JPH04353821A - Liquid crystal display device and its defect correcting method - Google Patents
Liquid crystal display device and its defect correcting methodInfo
- Publication number
- JPH04353821A JPH04353821A JP3129735A JP12973591A JPH04353821A JP H04353821 A JPH04353821 A JP H04353821A JP 3129735 A JP3129735 A JP 3129735A JP 12973591 A JP12973591 A JP 12973591A JP H04353821 A JPH04353821 A JP H04353821A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- bright spot
- picture element
- display device
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000007547 defect Effects 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims description 29
- 238000005286 illumination Methods 0.000 claims description 23
- 239000011159 matrix material Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000000149 argon plasma sintering Methods 0.000 claims description 4
- 230000001747 exhibiting effect Effects 0.000 claims description 4
- 238000012937 correction Methods 0.000 abstract description 47
- 238000010329 laser etching Methods 0.000 abstract description 10
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 23
- 239000010408 film Substances 0.000 description 12
- 238000007788 roughening Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000008439 repair process Effects 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000004988 Nematic liquid crystal Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
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- 206010027146 Melanoderma Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
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- 239000003086 colorant Substances 0.000 description 1
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- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
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- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
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Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、一組の偏向板に挟まれ
た一対の透明基板間に液晶が封入され、表示用の絵素が
マトリクス状に配列された透過型液晶パネルと、該透過
型液晶パネルの背面方向より表示用の照明光を照射する
光源手段とを有する液晶表示装置および該液晶表示装置
の液晶パネルに発生する輝点欠陥を修正する欠陥修正方
法に関する。[Industrial Application Field] The present invention relates to a transmissive liquid crystal panel in which a liquid crystal is sealed between a pair of transparent substrates sandwiched between a pair of polarizing plates, and display pixels are arranged in a matrix. The present invention relates to a liquid crystal display device having a light source unit that irradiates illumination light for display from the back side of a transmissive liquid crystal panel, and a defect repair method for repairing bright spot defects occurring in the liquid crystal panel of the liquid crystal display device.
【0002】0002
【従来の技術】この種の液晶表示装置の一例として、プ
ロジェクション装置に使用されるアクティブマトリクス
駆動方式の液晶パネルがある。この液晶パネルは貼り合
わされる一対のガラス基板の内の一方のガラス基板上に
マトリクス状に配設される絵素電極にTFT(薄膜トラ
ンジスタ)を接続し、該TFTのスイッチング動作によ
り各絵素電極の選択、非選択を行って表示動作を行う。
このため、単純マトリクスの欠点である非選択時のクロ
ストークを発生せず、高画質のディスプレイを実現でき
る。2. Description of the Related Art An example of this type of liquid crystal display device is an active matrix drive type liquid crystal panel used in a projection device. In this liquid crystal panel, TFTs (thin film transistors) are connected to picture element electrodes arranged in a matrix on one of a pair of glass substrates to be bonded together, and each picture element electrode is connected by the switching operation of the TFT. Display operations are performed by selecting and deselecting. Therefore, crosstalk during non-selection, which is a drawback of a simple matrix, does not occur, and a high-quality display can be realized.
【0003】ところで、TFTはガラス基板上にゲート
電極やソース電極およびドレイン電極等を積層した多層
構造であるため、これらの金属薄膜をガラス基板上に積
層する工程と、該金属薄膜をパターニングする工程が繰
り返し行われる。このため欠陥のない完全なTFTを作
製するには、製造工程において各種条件を維持、管理す
るために非常な努力を要する。By the way, since a TFT has a multilayer structure in which a gate electrode, a source electrode, a drain electrode, etc. are laminated on a glass substrate, there are a process of laminating these metal thin films on a glass substrate, and a process of patterning the metal thin film. is repeated. Therefore, in order to manufacture a perfect TFT without any defects, great effort is required to maintain and control various conditions during the manufacturing process.
【0004】それ故、場合によっては正常なTFT特性
が得られていない欠陥TFTを発生することもあり、欠
陥が修復可能なものはその欠陥内容により、それぞれの
修正技術を用いて修復が図られる。このようなTFTの
欠陥の一例として、回路形成パターン上での修復ができ
ず、表示駆動した場合に、TFTに接続された絵素電極
に相当する絵素が輝点となって表示画面上で認識される
輝点欠陥がある。[0004] Therefore, in some cases, a defective TFT may be generated in which normal TFT characteristics are not obtained, and if the defect is repairable, it is attempted to repair it using the respective repair technology depending on the content of the defect. . An example of such a TFT defect is that it cannot be repaired on the circuit formation pattern, and when the display is driven, the picture element corresponding to the picture element electrode connected to the TFT becomes a bright spot on the display screen. There is a recognized bright spot defect.
【0005】この輝点欠陥の修正方法の一従来例として
図11および図12に示される方法がある。この方法は
液晶パネル1の輝点絵素5に対応する入射側のガラス基
板2の表面付近(以下この位置を輝点欠陥修正部6とい
う)不透明遮光膜6を形成し、これによりに光源(図示
せず)から輝点絵素5に入射される光を減光して輝点絵
素5を目立たないように修正する手法をとる。One conventional example of a method for correcting bright spot defects is the method shown in FIGS. 11 and 12. In this method, an opaque light-shielding film 6 is formed near the surface of the glass substrate 2 on the incident side corresponding to the bright spot pixels 5 of the liquid crystal panel 1 (hereinafter, this position is referred to as the bright spot defect correction section 6), and thereby the light source ( A method is used to reduce the light incident on the bright spot picture element 5 from the bright spot picture element 5 (not shown) so as to make the bright spot picture element 5 less noticeable.
