JPH0481906A - Structure attitude controller - Google Patents

Abstract

PURPOSE:To very precisely control the attitude of a structure whose rigidity is large by installing an actuator for deforming the structure within an elastic deformation or thermal deformation range in the structure whose rigidity is large, detecting a displacement of the structure by a displacement sensor and executing the expansion/contraction control of the actuator. CONSTITUTION:In a structure 6 whose rigidity is large, actuators 7H, 8H for deforming the structure 6 within an elastic deformation or thermal deformation range are installed. In such a state, displacement sensors S1 - S4 installed on both sides of the heating actuators 7H, 8H detect a displacement in the axial direction of each wall surface of the structure 6, an average value of its detected displacement amount is calculated at every wall surface, and in accordance with its value, a control part executes the control of heating or cooling related to the actuators 7H, 8H, and the respective wall surfaces are subjected to expansion/contraction adjustment. In such a way, the ultraprecise attitude control of the structure can be executed easily.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a structure attitude control device that enables ultra-precise position control in various industrial machines.

(Prior Art) In various conventional machine tools, measuring devices, etc., efforts have been made to increase the rigidity of constituent members of the machines and devices as one method for improving processing accuracy or measuring accuracy.

As a result, due to the increased rigidity, the occurrence of distortion due to the load applied to the component is reduced, and the elastic deformation of the component is reduced.
Deterioration in accuracy due to deflection or the like can be prevented to some extent.

If we try to further increase accuracy and achieve ultra-precise processing and measurement, the temperature difference that occurs between the parts of machines and equipment causes thermal displacement of the parts, and dimensional changes occur between the constituent parts of the machines and equipment themselves. This is hindering the improvement of accuracy. Particularly in machine tools, the heat generated from the motor, drive system, and machining parts is conducted to each part as soon as machining begins, causing changes in dimensions between component parts over time, which adversely affects machining accuracy. There was a problem. Therefore, proposals have been made for thermal displacement control to eliminate the displacement of component parts due to these uneven temperature distributions (Society for Precision Engineering JSPE-
55-09' 89-O9-1706).

(Problem to be solved by the invention) However, the proposed thermal displacement control uses a laser beam to detect the warpage of the entire column of the machining center as the amount of movement of the top surface of the column, and uses a counter heater installed at the back of the column to detect the warpage of the entire column of the machining center. Since it is controlled on and off and compensates for changes in the straightness of the column, it can always maintain straightness with an accuracy of ±2μ-/-, but it does not compensate for displacement in the height direction of the column. Can not do it,
Furthermore, it is impossible to compensate for the thermal expansion of the head portion in which the motor, which is the heat source, is installed, and it is impossible to completely compensate for the decrease in processing accuracy due to thermal displacement.

The present invention has been made in order to solve the above-mentioned problems, and its purpose is to enable ultra-precise position control of machine tools, measuring devices, and other various industrial machines. The purpose is to provide a control device.

(Means for Solving the Problem) In order to achieve the above object, the first invention provides an actuator that is installed in a highly rigid structure and deforms the structure within an elastic deformation or thermal deformation range; A displacement sensor detects the displacement of the deformed area of the structure deformed by the actuator, and based on the amount of displacement detected by this displacement sensor, a drive signal for the actuator is sent to maintain the structure at a desired length. The invention is characterized by comprising a control section that generates the power.

A second invention provides an actuator that is installed coaxially with a rod-shaped structure to which a tensile or compressive load is applied in the axial direction and deforms the structure in the axial direction within an elastic deformation or thermal deformation range; A displacement sensor that detects the displacement of an object in the axial direction, and a control section that generates a drive signal for an actuator to hold the rod-shaped structure at a desired length based on the amount of displacement detected by the displacement sensor. It is characterized by:

A third invention provides the actuator in the second invention,
The rod-shaped structure itself is characterized by being configured to be displaced in the axial direction by heating and cooling it from the outside or inside.

A fourth invention includes a pair of actuators installed on opposing side walls of a hollow cylindrical structure in parallel with the side walls, each of which deforms the side wall of the structure in the axial direction within an elastic deformation or thermal deformation range; A displacement sensor is installed on the side wall where the actuator is installed and detects the axial displacement of the structure, and the structure is held at a desired length or a desired posture based on the amount of displacement detected by these displacement sensors. The present invention is characterized in that it includes a control section that generates a drive signal for each actuator in order to do so.

A fifth aspect of the present invention is characterized in that the actuator is mounted in two layers, one above the other, with the side wall portions aligned with each other.

The sixth invention provides four actuators that are installed on the side wall of a hollow cylindrical structure having four sides in parallel with the side wall, and each actuator deforms the side wall of the structure in the axial direction within an elastic deformation or thermal deformation range. and a displacement sensor that is installed on the side wall where the actuator is installed and detects the axial displacement of the structure, and based on the amount of displacement detected by these displacement sensors, the structure is moved to a desired length or a desired length. The present invention is characterized by comprising a control section that generates a drive signal for each actuator to maintain the posture.

A seventh aspect of the present invention is characterized in that the actuator is mounted in two stacked layers, with the side wall portions aligned with each other.

The eighth invention is installed in parallel to the side wall of a hollow cylindrical structure or cylindrical structure that can be equally divided into 3 or 5 or more in the circumferential direction, and elastically deforms or thermally deforms the side wall of the structure, respectively. A plurality of actuators that deform the structure in the axial direction within a range, displacement sensors that are installed on the side wall where the actuators are installed and detect the axial displacement of the structure, and the The present invention is characterized by comprising a control section that generates a drive signal for each actuator in order to hold the structure at a desired length or a desired posture.

A ninth invention is characterized in that the eighth invention is stacked in two layers, upper and lower.

The tenth invention is a hollow polyhedral structure made of rectangular parallelepipeds or other polyhedrons, which is installed in parallel on all or a part of the wall surface of a hollow polyhedral structure, and which causes the wall surface of the structure to become a wall surface within the range of elastic deformation or thermal deformation. Multiple actuators that deform in one or two parallel directions, displacement sensors that are installed on the wall where the actuators are installed and detect the displacement of the wall in the actuator operation direction, and based on the amount of displacement detected by these displacement sensors. , and a control unit that generates a drive signal for each actuator in order to hold the structure at a desired length or a desired posture.

The eleventh invention is the first invention, the second invention, the fourth invention, the fifth invention, the sixth invention, or the seventh invention.
invention or eighth invention or ninth invention or tenth invention
The invention is characterized in that the actuator is constituted by a hydraulic cylinder.

