JPH0436348B2 - - Google Patents

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a burn-in device, which is used for screening, aging, or reliability testing of samples such as semiconductor devices in a test room. This invention relates to a configuration for inserting and removing a board into a connector.

(Prior Art) A conventional burn-in device of this type has a structure described in, for example, Japanese Patent Laid-Open No. 113769/1983. In this conventional device, a pin protruding from a movable operating rod is engaged with a cam groove of a cam provided on a rotating shaft, a pressing plate is attached to this operating rod, and the operating rod is moved by rotation of the cam. The connector is advanced, and the pressing plate is used to push out a circuit board mounted with a semiconductor device, etc. connected to the connector, and the circuit board is removed from the connector.

(Problems to be Solved by the Invention) In the conventional burn-in device described above, it was possible to move the press plate forward and backward using a cam and remove the circuit board connected to the connector, but when connecting the circuit board to the connector This must be done manually, and the pressing force per connector is large and requires a lot of effort. Also, the pressing force tends to be uneven, and the circuit board and circuit board There were problems with low reliability of connection with the connector and poor operability.

The present invention has been made in view of the above problems, and allows the connection of circuit boards inserted into a test chamber to a connector, and the removal and removal of circuit boards connected to a connector automatically and uniformly in any number of circuit boards. This is done by operating force, and the connection of each circuit board connector is reliable and easy to operate without increasing the output of the electric motor for rotating the circuit board insertion/extraction mechanism or increasing the strength of the insertion/extraction mechanism drive system and its support system. This provides a good burn-in device.

[Structure of the invention]

(Means for Solving the Problems) The burn-in apparatus of the present invention has a test chamber in which a plurality of circuit boards on which samples such as semiconductor devices are mounted can be inserted and removed in parallel. Equipped with a removable connector,
A rotary shaft extending perpendicular to the circuit board and movable in the axial direction is provided in a corresponding part of the test chamber near the outside of both ends of the circuit boards stored in parallel. The insertion/extraction piece corresponding to the circuit board is placed at an axial position in the axial direction of the rotating shaft at which an arbitrary number of the insertion/extraction pieces can engage with the engaging portions provided near both ends of each of the circuit boards. A desired number of circuit boards inserted into the test chamber are sequentially moved and rotated in the axial direction of the rotating shaft to press and connect the circuit boards to the connector, and the circuit boards connected to the connector are It is provided with an insertion/extraction mechanism that sequentially removes and removes an arbitrary number by moving in the direction and rotating in the opposite direction.

(Function) The burn-in device of the present invention inserts a plurality of circuit boards carrying samples such as semiconductor devices into a test chamber, and rotates a rotating shaft near the outer periphery at both ends of the circuit board. The insertion/extraction pieces rotated by the connectors engage with the corresponding engaging portions of the circuit board, the circuit boards are pressed inward, and the circuit boards are respectively inserted and connected to the connectors. Then, both rotating shafts are rotated back to return the insertion/extraction piece, and the insertion/extraction piece is moved to the position of the next circuit board to be inserted by the axial movement of the rotating shafts. Then, by rotating the rotation shaft, the insertion/extraction pieces engage with the engaging parts of each circuit board corresponding to the insertion/extraction pieces, and the circuit boards are pressed toward each connector, and the circuit boards are connected to the connectors. Then, the insertion/extraction piece is returned by reverse rotation of the rotating shaft.
In this state, the test chamber is closed and the test is performed. Then, when the test is completed, the test chamber is opened, the rotation shaft is rotated in the opposite direction, and the insertion/extraction pieces are rotated, so that the insertion/extraction pieces are engaged with the corresponding engaging parts of the circuit board. Then, the circuit boards are pushed forward and the circuit boards are respectively removed from the connectors. Then, the rotating shaft is rotated back to return the insertion/extraction piece, and the insertion/extraction piece is moved to the position of the circuit board to be removed next by the axial movement of the rotating shaft. Then, by rotating the rotation shaft, the insertion/extraction pieces engage with the corresponding engagement parts of each circuit board, and the circuit boards are pressed forward, the circuit boards are removed from the connector, and the insertion/extraction pieces are It is returned by the reaction rotation of the rotating shaft.

(Example) The configuration of an example of the present invention will be described with reference to the drawings.

