JPH04274014A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To provide the thin-film magnetic head which can omit a stage for forming a lower magnetic film and has a slider having excellent wear resistance and slidability. CONSTITUTION:The slider 5 is constituted of a magnetic material. Two recessed parts 61, 62 are provided apart a spacing in the direction where a medium outflow direction a of the air bearing surfaces 53, 54 intersect. The slider part between the recessed parts 61 and 62 is formed as a lower pole part 55.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating thin-film magnetic head in which a thin-film magnetic transducer is provided at one end of a slider in a medium outflow direction, and the slider is made of a magnetic material.
On one end side where the thin-film magnetic transducer element is provided, two are spaced apart in a direction intersecting the medium outflow direction of the air bearing surface.
By providing two recesses and using the slider part between the recesses as the lower pole part, the process of forming the lower magnetic film including the lower pole part can be omitted, and it is also a low-cost product with excellent workability, wear resistance, and sliding properties. A thin film magnetic head having a slider can be obtained.

0002

[Prior Art] Conventionally, magnetic disk drives have a thin-film magnetic head that uses dynamic pressure generated by the running of the magnetic recording medium to fly while maintaining a small air bearing gap between itself and the magnetic recording medium. It is used. Its basic configuration is that a thin film magnetic transducer is provided on the air outflow end side of a slider that has an air bearing surface on the side facing the magnetic recording medium. FIG. 13 shows the basic structure of this type of thin-film magnetic head known from U.S. Pat. Two rail portions 101 and 102 are provided protrudingly from the rail portions 101 and 1.
The surface of 02 is an air bearing surface 1 with a high degree of flatness.
03 and 104, and a thin film magnetic transducer 2 is provided at each end of the rail portions 101 and 102 in the air outflow direction a.
is provided.

Referring to FIG. 14, the slider 1 is
It has a structure in which an insulating film 120 made of Al2O3 or the like is attached to a base portion 110 made of l2O3 -TiC or the like by means such as sputtering.
A thin film magnetic transducer element 2 is provided on the top.

The thin film magnetic transducer 2 is a thin film element formed according to a process similar to IC manufacturing technology. 21 is a lower magnetic film made of permalloy or the like, 22 is Al
23 is an upper magnetic film made of permalloy, etc., 24 is a coil, 251 to 253 are interlayer insulating films made of photoresist, etc., and 26 is Al.
A protective film such as 2O3 is provided, and 27 and 28 are lead conductors.

[0005] The lower magnetic film 21 and the upper magnetic film 23 have their tip portions facing each other with a gap film 22 in between.
11 and an upper pole portion 231, and the lower pole portion 211, the gap film 22, and the upper pole portion 231 constitute a conversion gap. Lower pole part 211
The yoke parts 212 and 232 are continuous with the upper pole part 231, and the yoke parts 212 and 232 are coupled to each other at a rear coupling part 233 to complete a magnetic circuit. The coil 24 is formed to spiral around the coupling portion 233. Both ends of the coil 24 are connected to lead conductors 27 and 28. Lead conductor 27
, 28 are led out to regions where the extraction electrodes 41 and 42 are formed, and the extraction electrodes 41 and 42 are formed at the ends thereof. The extraction electrodes 41 and 42 are covered with a protective film 26 that protects the entire thin film magnetic transducer 2 .

[0006]

However, the conventional thin film magnetic head described above has the following problems. (A) After attaching an insulating film 120 made of Al2O3 or the like to the base part 110 made of Al2O3 -TiC or the like, a lower pole part 211 is formed on the insulating film 120 by a process similar to IC manufacturing technology. A lower magnetic film 21 must be formed. For this reason,
The number of processes increases. (B) The track direction widths of the lower pole portion 211 of the lower magnetic film 21 and the upper pole portion 231 of the upper magnetic film are determined by patterning when forming the lower magnetic film 21 and the upper magnetic film 23 by photolithography. and cannot be changed later. Therefore, if the width in the track direction does not fall within a predetermined value, the product will be defective, resulting in a decrease in yield.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems, omit the step of forming the lower magnetic film that will become the lower pole part, and provide a low-temperature film with excellent workability, wear resistance, and sliding properties. It is an object of the present invention to provide a thin film magnetic head having a slider at a low cost.

