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JPH04315206A - Diaphragm type flow rate regulating valve - Google Patents

Diaphragm type flow rate regulating valve

Info

Publication number
JPH04315206A
JPH04315206A JP8007591A JP8007591A JPH04315206A JP H04315206 A JPH04315206 A JP H04315206A JP 8007591 A JP8007591 A JP 8007591A JP 8007591 A JP8007591 A JP 8007591A JP H04315206 A JPH04315206 A JP H04315206A
Authority
JP
Japan
Prior art keywords
valve
diaphragm
main valve
main
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8007591A
Other languages
Japanese (ja)
Other versions
JP2936776B2 (en
Inventor
Ryosuke Hayashi
良祐 林
Mikio Horimoto
堀本 幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP8007591A priority Critical patent/JP2936776B2/en
Publication of JPH04315206A publication Critical patent/JPH04315206A/en
Application granted granted Critical
Publication of JP2936776B2 publication Critical patent/JP2936776B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Fluid-Driven Valves (AREA)
  • Flow Control (AREA)

Abstract

PURPOSE:To prevent the influence of secondary pressure by canceling the secondary pressure loaded to a diaphragm constituting the valve body of a main valve by secondary pressure loaded to a secondary diaphragm provided on the secondary side of a flow passage in counter to the above-mentioned diaphragm with a pressure receiving plane having the almost same diameter as the valve seat diameter of this main valve. CONSTITUTION:A flow rate regulating valve A is equipped with a variable aperture pilot valve (b) and by controlling the aperture of this pilot valve (b), the aperture of a diaphragm type main valve (a) is indirectly controlled. On a secondary side 1b of the low passage, a secondary side diaphragm 4 equipped with the pressure receiving plane having the almost same diameter as the valve seat diameter of the main valve (a) is provided concentrically to the valve seat in counter to a diaphragm 2 constituting the valve body of the main valve (a). The secondary side diaphragm 4 is linked to the diaphragm 2 constituting the valve body of the main valve (a) by a linking member 5. Therefore, the secondary pressure loaded to this diaphragm 2 is canceled by the secondary pressure loaded to the secondary side diaphragm 4. Thus, the aperture of the valve A is prevented from being changed by the fluctuation of the secondary pressure.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は流量調節弁、特にダイヤ
フラム式の流量調節弁に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow control valve, particularly a diaphragm type flow control valve.

【0002】0002

【従来の技術】従来、流量調節弁として種々の構造が知
られているが、ボールバルブタイプ等開口面積を直接制
限するものがほとんどであり、主として手動あるいは減
速機を介するモーター駆動により弁を操作している。
[Prior Art] Various structures have been known as flow control valves, but most of them are ball valve types that directly limit the opening area, and the valves are mainly operated manually or by motor drive via a speed reducer. are doing.

【0003】0003

【発明が解決しようとする課題】これら、開口面積を直
接制限する従来の流量調節弁は流量調節、即ち弁の開度
調節に大きな操作力が必要である。
These conventional flow control valves that directly limit the opening area require a large operating force to control the flow rate, that is, to adjust the opening degree of the valve.

【0004】そこで、本発明の発明者等は流量調節弁を
パイロット式のダイヤフラム弁として、パイロット弁の
開度を調節することにより主弁の開度を間接的に制御す
るようにして操作力の軽減を図ることを思いついた。
Therefore, the inventors of the present invention changed the flow rate control valve to a pilot-type diaphragm valve, and indirectly controlled the opening of the main valve by adjusting the opening of the pilot valve, thereby reducing the operating force. I came up with an idea to alleviate it.

【0005】しかし乍ら、このようなダイヤフラム式の
流量調節弁は、流体圧を利用して作動するものであるた
め、流路2次側の圧力(以下二次圧という)の影響を受
け易く、二次圧の変動によりダイヤフラム弁の位置が変
化する可能性があり、流量調節性能に若干問題があった
However, since such a diaphragm type flow rate control valve operates using fluid pressure, it is easily affected by the pressure on the secondary side of the flow path (hereinafter referred to as secondary pressure). However, there was a possibility that the position of the diaphragm valve would change due to fluctuations in the secondary pressure, which caused some problems in flow rate adjustment performance.

