JPH04368851A - Magnetic field generating substrate and ink jet head equipped therewith - Google Patents
Magnetic field generating substrate and ink jet head equipped therewithInfo
- Publication number
- JPH04368851A JPH04368851A JP14457691A JP14457691A JPH04368851A JP H04368851 A JPH04368851 A JP H04368851A JP 14457691 A JP14457691 A JP 14457691A JP 14457691 A JP14457691 A JP 14457691A JP H04368851 A JPH04368851 A JP H04368851A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic field
- film
- ink
- field generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 40
- 239000010408 film Substances 0.000 abstract description 16
- 239000010409 thin film Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 18
- 239000010410 layer Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 5
- 230000020169 heat generation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は基板上に電磁石を複数個
、任意の位置に配置することによって、基板上の任意の
位置の磁場を変えることのできる基板に係り、これを用
いれば基板上に置かれた磁性体の位置を任意に変えるこ
とが可能であり、磁性体の変位を目的としたあらゆる分
野に利用できる。特に、本発明はインク滴を飛翔させ記
録媒体上に画像を形成するインクジェットヘッドのアク
チュエーターに関するものである。[Industrial Application Field] The present invention relates to a substrate that can change the magnetic field at any position on the substrate by arranging a plurality of electromagnets at any position on the substrate. It is possible to arbitrarily change the position of the magnetic body placed in the magnetic body, and it can be used in all fields where the purpose is to displace the magnetic body. In particular, the present invention relates to an actuator for an inkjet head that flies ink droplets to form an image on a recording medium.
【０００２】0002
【従来の技術】インクジェットヘッドの構造は種々提案
されているが、現在実用化されているのはインク内での
発熱体の熱発生によりインクの蒸発によるバブル発生で
圧力を生じさせる方式（図４）と、ピエゾ等の圧電素子
を基板に取り付け圧電素子の変形を利用し、基板を変位
させることによりインク内の圧力を変化させる方式（図
５）がある。2. Description of the Related Art Various inkjet head structures have been proposed, but the one currently in practical use is a method in which pressure is generated by bubbles generated by evaporation of the ink by heat generation from a heating element within the ink (Figure 4). ) and a method in which a piezoelectric element such as a piezo is attached to a substrate and the pressure inside the ink is changed by displacing the substrate by utilizing the deformation of the piezoelectric element (FIG. 5).
【０００３】図４は発熱体方式によるインクジェットヘ
ッドの断面図であるが、基板４０１に発熱体４０２を形
成し、インクの吐出穴を持った基板（ノズルプレート）
４０３を基板４０１に貼り付けることにより成るもので
ある。前述のように発熱体４０２に通電することにより
、インクを沸騰させバブルを発生させることによりイン
クジェットヘッド内の圧力を変化させ、インク４０４を
ノズル４０５から吐出させるタイプのものである。FIG. 4 is a cross-sectional view of an inkjet head using a heating element method. A heating element 402 is formed on a substrate 401, and a substrate (nozzle plate) having ink ejection holes is used.
403 is attached to the substrate 401. As described above, this type of inkjet head is of a type in which the ink is boiled and bubbles are generated by energizing the heating element 402, thereby changing the pressure inside the inkjet head and ejecting the ink 404 from the nozzle 405.
【０００４】図５は圧電方式のインクジェットヘッドの
断面図であるが、基板５０１にピエゾ等の圧電素子を貼
り付け、基板５０３と組み合わせることによりなるもの
である。FIG. 5 is a cross-sectional view of a piezoelectric inkjet head, which is constructed by pasting a piezoelectric element such as a piezo on a substrate 501 and combining it with a substrate 503.
【０００５】圧電素子は、ＰＺＴのようなセラミックを
焼成により形成し、素子状に切り出すことにより得られ
ており、こうして得られた圧電素子５０２に圧電を引加
することにより、インクジェットヘッド内の圧力を変化
させ、インク５０４を５０５のノズルから吐出させるタ
イプのものである。[0005] Piezoelectric elements are obtained by forming ceramics such as PZT by firing and cutting them into element shapes.By applying piezoelectricity to the thus obtained piezoelectric element 502, the pressure inside the inkjet head is reduced. This is a type in which the ink 504 is ejected from a nozzle 505 by changing the ink.