[0008]

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides that the slider is made of a magnetic material, and the thin film magnetic conversion element includes a lower magnetic material of the slider and a lower magnetic material. an upper magnetic film that together constitute a magnetic circuit; a lower pole part and an upper pole part formed as part of the lower magnetic body and the upper magnetic film so that their tip surfaces appear on the air bearing surface; and the lower pole part. and a gap film provided between the upper pole parts, a coupling part that couples the lower magnetic body and the upper magnetic film at the rear, and a coil formed in a spiral shape around the coupling part. The slider has two recesses spaced apart from each other in a direction perpendicular to the medium outflow direction of the air bearing surface on one end side where the thin film magnetic transducer is provided, and The portion is characterized by being formed by a slider portion between the recesses.

[0009]

[Function] Since the slider is made of a magnetic material such as ferrite, its workability, wear resistance, and slidability are improved.

Since the lower pole portion is constituted by the slider portion made of a magnetic material, there is no need for a step of forming a lower magnetic film to obtain the lower pole portion, unlike the conventional method. Therefore, the number of steps is reduced.

Moreover, since the lower pole portion is constituted by the slider portion between two recesses formed at intervals in a direction perpendicular to the direction of medium outflow on the air bearing surface, the position of the lower pole portion depends on the position of the recesses. By adjusting the width in the track direction, for example, narrowing the width in the track direction to accommodate high-density recording can be easily realized.

0012

1 is a perspective view of a thin film magnetic head according to the present invention, FIG. 2 is an enlarged view of a thin film magnetic transducer element portion, FIG. 3 is an enlarged perspective view thereof, and FIG. 4 is an enlarged sectional view thereof. In the figures, the same reference numerals as in FIGS. 13 and 14 indicate the same components. 5 is a slider. The slider 5 is entirely made of a magnetic material such as ferrite. Therefore, wear resistance and sliding properties are improved. The slider 5 shown in the figure has a side facing the medium, as in the conventional case.
Two rail portions 51, 52 are provided at intervals, and the surfaces of the rail portions 51, 52 are air bearing surfaces 53, 54 having a high degree of flatness.
A thin film magnetic transducer element 2 is provided at each end in the air outflow direction a.

The thin film magnetic transducer 2 includes a lower magnetic body formed by the slider 5, an upper magnetic film 23 that forms a magnetic circuit together with the lower magnetic body, and a tip surface of the lower magnetic body and the upper magnetic film 23, each of which is made of air. It consists of a lower pole part 55 and an upper pole part 231 formed to appear on the bearing surfaces 53 and 54, a gap film 22 provided between the lower pole part 55 and the upper pole part 231, and a slider 5 at the rear. It has a coupling part 233 that couples the lower magnetic body and the upper magnetic film 23, and a coil 24 formed in a spiral shape around the coupling part 233. 251 to 253 are intermembrane insulating films.

The slider 5 has two recesses 61 and 62 provided at an interval W2 in a direction intersecting the medium outflow direction a of the air bearing surfaces 53 and 54 on one end side where the thin film magnetic transducer element 2 is provided. have. Illustrated recesses 61, 62
is a groove having a width W1 and extending substantially parallel to the medium outflow direction a. The lower pole portion 55 is located in this recessed portion 61.
-62. As described above, since the lower pole portion 55 is constituted by the slider portion made of a magnetic material, there is no need for a lower magnetic film forming step to obtain the lower pole portion, unlike the conventional method. Therefore, the number of steps is reduced.

Moreover, the lower pole portion 55 is constituted by a slider portion between two recesses 61 and 62 formed at a distance W2 in a direction perpendicular to the medium outflow direction a of the air bearing surfaces 53 and 54. From the recess 61
, 62, etc., the width W2 in the track direction of the lower pole portion 55 can be adjusted to easily realize narrowing of the width in the track direction to cope with high-density recording.

The depth d1 of the recesses 61 and 62 is 1 μm or more, and is set to be approximately the same as or slightly larger than the throat height TH of the upper pole portion 231. Such recesses 61 and 62 can be formed by a combination of a mask and ion milling, focused ion milling, or the like.

The illustrated recesses 61 and 62 are formed in the medium outflow direction a.
It reaches the surface 261 of the protective film 26 that constitutes the outer end surface of the protective film 26 . With such a structure, the recess 61 when the medium slides
, 62 makes sliding dust discharge easier.

FIG. 5 is a partially enlarged perspective view showing another embodiment of the thin film magnetic head according to the present invention. In this example,
The recesses 61 and 62 are provided to set the track direction width W2 of not only the lower pole portion 55 but also the upper pole portion 231.