The twelfth invention is the fourth invention, the fifth invention, the sixth invention, the seventh invention, the eighth invention, or the ninth invention.
The invention is characterized in that the actuator installed in parallel with the side wall of the hollow cylindrical structure is configured with a heating source and a cold source that expand and contract by heating or cooling the side wall itself.

A 13th invention is that in the 10th invention, the actuator installed in parallel with the wall surface constituting the hollow polyhedral structure is configured with a heating source and a cold source that expand and contract by heating or cooling the wall surface itself. Features.

(Function) In the first invention, an actuator that deforms the structure within an elastic deformation or thermal deformation range is installed in a highly rigid structure, and a displacement sensor that detects the displacement of the structure is installed. Thereby, the expansion and contraction of the actuator is controlled based on the amount of displacement detected by the displacement sensor, and the structure is maintained at a desired length.

In the second invention, an actuator that deforms the structure in the axial direction within an elastic deformation or thermal deformation range is installed coaxially with the rod-shaped structure to which a tensile or compressive load is applied in the axial direction, and By providing a displacement sensor that detects the axial displacement of the structure, expansion and contraction of the actuator is controlled based on the amount of displacement detected by the displacement sensor, so that the rod-shaped structure is maintained at a desired length.

In the third invention, by heating and cooling the rod-shaped structure itself from the outside or inside, the displacement in the axial direction is changed and adjusted according to the temperature of the structure itself.

In the fourth invention, a pair of actuators that deform the side wall of the structure in the axial direction within an elastic deformation or thermal deformation range are respectively installed in parallel to the side wall of the hollow cylindrical structure, and By installing displacement sensors that detect the axial displacement of the structure on the side wall where the actuator is installed, the expansion and contraction of the actuator is controlled based on the amount of displacement detected by these displacement sensors, allowing the desired hollow cylindrical structure to be formed. length or held in the desired position. Furthermore, the combination of expansion and contraction of the pair of actuators provides two degrees of freedom: expansion and contraction in the axial direction and swinging within one plane.

In the fifth invention, the structure attitude control device of the fourth invention is stacked in two stages, so that when the first stage structure and the second stage structure are combined with the swing directions opposite to each other, the axis Movement in the right angle direction is possible and three degrees of freedom are obtained. Additionally, by setting the swing angle of the second stage structure to approximately three times the swing angle of the first stage structure and in the opposite direction, it is possible to swing the second stage structure without moving its axis. Become.

In the sixth invention, four actuators for deforming the structure in the axial direction within the range of elastic deformation or thermal deformation are provided on the side wall of the hollow cylindrical structure that grows four sides, respectively, in parallel with the side wall. At the same time, by installing displacement sensors that detect the axial displacement of the structure on the side wall where the actuators are installed, the expansion and contraction of each actuator is controlled based on the amount of displacement detected by these displacement sensors. The shaped structure is held at a desired length or in a desired position. Further, by combining the expansion and contraction of two orthogonal pairs of actuators, three degrees of freedom are obtained: axial expansion and contraction and swinging in two orthogonal planes.

In the seventh invention, by stacking the structure attitude control device of the sixth invention in two stages, the swings of the first stage structure and the second stage structure can be made in opposite directions as in the fifth invention. When combined, radial movement is possible in two orthogonal directions,
Five degrees of freedom are obtained.

Similarly, if the swing angle of the second stage structure is approximately three times the swing angle of the first stage structure and in the opposite direction, the axis of the second stage structure will not move (swing angle). becomes possible.

In the eighth invention, on the side wall of the hollow cylindrical structure or cylindrical structure that can be equally divided into 3 or 5 or more in the circumferential direction,
Three or five or more actuators that deform the structure in the axial direction within the range of elastic deformation or thermal deformation are each installed in parallel with the side wall, and displacement sensors that detect the axial displacement of the structure are installed on the actuators. By providing the actuators on the side wall, the expansion and contraction of each actuator is controlled based on the amount of displacement detected by these displacement sensors, and the hollow cylindrical structure is held at a desired length or a desired posture. Further, by combining the expansion and contraction of two orthogonal pairs of actuators, expansion and contraction in the axial direction and swinging in multiple planes are possible.

In the ninth invention, by stacking the structure attitude control device of the eighth invention in two stages, the swings of the first-stage structure and the second-stage structure can be made in opposite directions as in the fifth invention. When combined, radial movement is possible in multiple directions. Similarly, if the swing angle of the second stage structure is approximately three times the swing angle of the first stage structure and in the opposite direction, the swing angle of the second stage structure will not move. It becomes possible.

In the tenth invention, a plurality of actuators for deforming the wall surface in a direction parallel to the wall surface within an elastic deformation or thermal deformation range are arranged in parallel with the wall surface of the hollow polyhedral structure composed of rectangular parallelepipeds and other polyhedrons. In addition to installing each actuator, a displacement sensor that detects the displacement is provided on the wall surface where the actuator is installed, so that the expansion and contraction of each actuator is controlled based on the amount of displacement detected by these displacement sensors, and the rectangular parallelepiped or other polyhedron is adjusted to the desired length. or held in a desired position. Furthermore, a large number of degrees of freedom can be obtained by combining the expansion and contraction of actuators installed on the wall surface.

In the eleventh invention, the actuator used in the first invention, the second invention, and the fourth to tenth inventions is configured with a hydraulic cylinder, so that the expansion and contraction of the actuator can be easily controlled, and the response She is also good at sex.

In the twelfth invention, the actuator installed in parallel with the side wall of the hollow cylindrical structure used in the fourth invention to the ninth invention is expanded and contracted by heating or cooling the side wall itself. , it becomes possible to configure the actuator to be thin.

In the 13th invention, the actuator installed in parallel with the constituent wall surface of the hollow polyhedral structure used in the 10th invention is expanded and contracted by heating or cooling the wall surface itself, so that the actuator can be made thinner. It becomes possible to configure.

(Example) The present invention will be described in detail below with reference to the drawings.

1 and 2 show embodiments of the second and third inventions, with FIG. 1 being an external perspective view and FIG. 2 being a longitudinal sectional view.

In the figure, a rod-shaped structure 1 with flanges la and 1b formed at the upper and lower ends has a cooling water channel 2 for circulating cooling water formed inside, and cooling water is supplied through an inlet 2a formed on the side of the flange 1a. Then, it passes through the cooling water channel 2 inside the main body of the structure 1 and is discharged from the outlet 2b formed on the side surface of the flange 1b. Further, a heater 3 is uniformly wound around the outer circumference of the structure 1, so that the structure 1 can be heated from the outer circumferential surface.