【０００６】[0006]
【発明が解決しようとする課題】前述の発熱素子タイプ
及び圧電素子タイプはそれぞれ長短を持っている。[Problems to be Solved by the Invention] The heating element type and the piezoelectric element type described above each have advantages and disadvantages.
【０００７】発熱タイプはいわゆる薄膜プロセスによっ
て駆動体となる発熱素子を形成できるため、駆動素子の
高密度化が容易であるが、発熱方式によるため、加熱、
急冷により素子がダメージを受けること、及びインク中
のバブル消滅時の衝撃により発熱体がダメージを受ける
ことによりヘッド自体の寿命が短いという欠点があった
。[0007] In the heat generating type, the heat generating element serving as the driving body can be formed by a so-called thin film process, so it is easy to increase the density of the driving element.
The disadvantage is that the element is damaged by rapid cooling, and the heating element is damaged by the impact when the bubbles disappear in the ink, resulting in a short lifespan of the head itself.
【０００８】また、一方の圧電素子タイプは発熱方式と
は逆に上記のようなダメージがないためヘッド寿命は長
いものの、圧電素子をセラミックブロックから切り出し
、貼り付けるという工程からわかるように駆動素子の高
密度化が困難な構造になっている。On the other hand, the piezoelectric element type has a long head life because there is no damage as mentioned above, contrary to the heat generation method, but as can be seen from the process of cutting out the piezoelectric element from a ceramic block and pasting it on, the driving element The structure makes it difficult to increase density.
【０００９】また、両構造ともインク滴は前方へのみ吐
出され、ヘッド面に対して角度をつけて（斜に）インク
滴を飛翔させることはできなかった。このため高速のラ
イン印字を行うためには、印字部分に対応するだけの数
のインクジェットヘッドを持ったラインヘッドが必要で
あった。このためヘッド数が多くなり、コストアップに
つながっていた。Furthermore, in both structures, ink droplets are ejected only forward, and it is not possible to make ink droplets fly at an angle (obliquely) with respect to the head surface. For this reason, in order to perform high-speed line printing, a line head having as many inkjet heads as the number of printed areas is required. This increases the number of heads, leading to increased costs.
【００１０】そこで本発明の目的はこのような課題を解
決するもので、駆動素子の高密度化が可能で、長寿命で
、インク滴の飛翔角度を変えることで印字範囲を広くし
、少ないインクジェットヘッド数で高速印字の可能なイ
ンクジェットヘッドを提供するところにある。Therefore, the object of the present invention is to solve these problems, and it is possible to increase the density of the driving element, have a long life, widen the printing range by changing the flight angle of the ink droplets, and reduce the number of inkjet jets. The goal is to provide an inkjet head that can print at high speed with a limited number of heads.
【００１１】[0011]
【課題を解決するための手段】上記目的は、基板上に複
数個の電磁石を設置した磁場発生基板上に、薄膜磁石の
形成されたフィルムを貼り合わせ、該フィルムに任意の
距離を保ってノズルプレートを設置することによるイン
クジェットヘッドにより達成される。[Means for Solving the Problems] The above object is to bond a film on which a thin film magnet is formed on a magnetic field generating substrate on which a plurality of electromagnets are installed, and to attach a nozzle to the film at an arbitrary distance. This is achieved by an inkjet head by installing a plate.
【００１２】0012
【作用】本発明の構成であれば、磁石３１１と、その下
に配置された電磁石の反発により、フィルム３１０が変
形しフィルム上のインク３１５に圧力変化を生じさせ、
インク吐出口からインク滴を吐出させることができる。[Operation] With the structure of the present invention, the film 310 is deformed by the repulsion between the magnet 311 and the electromagnet placed below it, causing a pressure change in the ink 315 on the film.
Ink droplets can be ejected from the ink ejection ports.
【００１３】また、図３において電流を流す電磁石をノ
ズルに対して左側を用いればインク滴は右側へ、電流を
流す電磁石をノズルに対して右側に用いればインク滴は
左側へ飛翔する。即ち、電流を流す電磁石と電流量を任
意に選ぶことにより、インク滴を任意の角度をもって飛
ばすことができる。Further, in FIG. 3, if the electromagnet for passing current is used on the left side of the nozzle, the ink droplets will fly to the right, and if the electromagnet for passing current is used on the right side of the nozzle, the ink droplets will fly to the left. That is, by arbitrarily selecting the electromagnet through which current flows and the amount of current, ink droplets can be ejected at any angle.