【0006】ここで、不透明遮光膜6が形成されるガラ
ス基板2上の輝点絵素5に対応する部分、すなわち修正
箇所は輝点絵素5と光源からの照明光の入射経路が同一
になるガラス基板2の表面位置が選定される。より具体
的には、コンデンサレンズ7を通して光源から表示パネ
ル1に入射され、投影レンズ8に収束される光束の内の
輝点絵素5を通過する経路A上にあるガラス基板2の表
面位置をいう。図12は、輝点絵素5と不透明遮光膜6
が同一経路上にあることを模式的に示している。なお、
ガラス基板2は貼り合わされる2枚のガラス基板2、3
の内の入射側に位置するガラス基板であり、両基板間に
表示媒体としての液晶が封入される。Here, in the portion corresponding to the bright spot picture element 5 on the glass substrate 2 on which the opaque light-shielding film 6 is formed, that is, the modified location, the incident path of the illumination light from the light source is the same as that of the bright spot picture element 5. The surface position of the glass substrate 2 is selected. More specifically, the surface position of the glass substrate 2 on the path A that passes through the bright spot picture element 5 of the luminous flux that enters the display panel 1 from the light source through the condenser lens 7 and is converged on the projection lens 8 is determined. say. FIG. 12 shows a bright spot picture element 5 and an opaque light-shielding film 6.
This diagram schematically shows that they are on the same route. In addition,
The glass substrate 2 consists of two glass substrates 2 and 3 that are bonded together.
This is a glass substrate located on the incident side of the two substrates, and a liquid crystal serving as a display medium is sealed between the two substrates.
【0007】また、不透明遮光膜6は具体的には以下の
ようにして形成される。すなわち、UV硬化型樹脂(紫
外線硬化型樹脂)インクをマーキング針の先端微小R(
アール)の箇所に付着させ、これを上記修正箇所に転写
した後、紫外線を照射して硬化させ、これによりガラス
基板2の表面に接着する。なお、この不透明遮光膜6の
大きさは液晶パネルの機種により若干異なるが、直径が
約100〜250μm、厚みが10μm程度の非常に微
小なものである。Further, the opaque light-shielding film 6 is specifically formed as follows. That is, UV curable resin (ultraviolet curable resin) ink is applied to the tip of the marking needle with a minute radius (
After transferring it to the corrected area, it is cured by irradiation with ultraviolet rays, thereby adhering it to the surface of the glass substrate 2. The size of this opaque light-shielding film 6 varies slightly depending on the model of the liquid crystal panel, but it is extremely small with a diameter of about 100 to 250 μm and a thickness of about 10 μm.
【0008】但し、上記した修正方法が適用されるのは
輝点絵素5と修正箇所の光軸が常に一定となるプロジェ
クション装置用の液晶パネル等に限られ、直視型のよう
に視角が一定でないものには適用することができない。However, the above correction method is only applicable to liquid crystal panels for projection devices where the optical axis of the bright spot picture element 5 and the correction location are always constant, and the viewing angle is constant like a direct view type. It cannot be applied to anything that is not.
【0009】[0009]
【発明が解決しようとする課題】しかしながら、上記し
た修正方法は以下に示す欠点があるため、液晶表示装置
における輝点欠陥の悪影響を完全に排除するには限界が
ある。However, the above-mentioned correction method has the following drawbacks, and there is a limit to completely eliminating the adverse effects of bright spot defects in liquid crystal display devices.
【0010】■不透明遮光膜6は表面が非常に平滑なガ
ラス面に対する接着力が十分でないため、塵埃等の汚れ
を除去するために表面を拭きとる等の清掃作業を行うと
、ガラス基板2の表面から剥離したり、欠損を生じたり
する不具合を生じ易く、信頼性の面で劣る欠点がある。■The opaque light-shielding film 6 does not have sufficient adhesion to the glass surface, which has a very smooth surface, so if cleaning work such as wiping the surface to remove dust and other stains, the glass substrate 2 will be damaged. It is prone to problems such as peeling off from the surface and damage, and has the drawback of poor reliability.
【0011】■遮光特性において、この不透明遮光膜6
はほぼ完全に透過光を遮断するので、表示画面が明るい
映像場面の場合に、該不透明遮光膜6が黒点となって視
認されるため、修正箇所がディスプレイの端部位置に限
定される欠点がある。■ In light-shielding properties, this opaque light-shielding film 6
Since it almost completely blocks transmitted light, when the display screen is a bright video scene, the opaque light-shielding film 6 becomes visible as a black dot, which has the drawback that the correction area is limited to the edge position of the display. be.
