JPH04335224A - Production of master stamper and optical master plate container - Google Patents

Abstract

PURPOSE:To prevent the contamination of a plating liquid at the time of electroplating and to produce the good master stamper. CONSTITUTION:A photoresist 3 is applied on the front surface of a master plate 1 and is developed to form signal pits 2 after signals are recorded thereon. The master plate 1 is mounted to the optical master plate container 4 which covers all the surfaces of the master plate 1 exclusive of the surface formed with the signal pits 2. After a thin film (electrode layer 6) of a metal, such as nickel, is formed on the surface formed with the signal pits 2, a metallic layer 7 of several hundred microns is formed by electroplating using this thin film 6 as an electrode and the metallic layer 7 is peeled, by which the master stamper 8 is obtd. Only the optical master plate container 4 and the electrode layer 6 touch the plating liquid at the time of electroplating and, therefore, the plating liquid is not contaminated.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a master stamper manufacturing method and an optical disc master container, and more particularly to a master stamper manufacturing method and an optical disc master container used in manufacturing optical discs.

0002

2. Description of the Related Art In FIGS. 3(A) to 3(H), in (A), an optical disc master is generally a master disc 1 whose surface is polished (
In B), a photoresist 3 is applied, in (C) this is exposed using a laser beam whose intensity is modulated according to the information signal to be recorded, and in (D) it is developed to form an uneven signal corresponding to the sensitivity. Alternatively, it is produced by forming at least one of the grooves 2. Hereinafter, the uneven signal and the groove 2 will be collectively referred to as a signal pit. A master stamper 8 is manufactured from this optical disc master 5. In (E), a thin film of metal such as nickel is deposited on the surface of the optical disc master 5 on which the signal pits 2 are formed by vapor deposition or sputtering to form the electrode layer 6, and in (F) the surface on which the electrode layer 6 is formed. To,
A metal layer 7 of several hundred microns is formed by electrolytic plating. In (G), the electrode layer 6 and metal layer 7 are then peeled off from the master, and in (H), the photoresist 3 adhering to the surface is washed off to manufacture a master stamper 8.

Glass is generally used as the master disc 1, but concentric or spiral grooves (hereinafter abbreviated as V grooves) with a V-shaped cross section are formed in advance on one surface of the master disc 1. When used, a metal master such as copper is used as the master disc 1 instead of glass in order to form a V-groove by machining.

0004

[Problem to be solved by the invention] With glass master discs, metal ions of different types do not dissolve out and contaminate the plating solution during electrolytic plating, but with master discs made of metal such as copper, metal ions do dissolve out. It will contaminate the plating solution. If the plating solution becomes contaminated, foreign matter or defects may occur in the metal layer 7 formed by electrolytic plating, making it impossible to obtain a good metal layer and making it impossible to manufacture a good master stamper.

SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned problems and to provide a method for manufacturing a master stamper in which the metal of the master stamp does not dissolve as impurities into the electrolytic plating solution.

[0006]

[Means for Solving the Problems] In order to achieve this object, the method for manufacturing a master stamper and the optical disc master container of the present invention include a step of forming at least one of an uneven signal or a groove on one surface of the master, and a step of forming an uneven signal or groove on one surface of the master. a step of mounting an optical disc master container that covers all surfaces other than the surface on which at least one of the uneven signals or grooves is formed; and a step of forming a metal film on the surface on which at least one of the uneven signals or grooves is formed. The method mainly includes a step of forming a metal layer having the same composition as the metal film on the metal film, and a step of peeling off a master stamper composed of the metal layer and the metal film from the optical disc master. .

[0007]

[Operation] With this structure, the master stamper manufacturing method and the optical disc master container of the present invention are such that all surfaces of the master other than the surface on which the signal pits are formed are covered by the optical disc master container, and the surface on which the signal pits are formed. Since the stamper is covered with the same metal as the metal to be plated, the master stamper does not dissolve into the electrolytic plating solution as an impurity, making it possible to form a highly pure metal layer, creating a strong and good master stamper. This means that it can be manufactured.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing a master stamper and an optical disc master container according to an embodiment of the present invention will be described below with reference to the drawings. In FIGS. 1(A) to (I), (A)
In this step, the surface of the master disk 1 is polished, and in (B), a photoresist 3 is applied to one surface thereof. In (C), this is then exposed using a laser beam whose intensity is modulated according to the information signal to be recorded, and in (D), it is developed to form signal pits 2 corresponding to the sensitivity. In (E), the surface of the master disc 1 on which the signal pits 2 are formed (hereinafter referred to as optical disc master disc 5) other than the surface on which the signal pits 2 are formed is covered with the optical disc master container 4. In (F), a thin metal film (electrode layer) of metal such as nickel is formed on the surface of the optical disc master 5 on which the signal pits 2 are formed.
is deposited by vapor deposition, sputtering, etc. to form an electrode layer 6, and in (G), a metal layer 7 several hundred microns thick is formed on the electrode layer 6 by electrolytic plating, using this electrode layer 6 as an electrode. In (H), the part consisting of the electrode layer 6 and the metal layer 7 is peeled off from the optical disc master 5, and in (I), the part consisting of the electrode layer 6 and the metal layer 7 is peeled off from the optical disc master 5.
A master stamper 8 is produced by washing off the photoresist 3 adhering to the surface of the stamper. Note that the step in FIG. 1(I) may be omitted. The optical disc master container 4 can be removed from the optical disc master 5 and used repeatedly.