【００１４】[0014]
【実施例】（実施例１）以下本発明の実施例を図１、図
２、図３より説明する。Embodiments (Embodiment 1) An embodiment of the present invention will be described below with reference to FIGS. 1, 2, and 3.
【００１５】本発明の磁場発生基板を上方からみた図が
図１である。基板１０１上に電磁石１０２をｎ行×ｍ列
配置したものであり、各電磁石は各々、電圧、電流コン
トローラーに接続されており、電圧、電流を変化させる
ことにより各々の電磁石の発生する磁場を変化させるこ
とができる。FIG. 1 is a top view of the magnetic field generating substrate of the present invention. Electromagnets 102 are arranged in n rows and m columns on a substrate 101. Each electromagnet is connected to a voltage and current controller, and by changing the voltage and current, the magnetic field generated by each electromagnet is changed. can be done.
【００１６】電磁石１０２の形成方法を図２を用いて説
明する。A method for forming the electromagnet 102 will be explained using FIG. 2.
【００１７】基板１０１上に所定のパターンを持ったコ
イルを形成する。コイル部２０１は導電体で形成され、
金属、酸化物、有機物等の導電性の物質であれば何でも
良い。本実施例ではＣｒ−Ａｕを２ミクロンメートルの
厚さで蒸着により形成した後、フォトリソプロセスによ
り図２の形状のコイルにパターニングした。A coil having a predetermined pattern is formed on the substrate 101. The coil part 201 is formed of a conductor,
Any conductive substance such as a metal, oxide, or organic substance may be used. In this example, Cr--Au was formed to a thickness of 2 micrometers by vapor deposition, and then patterned into a coil having the shape shown in FIG. 2 by a photolithography process.
【００１８】次に、上記プロセスで形成されたコイル上
に絶縁層２０２を形成し、コイルのエンドポイントの部
分にコンタクトホール部２０３を形成した。絶縁層とし
ては酸化物、有機物何でもよく、本実施例では感光性ポ
リイミド樹脂を２ミクロンメートルの厚さでロールコー
ターにより皮膜し、フォトリソプロセスにより感光性ポ
リイミド樹脂の硬化及びコンタクトホール部２０３を形
成した。Next, an insulating layer 202 was formed on the coil formed by the above process, and a contact hole portion 203 was formed at the end point of the coil. Any oxide or organic material may be used as the insulating layer, and in this example, a photosensitive polyimide resin was coated with a thickness of 2 micrometers using a roll coater, and the photosensitive polyimide resin was cured and the contact hole portion 203 was formed by a photolithography process. .
【００１９】更に、コンタクトホール部２０３を通して
配線２０４を絶縁層２０２上に形成することで電磁石が
形成でき、本発明の磁場発生基板ができた。Furthermore, by forming a wiring 204 on the insulating layer 202 through the contact hole portion 203, an electromagnet can be formed, and the magnetic field generating substrate of the present invention has been completed.
【００２０】以上のプロセスからわかるように、本発明
の磁場発生基板は基板全面への薄膜形成とフォトリソプ
ロセスを用いて作られるため、各種の形状のコイル、及
びコイルの位置は任意に変えることが可能である。As can be seen from the above process, since the magnetic field generating substrate of the present invention is made by forming a thin film on the entire surface of the substrate and using a photolithography process, the coils of various shapes and the positions of the coils can be changed arbitrarily. It is possible.
【００２１】また、各電磁石の磁界強度を増すために、
各電磁石の中心部に絶縁膜を介してＦｅ、Ｎｉ、Ｃｏ等
の磁性体薄膜を形成してもよい。[0021] Also, in order to increase the magnetic field strength of each electromagnet,
A magnetic thin film of Fe, Ni, Co, etc. may be formed at the center of each electromagnet with an insulating film interposed therebetween.
【００２２】次に、図３を用いてインクジェットヘッド
としての使用方法を説明する。Next, using FIG. 3, a method of using the inkjet head will be explained.
【００２３】３０１は前述の磁場発生基板の基板部分で
あり、３０２から３０８までは前述のプロセスで形成さ
れた電磁石である。Reference numeral 301 is the substrate portion of the aforementioned magnetic field generating substrate, and 302 to 308 are electromagnets formed by the aforementioned process.
