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JPH04282593A - Cartridge heater - Google Patents

Cartridge heater

Info

Publication number
JPH04282593A
JPH04282593A JP4635791A JP4635791A JPH04282593A JP H04282593 A JPH04282593 A JP H04282593A JP 4635791 A JP4635791 A JP 4635791A JP 4635791 A JP4635791 A JP 4635791A JP H04282593 A JPH04282593 A JP H04282593A
Authority
JP
Japan
Prior art keywords
cartridge heater
pipe
temperature
cartridge
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4635791A
Other languages
Japanese (ja)
Inventor
Satoshi Uenosono
聡 上ノ薗
Tadashi Nakano
正 中野
Hiroshi Sato
弘志 佐藤
Masato Kumagai
正人 熊谷
Toshihiko Funabashi
敏彦 船橋
Motonobu Nishimura
元延 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISHIMURA TOGYO KK
JFE Steel Corp
Original Assignee
NISHIMURA TOGYO KK
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISHIMURA TOGYO KK, Kawasaki Steel Corp filed Critical NISHIMURA TOGYO KK
Priority to JP4635791A priority Critical patent/JPH04282593A/en
Publication of JPH04282593A publication Critical patent/JPH04282593A/en
Pending legal-status Critical Current

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  • Resistance Heating (AREA)

Abstract

PURPOSE:To provide a cartridge heater where the quick heating is possible and the quantity of power consumption is small. CONSTITUTION:The electric insulator pipe 2 to cover a heating part 1 is constituted of a ceramic baked body of AlN. This cartridge heater can quickly heat an object, having high thermal shock resistance, and can save powre consumption.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は各種産業の幅広い製品分
野における加熱源として応用されるカートリッジヒータ
に関し急速な昇温が可能なカートリッジヒータに関する
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cartridge heater that is used as a heating source in a wide range of product fields in various industries, and relates to a cartridge heater that can rapidly raise the temperature.

【0002】0002

【従来の技術】カートリッジヒータは一般に、棒状又は
板状の電気絶縁体に電熱体をコイル状に巻いて発熱部を
形成し、これを電気絶縁体パイプ内に挿入した後、パイ
プの一端に端子部を設け、パイプの両端を絶縁物で封止
して製造される。あるいはセラミックグリーンシートに
W、あるいはMo−Mnなどの抵抗パターンを印刷し、
この抵抗体印刷を施したセラミックシートを棒状または
パイプ状のセラミック成形体の外側に巻き付け、これを
高温一体焼成して発熱部を製造し、これを電気絶縁体パ
イプ内に挿入して製造される。
[Prior Art] Cartridge heaters generally have a heating element formed by coiling an electric heating element around a rod-shaped or plate-shaped electric insulator, and after inserting this into an electric insulator pipe, a terminal is attached to one end of the pipe. It is manufactured by providing a section and sealing both ends of the pipe with an insulator. Alternatively, print a resistance pattern such as W or Mo-Mn on a ceramic green sheet,
This ceramic sheet with resistor printing is wrapped around the outside of a bar-shaped or pipe-shaped ceramic molded body, and this is baked at high temperature to produce a heat generating part, which is then inserted into an electrical insulator pipe. .

【0003】従来よりカートリッジヒータは簡便である
と共に安全性が高く、各種産業で加熱源として幅広く利
用されている。従来、このようなカートリッジヒータの
電気絶縁体パイプとしては、アルミナが用いられてきた
。アルミナ絶縁体パイプは熱伝導率が小さいため、内部
の発熱部からの熱を外部に伝達するには内部温度を高め
るために時間を要し、一定の外部放熱量を得るためには
内面を高温にする必要があり、急速に加熱する用途には
対応が困難であった。さらに、そのための電力使用量が
多い欠点があった。
Conventionally, cartridge heaters are simple and highly safe, and have been widely used as heating sources in various industries. Conventionally, alumina has been used as the electrical insulator pipe of such cartridge heaters. Alumina insulator pipes have low thermal conductivity, so it takes time to raise the internal temperature in order to transfer heat from the internal heat generating part to the outside, and in order to obtain a constant amount of external heat radiation, the inner surface is heated to a high temperature. This makes it difficult to handle applications that require rapid heating. Furthermore, there was a drawback that a large amount of power was used for this purpose.