[0009] A mother stamper is copied from this master stamper 8, a stamper is copied from the mother stamper, and an optical disc is produced from the stamper. An optical disc may also be produced directly from the master stamper 8.

[0010] Generally, a glass master disk with a polished surface is used to produce an optical disk master disk, but when the master disk is used with a V-groove formed in advance, a material such as copper is used to form the V-groove by machining. A metal master is used. There is no problem even if the optical disc master 5 is a master disc on which signal pits 2 are formed on a master disc on which V grooves are formed. Also, signal pit 2
Although an example is shown where it is formed of photoresist, there is no problem if it is carved into the master disk 1 by etching.

Furthermore, although a master disc without holes is used in this embodiment, the present invention is not limited to this, and even master discs with a hole in the center or a master disc with a metal layer formed on the surface of glass or ceramic can be used. Can apply the invention.

The material for the optical disk master container is an electrically insulating material such as resin, glass, or ceramic, or the same metal as the metal to be adhered to the surface on which the signal pits are formed. There is no problem in using a plurality of materials.

When an electrically insulating material such as resin is used as the material for the optical disc master container 4, metal ions will not dissolve out during plating and contaminate the plating solution. Further, when using the same metal as the metal to be deposited, even if the metal dissolves, the ions are the same as those in the plating solution, so the plating solution will not be contaminated.

The shape of the optical disk master container 4 may be any shape as long as it can cover the surface of the optical disk master 5 other than the surface on which the signal pits 2 are formed, and it may be one piece as shown in FIG. 2, or a plurality of pieces. It is also possible to assemble individual parts.

[0015] With glass master discs, metal ions of different types do not dissolve out and contaminate the plating solution during electrolytic plating, but with copper master discs, metal ions dissolve out and contaminate the plating solution. If the plating solution is contaminated, foreign matter may be mixed in or defects may occur in the metal layer 7 formed by electrolytic plating, making it impossible to obtain a good metal layer 7 and making it impossible to manufacture a good master stamper 8. .

In the method for manufacturing the master stamper 8 of the present invention, even if a metal master is used, the signal pits 2 of the master 1 can be
All surfaces other than the surface on which the signal pits 2 are formed are covered with the optical disc master container 4, and the surface on which the signal pits 2 are formed is covered with the same metal as the metal to be plated. The metal layer 7 can be formed with high purity without metal dissolving as impurities,
A sturdy and good master stamper 8 can be manufactured.

[0017]

Effects of the Invention As is clear from the above description of the embodiments, according to the master stamper manufacturing method and optical disc master container of the present invention, all surfaces of the optical disc master except for the surface on which the signal pits are formed By covering with a container, the metal of the optical disc master does not dissolve into the electrolytic plating solution as an impurity, and a good metal layer can be formed, making it possible to manufacture a good master stamper.

[Brief explanation of drawings]

FIG. 1 is a process diagram showing a method for manufacturing a master stamper according to an embodiment of the present invention and a process for manufacturing a master stamper in an optical disc master container.

[Fig. 2] A cross-sectional view showing an example of an optical disc master container that covers a surface other than the surface on which signal pits are formed on the same optical disc master.

[Figure 3] Process diagram showing the manufacturing process of a conventional master stamper

[Explanation of symbols]

1 Master 2 Signal pit 3 Photoresist 4 Optical disc master container 5. Optical disc master 6 Electrode layer (metal film) 7 Metal layer 8 Master stamper

Claims (5)

[Claims] 1. A step of forming at least one of a concavo-convex signal or a groove on one surface of a master, and an optical disc master container that covers all surfaces other than the surface on which at least one of the concavo-convex signal or groove is formed. a step of forming a metal film on the surface on which at least one of the uneven signals or grooves is formed; a step of forming a metal layer having the same composition as the metal film on the metal film; A method for manufacturing a master stamper, which mainly includes a step of peeling off a master stamper composed of a layer and the metal film from an optical disc master. 2. An optical disc master container that covers all surfaces of the master other than the surface on which at least one of the uneven signals or grooves is formed, formed with an electrically insulating material or at least one of the uneven signals or grooves. 2. The method for manufacturing a master stamper according to claim 1, wherein an optical disc master container is made of at least one of the same metal as the metal film to be formed on the surface of the master stamper. 3. The method for manufacturing a master stamper according to claim 1, wherein a master stamp at least partially made of metal is used. 4. An optical disc master container that covers all surfaces of an optical disc master having at least one of an uneven signal or groove formed on one surface other than the surface on which at least one of the uneven signal or groove is formed. 5. The optical disk master container according to claim 4, which is made of at least one of the same metal as the metal film formed on the surface on which at least one of the electrically insulating material and the uneven signals or grooves is formed.