The light emitting parts 4a and 5a of the laser length measuring devices 4 and 5 as displacement sensors are installed on the diagonal line on the back surface of the flange 1b, and the light receiving parts 4b and 5b are arranged on the diagonal line on the back surface of the corresponding flange 1a. There is. The axial displacement of the structure 1 is detected from the average value of the face-to-face dimensions of the flange 1a1b measured by the laser length measuring devices 4 and 5.

This structure 1 is fixed to a supported member through mounting holes 1c and ld formed in flanges la and lb,
According to the displacement of the structure 1 detected by the laser length measuring device 4.5 as a displacement sensor, if the structure 1 is shrinking, the structure 1 is heated by the heater 3 to expand and return to its normal size. to correct.

On the other hand, if the structure 1 is expanding, cooling water is supplied to the cooling water channel 2 from a chiller or the like (not shown) to cool and shrink the structure 1, thereby correcting the size to the normal size. These heating
The cooling is controlled by a control section (not shown) based on the measured value of the laser length measuring device 4.5. The dimensions controlled here are values that correspond to the coefficient of thermal expansion specific to the material of the structure 1 and the temperature difference between heating or cooling. However, if compressive or tensile stress is applied to the structure 1, The value obtained by adding or subtracting the thermal displacement value to the strain generated in response to stress becomes the control dimension. In any case, structure 1
It will be adjusted within the expansion and contraction range of 0 elastic deformation or thermal deformation. This expansion/contraction change of the structure 1 is not limited to simply correcting deviations from normal dimensions, but is also actively used to make minute position adjustments of the supported member fixed to the flange 1a1b.

In addition, in the example, the inside of the structure 1 is cooled and the outside surface is heated, but it is also possible to heat the inside and cool the outside by adjusting only the temperature of the water circulating in the cooling water channel 2 inside. It is also possible to perform heating and cooling, and it is also possible to similarly configure the external heater 3 with a heat pipe or the like to adjust the temperature of the structure 1 from the outside and adjust the amount of expansion and contraction. In addition, in both heating and cooling cases,
The temperature gradient in the radial direction of the structure 1 is made axially symmetrical to prevent warpage or deflection from occurring in the structure 1 itself.

Further, it is also possible to install the displacement sensor on the central axis, and in that case, the number of displacement sensors can be reduced to one.

Furthermore, as the liquid to be circulated through the cooling water channel 2, other than cooling water, a heat medium such as oil or gas may also be used.

Furthermore, it is also possible to incorporate a hydraulic cylinder inside the structure 1 as a drive source for expanding and contracting the structure 1. When using a hydraulic cylinder, it is necessary to maintain the oil temperature constant, but the amount of expansion and contraction and the pressing force can be easily controlled, and the responsiveness is excellent.

Further, the sensor for measuring the displacement of the structure 1 may be any sensor as long as it can detect elastic deformation or thermal deformation of the structure 1, and specifically, a strain gauge, a differential transformer, a potentiometer, etc. are used.

In any case, the displacement sensor needs to be able to accurately measure the displacement that has occurred, without being affected by temperature, even if a temperature change occurs in the object to be measured or the sensor itself. In the case of strain gauges, if they are made of Super Invar material, accurate measurements can be made at temperatures below about 60''C without being affected by temperature.

Note that the structure 1 shown in FIGS. 1 and 2 can also be used as an actuator for a hollow cylindrical structure described later.

3 and 4 show an embodiment of the fourth invention, with FIG. 3 being a plan view and FIG. 4 being a front view.

In the figure, panel-shaped cooling actuators 7c and 8c are installed inside the two opposing sides of a square pipe-shaped structure 6, which is a hollow cylindrical structure, and a similar panel-shaped heating actuator 711.8M is installed on the outside thereof. cooling actuator 7c and heating actuator 7M, and cooling actuator 8c and heating actuator 8N.
and constitute a pair of actuators 7.8.

Furthermore, the heating actuator '711 outside the structure 6.
Displacement sensors S1 to S4 are installed in the axial direction on both sides of 811, and detect the axial displacement of the structure 6.

This structure 6 originally has a support target structure connected to its upper or lower part, and for the sake of explanation, only the part where the actuator 7.8 and displacement sensors S1 to S4 are installed is shown in the figure. ing.

Although the specific structure of the cooling actuators 7c and 8c is not shown, a cooling water circulation vibrator is provided inside the cooling actuators 7c and 8c.
Cooling water is supplied and circulated by a chiller or the like (not shown) to cool and contract the wall surface of the structure 6 that is in contact with it. Although the specific structure of the heating actuators 7x and 8H is also not shown, they are constructed from surface heating elements made of electric heaters, and when supplied with electric current, they heat and expand the wall surface of the structure 6 that they are in contact with. Since these actuators 7.8 can be formed thin, they do not occupy a large space on the inner and outer walls of the structure 6.

In this embodiment, displacement sensors S1 to S4 installed on both sides of the heating actuators 7N and 8N detect the displacement of each wall surface of the structure 6 in the axial direction, and the average value of the detected displacement amount is A control section (not shown) controls heating or cooling of the actuator 7.8 according to the value, and adjusts the expansion and contraction of each wall surface. The displacement sensor 5l-34 used in the present invention is a structure deformation detector (applied by the present applicant).
Japanese Patent Application No. 1-234428) is most suitable because it can accurately measure minute displacements such as temperature deformation and elastic deformation.

FIG. 5 shows the cooling actuators 7c, 8c and the heating actuators 7, . . . in the fourth embodiment of the invention shown in FIGS. 3 and 4. FIG. 8.0 is an explanatory diagram showing the movement and changes in the dimensions and posture of the structure 6.

Figure a shows a case where the atmospheric temperature of the structure 6 is constant and the actuators 7.8 are not operating under a condition where the structure 6 receives equal compressive or tensile loads from above and below, and the axial dimension of the structure 6 is is h and the upper and lower surfaces are held parallel.

The figure shows a case where the heating actuators 7M and 8N on both outer surfaces marked in black operate to uniformly heat the wall surface, and the axial dimension of the structure 6 is Δh.

It expands and the upper and lower surfaces are held parallel.

Figure C shows a case where the cooling actuators 7c and 8c on both inner surfaces marked in black operate to uniformly cool the wall surface, and the axial dimension of the structure 6 contracts by Δh, and the upper and lower surfaces are kept parallel. Note that the axial displacement amounts Δh+ and Δh2 in FIGS. b and C are determined by the heating actuators 7, . It can be arbitrarily adjusted by adjusting the wall surface temperature of the structure 6 according to the amount of heating or cooling of the cooling actuators 7c and 8c.