【0004】0004

【発明が解決しようとする課題】本発明は前述した問題
点を解決するもので、急速な昇温が可能で、電力使用量
が少ないカートリッジヒータを提供するものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems and provides a cartridge heater that can rapidly raise the temperature and consumes less power.

【0005】[0005]

【課題を解決するための手段】本発明は前記課題を解決
するため、カートリッジヒータの電気絶縁体パイプとし
て、AlN焼結体を使用することを特徴とする。
[Means for Solving the Problems] In order to solve the above problems, the present invention is characterized in that an AlN sintered body is used as an electrical insulator pipe of a cartridge heater.

【0006】[0006]

【作用】カートリッジヒータを急速に昇温させるには熱
伝導率の大きな電気絶縁体のパイプを使用すればよい。 これは発熱部からの熱を外部に伝えるためには電気絶縁
体中を効率よく熱伝導する必要があるからである。本発
明に用いるAlN焼結体は150W/m・K程度の高熱
伝導性を有し、アルミナの約10倍である。
[Operation] In order to rapidly raise the temperature of the cartridge heater, an electrically insulating pipe with high thermal conductivity may be used. This is because in order to transfer the heat from the heat generating part to the outside, it is necessary to conduct heat efficiently through the electrical insulator. The AlN sintered body used in the present invention has a high thermal conductivity of about 150 W/m·K, which is about 10 times that of alumina.

【0007】また、AlN焼結体は高熱伝導性で均熱性
に富み、さらに強度が大きいので、耐熱衝撃性が優れ、
急速加熱が可能である。このためカートリッジヒータの
電気絶縁体パイプとしてAlN焼結体を用いた場合、ア
ルミナを使用した場合に比べはるかに急速な昇温が可能
となる。またAlN焼結体は熱伝導率が大きいため、カ
ートリッジヒータ内部の温度と表面温度の差が僅差とな
り加熱に必要な電力密度及び電力量が低下する。
[0007] Furthermore, the AlN sintered body has high thermal conductivity, excellent heat uniformity, and high strength, so it has excellent thermal shock resistance.
Rapid heating is possible. Therefore, when an AlN sintered body is used as the electrical insulator pipe of the cartridge heater, the temperature can be increased much more rapidly than when alumina is used. Further, since the AlN sintered body has high thermal conductivity, the difference between the temperature inside the cartridge heater and the surface temperature is small, and the power density and amount of power required for heating are reduced.

【0008】本発明の電気絶縁体パイプとして使用する
AlN焼結体は以下の方法で製造することができる。A
lN粉末に焼結助剤、成形助剤を適量配合し湿式混合す
る。形状に応じて押出成形、射出成形、プレス成形等各
種成形方法により成形を行う。また抵抗体ペーストをセ
ラミックグリーンシートに印刷して一体焼成を行う場合
は、シート成形法によりグリーンシートを作成する。成
形、脱脂後窒素気流中で1750℃から1950℃の温
度で焼結を行う。例えば焼結助剤にY2 O3 を用い
れば150W/m・K程度の高熱伝導性の焼結体が得ら
れる。
The AlN sintered body used as the electrical insulator pipe of the present invention can be manufactured by the following method. A
Appropriate amounts of sintering aid and forming aid are added to IN powder and wet mixed. Depending on the shape, molding is performed using various molding methods such as extrusion molding, injection molding, and press molding. Further, when printing the resistor paste on a ceramic green sheet and performing integral firing, the green sheet is created by a sheet molding method. After molding and degreasing, sintering is performed at a temperature of 1750°C to 1950°C in a nitrogen stream. For example, if Y2 O3 is used as a sintering aid, a sintered body with high thermal conductivity of about 150 W/m·K can be obtained.