【0006】本発明は斯る従来事情に鑑みてなされたも
のであり、その目的とする処は二次圧の影響を受け難い
ダイヤフラム式流量調節弁を提供することである。
The present invention has been made in view of the above-mentioned conventional circumstances, and its object is to provide a diaphragm type flow control valve that is less susceptible to the influence of secondary pressure.

【0007】[0007]

【課題を解決するための手段】[Means to solve the problem]

【0008】上記目的を達成するために本発明のダイヤ
フラム式流量調節弁では、開度可変のパイロット弁を備
え、該パイロット弁の開度調節によりダイヤフラム式の
主弁の開度を間接的に制御するダイヤフラム式の弁構造
となすと共に流路2次側に上記主弁の弁シート径とほぼ
同径の受圧面を有する2次側ダイヤフラムを主弁の弁体
を構成するダイヤフラムと対向して、弁シートと同心状
に設け、該2次側ダイヤフラムを主弁の弁体を構成する
ダイヤフラムに連結部材で連結するものである。
In order to achieve the above object, the diaphragm type flow control valve of the present invention is provided with a pilot valve whose opening degree is variable, and the opening degree of the diaphragm type main valve is indirectly controlled by adjusting the opening degree of the pilot valve. A diaphragm type valve structure is formed, and a secondary side diaphragm having a pressure-receiving surface having a diameter approximately the same as the valve seat diameter of the main valve on the secondary side of the flow path is arranged opposite to the diaphragm constituting the valve body of the main valve, The secondary diaphragm is provided concentrically with the valve seat, and the secondary diaphragm is connected to the diaphragm constituting the valve body of the main valve by a connecting member.

【0009】[0009]

【作用】以上のように構成したダイヤフラム式流量調節
弁にあっては、二次圧により主弁の弁体を構成するダイ
ヤフラムに加わる力と2次側ダイヤフラムに加わる力が
同じ大きさになるため、二次圧により主弁のダイヤフラ
ムを開弁方向に押す力は、2次側ダイヤフラムに加えら
れ連結部材を介して主弁のダイヤフラムを閉弁方向に引
張る力により相殺されることになり、主弁のダイヤフラ
ムは二次圧の影響を受けない。
[Operation] In the diaphragm flow rate control valve configured as described above, the force applied by the secondary pressure to the diaphragm constituting the valve body of the main valve and the force applied to the secondary side diaphragm are of the same magnitude. The force that pushes the diaphragm of the main valve in the opening direction due to the secondary pressure is offset by the force that is applied to the secondary diaphragm and pulls the diaphragm of the main valve in the closing direction via the connecting member. The valve diaphragm is not affected by secondary pressure.

【0010】0010

【実施例】以下、本発明の一実施例を図に基づいて詳細
に説明する。図中(A)は流量調節弁の本体、(6)は
その流入口、(7)は流出口であり、これら両口(6)
(7)を連絡する流路(1)の途中には主弁座(3)が
形成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings. In the figure, (A) is the main body of the flow control valve, (6) is its inlet, and (7) is its outlet.
(7) A main valve seat (3) is formed in the middle of the flow path (1) that communicates with the main valve seat (3).

【0011】また上記流路(1)の1次側(1a)及び
2次側(1b)には夫々主弁座(3)と同心に開口(8
)(9)が本体(A)に開設される。
Furthermore, an opening (8) is provided concentrically with the main valve seat (3) on the primary side (1a) and secondary side (1b) of the flow path (1), respectively.
)(9) is opened in the main body (A).

【0012】そして、上記1次側開口(8)には後述す
るパイロット弁(b)を駆動する駆動部(10)を一体
に備えた蓋(11)が装着され、この蓋(11)と本体
(A)内に設けた段部(12)とにより周縁を挟持して
ダイヤフラム(2)が主弁座(3)と対向状かつ同心状
に配設される。
[0012] A lid (11) integrally equipped with a drive unit (10) for driving a pilot valve (b) to be described later is attached to the primary side opening (8), and the lid (11) and the main body are connected to each other. A diaphragm (2) is disposed facing and concentrically with the main valve seat (3), with its periphery sandwiched between the stepped portion (12) provided in (A).