Figure d shows a case where the cooling actuator 7c on the left inner surface marked in black and the heating actuator 8N on the right outer surface operate to cool and contract the left wall surface and heat and expand the right wall surface. Angle α counterclockwise
It is tilted, and the center position of the top surface moves a distance to the left. In other words, the actuator oscillates, and the oscillation angle α and the movement distance e of the center can be arbitrarily adjusted depending on the degree of heating and cooling of each actuator.

In this swinging motion, the swinging direction is reversed by switching the heating and cooling of the actuator relative to the wall surface to the opposite side. That is, in this embodiment, two degrees of freedom are obtained: vertical expansion/contraction and left/right swing, and the vertical movement and inclination angle of the support target structure that is continuous with the structure 6 can be controlled by the structure 6. It can be precisely controlled on the order of the amount of displacement obtained by thermal expansion.

6, 7, and 8 show an embodiment of the fifth invention, with FIG. 6 being a front view, and FIGS. 7 and 8 being explanatory diagrams of the operation.

In this embodiment, structures 9a and 9b having the same configuration as the structure 6 in the embodiment of the fourth invention are stacked in two stages with the installation surfaces of their actuators aligned. A cooling water channel 15 is formed at the joint between the structures 9a and 9b for thermal insulation, and the upper and lower structures 9a and 9b are connected to each other.
The structure prevents heat transfer between the two. Although not shown in the figure, cooling channels are similarly formed at the lower end of the structure 9a and the upper end of the structure 9b to provide thermal insulation from the supported structure. This thermal insulation with the supported structure also applies to the third embodiment of the invention. In addition, the planar configuration of this example is the third
The plan view is omitted because it is almost the same as the plan view shown in the figure. In addition, in the figure, displacement sensor S7. S8 is installed on the front side of the structure 9a to detect displacement of the wall surface in the axial direction. Further, although not shown, a displacement sensor S9.510 is installed on the back side of the structure 9a.

Similarly, displacement sensors Sll and S12 are installed on the front side of the structure 9b to detect displacement of the wall surface in the axial direction. Similarly, a displacement sensor 513 (not shown) is also located on the back side of the structure 9b.
S14 is installed. A heating actuator 11. ~1
4N, there is a cooling actuator llc"- on the inside of the wall.
14c is installed. Each of these actuators 1
Heating or cooling operations of units 1 to 14 are controlled by a control unit (not shown) according to the displacement amount detected by each displacement sensor S7 to S14.

In this embodiment, when the structures 9a and 9b are arranged in two stages and the structures 9a and 9b are constructed in the same manner as the structure 6 of the embodiment shown in FIGS. The swing angle and the moving distance of the center due to swinging are increased by up to twice. In addition, each installed actuator 11 to 1
Since the number of combinations of the operations in step 4 is greater than in the case of the fourth invention, complex control is possible and more advanced attitude control is possible.For example, as shown in FIG. When the upper structure 9b is tilted clockwise at an angle β, the upper surface of the structure 9b becomes parallel to the lower surface of the structure 9a, and only the central axis of the upper structure 9b is directed to the left. Move a distance of Hr to . This moving distance r can be arbitrarily adjusted by changing the inclination angle β of the structures 9a and 9b, so that horizontal movement without swinging, which could not be achieved with the fourth invention, becomes possible. It should be noted that this movement of the center axis position, contrary to the illustration,
By tilting clockwise and tilting the upper structure 9b counterclockwise, it can be moved to the right.

Regarding the swing, as shown in FIG. 8, the lower structure 9a is tilted counterclockwise at an angle γ, and the upper structure 9a is
If b is tilted clockwise by about three times the lower level, that is, by an angle of about 31, the top surface of structure 9b will swing at an angle of 2T clockwise with respect to the central axis of structure 9a, but the structure The central axis of 9b does not move from the lower structure 9a, that is, the inclination angle of the upper structure 9b is changed from the lower structure 9.
By making the inclination angle approximately three times as large as a and also in opposite directions, only swinging can be achieved without moving the axis of the upper surface. As a result, this fifth invention has three functions: vertical expansion and contraction, left and right swing, and horizontal movement.
A degree of freedom is obtained, and more diverse attitude control can be performed for the supported structures that are continuous with the structures 9a and 9b.

FIG. 9 shows a perspective view of another embodiment of the actuator 16. This actuator 16 is used for both heating and cooling, and has a cooling liquid passage consisting of a parallel part and a folded part inside the panel-shaped main body. 17 is formed 0
The cooling liquid input from the inlet 17a of the passage 17 passes through almost the entire area inside the actuator 16, and then passes through the outlet 17b.
is discharged from. A groove 18 for attaching a heater is similarly formed on the upper surface of the actuator 16, and a sheathed heater (not shown) is attached as a heat source.

When the sheathed heater is attached, the actuator 16 is fixed to the surface of the structure through the holes 16a formed at the four corners, heating and cooling the structure only on one side of the wall. Since this can be done with a single installed actuator, actuator installation and management becomes easy.

Next, an embodiment of the sixth invention will be described.

In the embodiment of the fourth invention, the actuator and displacement sensor were installed on two opposing walls, but
In this embodiment, actuators and displacement sensors are also installed on the remaining two sides. That is, all four sides of a structure with a square pipe-like cross section are controlled to expand and contract for each opposing wall surface, and as a result, compared to the posture control of the fourth invention, the direction of swing is increased by one direction, and three degrees of freedom are obtained. is obtained.

A specific configuration can be realized by similarly installing the actuator and displacement sensor on the left and right sides where the actuator and displacement sensor are not installed in the plan view of the third embodiment shown in FIG. . That action is the fifth
The result is almost the same as that shown in the figure, and the plane in the direction of inclination of the upper surface shown in figure d is increased by one more direction. Furthermore, by combining the two directions of inclination, it becomes possible to incline in all directions of 360 degrees.