【0012】本発明は、このような従来技術の欠点を解
決するものであり、修正に対する信頼性の向上および修
正位置が限定されることがない液晶表示装置および液晶
表示装置の欠陥修正方法を提供することを目的とする。The present invention solves the drawbacks of the prior art, and provides a liquid crystal display device and a method for repairing defects in a liquid crystal display device, which improves the reliability of correction and does not limit the repair position. The purpose is to
【0013】[0013]
【課題を解決するための手段】本発明の液晶表示装置は
、対向配置される偏向板間に挟まれた一対の透明基板間
に液晶が封入され、表示用の絵素がマトリクス状に配列
された透過型液晶パネルと、該透過型液晶パネルの背面
方向より表示用の照明光を照射する光源手段とを有する
液晶表示装置において、輝点欠陥が発生している該絵素
を照射する該照明光の照射経路上に位置する該偏向板の
表面付近に凹陥加工部が形成され、該凹陥加工部の底面
が光散乱特性を示す粗面形状に形成されてなり、そのこ
とにより上記目的が達成される。[Means for Solving the Problems] In the liquid crystal display device of the present invention, liquid crystal is sealed between a pair of transparent substrates sandwiched between polarizing plates arranged oppositely, and display pixels are arranged in a matrix. In a liquid crystal display device comprising a transmissive liquid crystal panel and a light source means for emitting illumination light for display from the back side of the transmissive liquid crystal panel, the illumination irradiates the pixel in which a bright spot defect has occurred. A recessed portion is formed near the surface of the deflection plate located on the light irradiation path, and the bottom surface of the recessed portion is formed into a rough surface shape exhibiting light scattering characteristics, thereby achieving the above object. be done.
【0014】また、本発明の液晶表示装置の欠陥修正方
法は、対向配置される偏向板間に挟まれた一対の透明基
板間に液晶が封入され、表示用の絵素がマトリクス状に
配列された透過型液晶パネルと、該透過型液晶パネルの
背面方向より表示用の照明光を照射する光源手段とを有
する液晶表示装置の欠陥修正方法において、該照明光を
該透過型液晶パネルに照射して該絵素に発生している輝
点欠陥を検出する工程と、
該輝点欠陥が発生している該絵素を照射する該照明光の
照射経路上に位置する該偏向板の表面付近に、底面が光
散乱特性を示す粗面形状に形成された凹陥加工部を形成
する工程と
を含んでなり、そのことにより上記目的が達成される。[0014] Furthermore, the method for correcting defects in a liquid crystal display device of the present invention is such that liquid crystal is sealed between a pair of transparent substrates sandwiched between polarizing plates disposed oppositely, and display pixels are arranged in a matrix. A method for correcting a defect in a liquid crystal display device having a transmissive liquid crystal panel and a light source means for emitting illumination light for display from the back side of the transmissive liquid crystal panel, the method comprises: irradiating the transmissive liquid crystal panel with the illumination light; a step of detecting a bright spot defect occurring in the picture element using , forming a recessed part whose bottom surface has a rough surface shape exhibiting light scattering properties, thereby achieving the above object.
【0015】好ましくは、深さの浅い部位と深い部位が
交互に連設されて形成されるステップ状の底面を有する
凹陥加工部を形成する。また、エキシマレーザーエッチ
ングで凹陥加工部を形成することが好ましい。更には、
入射側のみならず出射光側の偏向板にも凹陥加工部を形
成することもできる。[0015] Preferably, a recessed part is formed having a step-like bottom surface formed by alternately forming shallow parts and deep parts. Further, it is preferable to form the recessed portion by excimer laser etching. Furthermore,
It is also possible to form a concave portion not only on the incident side but also on the deflection plate on the output light side.
【0016】[0016]
【作用】上記のように表示用の照明光の照射経路上に位
置する偏向板の表面付近に凹陥加工部を形成し、その底
面を粗面化処理すると、この部分を通過する照明光が拡
散される。従って、表示画面上において、輝点欠陥の輝
度レベルが周囲の絵素に対して目立たなくなるレベルに
迄減光されることになる。この結果、輝点絵素の存在が
周囲の正常絵素に対して目立たない状態になる。すなわ
ち、輝点絵素が修正されたことになる。[Effect] As described above, by forming a recessed part near the surface of the deflection plate located on the irradiation path of display illumination light and roughening the bottom surface, the illumination light passing through this part is diffused. be done. Therefore, on the display screen, the brightness level of the bright spot defect is reduced to a level that makes it less noticeable compared to the surrounding picture elements. As a result, the presence of the bright spot picture element becomes inconspicuous compared to the surrounding normal picture elements. In other words, the bright spot picture element has been corrected.
【0017】[0017]
【実施例】以下本発明の一実施例を説明する。[Embodiment] An embodiment of the present invention will be described below.
【0018】図1は本発明の一実施例にかかる欠陥の修
正方法を模式的に示しており、エキシマレーザ発振器9
から出射されたレーザビーム10はスリットパターン1
1を通り、紫外線反射ミラー12で反射された後、レン
ズ13を経て載置台14上にセットされた液晶パネル1
の輝点修正部16に集光されて照射される。図2に斜線
で示すように、この輝点修正部16は照射光に対して輝
点を発生している輝点絵素5と同一の照射経路上にある
。FIG. 1 schematically shows a defect correction method according to an embodiment of the present invention, in which an excimer laser oscillator 9
The laser beam 10 emitted from the slit pattern 1
1, is reflected by an ultraviolet reflecting mirror 12, passes through a lens 13, and is set on a mounting table 14.
The light is focused and irradiated onto the bright spot correction unit 16. As indicated by diagonal lines in FIG. 2, the bright spot correction unit 16 is located on the same irradiation path as the bright spot picture element 5 that generates the bright spot with respect to the irradiated light.
【0019】また、本実施例の輝点修正部16は、図3
に示すように貼り合わされる一対のガラス基板2、27
の両外側に配設される一対の偏向板31、31の内、光
源からの照明光40が液晶パネル1に入射される側の偏
向板31の表面付近に選定される。偏向板31、31は
ヨウ素系等の染料系偏向板で形成され、該輝点修正部1
6は上記同様に輝点絵素5を照射する照明光40の照射
経路上にある。Further, the bright spot correction unit 16 of this embodiment is shown in FIG.