【0013】このダイヤフラム(2)は主弁座(3)と
対応して主弁(a)を構成するもので(以下主弁用ダイ
ヤフラムという)、その背後には蓋(11)との間に背
圧室(13)を形成する。
This diaphragm (2) corresponds to the main valve seat (3) and constitutes the main valve (a) (hereinafter referred to as the main valve diaphragm), and behind it there is a space between it and the lid (11). A back pressure chamber (13) is formed.

【0014】主弁用ダイヤフラム(2)には主弁座(3
)への着座部分の変形を防止するため、主弁座(3)の
シート径より若干大径な当板(14)が背面側に当てら
れ、主弁座(3)を外側に外れる位置において当板(1
4)とダイヤフラム(2)を小孔状に貫通して背圧室(
13)と流路を1次側(1a)を連通連絡する小通路(
15)が形成される。
The main valve diaphragm (2) has a main valve seat (3).
) In order to prevent deformation of the seating part, a contact plate (14) with a diameter slightly larger than the seat diameter of the main valve seat (3) is placed on the back side, and at a position where the main valve seat (3) is removed outwardly. Our board (1
4) and the diaphragm (2) in the form of a small hole to form a back pressure chamber (
13) and a small passage (
15) is formed.

【0015】上記当板(14)には、主弁用ダイヤフラ
ム(2)の中央部を貫通する突部(16)が設けられて
おり、該突部(16)中心を軸方向に貫通してパイロッ
ト孔(17)が形成されると共にこのパイロット孔(1
7)の背圧室(13)側開口縁にパイロット弁座(18
)が形成される。
The abutting plate (14) is provided with a protrusion (16) that passes through the center of the main valve diaphragm (2), and a protrusion (16) that passes through the center of the protrusion (16) in the axial direction. A pilot hole (17) is formed and this pilot hole (1
A pilot valve seat (18) is installed on the back pressure chamber (13) side opening edge of 7).
) is formed.

【0016】このパイロット弁座(18)に対応してパ
イロット弁(b)を構成する弁体(19)は前記駆動部
(10)より延びて、蓋(11)を貫通し、背圧室(1
3)内に挿入されるプランジャー(20)先端に一体に
設けられる。駆動部(10)はプランジャー(20)と
このプランジャー(20)に連係してこれを進退駆動し
その前進若しくは後退位置を可変させる電磁ソレノイド
や正逆回転可能なモーター等の電気的駆動装置(21)
等を備え、電気的駆動装置をケーシング(22)内に収
めると共にプランジャー(20)をケーシング底板(2
2a )を貫通せしめて設けてあり、ケーシング(22
)が蓋(11)の背面に取着固定されてプランジャー(
20)が蓋(11)に設けた挿通孔(23)からパイロ
ット弁座(18)と同心になるように本体(A)の背圧
室(13)内に挿入され、プランジャー(20)先端の
パイロット弁体(19)がパイロット弁座(18)に対
応する。
A valve body (19) constituting the pilot valve (b) corresponding to the pilot valve seat (18) extends from the drive section (10), penetrates the lid (11), and opens the back pressure chamber ( 1
3) It is integrally provided at the tip of the plunger (20) inserted into the plunger (20). The drive unit (10) includes a plunger (20) and an electric drive device such as an electromagnetic solenoid or a motor that can rotate in forward and reverse directions to move the plunger (20) forward and backward and change its forward or backward position. (21)
etc., the electric drive device is housed in the casing (22), and the plunger (20) is housed in the casing bottom plate (22).
2a) is provided through the casing (22a).
) is attached and fixed to the back of the lid (11), and the plunger (
20) is inserted into the back pressure chamber (13) of the main body (A) through the insertion hole (23) provided in the lid (11) so as to be concentric with the pilot valve seat (18), and the tip of the plunger (20) The pilot valve body (19) corresponds to the pilot valve seat (18).