FIG. 6 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention. In this embodiment, the recesses 61 and 62 are formed in a stepped shape with openings on three sides.

FIG. 7 is a perspective view showing still another embodiment of the thin film magnetic head according to the present invention. In the slider 5 made of a magnetic material, the air bearing surface 56 on the side facing the medium is a flat surface without a rail portion. There is only one thin film magnetic transducer 2, and a lower pole portion 55 formed by recesses 61 and 62 is formed for this one thin film magnetic transducer 2.

FIG. 8 shows a perspective view of still another embodiment of the thin film magnetic head according to the present invention. The thin film magnetic transducer 2 is arranged approximately in the widthwise middle portion of the slider 5 made of a magnetic material. Further, the extraction electrodes 41 and 42 are arranged side by side in the width direction of the slider 5. The slider 5 has two recesses 61 and 62 spaced apart from each other in a direction intersecting the medium outflow direction a of the air bearing surface 56 on one end side where the thin film magnetic transducer element 2 is provided. The portion 55 is formed by the slider portion between the recesses 61 and 62.

According to the embodiments shown in FIGS. 7 and 8, a compact thin-film magnetic head suitable for high-density recording and high-speed access can be realized.

FIG. 9 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention, and FIG. 10 is a diagram illustrating the operation thereof. In addition to the recesses 61 and 62 that define the width of the pole portion in the track direction, the slider 5 has another recess 63 provided so as to span the end of the upper pole portion 231 on the side opposite to the gap film 22 . The bottom surface of the recess 63 may be the same as the bottom surfaces of the recesses 61 and 62. Also,
The recess 63 may not be stepped but may be a sloped surface. Such a recess 63 can be formed by the same means as the recesses 61 and 62. Referring to FIG. 10, the end surface of the upper pole portion 231 provided with the recess 63 is composed of a first end surface P11 and a second end surface P12. The second end surface P12 is on the opposite side to the direction in which the conversion gap G is located, and is located on the opposite side to the direction in which the conversion gap G is located.
1, it retreats stepwise with a retreat amount d2.

With the above-described structure, the tip thickness of the pole end surface, which is dominant with respect to the magnetic field distribution, is equal to that of the first end surface P1.
It is reduced to a value determined by the tip thickness T11 of 1. Therefore, the magnetic field distribution L2 is sharpened, and the gradient of the magnetic field strength at the medium outlet end side where the magnetization distribution L2 on the medium M is determined becomes steep.

Moreover, during reproduction, the sub-pulse generated at the boundary separating the first end face P11 and the second end face P12 is generated at a position close to the main pulse. Since the resulting reproduced waveform is a combination of the main pulse and the sub-pulses occurring at the boundary, the sub-pulses act in a direction that promotes sharpening of the main pulse. For these two reasons, the reproduced waveform is sharpened and PW5
The 0 value becomes small and high-density recording becomes possible. Further, as a result of the sub-pulse generated at the boundary being combined with the main pulse, undershoot in the reproduced waveform is suppressed. Sharpening of the reproduced waveform will be explained in more detail in the embodiments shown in FIGS. 11 and 12.

FIG. 11 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention, and FIG. 12 is a diagram illustrating the operation thereof. The slider 5 includes recesses 61 and 62 that define the track direction width of the pole portion, and a recess 63 provided so as to span the end of the upper pole portion 231 opposite to the gap film 22, as well as the lower pole portion 55. It has a recess 64 provided so as to span the end opposite to the gap film 22 . Lower pole portion 55 with recess 64
The end face is composed of a third end face P21 and a fourth end face P22. The fourth end surface P22 is located on the opposite side to the direction in which the conversion gap G is located, and is recessed step-wise from the third end surface P21 by a recess amount d3.

In this embodiment, since the effect of the recess 64 is added to the effect of the recess 63, the magnetic field distribution is further sharpened, and the magnetic field strength at the medium outlet side where the magnetization distribution on the medium is determined is increased. The slope becomes even steeper.