A pair of glass substrates 2 and 27 are bonded together as shown in
Of the pair of deflection plates 31, 31 disposed on both outer sides of the LCD panel 1, a position near the surface of the deflection plate 31 on the side where the illumination light 40 from the light source is incident on the liquid crystal panel 1 is selected. The deflection plates 31, 31 are formed of dye-based deflection plates such as iodine-based deflection plates, and the bright spot correction unit 1
6 is on the irradiation path of the illumination light 40 that irradiates the bright spot picture element 5 as described above.
【0020】入射側のガラス基板2の内面側、すなわち
対向面側にはカラーフィルタ24およびブラックストラ
イプ25が交互に配設される。カラーフィルタ24は全
て同色のカラーフィルタ(図示例ではR(赤)のカラー
フィルタ)であって、該カラーフィルタ24およびブラ
ックストライプ25は絵素に対応して配設される。更に
、このように配設されるカラーフィルタ24およびブラ
ックストライプ25の内面側には対向電極26が配設さ
れる。対向電極26は一対のガラス基板2、27間に封
入されるツィステッドネマティック液晶層30に電圧を
印加するために配設される。なお、カラーフィルタ24
はガラス基板2の外表面側に配設することにしてもよい
。Color filters 24 and black stripes 25 are alternately arranged on the inner surface of the glass substrate 2 on the incident side, that is, on the opposing surface. The color filters 24 are all color filters of the same color (in the illustrated example, R (red) color filters), and the color filters 24 and black stripes 25 are arranged corresponding to picture elements. Further, a counter electrode 26 is provided on the inner surface of the color filter 24 and black stripe 25 arranged in this manner. The counter electrode 26 is arranged to apply a voltage to the twisted nematic liquid crystal layer 30 sealed between the pair of glass substrates 2 and 27. Note that the color filter 24
may be arranged on the outer surface side of the glass substrate 2.
【0021】一方、照明光40が出射される側のガラス
基板27の内面にはマトリクス状に配列された絵素電極
28と該絵素電極28への給電をスイッチングするTF
T29が形成され、両ガラス基板2、27間には90度
またはそれ以上ねじれ配向されたツィステッドネマティ
ック液晶層30が封入されている。なお、この実施例で
は液晶パネル1として3枚パネル方式の投影型液晶表示
装置に用いられる液晶表示パネル1を例示している。こ
の場合、液晶パネル1に組み込まれるカラーフィルタ2
4は上記のように同一のパネル内で同色となり、3枚の
液晶パネル1が合成されて三原色フルカラー表示が行わ
れることになる。On the other hand, on the inner surface of the glass substrate 27 on the side from which the illumination light 40 is emitted, there are picture element electrodes 28 arranged in a matrix and a TF for switching the power supply to the picture element electrodes 28.
A twisted nematic liquid crystal layer 30 twisted by 90 degrees or more is sealed between the glass substrates 2 and 27. In this embodiment, the liquid crystal display panel 1 used in a three-panel projection type liquid crystal display device is exemplified as the liquid crystal panel 1. In this case, the color filter 2 incorporated in the liquid crystal panel 1
4 have the same color within the same panel as described above, and the three liquid crystal panels 1 are combined to perform a full-color display of the three primary colors.
【0022】また、液晶パネル1としては、直視型ある
いは投影型いずれの液晶表示装置を用いることもでき、
表示方式としては、偏向フィルム31と液晶分子のねじ
れ配向効果を利用したTFT駆動型、MIM駆動型又は
デューテイ駆動型等広く適用可能である。更には、上記
構造以外に照明光40の入射側にTFT付ガラス基板、
出射側にカラーフィルタ付ガラス基板側に輝点修正部1
6を形成する構成としてもよい。Further, as the liquid crystal panel 1, either a direct view type or a projection type liquid crystal display device can be used.
As a display method, a TFT drive type, an MIM drive type, a duty drive type, etc., which utilize the twisted alignment effect of the polarizing film 31 and liquid crystal molecules, are widely applicable. Furthermore, in addition to the above structure, a glass substrate with a TFT is provided on the incident side of the illumination light 40,
Bright spot correction unit 1 on the glass substrate side with color filter on the output side
It is good also as a structure which forms 6.
【0023】なお、スリットパターン11には輝点修正
部16の外形サイズが拡大された形状のパターンが形成
されており、該スリットパターン11を通した縮小スリ
ット露光によりレーザビーム10が輝点修正部16の位
置に精度よく照射されるようになっている。加えて、こ
のようなスリットパターン11を用いれば、次に説明す
る粗面17を種々の凹凸段差で形成できる利点がある。
また、載置台14は、例えば水平面内において、X−Y
直交2軸方向に移動可能になっており、該載置台14の
移動によりレーザビーム10を所望の輝点修正部16に
照射できるようになっている。Note that the slit pattern 11 is formed with a pattern in which the outer size of the bright spot correction section 16 is enlarged, and the laser beam 10 is directed to the bright spot correction section by the reduction slit exposure through the slit pattern 11. 16 positions are irradiated with high precision. In addition, if such a slit pattern 11 is used, there is an advantage that the rough surface 17 described below can be formed with various uneven steps. In addition, the mounting table 14 may be placed in the X-Y position in a horizontal plane, for example.
It is movable in two orthogonal axes directions, and by moving the mounting table 14, the laser beam 10 can be irradiated onto a desired bright spot correction section 16.