Next, FIG. 10 shows another specific embodiment of the sixth invention.
This will be explained with reference to FIG. In FIG. 10, inside the section 18a of the structure 18, which is constructed by dividing a hollow quadrangular prism having a girder structure into three sections, there are cylindrical sections at the four inner corners parallel to the longitudinal direction of the structure 18. Actuator 19~
22 is fixedly attached between the partition walls. These cylindrical actuators 19 to 22 are usually paired in pairs depending on the direction to be controlled, and drive the side walls to expand and contract uniformly. As a result, as shown by the arrow in the section 18c, the structure 18 can be controlled in three degrees of freedom, including longitudinal expansion and contraction and vertical and horizontal swing. A displacement sensor (not shown) is installed on the outer peripheral wall of the j18a or on each actuator 19-22, and the amount of expansion and contraction of each actuator 19-22 is adjusted and controlled according to the amount of displacement detected by this displacement sensor. FIG. 11 shows the inside of the compartment 18a in more detail, and the cylindrical actuators 19 to 22 may be hydraulic cylinders or thermal actuators that expand and contract the built-in expansion body by heating and cooling. In Fig. 0, a thermal actuator is used, and a bendable heat pipe 2 passes through each head cover 19a to 22a of the actuators 19 to 22.
3 are respectively inserted into the actuator. The other end of the heat pipe 23 is inserted into the heat exchanger 24, and heat is exchanged with the cooling water in the heat exchanger 24, thereby causing a temperature change by cooling the actuators 19 to 22 and generating an expansion/contraction driving force. .

FIG. 12 is a sectional view showing the internal structure of the actuator 19, in which a member with a U-shaped cross section connected to the head cover 19a and a U-shaped member in cross section connected to the end cover 19b at the other end are combined, and the other end of the member is combined. An expandable member 27, which is an expandable body, is held between 19c and 19d via non-compressible heat insulating materials 29a and 29b. The extensible member 27 has its outer periphery covered with a heat insulating material 28 to be insulated from the outside air, and has a heat vibrator 23, a sheathed heater 25, and a thermocouple 26 embedded inside. The other end of the heat vibe 23 is inserted into a heat exchanger 24 and heat exchanged with cooling water.
The expandable member 27 is cooled by absorbing heat.

In this actuator 19, the heat pipe 23 constantly absorbs heat from the expandable member 27 to maintain the temperature below a certain level, and only when heating is necessary, the sheathed heater 2
5 and the telescopic member 27 while monitoring the thermocouple 26.
The amount of expansion and contraction is adjusted by heating the material to a predetermined temperature. Specifically, when the elastic member 27 is cooled, the space between the head cover 19a and the end cover 19b expands, and when the elastic member 27 is heated, the space between the head cover 19a and the end cover 19b is reduced, so normally When the actuator 19 is fixedly attached to the structure to be supported in a tensioned state and the posture of the structure to be supported is to be controlled by narrowing the distance between the structures to be supported, the expandable member 27 is heated to a temperature at which the necessary amount of contraction is obtained. It is used as Alternatively, the temperature of the expandable member 27 can be adjusted by constantly heating the sheathed heater 25 and adjusting the water temperature of the heat exchanger 24 at the other end of the heat pipe 23.

In any case, the temperature of the expandable member 27 is adjusted depending on the relative magnitude of the heating amount of the sheathed heater 25 and the cooling amount of the heat pipe 23. Note that normally, with the actuator 19 installed, the head cover 19a and the end cover 1
A tensile load is applied between 9b to generate compressive stress in the elastic member 27 to cause distortion, and in order to adjust this distortion, the temperature of the elastic member 27 is adjusted and the elastic member 2
7, the amount of strain is adjusted while counteracting the stress applied from the outside, and finally the head cover 19
Adjust the dimension between a and the end cover 19b to a desired value.

FIG. 13 shows another embodiment of a cylindrical thermal actuator, and this actuator 31 is a cylinder with a sheathed heater 33 wound around the outside in a hole formed at the bottom of an end cover 32 having a hat-like cross section. A lid portion 35 is integrally fixed to the other end of the 0W-shaped telescopic member 34, which is concentrically connected to the inside of the end cover 32. A telescopic member 37 is connected to the inside of this lid part 35 in the axial direction of the central part via a non-compressible heat insulating material 36, and a disc-shaped helad cover is connected to the other end via a non-compressible heat insulating material 38. 39 are connected and supported. A heat vibrator 41 is inserted through the head cover 39 and the heat insulating material 38 to near the left end of the expandable member 37 . This actuator 31 heats the sheathed heater 33 to
4 and when the heat vibrator 41 expands and expands the expandable member 3.
7 is cooled and the expandable member 34 is contracted, the dimension between the surfaces of the end cover 32 and the helad cover 39 is narrowed.

Further, the amount of expansion and contraction of this actuator 31 can be adjusted by the amount of heating by the sheathed heater 33 and the amount of cooling by the heat vibrator 41, and operates in substantially the same manner as the actuator 19 described above.

14 and 15 show other embodiments of the cylindrical thermal actuator, FIG. 14 is a longitudinal sectional view of the actuator 42, and FIG. 15 is a sectional view taken along the line A-A in FIG. 14. . As shown in the figure, the actuator 42 has a head cover 43 and an end cover 44 installed alternately, and an incompressible heat insulating material 45.degree. The member 47 and the disk 48 are held by pressure or adhesive. A heat vibe 49 for cooling and a sheathed heater 51 for heating are inserted into the hollow part 47a of the elastic member 47 through the head cover 43, the other end 44a of the end cover, the heat insulating material 46, and the disc 48. are spirally arranged in the hollow portion 47a on the outer periphery of the heat vibrator 49. In addition, the elastic member 4
Similarly, the main body portion of the thermocouple 52 is inserted into 7, and the outer periphery is covered with a heat insulating material 50.

Incidentally, mounting holes 44b are formed in the four corners of the end cover 44 shown in FIG. 15, and mounting holes 44b are similarly formed in the head cover 43, which are sometimes used for mounting the actuator 42.

This actuator 42 is also similar to the actuator 19 described above.
．． 31, the attachment is fixed to the structure to be supported with the elastic member 47 in the tensioned state, that is, in the pressed state,
By controlling the temperature using the heat vibrator 49 for cooling and the sheathed heater 51 for heating, the face-to-face dimension between the head cover 43 and the end cover 44 can be adjusted to a required value.

16 and 17 show other embodiments of the same cylindrical thermal actuator, FIG. 16 is a longitudinal sectional view of the actuator 54, and FIG. 17 is a sectional view taken along the line B-B in FIG. 16. be. As shown in the figure, the actuator 54 has end covers 55 and 56 each having a U-shaped cross section with a portion of a cylindrical portion cut out alternately, and the other end 55
A rod-shaped extensible member 59 is held under pressure or adhesively between 56b and 56b via an incompressible heat insulating material 57,58. The extensible member 59 has its outer periphery covered with a heat insulating material 50, and has an end cover other end 55b at its center,
A heat vibro 2 for temperature adjustment is inserted through the heat insulating material 57.

