (n=1.2.3...) Vp=1/F "te...■.

次にリングにジョセフソン接合を設け、ジョセフソン接
合の臨界電流をIC,接合部を流れる電流及び電圧をそ
れぞれI、Vとすると、ジョセフソン効果より。
Next, a Josephson junction is provided in the ring, the critical current of the Josephson junction is IC, and the current and voltage flowing through the junction are I and V, respectively.From the Josephson effect.

I=Icsinθ           ・・・■V=
(気/2e )iθ/8t)  ・・・■θ;ジョセフ
ソン接合のオーダーパラメータの位相差 上;h/2π(hはブランク定数) e:電子電荷 と表わすことができる。
I=Icsinθ...■V=
(qi/2e)iθ/8t) ... ■θ; On the phase difference of the order parameter of Josephson junction; h/2π (h is a blank constant) e: It can be expressed as electronic charge.

■式を時間微分すると 8I/8t=Iccosθ(Bθ/8t)−・・■とな
るから■、■式より V= (’R/2e )  (I/c cos o> 
    −@(eI/at) =LJ  (θ I/at)            
 ・・・■LJ z (’h/2e )(1/Ic c
os θ)となる、従ってジョセフソン接合はLJなる
インダクタンスを等測的に担うことになる。
■If we differentiate the equation with time, we get 8I/8t=Iccosθ(Bθ/8t)−・・■So from the equations, V= ('R/2e) (I/c cos o>
−@(eI/at) =LJ (θ I/at)
...■LJ z ('h/2e) (1/Ic c
os θ), and therefore the Josephson junction equimetrically carries an inductance of LJ.

次にジョセフソン接合を含む超伝導リングは一般にrf
−3QUIDと呼ばれているが、このリング内の磁束の
量子化条件よりリング内の磁束をΦ1 とすると。
Next, superconducting rings containing Josephson junctions are generally rf
Although it is called -3QUID, if the magnetic flux inside the ring is Φ1 based on the quantization conditions for the magnetic flux inside this ring.

θ=2π(Φi/Φo+1)        ・・・■
1=0.1.2・・・ Φo=h/2e;磁束量子 で表わすことができる。
θ=2π(Φi/Φo+1)...■
1=0.1.2... Φo=h/2e; Can be expressed in terms of magnetic flux quantum.

Φiと外部磁束Φχの関係は Φχ=+LIC5in(2rΦ1/Φ、>・・・■L;
リングのインダクタンス で与えられ、α=2πLIC/Φ0をパラメータにΦχ
とΦ1の関係を示すと第2図の様になる。
The relationship between Φi and external magnetic flux Φχ is Φχ=+LIC5in(2rΦ1/Φ, >...■L;
Given by the inductance of the ring, Φχ with α=2πLIC/Φ0 as a parameter
The relationship between and Φ1 is shown in Figure 2.

図においてαく1ではΦiはΦχに対して1価。In the figure, when α is 1, Φi has a valence of 1 with respect to Φχ.

α〉1では多価となる。従ってαく1となる様にリング
のインダクタンスし、臨界電流ICを選べばθはΦχに
対して一義的に決まり、この結果0式よりΦχによりL
Jを一義的に変化させることができる。
When α>1, it becomes multivalent. Therefore, if the inductance of the ring is set so that α is 1, and the critical current IC is selected, θ is uniquely determined for Φχ, and as a result, from equation 0, L is determined by Φχ.
J can be uniquely changed.

いま、共振器のインダクタンスをL tとするとこのイ
ンダクタンスは L↑ (Φχ)=L0士LJ  (Φχ)と表わすこと
ができる。
Now, if the inductance of the resonator is Lt, this inductance can be expressed as L↑(Φχ)=LO−LJ(Φχ).

従って■、■−式においてΦXによりVE)を変化させ
ることによりfoを変化させることが可能となる。
Therefore, it is possible to change fo by changing VE) by ΦX in the equations (1) and (2).