【0024】また、輝点絵素5の検出は、前工程におい
て、液晶パネル1に光源より照明光40を照射し、駆動
状態にある液晶パネル1の表示画像を表示画面上に投影
し、この投影像を検査員が視認して行われる。In addition, the detection of the bright spot picture elements 5 is carried out by irradiating the liquid crystal panel 1 with illumination light 40 from a light source and projecting the display image of the liquid crystal panel 1 in the driving state onto the display screen in the previous step. This is done by visually checking the projected image.
【0025】図3に示すように、輝点修正部16に対す
る修正処理は該輝点修正部に矢印I1方向からレーザビ
ーム10を照射して行われる。これにより照射部はレー
ザエッチングされ、偏向板31のエッチング部底面、す
なわち凹部18の底面に微小な凹凸からなる粗面17が
形成される。従って、以後、この粗面化処理部に光源よ
り矢印I1方向と同様のI2方向から照明光40を照射
すると、該照明光40は粗面17により拡散された後、
表示画面に向けて出射される。それ故、粗面形状の程度
に応じて同一の経路上にある輝点絵素5から観測者に到
達する直達光量が減少し、輝点絵素5の輝度レベルが表
示画面上において、周囲の正常絵素50の輝度レベルと
差のないレベル迄低下されることになる。この結果、輝
点絵素として認識されなくなる。すなわち、輝点絵素5
の減光効果により輝点絵素5が修正されたことになる。As shown in FIG. 3, the correction process for the bright spot correction section 16 is performed by irradiating the bright spot correction section with a laser beam 10 from the direction of arrow I1. As a result, the irradiated portion is laser-etched, and a rough surface 17 consisting of minute irregularities is formed on the bottom surface of the etched portion of the deflection plate 31, that is, on the bottom surface of the recess 18. Therefore, from now on, when illumination light 40 is irradiated from the light source to this roughened surface from the direction I2, which is the same as the direction of arrow I1, the illumination light 40 is diffused by the rough surface 17, and then
The light is emitted towards the display screen. Therefore, depending on the degree of the rough surface shape, the amount of direct light reaching the observer from the bright spot picture element 5 on the same path decreases, and the brightness level of the bright spot picture element 5 on the display screen is lower than that of the surroundings. The brightness level is reduced to a level that is no different from the brightness level of the normal picture element 50. As a result, it is no longer recognized as a bright spot picture element. That is, bright spot picture element 5
This means that the bright spot picture element 5 has been corrected due to the dimming effect.
【0026】上記の輝度低減効果を観測者に到達する直
達光量の変化として表現すると、粗面化後の光量をレー
ザビーム10照射前の80%〜10%程度の範囲に適宜
制御することが可能である。本実施例ではレーザビーム
10照射前の光量の50%±10%程度に低減させて良
好な輝点欠陥の修正効果を得ている。尚、偏向板31は
入射側と出射側の両方に配置されるため、上記の輝度減
光量を大きくしたい場合は、両方の偏向板31、31に
凹部18および粗面17を形成すればよい。Expressing the above luminance reduction effect as a change in the amount of direct light reaching the observer, it is possible to appropriately control the amount of light after surface roughening within a range of approximately 80% to 10% of the amount before irradiation with laser beam 10. It is. In this embodiment, the light intensity is reduced to approximately 50%±10% of the light intensity before irradiation with the laser beam 10, thereby obtaining a good bright spot defect correction effect. Note that since the deflection plates 31 are arranged on both the incident side and the output side, if it is desired to increase the amount of brightness attenuation described above, the recesses 18 and the rough surfaces 17 may be formed in both the deflection plates 31, 31.
【0027】上記した粗面化処理はCO2レーザによる
レーザエッチングで行ってもよいし、あるいはダイヤモ
ンド針や超硬合金製の針を用いた触刻によって行うこと
もできるが、エキシマレーザエッチングによればこれら
の方法に比して以下に示す利点がある。The above-mentioned surface roughening treatment may be performed by laser etching using a CO2 laser, or by engraving using a diamond needle or a cemented carbide needle, but according to excimer laser etching, It has the following advantages over these methods.
【0028】まず、触彫法と比較すると、粗面加工が容
易になると共に、凹凸形状の精度がよい粗面17を形成
できる利点がある。First, compared to the touch engraving method, there is an advantage that the roughening process is easier and the roughened surface 17 can be formed with high precision in the uneven shape.
【0029】一方、CO2レーザと比較すると、CO2
レーザエッチングは熱加工であるため、輝点修正部16
周囲に熱的ダメージを与えることになるが、エキシマレ
ーザエッチングによればこのような熱的ダメージを与え
ることがないという利点がある。従って、以上の理由に
よりエキシマレーザエッチングにより粗面17を形成す
る修正方法が実施する上で最も好ましいものになる。On the other hand, compared to CO2 laser, CO2
Since laser etching is thermal processing, the bright spot correction part 16
This would cause thermal damage to the surrounding area, but excimer laser etching has the advantage of not causing such thermal damage. Therefore, for the above reasons, the correction method of forming the rough surface 17 by excimer laser etching is the most preferable method to implement.
【0030】更に、エキシマレーザエッチングは封入ガ
スとして、発振波長193nmのArF、発振波長24
8nmのKrF、発振波長308nmのXeCl等が使
用され、該封入ガスの種類によってエキシマレーザ発振
器9のパルスエネルギーが異なり、粗面18の表面粗さ
も異なることになるが、本発明者等による以下の実験結
果により、封入ガスとしてKrFを使用したエキシマレ
ーザエッチング加工が最も好ましい修正方法であること
を確認できた。Furthermore, in excimer laser etching, ArF with an oscillation wavelength of 193 nm and ArF with an oscillation wavelength of 24 nm are used as filler gas.