This actuator 54 is also similar to the actuator 19 described above.
, 31.42, the expansion/contraction member 59 is in a tensioned state, that is, in a pressed state, and is fixed to the structure to be supported, and the temperature control pipe 62 is connected to another heating or cooling source (not shown). Connect it to the desired temperature and adjust it to the desired temperature.
The required value for the face-to-face dimensions of the end covers 55 and 56 can be obtained.

Note that the actuator 42, 54 described above has the illustrated helad cover 43, end cover 44, and end cover 55, 56 all integrally constructed, but when manufacturing the actual gap, one of them must be separated. After the mutual assembly is completed, the actuators 42 and 54 can be assembled by forming an integral structure by welding or the like.

FIG. 18 is a longitudinal sectional view showing another embodiment of the same cylindrical thermal actuator. This actuator 64
is capable of operating in both compression and tension directions, and has two spiral grooves formed on the outer periphery of the central part of a rod-shaped elastic body 65 made of stainless steel (SUS304), etc., and one groove 65a has two spiral grooves. A sheathed heater 66 for heating is wrapped around it, a cooling water pipe 67 is wrapped around the other groove 65b, and each groove is filled and covered with heat transfer cement to improve the efficiency of heat transfer. Grooves 65c and 65d that are one step deeper are formed outside the start and end portions of the spiral grooves 65a and 65b. This prevents heat from entering and exiting between the and both ends. Similarly, for heat insulation of the elastic body 65, a heat insulating material 71 is provided on the outer periphery, and heat insulating materials 72 and 73 are coated on the inner surfaces of the grooves 65c and 65d to prevent heat radiation and heat absorption from the center of the elastic body 65 to the outside air. are doing. A single clevis portion 76 and a double clevis portion 77 having bottle mounting holes 74 and 75, respectively, are formed at both ends of the expandable body 65.

Further, the expandable body 65 is provided with a thermocouple 78 for measuring the temperature at the center and a thermocouple 79 for measuring the temperature near the surface, so that the temperature of the expandable body 65 is detected.

This actuator 64 expands and contracts based on displacement information of the supported structure to which it is attached.

When the support target structure is to be expanded, the sheathed heater 66 is energized to heat the expandable body 65 and thermally expand it to a predetermined length. In addition, when attempting to contract the support member, stop energizing the sheathed heater 66 and
Cooling water is circulated through the cooling water pipe 67 to cool the expandable body 65 and heat-shrink it to a predetermined length. These heating or cooling operations are performed while monitoring the temperature of the expandable body 65 detected by the thermocouples 78 and 79. Furthermore, the sheathed heater 66
The amount of expansion and contraction of the actuator 64 can be adjusted more precisely and stably by adjusting the current value supplied to the actuator 64, the cooling water temperature, and intermittent supply intervals in small increments.

Each thermal actuator explained above 19, 31°42.5
4.64, depending on the purpose of the structure, if the zero point during operation is set to a high temperature in advance, it can be installed by simply providing a heat source for heating, without the need for a dedicated cooling device, and can be cooled naturally by the atmosphere. It can be operated with.

FIG. 19 is a modification of the embodiment shown in FIG.
Similarly to FIG. 10, the actuators 82
85 are installed, and actuators 86 to 89 are also installed diagonally on each surface. The actuators 82 to 89 installed here are suitably hydraulic cylinders or the actuator 64 driven by heat shown in FIG. 18.

In this embodiment, actuators 82 to 8 are arranged in the longitudinal direction at the four corners.
In addition to controlling the expansion and contraction of the structure 81, by appropriately adjusting the expansion and contraction of the actuators 86 to 89 installed on the diagonal of each surface, it is possible to generate twisting in the axial direction of the structure 81. The degree of freedom is increased compared to the example, and it is possible to control four degrees of freedom.

FIG. 20 shows the arrangement of displacement sensors s21 to S2B etc. installed on the surface of the actuator installation of the structure 81 in FIG. By processing the values, it is possible to detect the axial expansion/contraction displacement and torsion of each surface.

FIG. 21 shows an embodiment in which fewer actuators are installed than in the embodiment of FIG. 19, with two actuators 91.
92, 93.94, 9596, and 97.98 are installed. In this case as well, by combining the expansion and contraction of the actuators on each of the four sides, it is possible to cause the structure 81 to expand and contract in the axial direction, swing, and twist.

FIG. 22 is an explanatory diagram illustrating the operation of a box-shaped beam structure constructed by installing actuators in substantially the same manner as in the embodiment shown in FIG. 19.

As shown in the figure, eight actuators 109 are installed at the corners 111!101 to 108 of the hexahedral box-shaped beam structure 100.
By connecting the actuators 116 to 116 and controlling the expansion and contraction of each actuator, it is possible to cause the box-shaped beam structure to expand and contract, swing, and twist.

For example, the control operation of this box-shaped beam structure 100 is as follows.
Center point O of surfaces 105-108 with respect to surfaces 101-104
The position change (x, y, z) of and X.

The minute angle changes (θ, φ, ψ) around each of the y and z axes correspond to the amount of elongation a of each of the actuators 109 to 116.
, b, c, d, e, f, g, h.

Regarding the structures 9a and 9b shown in FIG. 6, actuators were installed only on two opposing faces of each stage to control the postures of the structures 9a and 9b with three degrees of freedom.
By setting each actuator on four surfaces in each stage, creating a two-stage configuration with eight surfaces, and simultaneously installing a displacement sensor on each surface, control with five degrees of freedom can be achieved. Similarly, in FIGS. 1O and 11, actuators were installed only at the four corners of the longitudinal direction of the section 18a of the structure 18 to control the posture of the structure 18 with three degrees of freedom, but the section 18a By similarly installing actuators at the four longitudinal corners of the adjacent section 18b, the degree of freedom with which the structure 18 can be controlled becomes five. A structure attitude control device in which structures capable of attitude control on four sides are stacked in two layers in this manner corresponds to the seventh invention.

In addition, the embodiment shown in FIGS. 3 and 4 is
10, 11, 19, and 21.
The embodiment shown in the figure is a four-sided control of the structure 18, but it is also possible to control the structure as a hollow polygonal prism or cylinder made of triangular prisms, pentagonal prisms, etc., on the entire surface of the structure or on any arbitrary surface. By installing an actuator and a displacement sensor, it becomes possible to control a hollow polygonal column or cylinder using three or more than five sides, and as in the above-mentioned embodiments, it is possible to precisely control the posture of the structure. . Like this 3
A structure attitude control device that controls the attitude of a hollow structure or a cylindrical structure having a surface or five or more surfaces corresponds to the eighth invention.

Similarly, it is also possible to realize attitude control with an increased degree of freedom by using two or more stages of structure attitude control devices that control the attitude of these three or more faces and the cylindrical hollow structure. This is possible, and the structure attitude control device in this case corresponds to the ninth invention.