〈発明の効果〉 以上実施例とともに具体的に説明した様に本発明によれ
ば、外部磁界により変化するジョセフソン接合の等価イ
ンダクタンスをリング型共振器内に構成したため、リン
グのインダクタンスを磁界により変化させることにより
周波数可変共振器を実現することができ、かつ、リング
を超伝導部材としたため損失が非常に小さいので本質的
にQ値の高いものとなる6
<Effects of the Invention> As specifically explained above in conjunction with the embodiments, according to the present invention, the equivalent inductance of the Josephson junction that changes depending on the external magnetic field is configured in the ring resonator, so that the inductance of the ring can be changed depending on the magnetic field. By doing so, a variable frequency resonator can be realized, and since the ring is made of a superconducting material, the loss is extremely small, so it inherently has a high Q value6.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す平面図(a>及び(a
)図のA−A断面図〈b)、第2図は磁束量子Φ。、リ
ング内の磁束Φ1及び外部磁束Φχの関係を示す図、第
3図9第4図は従来装置の構成図である。 1・・・基板、2・・・超伝導グランドブレーン、3・
・・誘電体膜、4・・・ストリップライン、5・・・リ
ング6・・・ジョセフソン接合、7・・・磁界発生手段
(コイル)。 代理人 弁理士 小 沢 信 功。 N N 勺 マ ー ℃ N
FIG. 1 is a plan view showing an embodiment of the present invention (a> and (a
) A-A cross-sectional view (b) in Figure 2 shows the magnetic flux quantum Φ. , FIG. 3, FIG. 3, and FIG. 4 are diagrams showing the relationship between the magnetic flux Φ1 inside the ring and the external magnetic flux Φχ, which are configuration diagrams of the conventional device. 1...Substrate, 2...Superconducting ground brain, 3.
... Dielectric film, 4... Strip line, 5... Ring 6... Josephson junction, 7... Magnetic field generating means (coil). Agent: Nobuaki Ozawa, patent attorney. N N 勺 ℃ N

Claims (1)

【特許請求の範囲】[Claims]  基板上に形成された超伝導グランドプレーンと,この
超伝導グランドプレーン上に形成された誘電体膜と,こ
の誘電体膜上に形成されたジョセフソン接合を有する超
伝導薄膜からなるリング及びこのリングの近傍に設けら
れたストリップラインと,前記リングの上方に所定の距
離を隔てて磁界発生手段を設けたことを特徴とする周波
数可変共振器。
A ring consisting of a superconducting ground plane formed on a substrate, a dielectric film formed on this superconducting ground plane, a superconducting thin film having a Josephson junction formed on this dielectric film, and this ring. 1. A variable frequency resonator comprising: a strip line provided near the ring; and magnetic field generating means provided above the ring at a predetermined distance.
JP2215207A 1990-08-15 1990-08-15 Variable frequency resonator Expired - Lifetime JP2780462B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2215207A JP2780462B2 (en) 1990-08-15 1990-08-15 Variable frequency resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2215207A JP2780462B2 (en) 1990-08-15 1990-08-15 Variable frequency resonator

Publications (2)

Publication Number Publication Date
JPH0497602A true JPH0497602A (en) 1992-03-30
JP2780462B2 JP2780462B2 (en) 1998-07-30

Family

ID=16668470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2215207A Expired - Lifetime JP2780462B2 (en) 1990-08-15 1990-08-15 Variable frequency resonator

Country Status (1)

Country Link
JP (1) JP2780462B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5484765A (en) * 1994-02-04 1996-01-16 Massachusetts Institute Of Technology Ferrite/superconductor microwave device
US5721195A (en) * 1995-03-11 1998-02-24 Robert Bosch Gmbh Dual mode planar superconductive resonator and filter including a Josephson junction for varying mode coupling
US6360112B1 (en) 1994-06-17 2002-03-19 Matsushita Electric Industrial Co., Ltd. High-frequency circuit element having a superconductive resonator tuned by another movable resonator
US6864762B2 (en) * 2002-03-26 2005-03-08 Matsushita Electric Industrial Co., Ltd. Bandpass filter and apparatus using same
US7253701B2 (en) * 2004-11-30 2007-08-07 Northrop Grumman Corporation Multiplexed amplifier
CN102563179A (en) * 2012-01-09 2012-07-11 江南大学 Electromagnetic valve without static consumption

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5484765A (en) * 1994-02-04 1996-01-16 Massachusetts Institute Of Technology Ferrite/superconductor microwave device
US6360112B1 (en) 1994-06-17 2002-03-19 Matsushita Electric Industrial Co., Ltd. High-frequency circuit element having a superconductive resonator tuned by another movable resonator
US6360111B1 (en) * 1994-06-17 2002-03-19 Matsushita Electric Industrial Co., Ltd. High-frequency circuit element having a superconductive resonator with an electroconductive film about the periphery
US5721195A (en) * 1995-03-11 1998-02-24 Robert Bosch Gmbh Dual mode planar superconductive resonator and filter including a Josephson junction for varying mode coupling
US6864762B2 (en) * 2002-03-26 2005-03-08 Matsushita Electric Industrial Co., Ltd. Bandpass filter and apparatus using same
US7253701B2 (en) * 2004-11-30 2007-08-07 Northrop Grumman Corporation Multiplexed amplifier
CN102563179A (en) * 2012-01-09 2012-07-11 江南大学 Electromagnetic valve without static consumption

Also Published As

Publication number Publication date
JP2780462B2 (en) 1998-07-30

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