KrF with a wavelength of 8 nm, XeCl with an oscillation wavelength of 308 nm, etc. are used, and the pulse energy of the excimer laser oscillator 9 differs depending on the type of the filled gas, and the surface roughness of the rough surface 18 also differs. The experimental results confirmed that excimer laser etching using KrF as a filler gas is the most preferable repair method.
【0031】すなわち、輝点修正部16からの出射光を
減光させる粗面化に最適なエキシマレーザガスの種類を
検討するため、封入ガスの種類を変え、同一のパルスシ
ョット条件で実験したところ、粗面17の表面粗さはK
rFが最も粗く、次いでArFであった。そして、表面
粗さを最も粗面化できたKrFによる粗面17を顕微鏡
で観察すると、粗面17が砂粒状を呈し、透過照明の透
過が十分に抑制されることが確認できた。That is, in order to examine the type of excimer laser gas that is most suitable for roughening the surface by attenuating the light emitted from the bright spot correction section 16, experiments were conducted under the same pulse shot conditions with different types of gas filled. The surface roughness of the rough surface 17 is K
rF was the coarsest, followed by ArF. When the roughened surface 17 made of KrF, which had the highest surface roughness, was observed under a microscope, it was confirmed that the roughened surface 17 had a sand grain shape and that transmission of transmitted illumination was sufficiently suppressed.
【0032】従って、このKrFを用いて図2に示す輝
点修正部16の全域に一様にレーザビームを照射して輝
点消失効果を確認したところ、輝点の輝度レベルが正常
絵素の輝点レベルと差のない低いレベル迄減光されてい
ることが確認できた。Therefore, when we used this KrF to uniformly irradiate a laser beam over the entire area of the bright spot correction unit 16 shown in FIG. It was confirmed that the brightness had been reduced to a low level that was no different from the bright spot level.
【0033】図4は図3に示される粗面化処理の変形例
を示しており、この変形例では半球状の凹部18aを入
射側の偏向板31の表面付近に形成し、その底面に粗面
17を形成する粗面化処理を行う。この変形例において
も、輝度減光量を大きくしたい場合は両偏向板31、3
1に凹部18aおよび粗面17を形成すればよい。FIG. 4 shows a variation of the surface roughening treatment shown in FIG. A roughening process is performed to form the surface 17. Also in this modification, if you want to increase the amount of brightness attenuation, both deflection plates 31, 3
The recess 18a and the rough surface 17 may be formed in the recess 18a and the rough surface 17.
【0034】図5および図6は本発明の第2実施例を示
しており、この第2実施例では、輝点修正部16の微小
面積内に多数の凹部19(図の斜線部分)と凸部20(
図の白枠部分)を形成し、且つこの凹部19の底面およ
び凸部20の表面に粗面17を形成する修正方法をとる
。なお、上記微小面積は液晶パネルの機種毎に異なるが
、小さいもので120×100μm、大きいもので25
0×230μm程度である。5 and 6 show a second embodiment of the present invention. In this second embodiment, a large number of concave portions 19 (shaded portions in the figure) and convex portions are formed within a minute area of the bright spot correction portion 16. Part 20 (
A correction method is used in which a rough surface 17 is formed on the bottom surface of the recess 19 and the surface of the convex portion 20. The micro area mentioned above differs depending on the model of LCD panel, but the small one is 120 x 100 μm, and the large one is 25 μm.
It is approximately 0×230 μm.
【0035】この第2実施例によれば、粗面化処理がい
わば二重に施されることになるので、光源からの入射光
を更に一層拡散、減光できる利点がある。この第2実施
例によれば、プロジェクション装置の今後の技術動向に
対応する上で都合のよいものになる。すなわち、今後の
技術動向として、光源となるメタルハライドランプの高
輝度化が進むことが予想されるため、これに対応すべく
粗面化処理部における輝点輝度の減光効果を更に一層向
上させる必要があるからである。According to the second embodiment, since the surface roughening treatment is performed twice, there is an advantage that the incident light from the light source can be further diffused and attenuated. This second embodiment is convenient for responding to future technological trends in projection devices. In other words, as future technological trends are expected to increase the brightness of metal halide lamps as light sources, it is necessary to further improve the bright spot brightness reduction effect in the roughened surface treatment area to accommodate this. This is because there is.
【0036】なお、この修正方法はレーザビーム10を
以下の手順で輝点修正部16に照射して行われる。すな
わち、まず輝点修正部16の全域にレーザビーム10を
一様に照射し、次いで、メッシュ状のスリットパターン
マスクを使用してこれの上方から2度目のレーザビーム
照射を行って凹部19を形成する。Note that this correction method is performed by irradiating the bright spot correction section 16 with the laser beam 10 in the following procedure. That is, first, the laser beam 10 is uniformly irradiated over the entire area of the bright spot correction section 16, and then the recess 19 is formed by irradiating the laser beam a second time from above using a mesh-like slit pattern mask. do.