Moreover, during reproduction, the first
The sub-pulse L12 generated at the boundary separating the end surface P11 and the second end surface P12, and the third end surface P caused by the recess 64
The sub-pulse L13, which is generated at the boundary separating the second end surface P21 and the fourth end surface P22, is generated at a position close to the main pulse L11. The obtained reproduced waveform L1 is a combination of the main pulse L11 and the sub-pulses L12 and L13, so the sub-pulse L12
, L13 act in a direction that promotes sharpening of the main pulse L11. For these two reasons, the reproduced waveform L1 is sharpened, the PW50 value becomes small, and high-density recording becomes possible. Moreover, as the sub-pulses L12 and L13 generated at the boundary are combined with the main pulse L11, undershoot in the reproduced waveform L1 is suppressed.

Although not shown in the drawings, it goes without saying that there are many variations in which the embodiments shown in FIGS. 1 to 12 are combined.

[0030]

[Effects of the Invention] As described above, according to the present invention, the following effects can be obtained. (a) Since the slider is made of a magnetic material such as ferrite, it is possible to provide a thin film magnetic head with high workability, wear resistance, and slidability. (d) Since the lower pole part is composed of a slider part made of a magnetic material, there is no need for a lower magnetic film forming process to obtain the lower pole part, and the thin film magnetism is easy to manufacture at a low cost with a small number of processes. We can provide heads. (c) Since the lower pole part is constituted by a slider part between two recesses formed at intervals in a direction perpendicular to the direction of medium outflow on the air bearing surface, the position of the recesses determines the track of the pole part. It is possible to provide a thin film magnetic head that can adjust the width in the track direction and easily realize narrowing of the width in the track direction to cope with high-density recording.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a thin film magnetic head according to the present invention.

FIG. 2 is an enlarged view of the thin film magnetic transducer element portion of the thin film magnetic head according to the present invention.

FIG. 3 is an enlarged perspective view of the magnetic transducer element portion of the thin-film magnetic head according to the present invention.

FIG. 4 is an enlarged sectional view of a thin film magnetic head according to the present invention.

FIG. 5 is a partially enlarged perspective view showing another embodiment of the thin film magnetic head according to the present invention.

FIG. 6 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention.

FIG. 7 is a perspective view showing still another embodiment of the thin film magnetic head according to the present invention.

FIG. 8 is a perspective view showing still another embodiment of the thin film magnetic head according to the present invention.

FIG. 9 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention.

10 is a diagram illustrating the operation of the thin film magnetic head according to the present invention shown in FIG. 9. FIG.

FIG. 11 is a partially enlarged perspective view showing still another embodiment of the thin film magnetic head according to the present invention.

12 is a diagram illustrating the operation of the thin film magnetic head according to the present invention shown in FIG. 11. FIG.

FIG. 13 is a perspective view of a conventional thin film magnetic head.

FIG. 14 is an enlarged cross-sectional view of a magnetic transducer element portion of a conventional thin-film magnetic head.

[Explanation of symbols]

2 Magnetic conversion element 22 Gap film 23
Upper magnetic film 231
Upper pole part 24
coil 5
Sliders 53, 54, 56
air bearing surface 55
Lower pole parts 61, 62 recessed part

Claims (6)

[Claims] 1. A thin film magnetic head including a slider and a thin film magnetic transducer provided at one end of the slider in a medium outflow direction, the slider being made of a magnetic material, The conversion element includes a lower magnetic body formed by the slider, an upper magnetic film that constitutes a magnetic circuit together with the lower magnetic body, and a tip surface of the converter as a part of the lower magnetic body and the upper magnetic film so that it appears on the air bearing surface. the formed lower pole part and upper pole part, a gap film provided between the lower pole part and the upper pole part, a coupling part that couples the lower magnetic body and the upper magnetic film at the rear, and the coupling part. The slider has a coil formed in a spiral shape around the part, and the slider has coils arranged at intervals in a direction intersecting the direction of the medium outflow of the air bearing surface on one end side where the thin film magnetic transducer is provided. 1. A thin film magnetic head, comprising two recesses provided at the same distance, and wherein the lower pole portion is formed by a slider portion between the recesses. 2. The thin film magnetic head according to claim 1, wherein the slider is made of ferrite. 3. The thin film magnetic head according to claim 1, wherein the recess reaches an outer end surface in a medium outflow direction. 4. The thin film magnetic head according to claim 1, wherein the recessed portion is provided to set a width of the upper pole portion in the track direction. 5. The slider has another recess provided in the air bearing surface so as to span an end of the upper pole portion opposite to the gap film. , 2, 3 or 4. 6. The slider further includes another recess provided on the air bearing surface so as to span an end of the lower pole portion opposite to the gap film. , 2, 3, 4 or 5.