Reference numeral 1 denotes a test chamber surrounded by a heat insulating material, and inside the test chamber 1 there are a plurality of connectors that removably connect a plurality of circuit boards 3 on which samples 2 such as semiconductor devices are mounted in the vertical direction. 4 are arranged in parallel. Further, on both sides of the front opening 5 of this test chamber 1, rotary shafts 6 are supported, which are located near both sides of the circuit board 3 inserted into the test chamber 1, and are rotatable and movable up and down. has been done. A plurality of insertion/extraction pieces 7 constituting an insertion/extraction mechanism are fixed to each rotating shaft 6 in correspondence with the number of the respective circuit boards 3. Each insertion/extraction piece 7 has a concave arc-shaped engaging edge 9 that is removably engaged with an engaging part 8 such as a pin provided on both sides of the circuit board 3 on both edges of the tip side. There is.

Furthermore, groove-shaped guide portions 10 are provided on both left and right sides of the test chamber 1 to guide the circuit board 3 to a predetermined position. Further, a heat insulating door 11 is provided in the front opening 5 of the test chamber 1 so as to be openable and closable.

Further, each of the rotating shafts 6 is projected upward from the test chamber 1, and each of the rotating shafts 6 is supported by a bearing section 12 provided at the upper part of the test chamber 1 so as to be freely rotatable and vertically movable. The rotating shaft 6 is rotatably coupled to a sprocket 13 provided on a bearing portion 12 and spline-coupled so as to be movable in the axial direction. Further, an idler sprocket 14 is rotatably attached to the upper part of the test chamber 1 by a bearing part 15, and a torque limiter clutch 16 is further attached to the upper part of the test chamber 1. The sprocket 17 on the output side of this torque limiter clutch 16, the sprockets 13, 13 provided on each of the rotating shafts 6, 6, and the idler sprocket 1
4, a chain 18 is suspended between both rotating shafts 6, 6.
are adapted to be rotated in conjunction with each other in opposite directions. Further, the input gear 19 of the torque limiter clutch 16 is meshed with the output gear 21 of the electric motor 20. Furthermore, ring-shaped rack teeth 22 are formed on the outer peripheries of the upper ends of both rotating shafts 6 (shown at the upper and lower ends for illustration in FIG. 5). An engaging gear 23 is provided on the electric motor 24 . and,
Through the forward and reverse driving of the electric motor 24, the gear 23 provided on the rotary shaft 25 of the electric motor 24 meshes with the rack teeth 22, so that both rotary shafts 6 are moved up and down synchronously, and when both rotary shafts 6 are in the lowered state, For example, the insertion/removal pieces 7 in even-numbered stages can be engaged with and disengaged from the engaging portions 8 of the circuit board 3 at the corresponding height positions every other time, for example, in the odd-numbered stages when both rotating shafts 6 are in the raised state. The insertion/removal piece 7 can be engaged with and detached from the engaging portion 8 of the circuit board 3 at the corresponding height position.

Note that the circuit board 3 is provided with a reinforcing member 26.

Next, the operation of this embodiment will be explained.

Both sides of a plurality of circuit boards 3 on which samples 2 such as semiconductor devices are mounted are inserted through the front opening 5 of the test chamber 1 into groove-shaped guide portions 10 provided on both left and right sides of the test chamber 1, When the electric motor 20 is driven,
The rotating shafts 6 are rotated in opposite directions, and the rotation of the rotating shafts 6 rotates the insertion/extraction pieces 7 as shown in FIG. 7 engage with the engaging portions 8 of the circuit board 3, the circuit board 3 is pressed inward, and the end connecting portions of the circuit board 3 are inserted and connected to the connectors 4, respectively. Then, the insertion/extraction part 7 is rotated by reverse driving of the electric motor 20.
is returned to the position indicated by the chain line in Figure 3. Next, the electric motor 24
Both rotation shafts 6 are raised by driving, and the insertion/extraction pieces 7 of the odd-numbered stages are moved to the height position of the circuit board 3 of each odd-numbered stage. When the rotating shaft 6 rotates as described above by driving the electric motor 20, the engaging portion 8 of each circuit board 3
The insertion/extraction pieces 7 are engaged with each other, the circuit board 3 is pressed toward each connector 4, the circuit board 3 is connected to each connector 4, and the insertion/extraction piece 7 is returned by reverse rotation of the rotating shaft 6. .

