JPH044560B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine movement mechanism used in an exposure apparatus for integrated circuits, an interferometer, or the like.

[Prior Art] Conventionally, in an exposure apparatus or an interferometer for an integrated circuit, a fine movement mechanism is used to move a fine amount in a linear direction without causing any inclination.

Therefore, as the fine movement mechanism, Fig. 4a,
As shown in FIG. 5B, there is a fine movement mechanism in which three piezo elements 2 are arranged on a fixed base 1 and an annular moving frame 3 is held on each piezo element 2, or a support frame is installed upright on a support base 4 as shown in FIG. A fine movement mechanism is known in which two actuating devices 6 each having a piezo element inside a cylindrical strain tube are disposed in a cylindrical strain tube 5, and a moving frame 7 is held in the actuating devices 6.

The latter fine movement mechanism is an invention described in Japanese Patent Application Laid-Open No. 147682/1982, in which an electrical signal 8 from a control circuit is inputted to a piezo element of each actuating device 6 via an amplifier 9. 6 is activated and the interferometer element 1 is fixed to the movable frame 7 by the locking part.
1 can be slightly moved.

The former fine movement mechanism is also used by fixing a desired subject to the fine movement frame 3 and operating each piezo element 2 via a control circuit to slightly move the subject.

[Problems to be Solved by the Invention] However, in the case of the fine movement mechanism shown in FIG. Although it is necessary, it is difficult to match the characteristics of each piezo element 2, so the moving frame 3 tends to tilt, and it has the disadvantage that it is difficult to always expect accurate micro-movement. It was hot.

Therefore, in the fine movement mechanism shown in the fourth figure, the tilting of the moving frame 3 due to the difference in the characteristics of each piezo element 2 can be prevented by the distortion tube of each actuating device 6 in the fine movement mechanism shown in the fifth figure. This can be avoided by making it possible to match the characteristics of the piezo elements built into the device, but this would complicate the configuration of the actuating device 6 itself and require adjustment to operate each actuating device 6 in synchronization. However, the work was complicated and the rigidity in the direction perpendicular to the plane of the paper was insufficient.

Therefore, the present invention was invented in view of the drawbacks of the conventional fine movement mechanism, and is capable of performing accurate fine movement without being influenced by the characteristics of the piezo element, and has a simple configuration and is not complicated. The purpose of this invention is to provide a fine movement mechanism that does not require extensive adjustment work and has excellent control.

[Means for Solving the Problems] The fine movement mechanism of the present invention supports a cylindrical moving member provided inside a fixed member so as to be movable in the axial direction via an elastic member, and also supports a cylindrical moving member provided inside a fixed member so as to be movable in the axial direction. A fine movement element disposed in an annular shape and displaced in the axial direction of the movement member and a fulcrum member opposed to the fine movement element are disposed between the moving member and the other surface thereof. This fine movement mechanism is constructed by interposing a lever member with a pair of fulcrum connecting portions facing each other at a position 90° apart from the position of the element.

[Operation] The fine movement mechanism according to the above means makes the movable member movable in the axial direction via the elastic member in the fixed member, uses the fine movement element as the point of force, and uses the fulcrum member of the lever member interposed between the fixed member and the movable member. The point of action is the point of action, and the pair of fulcrum connecting portions in the direction perpendicular to the direction connecting the point of force and the point of action are used as fulcrums to make slight movements.

[Example] Examples of the fine movement mechanism of the present invention will be described below with reference to the drawings.

(First Embodiment) Figures 1a, b, and c show a first embodiment of the fine movement mechanism of the present invention, in which Figure 1a is a plan view, and Figure 1b is a cross section taken along the line A-A in Figure 1a. Figure 1c is Figure 1a
It is a BB side sectional view which broke a part in .

In the figure, reference numeral 20 denotes a fixing member, and this fixing member 20 has a cylindrical support frame 23 erected on the outer periphery of a circular fixation base 22 with a through hole 21 in the center. An annular support edge 24 is formed protruding from the inner peripheral portion.

25 is a moving member, and this moving member 25 includes a cylindrical frame 26 having an inner diameter that is approximately the same as the inner diameter of the through hole 21 formed in the fixed base 22 of the fixed member 20; It is formed by protruding an annular support edge 27 on the upper side of the outer periphery.