【0037】図7および図8は本発明の第3実施例を示
しており、この第3実施例では輝点修正部16に図7に
斜線で示される多数の丸穴状の凹部21を形成し、該凹
部21の底面に粗面17を形成する修正方法をとる。こ
の第3実施例の修正方法は上記第2実施例同様の手順で
行われ、同様の減光効果を奏する。FIGS. 7 and 8 show a third embodiment of the present invention. In this third embodiment, a large number of circular hole-shaped recesses 21 are formed in the bright spot correction section 16 as shown by diagonal lines in FIG. However, a correction method is adopted in which a rough surface 17 is formed on the bottom surface of the recess 21. The correction method of this third embodiment is performed in the same procedure as the second embodiment, and produces the same light reduction effect.
【0038】図9は第3実施例で示される粗面化処理の
変形例を示しており、この変形例では凹部21aをテー
パ状に形成し、その底面に粗面17を形成する粗面化処
理を行う。FIG. 9 shows a modification of the surface roughening treatment shown in the third embodiment. In this modification, the recess 21a is formed into a tapered shape, and a rough surface 17 is formed on the bottom surface of the recess 21a. Perform processing.
【0039】図10は本発明の第4実施例を示しており
、この第4実施例ではレーザビーム10の照射方向を輝
点修正部16に対して所定の角度をつけて行い、斜めに
なった凹凸部19b、20bを形成する修正方法をとる
。この第4実施例による場合も上記第2、第3実施例同
様の効果を奏することができる。FIG. 10 shows a fourth embodiment of the present invention. In this fourth embodiment, the irradiation direction of the laser beam 10 is set at a predetermined angle with respect to the bright spot correction unit 16, so that the laser beam 10 is irradiated at a predetermined angle. A correction method is used to form uneven portions 19b and 20b. The fourth embodiment also provides the same effects as the second and third embodiments.
【0040】なお、本発明が適用される液晶パネルは3
枚パネル方式の投影型液晶表示装置に用いられるものに
限定されず、R(赤)、G(緑)、B(青)の三原色カ
ラーフィルタが交互に配列された直視型の液晶パネルで
あっても同様に実施することができる。Note that the liquid crystal panel to which the present invention is applied is 3
It is not limited to those used in single-panel projection type liquid crystal display devices, and is a direct-view type liquid crystal panel in which three primary color filters of R (red), G (green), and B (blue) are alternately arranged. can also be implemented in the same way.
【0041】[0041]
【発明の効果】以上の本発明によれば、上記従来の修正
方法に比して以下に箇条書きする利点を有する。The present invention has the following advantages over the conventional correction method described above.
【0042】■遮光、減光特性。■ Light shielding and light attenuation characteristics.
【0043】従来方法によれば、修正部に入射する入射
光を完全に遮光するので、修正部が黒点となるため修正
箇所がディスプレイの端部に限定されるのに対し、本発
明によれば、入射光を拡散減光して修正するので、かか
る黒点を生じず、修正箇所が限定されることがない。According to the conventional method, since the incident light entering the correction section is completely blocked, the correction section becomes a black spot and the correction area is limited to the edge of the display. Since the correction is performed by diffusing and attenuating the incident light, such black spots do not occur and the correction location is not limited.
【0044】■修正の信頼性。■ Reliability of modification.
【0045】不透明遮光膜を使用しないので、当然のこ
とながら、該膜が清掃時等において剥離、欠落する不具
合を発生することがなく、信頼性の向上が図れる。Since an opaque light-shielding film is not used, it goes without saying that the film does not peel off or fall off during cleaning, and reliability can be improved.
【0046】■修正サイズ、修正形状。■Correction size and shape.
【0047】従来方法によれば、安定した不透明遮光膜
の接着を行わんとすれば、接着形状がどうしても円形の
ものに限定されるため、方形の輝点絵素に対処しづらく
なるのに対し、本発明によれば、スリットパターンを使
用することにより、輝点絵素の形状に対処でき、多種類
の凹凸段差を形成できるので減光度の選択が可能になる
利点がある。According to the conventional method, if an opaque light-shielding film is to be bonded stably, the bonding shape is limited to a circular shape, which makes it difficult to deal with square bright spot pixels. According to the present invention, by using a slit pattern, it is possible to deal with the shape of a bright spot pixel, and many types of uneven steps can be formed, so there is an advantage that the degree of dimming can be selected.
【図1】本発明の一実施例にかかるエキシマレーザ装置
を用いた欠陥の修正方法を模式的に示す図面。FIG. 1 is a drawing schematically showing a defect repair method using an excimer laser device according to an embodiment of the present invention.
【図2】輝点絵素と輝点修正部が照明光に対して同一の
照射経路上にあることを示す図面。FIG. 2 is a drawing showing that a bright spot picture element and a bright spot correction unit are on the same irradiation path with respect to illumination light.
【図3】エキシマレーザエッチングにより形成された粗
面を示す図面。FIG. 3 is a drawing showing a rough surface formed by excimer laser etching.
【図4】図3で示される粗面化処理の変形例を示す図面
。FIG. 4 is a drawing showing a modification of the surface roughening process shown in FIG. 3;
【図5】本発明の第2実施例にかかる輝点修正部を示す
図面。FIG. 5 is a drawing showing a bright spot correction unit according to a second embodiment of the present invention.
【図6】図5のB−B線による断面図。FIG. 6 is a sectional view taken along line BB in FIG. 5;
【図7】本発明の第3実施例にかかる輝点修正部を示す
図面。FIG. 7 is a drawing showing a bright spot correction unit according to a third embodiment of the present invention.