【００２４】３１０は薄膜磁石３１１が形成されたフィ
ルムである。この図では薄膜磁石は連続膜になっている
が、薄膜磁石に切り込みを入れ、各電磁石に１対１で対
応させた独立磁石の集合体としても良い。310 is a film on which a thin film magnet 311 is formed. In this figure, the thin film magnet is a continuous film, but the thin film magnet may be cut into a set of independent magnets in one-to-one correspondence with each electromagnet.
【００２５】本実施例ではフィルムを厚さ１０ミクロン
メートルのポリイミドフィルムとし、薄膜磁石としては
スパッタ法によりＮｄ−Ｆｅ−Ｂを１５ミクロンメート
ルの厚さに形成したものとした。この薄膜磁石層の上に
絶縁膜としてＳｉＯ２ を２０００オングストロームの
厚みで形成した。この薄膜磁石を膜面方向に磁化させ、
磁化方向をそろえたものを、磁場発生基板に密着、貼り
合わせた。In this example, the film was a polyimide film with a thickness of 10 micrometers, and the thin film magnet was made of Nd-Fe-B formed to a thickness of 15 micrometers by sputtering. On this thin film magnet layer, an insulating film of SiO2 was formed to a thickness of 2000 angstroms. This thin film magnet is magnetized in the direction of the film surface,
The magnets with the same magnetization direction were closely attached and bonded to the magnetic field generating substrate.
【００２６】次に、直径５０ミクロンメートルノズル部
３１４を持つ厚さ５０ミクロンメートルノズルプレート
３１３を基板３１０との間隔が７００ミクロンメートル
となるようにエポキシ樹脂を用いて貼り合わせることに
より、本発明のインクジェットヘッドを作製した。Next, the 50 micrometer nozzle plate 313 having a diameter of 50 micrometer nozzle portion 314 is bonded to the substrate 310 using epoxy resin so that the distance between the plate and the substrate 310 is 700 micrometers. An inkjet head was created.
【００２７】インクを３１５の空間に満たした後、電磁
石３０４、３０５、３０６に電流を薄膜磁石の極性と反
発するように流した。その結果、インクは垂直方向に飛
翔した。After filling the space 315 with ink, a current was passed through the electromagnets 304, 305, and 306 so as to repel the polarity of the thin film magnet. As a result, the ink flew vertically.
【００２８】次に同様の極性で、電磁石３０５、３０６
、３０７、３０８に同じように電流を流すことで、図３
においてインクは左側へ角度をもって飛翔した。Next, with similar polarity, electromagnets 305 and 306
, 307, and 308 in the same way, Figure 3
The ink flew at an angle to the left.
【００２９】インクの角度は作動させる電磁石及び流す
電流によって制御することができた。The angle of the ink could be controlled by the actuated electromagnet and the applied current.
【００３０】（実施例２）実施例１と同様の方法で、複
数の電磁石を厚さ２０ミクロンメートルのポリイミドフ
ィルムに形成したものを磁場発生基板とし、電磁石上に
絶縁膜として１ミクロンメートルのポリイミド樹脂をコ
ートした。(Example 2) Using the same method as in Example 1, a plurality of electromagnets were formed on a polyimide film with a thickness of 20 micrometers as a magnetic field generating substrate, and a polyimide film with a thickness of 1 micrometer as an insulating film was placed on the electromagnets. Coated with resin.
【００３１】これを圧延されたプラセオジウム磁石に密
着貼り付けた。[0031] This was closely attached to a rolled praseodymium magnet.
【００３２】こうして得られた基板を実施例１と同様な
方法で、磁場発生基板がノズルプレート側になるような
構造でインクジェットヘッドを作製した。[0032] Using the thus obtained substrate, an inkjet head was fabricated in the same manner as in Example 1, with a structure in which the magnetic field generating substrate was on the nozzle plate side.
【００３３】インクの飛翔及びそのヘッド面に対しての
角度は実施例１と同様の結果が得られた。The same results as in Example 1 were obtained regarding the flight of ink and its angle with respect to the head surface.
【００３４】[0034]
【発明の効果】以上実施例よりわかるように、本発明の
磁場発生基板はＩＣプロセスに代表される薄膜加工プロ
セスにより形成されるため、電磁石の高密度化が可能で
ある。As can be seen from the above embodiments, since the magnetic field generating substrate of the present invention is formed by a thin film processing process typified by an IC process, it is possible to increase the density of electromagnets.