In this state, the test chamber 1 is closed with the heat insulating door 11 and the test is performed. This test involves applying thermal and electrical stress to a sample 2, such as a semiconductor device mounted on a circuit board 3, to reject the sample 2 that has deterioration characteristics and rejecting it. 2, prior to the aging process, which is accelerated to the level of normal operation life, or reliability testing.

Then, when the test is completed, the insulation door 11 is opened and the electric motor 20 is driven in the opposite direction.The rotating shafts 6 are rotated in opposite directions in synchronization with each other, and this rotation of the rotating shafts 6 causes the fourth As shown in the figure, the insertion/extraction pieces 7 are rotated, and when the rotating shaft 6 is in the raised state, the insertion/extraction pieces 7 in odd-numbered stages engage with the engaging portions 8 of the circuit board 3, and the circuit board 3 moves forward. The end connecting portions of the circuit board 3 are each removed from the connector 4 by being pressed. Then, by driving the electric motor 20 in reverse, the insertion/extraction piece 7 is returned to the position indicated by the chain line in FIG. Next, both rotating shafts 6 are lowered by the drive of the electric motor 24, and the insertion/extraction pieces 7 of the even-numbered stages are moved to the height position of the circuit board 3 of each even-numbered stage. When the rotating shaft 6 rotates as described above by driving the electric motor 20, the insertion/removal pieces 7 engage with the engaging portions 8 of each circuit board 3, and the circuit board 3
is pressed forward, the circuit board 3 is removed from the connector 4, and the insertion/extraction piece 7 is returned by reverse rotation of the rotating shaft 6.

〔Effect of the invention〕

According to the present invention, a plurality of connectors for removably connecting each circuit board are arranged in a test chamber that removably stores a plurality of circuit boards loaded with samples such as semiconductor devices, and An insertion/extraction mechanism is provided to press and connect the circuit board inserted into the connector to the connector and to remove the circuit board connected to the connector. By inserting multiple circuit boards loaded with samples such as semiconductor devices into a test chamber and activating the insertion/extraction mechanism, each circuit board can be pressed into a connector and connected to the connector. The circuit board connected to the connector can be removed from the connector by the operation of the insertion/extraction mechanism. , the connectors of the circuit boards inserted into the test chamber are connected to the connectors, and the circuit boards connected to the connectors are removed and connected in sequence by an arbitrary number using an even operating force,
It is possible to increase the output of the electric motor for rotating the circuit board insertion/extraction mechanism, reduce the strength of the insertion/extraction mechanism drive system and its support system, and improve operability with reliable connector connection of each circuit board.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional plan view of a burn-in device showing an embodiment of the present invention, Fig. 2 is a longitudinal sectional front view of the same, Fig. 3 is a plan view of the insertion/extraction part showing the state when the same circuit board is attached, and Fig. FIG. 4 is a plan view of the insertion/extraction piece showing the state when the circuit board is removed and removed, and FIG. 5 is a perspective view of the same. 1...Testing room, 2...Sample, 3...Circuit board, 4...
Connector, 5... Front opening of test chamber 1, 6... Rotating shaft, 7... Insertion/extraction piece of insertion/extraction mechanism.

Claims (1)

[Scope of Claims] 1. In a testing chamber in which a plurality of circuit boards mounted with samples such as semiconductor devices are housed in parallel in a removable manner, a connector is provided to removably connect to each of the circuit boards. A rotary shaft extending perpendicular to the circuit board and movable in an axial direction is provided in a corresponding part of the test chamber near the outside of both ends of the circuit boards stored in parallel, and this rotation An axial direction in which an insertion/extraction piece corresponding to the circuit board is attached to a shaft, and an arbitrary number of insertion/extraction pieces can be engaged with engaging parts provided near both ends of each of the circuit boards in the axial direction of the rotating shaft. position,
An arbitrary number of circuit boards inserted into the test chamber are pressed and connected to the connector by sequentially moving and rotating the rotary shaft in the axial direction, and the circuit boards connected to the connector are moved in the axial direction. A burn-in device characterized by being provided with an insertion/extraction mechanism that sequentially removes and removes an arbitrary number of pieces by rotating in the opposite direction.