【0017】一方前記、2次側開口(9)にはリング状
の締付具(24)が螺着され、該締付具(24)と本体
(A)内に設けた段部(25)とにより周縁部を挟持し
て2次側ダイヤフラム(4)が2次側開口(9)を塞い
で上記主弁用ダイヤフラム(2)と同心状に対向配設さ
れる。
On the other hand, a ring-shaped fastener (24) is screwed into the secondary opening (9), and the fastener (24) and a step (25) provided in the main body (A) The secondary side diaphragm (4) closes the secondary side opening (9) by sandwiching the peripheral edge thereof, and is arranged concentrically opposite to the main valve diaphragm (2).

【0018】この2次側ダイヤフラム(4)はその受圧
面径AD が主弁座(3)のシート径AS とほぼ同径
に形成され、その中央部にはこの2次側ダイヤフラム(
4)を主弁用ダイヤフラム(2)に連結する連結部材(
5)がネジ(26)止め固定される。
The pressure receiving surface diameter AD of this secondary diaphragm (4) is formed to be approximately the same diameter as the seat diameter AS of the main valve seat (3), and the secondary diaphragm (4) is formed in the center thereof.
4) to the main valve diaphragm (2).
5) is fixed with screws (26).

【0019】連結部材(5)は一端を2次側ダイヤフラ
ム(4)中央にネジ(26)止めされて流路(1)内を
主弁座(3)方向へ主弁座(3)と同心に延び、他端に
は軸方向に凹穴(27)が開口すると共に周縁に主弁座
(3)より若干小径なフランジ(28)が設けられてお
り、凹穴(27)と当板(14)の突部(16)とを両
者に設けた螺子(29)により螺着し、フランジ(28
)と当板(14)とで主弁用ダイヤフラム(2)を挟持
することによって2次側ダイヤフラム(4)と主弁用ダ
イヤフラム(2)とを連結している。
The connecting member (5) has one end fixed to the center of the secondary diaphragm (4) with a screw (26), and moves in the flow path (1) toward the main valve seat (3) concentrically with the main valve seat (3). A recessed hole (27) is opened in the axial direction at the other end, and a flange (28) with a slightly smaller diameter than the main valve seat (3) is provided on the periphery, and the recessed hole (27) and the contact plate ( 14) and the protrusion (16) with the screws (29) provided on both sides, and the flange (28)
) and the contact plate (14) sandwich the main valve diaphragm (2), thereby connecting the secondary side diaphragm (4) and the main valve diaphragm (2).

【0020】そして、上記連結部材(5)には該部材外
部と凹穴(27)内底部を連絡する通孔(30)が周側
面に開穿されこれによりパイロット孔(17)は流路2
次側(1b)に通じることができるようになっている。
A through hole (30) connecting the outside of the connecting member (5) and the inner bottom of the recessed hole (27) is opened on the circumferential side of the connecting member (5), so that the pilot hole (17) is connected to the flow path 2.
It is now possible to connect to the next side (1b).

【0021】而して、斯る流量調節弁は、パイロット弁
(b)を開弁して背圧室(13)の圧力を抜くことによ
り、流路1次側(1a)の圧力と背圧室(13)内圧力
との圧力差が生じさせ、その圧力差で、主弁(a)が開
弁するが、プランジャー(20)を進退させパイロット
弁(b)の位置を調節することにより、主弁(a)の弁
開度が調節される。即ち流量が調節される。
[0021] Thus, such a flow rate control valve adjusts the pressure and back pressure on the primary side (1a) of the flow path by opening the pilot valve (b) and releasing the pressure in the back pressure chamber (13). A pressure difference with the internal pressure of the chamber (13) is generated, and the main valve (a) opens due to the pressure difference. By moving the plunger (20) back and forth and adjusting the position of the pilot valve (b), , the valve opening degree of the main valve (a) is adjusted. That is, the flow rate is adjusted.

【0022】この際、二次圧は主弁用ダイヤフラム(2
)及び2次側ダイヤフラム(4)の双方に対して同じよ
うにかかるが、主弁用ダイヤフラム(2)と2次側ダイ
ヤフラム(4)の受圧面は対向しているためダイヤフラ
ム(2)(4)相互に対して反対方向への付勢力となる
At this time, the secondary pressure is applied to the main valve diaphragm (2
) and the secondary diaphragm (4), but since the pressure receiving surfaces of the main valve diaphragm (2) and the secondary diaphragm (4) face each other, the diaphragm (2) (4) ) They act as urging forces in opposite directions to each other.