【0009】[0009]

【実施例】以下本発明の実施例を図1に基づいて説明す
る。図1にカートリッジヒータの構成例を示した。Ni
−Crからなる発熱体を巻いた陶磁器製の棒状焼結体か
らなる発熱部1を準備し、この発熱部1をAlNからな
る内径8mm、外径10mmの電気絶縁体パイプ2の内
部に挿入し、絶縁物3でパイプの両端を封止し、カート
リッジヒータを作製した。比較例1として、アルミナを
パイプ2としたほかは同一仕様のカートリッジヒータを
作製した。
[Embodiment] An embodiment of the present invention will be described below based on FIG. FIG. 1 shows an example of the configuration of a cartridge heater. Ni
- Prepare a heat generating part 1 made of a rod-shaped sintered ceramic body wrapped around a heat generating element made of Cr, and insert this heat generating part 1 into an electrical insulator pipe 2 made of AlN with an inner diameter of 8 mm and an outer diameter of 10 mm. Both ends of the pipe were sealed with insulator 3 to produce a cartridge heater. As Comparative Example 1, a cartridge heater with the same specifications except that the pipe 2 was made of alumina was manufactured.

【0010】これら2種のカートリッジヒータに10V
、3Aの電流を流した時のヒータ表面温度の時間変化を
図2に示した。図2からアルミナを利用して作製したカ
ートリッジヒータに比べAlN焼結体を使用したカート
リッジヒータでは、約5倍の昇温速度で昇温が可能とな
った。またアルミナは耐熱衝撃性が小さいためこの条件
では300℃で破壊した。
10V to these two types of cartridge heaters
FIG. 2 shows the change in heater surface temperature over time when a current of 3 A was applied. As can be seen from FIG. 2, the cartridge heater using the AlN sintered body was able to raise the temperature about five times faster than the cartridge heater made using alumina. Furthermore, since alumina has low thermal shock resistance, it broke at 300°C under these conditions.

【0011】また上記電気絶縁体パイプの表面温度が2
50℃になるまでのヒータの電力使用量を測定した。A
lNを使用したカートリッジヒータでは、アルミナを使
用した場合に比べ約40%の電力使用量であった。
Further, the surface temperature of the electric insulator pipe is 2
The amount of power used by the heater until the temperature reached 50°C was measured. A
The cartridge heater using IN used approximately 40% less power than the cartridge heater using alumina.

【0012】0012

【発明の効果】本発明のカートリッジヒータはAlNか
ら構成された電気絶縁体パイプを用いているので、急速
加熱が可能であると共に電力使用量も少なくて済む効果
がある。
Effects of the Invention Since the cartridge heater of the present invention uses an electrically insulating pipe made of AlN, rapid heating is possible and the amount of power consumed can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の実施例の模式図である。FIG. 1 is a schematic diagram of an embodiment of the present invention.

【図2】本発明の効果を示すグラフである。FIG. 2 is a graph showing the effects of the present invention.

【符号の説明】[Explanation of symbols]

1  発熱部 2  セラミックパイプ 3  絶縁物 1 Heat generating part 2 Ceramic pipe 3 Insulator

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  AlN焼結体からなる電気絶縁体パイ
プを備えたことを特徴とするカートリッジヒータ。
1. A cartridge heater comprising an electrical insulator pipe made of an AlN sintered body.
JP4635791A 1991-03-12 1991-03-12 Cartridge heater Pending JPH04282593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4635791A JPH04282593A (en) 1991-03-12 1991-03-12 Cartridge heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4635791A JPH04282593A (en) 1991-03-12 1991-03-12 Cartridge heater

Publications (1)

Publication Number Publication Date
JPH04282593A true JPH04282593A (en) 1992-10-07

Family

ID=12744898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4635791A Pending JPH04282593A (en) 1991-03-12 1991-03-12 Cartridge heater

Country Status (1)

Country Link
JP (1) JPH04282593A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2720888A1 (en) * 1994-06-03 1995-12-08 Electricite De France Protective envelope for electric components esp, immersion heating elements used e.g. in aluminium@ prodn.
JP2003515950A (en) * 1999-11-30 2003-05-07 ウエファーマスターズ, インコーポレイテッド Single wafer furnace with resistance heating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2720888A1 (en) * 1994-06-03 1995-12-08 Electricite De France Protective envelope for electric components esp, immersion heating elements used e.g. in aluminium@ prodn.
JP2003515950A (en) * 1999-11-30 2003-05-07 ウエファーマスターズ, インコーポレイテッド Single wafer furnace with resistance heating

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