Further, the movable member 25 is connected to the fixed member 20.
It is held by upper and lower annular leaf springs 28 and 29 so as to be able to move vertically on the same axis.

The upper and lower leaf springs 28 and 29 have their outer peripheral edges buried and fixed in the inner peripheral wall of the fixed member 20, and their inner peripheral edges are buried and fixed in the outer peripheral wall of the movable member 25, so that the fixed member 20 and the movable member are fixed. 25
It is interposed in between. In addition to the above-mentioned structure, the method of fixing the inner and outer edges of both leaf springs 28 and 29, the fixed member 20, and the inner and outer walls of the movable member is not shown in the drawings. The leaf spring 2 is provided with fitting recesses on the inner and outer edges of the leaf springs 28 and 29 at corresponding positions on the inner and outer walls, and a screw portion is provided in the fitting recess, and the leaf spring 2 is fitted in the fitting recess.
Examples include a method of fixing the inner and outer peripheries of 8 and 29 by screwing a screw member into the threaded portion, and the present invention is not limited to the above embodiments.

30 is an annular lever member, and this lever member 30
is interposed between the fixed member 20 and the movable member 25, and the lever member 30 and the fixed member 2
By attaching fulcrum springs 31 and 32 as fulcrum connecting parts (acting as fulcrums) facing each other between the supporting edges 24 of 0, the lever member 30 is fixed to the fixed member 2.
0 and the support edge 2 of the moving member 25
A piezo element 33 (acting as a force point) is installed between the lever member 30 and the support edge 27 of the moving member 25 at a position opposite to the piezo element 33.
The tip 3 of the fulcrum member 34 is attached with the end fixed to the
4a (acting as a point of action) is the lever member 30
The lever member 30 is connected to the movable member 25 by disposing the lever a in contact with the lever member 30.

Reference numeral 35 denotes a wiring hole for the piezo element 33, which is formed in the support frame 23 of the fixing member 20.

As for the configuration of the fulcrum connecting portion between the lever member 30 and the fixing member 20, as is clear from the enlarged sectional view of FIG. The upper and lower ends of the lever member 30 and the support edge 2 of the fixing member 20 are respectively
In addition to the case where the fixing member 20 and the lever member 30 are formed in advance as shown in the enlarged sectional view of FIG. In the case where the section is constructed by providing elasticity by providing circular perforations 36 and 37 and integrally molding the fulcrum connecting pieces 38 and 39, or as shown in the enlarged cross-sectional view of FIG. The engagement recess 4 of the steel ball 40 corresponds to the support edge 24 of the member 30 and the fixed member 20.
1 and 42 are provided, and both engaging recesses 41 and 42 are provided.
Examples include a case where a fulcrum connection part between the fixed member 20 and the lever member 30 is formed by interposing a steel ball 40 therebetween, instead of the fulcrum connection part by the fulcrum springs 31 and 32.

Further, the tip 34a of the fulcrum member 34 is formed into a spherical shape, as shown in FIG. 1c, to reduce the contact resistance against the inclination of the lever member 30.

As for the method of using the fine movement mechanism having the above configuration, as shown in FIG. After being set on the upper side, the lens 43 is irradiated with a required light beam from the through hole 21 formed in the fixed base 22 of the fixed member 20, and the piezo element 33 is driven while being inputted with a drive signal via the control circuit. This allows the moving member 25 to be moved slightly to adjust the focus position of the lens 43 during use.

Furthermore, by driving the piezo element 33, the amount of displacement is changed between the fixing member 20 and the plate spring 2.
The annular leaf spring 28 is halved via a lever member 30 interposed between the movable member 25 held via 8 and 29, and is halved via a fulcrum member 34.
The movable member 25 held by the movable member 29 can be displaced coaxially with the fixed member 20 without tilting.

(Second Embodiment) Fig. 2 shows a second embodiment of the fine movement mechanism of the present invention, in which Fig. 2a is a plan view, Fig. 2b is a sectional view taken along the line C-C in Fig. Figure c is a partially broken DD side sectional view in Figure 2a.

Therefore, the fine movement mechanism in such an embodiment is
In the configuration of the fine movement mechanism of the first embodiment, the movable member 25 is connected to the upper and lower leaf springs 2 with respect to the fixed member 20.
8 and 29, it is held by only the upper plate spring 28.