【0023】ところが、主弁座(3)のシート径AS 
(主弁用ダイヤフラムが二次圧を受ける面の径)と2次
側ダイヤフラム(4)の受圧面径AD がほぼ同径であ
るため、二次圧により主弁用ダイヤフラム(2)にかか
る力と2次側ダイヤフラム(4)にかかる力とがほぼ等
しくなり、しかも両ダイヤフラム(2)(4)は連結部
材(5)で相互に連結されているので、両ダイヤフラム
(2)(4)にかかる力は相殺される。
However, the seat diameter AS of the main valve seat (3)
(The diameter of the surface where the main valve diaphragm receives secondary pressure) and the pressure receiving surface diameter AD of the secondary diaphragm (4) are almost the same diameter, so the force exerted on the main valve diaphragm (2) by the secondary pressure and the force applied to the secondary diaphragm (4) are almost equal, and since both diaphragms (2) and (4) are connected to each other by the connecting member (5), Such forces are canceled out.

【0024】従って、仮に下流側の水栓の開閉により、
二次圧が変動しても主弁用ダイヤフラム(2)がその影
響を受けることがなく、主弁(a)の弁開度は変化しな
い。
Therefore, if the downstream faucet is opened and closed,
Even if the secondary pressure fluctuates, the main valve diaphragm (2) is not affected by it, and the valve opening of the main valve (a) does not change.

【0025】尚、この実施例においては、本体(A)の
蓋(11)と駆動部(10)のケーシング底板(22a
 )との間は当然シールするが、プランジャー(20)
が上記座板(22a )及び蓋(11)を挿通する部分
にはシールせず、背圧室(13)内の水がプランジャー
(20)背後に巡り込む構造になっている。
In this embodiment, the lid (11) of the main body (A) and the casing bottom plate (22a) of the drive section (10) are
), but the plunger (20)
However, the portion through which the seat plate (22a) and the lid (11) are inserted is not sealed, and water in the back pressure chamber (13) flows behind the plunger (20).

【0026】次に図3は基本的には前記実施例と変わる
処はないが、プランジャー(20)がケーシング底板(
22a )を挿通する部分をOリング(31)でシール
しており、そのシール部の径AP をパイロット弁座(
18)のシート径AR と同径に形成したものである。
Next, in FIG. 3, there is basically no difference from the above embodiment, but the plunger (20) is attached to the casing bottom plate (
The part where the valve (22a) is inserted is sealed with an O-ring (31), and the diameter AP of the sealing part is set to the pilot valve seat (
18) is formed to have the same diameter as the seat diameter AR.

【0027】斯る構造とすることにより、この実施例の
流量調節弁は、背圧室(13)内の水圧によりプランジ
ャー(20)にかかる閉弁方向の力と開弁方向の力を相
殺することができ、前示実施例のものに比べて小さな操
作力で流量調節が可能になる。
With this structure, the flow control valve of this embodiment cancels the force in the valve closing direction and the force in the valve opening direction applied to the plunger (20) by the water pressure in the back pressure chamber (13). This makes it possible to adjust the flow rate with a smaller operating force than in the previous embodiment.

【0028】[0028]

【効果】本発明は以上のように、流路2次側に上記主弁
の弁シート径とほぼ同径の受圧面を有する2次側ダイヤ
フラムを主弁の弁体を構成するダイヤフラムと対向して
弁シートと同心状に設け、該2次側ダイヤフラムを主弁
の弁体を構成するダイヤフラムに連絡部材で連絡したの
で、主弁の弁体を構成するダイヤフラムにかかる二次圧
は2次側ダイヤフラムにかかる二次圧により相殺される
[Effects] As described above, the present invention includes a secondary diaphragm having a pressure receiving surface having a diameter approximately the same as the valve seat diameter of the main valve on the secondary side of the flow path, which faces the diaphragm constituting the valve body of the main valve. Since the secondary diaphragm is connected to the diaphragm constituting the valve body of the main valve by a connecting member, the secondary pressure applied to the diaphragm constituting the valve body of the main valve is on the secondary side. This is offset by the secondary pressure on the diaphragm.