【図8】図7のC−C線による断面図。FIG. 8 is a sectional view taken along line CC in FIG. 7;
【図9】図8で示される粗面化処理の変形例を示す図面
。FIG. 9 is a drawing showing a modification of the surface roughening process shown in FIG. 8;
【図10】本発明の第4実施例にかかる輝点修正部の断
面図。FIG. 10 is a sectional view of a bright spot correction section according to a fourth embodiment of the present invention.
【図11】従来方法を示す側面図。FIG. 11 is a side view showing a conventional method.
【図12】従来方法における図2に対応する図面。FIG. 12 is a drawing corresponding to FIG. 2 in the conventional method.
1 液晶パネル 2 ガラス基板 5 輝点絵素 9 エキシマレーザ発振器 10 レーザビーム 11 スリットパターン 14 載置台 16 輝点修正部 17 粗面 18 凹部 19 凹部 27 出射光側ガラス基板 30 ツィステッドネマティック液晶31 偏向板 40 照明光 1.LCD panel 2 Glass substrate 5 Bright spot picture elements 9 Excimer laser oscillator 10 Laser beam 11 Slit pattern 14 Placement stand 16 Bright spot correction section 17 Rough surface 18 Recess 19 Recess 27 Output light side glass substrate 30 Twisted nematic liquid crystal 31 Deflection plate 40 Illumination light
Claims (2)
透明基板間に液晶が封入され、表示用の絵素がマトリク
ス状に配列された透過型液晶パネルと、該透過型液晶パ
ネルの背面方向より表示用の照明光を照射する光源手段
とを有する液晶表示装置において、輝点欠陥が発生して
いる該絵素を照射する該照明光の照射経路上に位置する
該偏向板の表面付近に凹陥加工部が形成され、該凹陥加
工部の底面が光散乱特性を示す粗面形状に形成されてい
る液晶表示装置。1. A transmissive liquid crystal panel in which a liquid crystal is sealed between a pair of transparent substrates sandwiched between opposing polarizing plates, and display pixels are arranged in a matrix; and the transmissive liquid crystal panel. In a liquid crystal display device having a light source means for irradiating illumination light for display from the rear direction of the polarizing plate located on the irradiation path of the illumination light that irradiates the picture element in which a bright spot defect has occurred, A liquid crystal display device in which a recessed portion is formed near the surface, and the bottom surface of the recessed portion is formed into a rough surface shape exhibiting light scattering characteristics.
透明基板間に液晶が封入され、表示用の絵素がマトリク
ス状に配列された透過型液晶パネルと、該透過型液晶パ
ネルの背面方向より表示用の照明光を照射する光源手段
とを有する液晶表示装置の欠陥修正方法において、該照
明光を該透過型液晶パネルに照射して該絵素に発生して
いる輝点欠陥を検出する工程と、 該輝点欠陥が発生している該絵素を照射する該照明光の
照射経路上に位置する該偏向板の表面付近に、底面が光
散乱特性を示す粗面形状に形成された凹陥加工部を形成
する工程と を含む液晶表示装置の欠陥修正方法。2. A transmissive liquid crystal panel in which a liquid crystal is sealed between a pair of transparent substrates sandwiched between opposing polarizing plates, and display pixels are arranged in a matrix; and the transmissive liquid crystal panel. A method for repairing a defect in a liquid crystal display device having a light source means for irradiating illumination light for display from the back side of the display device, wherein the illumination light is irradiated onto the transmissive liquid crystal panel to correct a bright spot defect occurring in the pixel. a step of detecting a rough surface having a bottom surface exhibiting light scattering characteristics near the surface of the deflection plate located on the irradiation path of the illumination light that irradiates the picture element in which the bright spot defect has occurred; A method for correcting a defect in a liquid crystal display device, comprising the step of forming the formed recessed part.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP3129735A JP2740583B2 (en) | 1991-05-31 | 1991-05-31 | Liquid crystal display device and defect repair method for liquid crystal display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP3129735A JP2740583B2 (en) | 1991-05-31 | 1991-05-31 | Liquid crystal display device and defect repair method for liquid crystal display device |
Publications (2)
Publication Number | Publication Date |
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JPH04353821A true JPH04353821A (en) | 1992-12-08 |
JP2740583B2 JP2740583B2 (en) | 1998-04-15 |
Family
ID=15016912
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Application Number | Title | Priority Date | Filing Date |
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JP3129735A Expired - Lifetime JP2740583B2 (en) | 1991-05-31 | 1991-05-31 | Liquid crystal display device and defect repair method for liquid crystal display device |
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JP (1) | JP2740583B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001086616A1 (en) * | 2000-05-11 | 2001-11-15 | Iizuka Electric Industry Co., Ltd. | Image display apparatus, method for repairing dot chipping of image display apparatus, method for attaching repairing material of dot chipping, and method for applying repairing material of dot chipping |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6251319U (en) * | 1985-09-18 | 1987-03-30 | ||
JPH03265820A (en) * | 1990-03-16 | 1991-11-26 | Hitachi Ltd | lcd display |
-
1991
- 1991-05-31 JP JP3129735A patent/JP2740583B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6251319U (en) * | 1985-09-18 | 1987-03-30 | ||
JPH03265820A (en) * | 1990-03-16 | 1991-11-26 | Hitachi Ltd | lcd display |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001086616A1 (en) * | 2000-05-11 | 2001-11-15 | Iizuka Electric Industry Co., Ltd. | Image display apparatus, method for repairing dot chipping of image display apparatus, method for attaching repairing material of dot chipping, and method for applying repairing material of dot chipping |
Also Published As
Publication number | Publication date |
---|---|
JP2740583B2 (en) | 1998-04-15 |
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