JPH044553A - Manufacture of radiation detector - Google Patents

Abstract

PURPOSE:To prevent drop of signal quality due to inhomogeneity of ionized space and deterioration of the anti-vibration performance and accomplish shortening of the construction term, suppression of the production costs, and stabilization of the quality by forming an anode electrode and a cathode electrode either by the thick film printing means or by photo-lighographic means. CONSTITUTION:An anode electrode 22 and a cathode electrode 23 are formed on an insulative plate 21 and 24, respectively, using either the thick film printing technique or photo-lighographic technique. A space for electrode is filled with ionized gas 25, example of which is inert gas such as neon, argon, and xenon. The inter-electrode distance is held by pinching with an insulation or a rib structure of low melting point glass which is formed alike by the thick film printing technique or photo-lithographic technique. Therefore, the inter-electrode distance and ionization space can be controlled with high precision. This prevents drop of signal quality due to inhomogeneity of the ionized space and deterioration of the anti-vibration performance, shortens the construction term, suppresses the production cost, and stabilizes the quality of the products.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a radiation detector, and more specifically, to a method for manufacturing a radiation detector in which an anode electrode and a cathode electrode are arranged in an XY matrix shape. It is about the method.

[Prior Art] Figures 4 and 5 show, for example, North Holland Publishing Company (NORT) I-) 10LLAND.
Nuclear Instruments and Methods (NUCLEARINSTRUMENTS A) published by PUBLIS IING Co.
ND MET) IODs) Volume 141 (1977) P
, 505-509'' is a radiation detector in which an anode electrode and a cathode electrode are arranged in an xY matrix shape, making it possible to detect a two-dimensional distribution of radiation.

In this radiation detector, an XY matrix-shaped anode electrode (2) and a cathode electrode (3) are insulated and held by an insulating frame (1), and these are sandwiched between insulating plates (4) and (5). It is sealed. An inert gas (6) such as neon, argon, or xenon is sealed as an ionized gas in the radiation detector interior space.

Regarding the operating principle of detecting a two-dimensional distribution of the radiation detector configured as above, the principle of operation for detecting ionizing radiation of X-rays and γ-rays is the same for neutron detection and detection of ionizing radiation such as X-rays and γ-rays. Radiation detection will be explained. When X-rays or γ-rays hit the metal or ionizing gas (6) constituting the detector electrode, high-energy electrons are emitted by one of the processes of photoelectric effect, Compton effect, and electron pair generation. These high-energy electrons ionize the ionizing gas (6) to form ion pairs. This ion pair is generated positively by the electric field associated with the voltage applied between the anode electrode (2) placed at the intersection of the XY matrix corresponding to the region where the ion pair is generated and the candid electrode i (3). Ions are transferred to the cathode electrode (3
), electrons are collected at the seven-node electrode (2), which is measured as a signal current flowing through an external measurement circuit.

[Problems to be solved by the invention] Conventional radiation detectors as described above have a complicated structure, and most of the manufacturing process relies on manual labor, resulting in problems such as low productivity and high production costs. Moreover, since each electrode is arranged in a space, there are problems such as deterioration of signal quality due to non-uniformity of ionization space and poor vibration resistance performance.

This invention was made to solve the above-mentioned problems, and aims to provide a method for manufacturing a radiation detector having low production costs and stable characteristics.

[Means for Solving the Problems] A method for manufacturing a radiation detector according to the present invention uses thick film printing technology or photolithography technology that has been developed in recent years to be used in the manufacture of various electronic devices. A matrix-shaped anode electrode and cathode electrode are formed.

"Function" In this invention, by forming the anode electrode and cathode electrode in the XY matrix shape, which are the main structures, using thick film printing technology or photolithography technology,
In addition, the ionized space is partitioned by a rib structure, so that @
The distance between the poles and the ionization space are controlled with high precision, eliminating the conventional problems such as deterioration of signal quality due to non-uniformity of the ionization space and poor vibration resistance performance, and at the same time improving the position resolution6 [ Embodiment] Hereinafter, an embodiment of the present invention will be explained with reference to FIGS. 1 and 2. In FIG. Corresponds to plates (4) and (5). Anode electrode (22), cathode electrode (23)
are the anode electrodes (2) in FIGS. 4 and 5, respectively.
corresponds to the cathode electrode (3) and the anode electrode (22)
are formed on the insulating plate (21), and the cathode electrode (23) is formed on the insulating plate (24) using thick film printing technology or photolithography technology, respectively. The electrode space is filled with an ionized gas (25), and an inert gas such as neon, argon, or xenon is used as the ionized gas in the conventional case. The ionization distance is maintained by sandwiching an insulating material and a rib structure (26) of low melting point glass, which is also formed using thick film printing technology or photolithography technology. Low-melting glass is also used for the hermetic sealing of the radiation detector.

Radiation detectors in which the main structure of the radiation detector, the anode electrode (22) and cathode (23) in the XY matrix shape, are formed using thick film printing technology or photolithography technology in this way, require the longest manufacturing period. The assembly process of the electrode part, which has long relied on manual labor, has now been replaced by an anode electrode (
22) After forming cathode electrodes (23) individually on insulating plates using thick film printing technology or photolithography technology, aligning and sealing two insulating plates (21) and (24) together. By replacing it with , significant improvements can be achieved in terms of construction period, cost, and quality stability.

In the above embodiment, a radiation detector sensitive to ionizing radiation such as X-rays and γ-rays was shown, but as shown in FIG. 23) L with enriched poron-10 isotope on the surface
If coated with asg(27), it is possible to have neutron sensitivity. Further, in order to facilitate alignment between the two insulating plates (21) and (24), at least one of the insulating plates may be a transparent plate, for example, a glass plate.

[Effects of the Invention] As described above, according to the present invention, by forming the anode electrode and cathode electrode in the XY matrix shape, which are the main structures, using thick film printing technology or photolithography technology, the construction period, cost, and This has the effect of significantly improving quality stability.

[Brief explanation of the drawing]

Fig. 1 is a cutaway perspective view of essential parts for explaining one embodiment of the present invention, Fig. 2 is a cross-sectional view of the same, Fig. 3 is a transverse cross-sectional view for explaining another embodiment, and Fig. 4 5 is a partially cutaway perspective view of a conventional radiation detector, and FIG. 5 is a cross-sectional view of the same. (21)...Insulating plate, (22)...Anode electrode, (2
3)...Cathode electrode, (24)...Insulating plate, (25)
・・Ionized gas, (26)--rib, (27) ・・La
Bg. In each figure, the same reference numerals indicate the same or corresponding parts. Agent Zeng Wa Dao Figure 1, Figure 2, Figure 2, Figure 3

Claims (1)

[Claims] (1) Consists of an anode electrode and a cathode electrode arranged in an XY matrix shape with a discharge space separated from each other, and an insulating plate that holds both electrodes and maintains insulation and airtightness of the discharge space. A method for manufacturing a gas-filled flat plate type radiation detector, characterized in that the anode electrode and the cathode electrode are formed by either thick film printing means or photolithography means.