【0029】従って、流体を利用するダイヤフラム式の
流量調節弁となしたにもかかわらず、主弁の開度は二次
圧の変動により変化することがない高性能の流量調節弁
を得ることができる。
Therefore, even though the valve is a diaphragm type flow control valve that uses fluid, it is not possible to obtain a high-performance flow control valve in which the opening degree of the main valve does not change due to fluctuations in the secondary pressure. can.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】  本発明の一実施例を示すダイヤフラム式流
量調節弁の断面図。
FIG. 1 is a cross-sectional view of a diaphragm flow control valve showing one embodiment of the present invention.

【図2】  弁を締め切った状態において要部を示す断
面図。
FIG. 2 is a sectional view showing the main parts in a state where the valve is closed.

【図3】  他の実施例を示す断面図。FIG. 3 is a sectional view showing another embodiment.

【符号の説明】[Explanation of symbols]

a:主弁          b:パイロット弁1:流
路          1a:流路1次側1b:流路2
次側 2:主弁の弁体を構成するダイヤフラム(主弁用ダイヤ
フラム) 3:主弁座        4:2次側ダイヤフラム5
:連結部材
a: Main valve b: Pilot valve 1: Flow path 1a: Flow path primary side 1b: Flow path 2
Next side 2: Diaphragm that constitutes the valve body of the main valve (main valve diaphragm) 3: Main valve seat 4: Secondary side diaphragm 5
:Connection member

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  開度可変のパイロット弁を備え、該パ
イロット弁の開度調節によりダイヤフラム式の主弁の開
度を間接的に制御するダイヤフラム式流量調節弁であっ
て、流路2次側に上記主弁の弁シート径とほぼ同径の受
圧面を有する2次側ダイヤフラムを主弁の弁体を構成す
るダイヤフラムと対向して弁シートと同心状に設け、該
2次側ダイヤフラムを主弁の弁体を構成するダイヤフラ
ムに連結部材で連絡したことを特徴とするダイヤフラム
式流量調節弁。
1. A diaphragm type flow control valve comprising a pilot valve with a variable opening degree, and indirectly controlling the opening degree of a diaphragm type main valve by adjusting the opening degree of the pilot valve, wherein the valve is provided on the secondary side of a flow path. A secondary diaphragm having a pressure-receiving surface of approximately the same diameter as the valve seat diameter of the main valve is provided concentrically with the valve seat, facing the diaphragm constituting the valve body of the main valve. A diaphragm type flow control valve, characterized in that it is connected to a diaphragm constituting a valve body of the valve through a connecting member.
JP8007591A 1991-04-12 1991-04-12 Diaphragm flow control valve Expired - Fee Related JP2936776B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8007591A JP2936776B2 (en) 1991-04-12 1991-04-12 Diaphragm flow control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8007591A JP2936776B2 (en) 1991-04-12 1991-04-12 Diaphragm flow control valve

Publications (2)

Publication Number Publication Date
JPH04315206A true JPH04315206A (en) 1992-11-06
JP2936776B2 JP2936776B2 (en) 1999-08-23

Family

ID=13708096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8007591A Expired - Fee Related JP2936776B2 (en) 1991-04-12 1991-04-12 Diaphragm flow control valve

Country Status (1)

Country Link
JP (1) JP2936776B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06170216A (en) * 1992-12-08 1994-06-21 Toyo Eng Corp Cartridge piping connecting device and batch production system
WO2004006035A1 (en) * 2002-07-03 2004-01-15 Asahi Organic Chemicals Industry Co., Ltd. Fluid control valve
JP2007058352A (en) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd Fluid controller

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06170216A (en) * 1992-12-08 1994-06-21 Toyo Eng Corp Cartridge piping connecting device and batch production system
WO2004006035A1 (en) * 2002-07-03 2004-01-15 Asahi Organic Chemicals Industry Co., Ltd. Fluid control valve
US7108241B2 (en) 2002-07-03 2006-09-19 Asahi Organic Chemicals Industry Co., Ltd. Flow control valve
JP2007058352A (en) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd Fluid controller

Also Published As

Publication number Publication date
JP2936776B2 (en) 1999-08-23

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