Furthermore, in the embodiments shown in FIGS. 10, 19, etc., the actuator and displacement sensor are installed on a surface located on the outer periphery with respect to the axial direction of the structure. It is also possible to install actuators and displacement sensors on the surfaces on which they are located, and the structure is not limited to hollow cylindrical structures, and it is also possible to install actuators and displacement sensors on each surface of various polyhedrons. It can be installed to control the attitude of structures made of polyhedrons. The structure attitude control device in this case corresponds to the 1st invention.

In this way, with the present invention, even minute dimensional changes that occur due to temperature changes in the structure itself can be corrected by heating or cooling the structure itself to adjust the temperature, which was previously impossible. A few microns of ultra-precise attitude control
This method can be implemented in units of m. In addition, by forcibly changing the structure elastically using a separate actuator without heating or cooling the structure itself, it is also possible to compensate for dimensional changes and perform ultra-precise posture control.
It is possible to expand the use of ultra-precise posture control in various fields such as various industrial machines and measuring devices.

In addition, when circulating cooling water to the actuator or structure in the embodiment, it is also possible to circulate using oil, gas, or other heat medium adjusted to a constant temperature instead of the cooling water.

Further, although the specific configuration of the control unit in the embodiment is not shown, it is usually constituted by an electric circuit, and is used to adjust the temperature of the thermal actuator, control the amount of expansion and contraction of the hydraulic cylinder, etc. When the control unit maintains the original preset posture of the structure, when the displacement sensor detects the displacement of the structure, it outputs a drive signal for the actuator to correct the displacement based on the detected value. be done. Further, when precisely changing and adjusting the posture of the structure to a specified input position, the control unit outputs a drive signal for the actuator while checking the detected value of the displacement sensor.

(Effects of the Invention) As described above, according to the present invention, the following effects can be obtained.

According to the first invention, an actuator that deforms the structure within an elastic deformation or thermal deformation range is installed in a highly rigid structure, and a displacement sensor detects the displacement of the structure to control expansion and contraction of the actuator. Therefore, the length or posture of a highly rigid structure can be controlled extremely precisely.

According to the second invention, an actuator that deforms the structure in the axial direction within an elastic deformation or thermal deformation range is installed coaxially with the rod-shaped structure to which a tensile or compressive load is applied in the axial direction, Since the displacement sensor detects the axial displacement of the structure and the expansion and contraction of the actuator is controlled, the length of the rod-shaped structure can be determined extremely accurately.

According to the third invention, the displacement in the axial direction can be easily adjusted by heating and cooling the rod-shaped structure itself from the outside or inside.

According to the fourth invention, a pair of actuators are provided on opposing side walls of the hollow cylindrical structure to deform the side walls of the structure in the axial direction within the range of elastic deformation or thermal deformation! displacement sensors installed on the side walls of each structure detect the axial displacement of the structure and control the expansion and contraction of the actuator, making it possible to control the length or posture of the hollow cylindrical structure with extreme precision. can be controlled.

According to the fifth invention, by stacking the structure attitude control devices of the fourth invention in two stages, movement in a direction perpendicular to the axis of the structure is possible, and three degrees of freedom are obtained. Also, 2
The swing angle of the tier structure is approximately 3 times the swing angle of the first tier structure.
By doubling it and moving it in the opposite direction, it becomes possible to swing the second stage structure without moving its axis, allowing for more precise and more complex control.

According to the sixth invention, four actuators for deforming the structure in the axial direction within the range of elastic deformation or thermal deformation are provided on the side wall of the hollow cylindrical structure having four surfaces in parallel with the side wall of the structure. Displacement sensors installed on the side walls detect the axial displacement of each structure and control the expansion and contraction of each actuator, making it possible to control the length or posture of the hollow cylindrical structure with extreme precision and three-dimensionality. can be controlled.

According to the seventh invention, by stacking the structure attitude control devices of the sixth invention in two stages, the axis can be moved in the radial direction, and five degrees of freedom are obtained. In addition, if the swing angle of the second stage structure is made approximately three times the swing angle of the first stage structure and in the opposite direction, the axis of the second stage structure will not move and the swing angle will be three-dimensional. This allows for more precise and more complex three-dimensional control.

According to the eighth invention, on the side wall of the hollow cylindrical structure or the cylindrical structure equally divided into three or five or more parts in the circumferential direction,
Three or five or more actuators that deform the structure in the axial direction within the range of elastic deformation or thermal deformation are installed in parallel with the side walls of the structure, and displacement sensors installed on the side walls each measure the axial displacement of the structure. is detected and the expansion and contraction of each actuator is controlled, so the length or posture of the hollow cylindrical structure can be controlled extremely precisely and three-dimensionally.

According to the ninth invention, by stacking the structure attitude control device of the eighth invention in two stages, the shaft can move in the radial direction, increasing the degree of freedom, and the neck of the second stage structure is improved. By increasing the swing angle to about three times the swing angle of the first-stage structure and in the opposite direction, the second-stage structure can swing three-dimensionally without moving its axis, making it possible to create a more precise structure. Furthermore, more complex three-dimensional control can be performed.

According to the tenth invention, a double actuator that deforms the wall surface in a direction parallel to the wall surface within the range of elastic deformation or thermal deformation is provided on the wall surface of the hollow polyhedral structure composed of a rectangular parallelepiped or other polyhedron. They are installed in parallel, and the displacement sensors installed on the side walls detect the displacement of the wall surfaces and control the expansion and contraction of each actuator, allowing extremely precise and three-dimensional control of the length or posture of the hollow polyhedral structure. According to the eleventh invention, since the actuator used in the second invention and the fourth to tenth inventions is constituted by a hydraulic cylinder, the expansion and contraction of the actuator can be controlled with excellent responsiveness. I can do it.

According to the twelfth and thirteenth inventions, the actuator used in the fourth to ninth inventions is configured to expand or contract the side wall or wall surface itself due to a temperature change by heating or cooling the side wall or wall surface itself. Because of that,
The actuator itself can be configured to be thin.

As described above, in the invention of the present application, a displacement sensor detects an extremely minute displacement of a structure, and an actuator installed in parallel to the structure in pair with the displacement sensor expands and contracts. In addition to correcting displacement,
By actively deforming the structure to the desired length,
It is now possible to control the posture of structures with ultra-precise precision, which was previously not possible due to the effects of thermal displacement of structures, and the accuracy of various industrial machines and measuring instruments can be dramatically improved. Become.