Therefore, by omitting the arrangement of the lower leaf spring 29, the space for its arrangement can be eliminated;
This has the advantage that the structure of the fine movement mechanism can be made smaller and simpler.

Other functions and effects are the same as the fine movement mechanism of the first embodiment, and the structure is the same as that of the first embodiment.
Components that are the same as those of the fine movement mechanism of the embodiment are given the same numbers, and their specific configurations will be omitted.

(Third Embodiment) FIG. 3 shows a third embodiment of the fine movement mechanism of the present invention,
FIG. 3a is a plan view, FIG. 3b is a sectional view taken along the line EE in FIG. 3a, and FIG. 3c is a partially cutaway sectional view taken along the line FF in FIG. 3a.

Therefore, in addition to the structure of the fine movement mechanism of the first embodiment, the fine movement mechanism of this embodiment has a fixed member 2.
An annular support edge 4 is provided on the upper side of the inner peripheral wall of the support frame 23 of
6 is provided in a protruding manner, and a pressure spring 47 as a pressure elastic member is elastically mounted on this support edge 46 and the support edge 27 of the moving member 25.
In the fine movement mechanism of the first and second embodiments, the displacement of the moving member 25 due to the drive of the piezo 33 is caused by the reaction force caused by the elasticity of the upper and lower leaf springs 28 and 29 via the lever member 30 and the fulcrum member 34. However, the pressure spring 47 is
The structure is such that the movable member 25 can be slightly moved through the lever member 30 and the fulcrum member 34 while exerting the elastic force of Therefore, it is possible to exhibit the advantage of widening the linearity in the same configuration.

The other functions and effects are the same as those of the fine movement mechanism of the first embodiment, and the same components as those of the first embodiment are given the same reference numerals and their explanations will be omitted.

Regarding the pressure spring 47, in addition to the configuration in which one annular spring is elastically loaded in the annular direction between the supporting edges 27 and 46 of the fixed member 20 and the fine movement member 25, a plurality of annular springs are provided in the annular direction. It is also possible to configure it by loading a spring with a bullet.

[Effects of the Invention] According to the fine movement mechanism of the present invention, it can be constructed without using a plurality of fine movement elements, so that an appropriate amount of displacement can be achieved without being influenced by the characteristics of each fine movement element, such as by aligning the characteristics of each fine movement element. This has the advantage that it is possible to stably obtain the movement without tilting, and that the performance of fine movement control can be improved by the displacement operation via the lever member and the fulcrum member.

[Brief explanation of drawings]

Figures 1a, b, and c show a first embodiment of the fine movement mechanism of the present invention, where Figure 1a is a plan view, Figure 1b is a sectional view taken along the line A-A in Figure 1a, and Figure 1c. is Figure 1a
Fig. 1 d, e, f are enlarged sectional views showing the fulcrum connection between the lever member and the fixed member, and Fig. 2 shows the second fine movement mechanism of the present invention.
Fig. 2a is a plan view, Fig. 2b is a sectional view taken along the line C-C in Fig. 2a, and Fig. 2c is a diagram showing an embodiment.
3 shows a third embodiment of the fine movement mechanism of the present invention, FIG. 3 a is a plan view, and FIG. Fig. 3c is a partially broken side sectional view taken along F-F in Fig. 3a, Fig. 4a,
b, FIG. 5 is an explanatory diagram of the prior art. 20... Fixed member, 21... Through hole, 22... Fixed base, 23... Support frame, 24, 27, 46...
...Supporting edge, 25...Moving member, 26...Frame body, 2
8, 29...Plate spring, 30...Lever member, 31,
32...Fully spring, 33...Piezo element, 34...
... fulcrum member, 43 ... lens, 44 ... holding frame,
45... Presser ring, 47... Pressure spring.

Claims (1)

[Claims] 1. A cylindrical movable member provided inside the fixed member,
A fine movement element supported movably in the axial direction via an elastic member and disposed between the fixed member and the movable member has a ring shape and is displaceable in the axial direction of the movable member on one surface. By disposing a fulcrum member opposite to the fulcrum member and interposing a lever member having a pair of fulcrum connecting portions facing each other at a position 90° apart from the position of the fine movement element on the other surface, the fine movement can be achieved. The element is the point of emphasis, the fulcrum connection part is the fulcrum,
A fine movement mechanism, characterized in that the movable member is slightly moved using the fulcrum member as a point of action.