【００３５】本発明の磁場発生基板を用いたインクジェ
ットヘッドは、駆動に発熱方式を取らないため素子の寿
命が長く、かつ上記のように高密度な電磁石形成が可能
なこと、更に任意に駆動電磁石及び駆動電流を選ぶこと
により、インク滴の飛翔角度を任意に変えることが可能
になり、ヘッド数の少ない製造コストの低い高速印字可
能なインクジェットヘッドが製造可能になった。The inkjet head using the magnetic field generating substrate of the present invention has a long element life because it does not use a heat generation method for driving, and it is also possible to form high-density electromagnets as described above. By selecting the drive current and the drive current, it is now possible to arbitrarily change the flight angle of the ink droplets, making it possible to manufacture an inkjet head capable of high-speed printing with a small number of heads and at low manufacturing cost.
【図１】本発明の磁気発生基板を上面から見た図である
。FIG. 1 is a top view of a magnetism generating substrate of the present invention.
【図２】本発明の電磁石の製造プロセスを示す図である
。FIG. 2 is a diagram showing the manufacturing process of the electromagnet of the present invention.
【図３】本発明のインクジェットヘッドの断面図である
。FIG. 3 is a sectional view of the inkjet head of the present invention.
【図４】従来の発熱式インクジェットヘッドの断面図で
ある。FIG. 4 is a sectional view of a conventional heat-generating inkjet head.
【図５】従来の圧電素子式インクジェットヘッドの断面
図である。FIG. 5 is a sectional view of a conventional piezoelectric element type inkjet head.
１０１ 基板
１０２ 電磁石
２０１ コイル（導電体）
２０２ 絶縁層
２０３ コンタクトホール
２０４、２０５ 電源とのコンタクト部３０１ 基
板
３０２、３０３、３０４、３０５ 電磁石３０６、３
０７、３０８ 電磁石
３１０ 基板（フィルム）
３１１ 磁石層
３１２ 絶縁層
３１３ ノズルプレート
３１４ ノズル
３１５ インク層
３１６、３１７ 接着層
４０１ 基板
４０２ 発熱体
４０３ ノズルプレート
４０４ インク
４０５ ノズル
５０１ 基板
５０２ 圧電素子
５０３ ノズルプレート
５０４ インク
５０５ ノズル101 Substrate 102 Electromagnet 201 Coil (conductor) 202 Insulating layer 203 Contact hole 204, 205 Contact part with power supply 301 Substrate 302, 303, 304, 305 Electromagnet 306, 3
07, 308 Electromagnet 310 Substrate (film) 311 Magnet layer 312 Insulating layer 313 Nozzle plate 314 Nozzle 315 Ink layer 316, 317 Adhesive layer 401 Substrate 402 Heat generating element 403 Nozzle plate 404 Ink 405 Nozzle 501 Substrate 502 Piezoelectric element 503 Nozzle plate 504 Ink 505 nozzle
Claims (3)
特徴とする磁場発生基板。1. A magnetic field generating board characterized in that a plurality of electromagnets are installed on the board.
ルムを貼り合わせ、該フィルムに任意の距離を保ってノ
ズルプレートを設置したことを特徴とするインクジェッ
トヘッド。2. An inkjet head characterized in that a film on which a magnet is formed is laminated on a magnetic field generating substrate, and a nozzle plate is placed on the film at an arbitrary distance.
石と貼り合わせノズルプレートと磁場発生基板を対向さ
せ、これを任意の距離を保って接着・接合したことを特
徴とするインクジェットヘッド。3. An inkjet head characterized in that a magnetic field generating substrate formed on a film is bonded to a magnet, the nozzle plate and the magnetic field generating substrate are opposed to each other, and the two are adhered and joined with a desired distance maintained between them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14457691A JPH04368851A (en) | 1991-06-17 | 1991-06-17 | Magnetic field generating substrate and ink jet head equipped therewith |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14457691A JPH04368851A (en) | 1991-06-17 | 1991-06-17 | Magnetic field generating substrate and ink jet head equipped therewith |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04368851A true JPH04368851A (en) | 1992-12-21 |
Family
ID=15365386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14457691A Pending JPH04368851A (en) | 1991-06-17 | 1991-06-17 | Magnetic field generating substrate and ink jet head equipped therewith |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04368851A (en) |
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