[Brief explanation of the drawing]

1 and 2 show embodiments of the second and third inventions, FIG. 1 is a perspective view thereof, FIG. 2 is a longitudinal sectional view thereof, and FIGS. 3, 4, and 5. shows an embodiment of the fourth invention, FIG. 3 is a plan view thereof, FIG. 4 is a front view thereof, FIG. 5 is an explanatory diagram of the operation, and FIGS. 6, 7, and 8 are Embodiment of the fifth invention is shown, FIG. 6 is a front view from outside, FIGS. 7 and 8 are explanatory diagrams of the operation, FIG. 9 is a perspective view of another embodiment of the actuator, and FIG. 10 11 shows an embodiment of the sixth invention, FIG. 10 is a perspective view thereof, FIG. 11 is a perspective view of the main part of FIG.
Figures 2, 13 and 14 show the actuator
FIG. 15 is a vertical sectional view of another embodiment of the present invention, and FIG.
16 is a longitudinal sectional view of another embodiment of the actuator; FIG. 17 is a sectional view taken along line B-B of FIG. 16;
8 is a vertical sectional view of another embodiment of the actuator, No. 19
20 and 20 are perspective views showing another embodiment of the sixth invention, FIG. 21 is a perspective view showing another embodiment of the sixth invention, and FIG. 22 is a perspective view showing another embodiment of the sixth invention. It is a perspective view showing an example of this. -ta 64...Actuator 78.79...Thermocouple 81...Structure 82-89...Actuator 91-98...Actuator 100...
Box-shaped beam structure 109-116...actuator
S1-S14...Displacement sensor 521-328...
Displacement sensor...Structure 2...Cooling waterway 9 3...Converter 4
．． 5... Laser length measuring device 6... Structure 7... Actuator 7. ...7 types of cooling actuators・
... Heating actuator 8 ... Actuator 8
c...Cooling actuator 8m...Heating actuator 9a, 9b...Structures 11-14...Actuator Ilc-14c...Cooling actuator 11m", 14*...Heating actuator 15
...Cooling water I 16...Actuator 18.
...Structure 18a...Division 19-22...Actuator 31...Actuator 42...Actuator 52...Thermocouple 54...Engraving of actuator surface (no change in content) Fig. Figure 6 Figure 7 Figure 10 Figure n Figure 8 r Figure 9 Figure 16 Figure 21 Figure 22 Procedural amendment (method) 2. Name of invention Structure attitude control device 3° correction case relationship with

Claims (13)

[Claims] (1) An actuator that is installed on a highly rigid structure and deforms the structure within the range of elastic deformation or thermal deformation, and a displacement sensor that detects the displacement of the deformation area of the structure that is deformed by this actuator. A structure attitude control device comprising: a control unit that generates a drive signal for an actuator to maintain the structure at a desired length based on the amount of displacement detected by the displacement sensor. (2) An actuator that is installed coaxially with the rod-shaped structure to which a tensile or compressive load is applied in the axial direction and deforms the structure in the axial direction within the range of elastic deformation or thermal deformation, and the axis of the structure. A displacement sensor that detects directional displacement; and a control unit that generates a drive signal for an actuator to maintain the rod-shaped structure at a desired length based on the amount of displacement detected by the displacement sensor. A structure attitude control device characterized by: (3) The structure attitude control device according to claim 2, wherein the actuator is configured to cause displacement in the axial direction by heating and cooling the rod-shaped structure itself from the outside or inside. (4) A pair of actuators are installed on opposing side walls of the hollow cylindrical structure in parallel with the side walls, and each actuator deforms the side wall of the structure in the axial direction within the range of elastic deformation or thermal deformation. displacement sensors installed on the side walls of the structure to detect the axial displacement of the structure; A structure attitude control device comprising: a control unit that generates a drive signal for each actuator; (5) A structure attitude control device according to claim 4, wherein the structure attitude control device according to claim 4 is stacked in two layers, with the actuator mounting side wall portions aligned with each other. (6) four actuators installed on the side wall of a hollow cylindrical structure having four sides in parallel with the side wall, each of which deforms the side wall of the structure in the axial direction within an elastic deformation or thermal deformation range; A displacement sensor is installed on the side wall where the structure is installed and detects the axial displacement of the structure, and the structure is held at a desired length or a desired posture based on the amount of displacement detected by these displacement sensors. A structure attitude control device comprising: a control unit that generates a drive signal for each actuator in order to control the structure. (7) A structure attitude control device according to claim 6, wherein the structure attitude control device is configured such that the actuator mounting side wall portions are aligned with each other and stacked in two stages, upper and lower. (8) Installed on the side wall of a hollow cylindrical structure or cylindrical structure that can be equally divided into 3 or 5 or more in the circumferential direction, in parallel with the side wall, and axially deforms the side wall of the structure within the range of elastic deformation or thermal deformation. a plurality of actuators that deform the structure in the axial direction; a displacement sensor that is installed on the side wall where the actuators are installed and detects the axial displacement of the structure; and a displacement sensor that deforms the structure based on the amount of displacement detected by these displacement sensors. A structure attitude control device comprising: a control unit that generates a drive signal for each actuator to maintain the structure at a desired length or a desired attitude; (9) A structure attitude control device characterized in that the structure attitude control device according to claim 8 is stacked in two layers, upper and lower. (10) A hollow polyhedral structure composed of rectangular parallelepipeds and other polyhedrons is installed in parallel to the entire wall surface or a part of the wall surface, and the structure wall surface is elastically deformed or thermally deformed within the range of elastic deformation or thermal deformation. A plurality of actuators for deforming in one direction or two directions, a displacement sensor installed on a wall where the actuators are installed and detecting displacement of the wall in the actuator operation direction, and based on the amount of displacement detected by these displacement sensors, A structure attitude control device comprising: a control section that generates a drive signal for each actuator in order to hold the structure at a desired length or a desired posture. (11) Claim 1 or Claim 2 or Claim 4 or Claim 5 or Claim 6 or Claim 7 or Claim 8 or Claim 9 or Claim 10 characterized in that the actuator is constituted by a hydraulic cylinder. The structure attitude control device described. (12) The actuator installed in parallel with the side wall of the hollow cylindrical structure is constituted by a heating source and a cold source that expand and contract by heating or cooling the side wall itself. A structure attitude control device according to claim 5, claim 6, claim 7, claim 8, or claim 9. (13) Structure of hollow polyhedral structure Structure according to claim 10, characterized in that the actuator installed in parallel with the wall surface is constituted by a heating source and a cold source that expand and contract by heating or cooling the wall surface itself. Object attitude control device.