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JPH04250690A - Manufacture of printed circuit board - Google Patents

Manufacture of printed circuit board

Info

Publication number
JPH04250690A
JPH04250690A JP813791A JP813791A JPH04250690A JP H04250690 A JPH04250690 A JP H04250690A JP 813791 A JP813791 A JP 813791A JP 813791 A JP813791 A JP 813791A JP H04250690 A JPH04250690 A JP H04250690A
Authority
JP
Japan
Prior art keywords
photoresist
wiring board
electrodeposition
seconds
electrodeposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP813791A
Other languages
Japanese (ja)
Inventor
Michinobu Usagawa
宇佐川 道信
Yoshiyuki Kuboi
窪井 良行
Shoichi Fujimori
藤森 正一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP813791A priority Critical patent/JPH04250690A/en
Publication of JPH04250690A publication Critical patent/JPH04250690A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

PURPOSE:To prevent generation of a precipitation malfunction in a photoresist to be formed by electrodepositing. CONSTITUTION:A circuit board provided on the surface with a metal layer is dipped in electrodeposition photoresist liquid, energized, and coated on the surface of the layer with a photoresist by electrodepositing. In this case, the board is vibrated in the liquid from dipping of the board in the liquid at least to an initial period of the energization. Bubbles adhered to the board when dipping of the board in the liquid, bubbles adhered to the board upon generation in the liquid are removed by vibration to be applied to the board in the liquid, thereby preventing precipitation malfunction of the photoresist.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、金属層にフォトレジス
トを電着塗装する工程を含むプリント配線板の製造方法
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, which includes a step of electrodepositing a photoresist on a metal layer.

【0002】0002

【従来の技術】従来、プリント配線板を製造するにあた
っては、積層板などで作成される配線基板の表面に張っ
た銅箔等の金属層の表面にフォトレジストを塗布し、次
に所定のパターンでフォトレジストを露光して現像した
後、エッチング処理して回路形成することによっておこ
なわれている。そして上記のフォトレジストの塗布は、
スプレー法やロールコーター法、ディップ法などでおこ
なわれているが、フォトレジストを薄い膜厚で均一に塗
布することは困難であって、フォトレジストを露光・現
像して形成されるパターンはシャープにならず、市場ニ
ーズの高いファインパターンの微細回路を作成すること
が難しいという問題があり、またスルーホールを有する
プリント配線板を製造するにあたってはスルーホールの
内周のメッキの表面にもフォトレジストを塗布する必要
があるが、これらの塗布法では難しいという問題もある
[Prior Art] Conventionally, in manufacturing printed wiring boards, photoresist is applied to the surface of a metal layer such as copper foil that is placed on the surface of a wiring board made of a laminate, etc., and then a predetermined pattern is applied. This is done by exposing a photoresist to light, developing it, and then etching it to form a circuit. And the above photoresist application is
This is done using the spray method, roll coater method, dip method, etc., but it is difficult to uniformly apply a thin film of photoresist, and the pattern formed by exposing and developing the photoresist is sharp. However, there is a problem in that it is difficult to create microcircuits with fine patterns, which are in high demand in the market.Also, when manufacturing printed wiring boards with through holes, it is necessary to apply photoresist to the plating surface on the inner periphery of the through holes. However, there is a problem in that these coating methods are difficult.

【0003】このために最近、電着塗装をフォトレジス
トの塗布に応用した技術が開発され、実用に供されてい
る。すなわち、特開昭63−17592号公報や特開昭
63−23389号公報等においても開示されているよ
うに、電着型のフォトレジスト液に金属層を張った配線
基板を浸漬し、電着フォトレジスト液と金属層との間に
直流電流を通電すると、電気メッキと同様な原理で電極
反応によって電着フォトレジスト液の樹脂成分が金属層
の表面に析出し、金属層の表面にフォトレジストを電着
塗装することができる。金属層の表面に析出したフォト
レジストは電気的に絶縁性であるために、金属層の表面
で部分的にフォトレジストの析出量に差が生じると、析
出量が少なく絶縁性の低い部分に析出が集中することに
なり、この結果、非常に均一な膜厚でフォトレジストを
塗布することができると共に、スルーホールのような凹
んだ部分にも均一にフォトレジストを塗布することがで
きるのである。
[0003] For this reason, a technique in which electrodeposition coating is applied to photoresist coating has recently been developed and put into practical use. That is, as disclosed in JP-A-63-17592 and JP-A-63-23389, a wiring board covered with a metal layer is immersed in an electrodeposition type photoresist solution, and then the wiring board is electrodeposited. When a direct current is passed between the photoresist solution and the metal layer, the resin component of the electrodeposited photoresist solution is deposited on the surface of the metal layer by an electrode reaction based on the same principle as electroplating, and the photoresist is deposited on the surface of the metal layer. Can be electroplated. Since the photoresist deposited on the surface of the metal layer is electrically insulating, if there is a difference in the amount of photoresist deposited locally on the surface of the metal layer, the amount of photoresist deposited is smaller and will be deposited in areas with low insulation. As a result, the photoresist can be coated with a very uniform film thickness, and the photoresist can also be coated evenly on recessed areas such as through holes.

【0004】0004

【発明が解決しようとする課題】しかし、フォトレジス
トを電着塗装する場合、気泡の存在によるフォトレジス
トの析出異常の発生が問題になる。すなわち、配線基板
を電着フォトレジスト液に浸漬する際に気泡が巻き込ま
れたり、配線基板に設けたスルーホール内に気泡が残っ
たり、あるいは電着の際に発生するガスが気泡として配
線基板の表面やスルーホール内に付着したりして、配線
基板の表面やスルーホール内に気泡が存在することが多
く、このように気泡が存在する箇所には電着でフォトレ
ジストを析出させることができず、この結果フォトレジ
ストの塗膜にピンホールが発生して、最終的にはエッチ
ング処理して形成される回路に欠損不良が生じることに
なるものである。
However, when applying photoresist by electrodeposition, the occurrence of abnormal deposition of the photoresist due to the presence of air bubbles becomes a problem. In other words, when the wiring board is immersed in the electrodeposition photoresist solution, air bubbles may become entangled, air bubbles may remain in the through holes provided in the wiring board, or gases generated during electrodeposition may form bubbles on the wiring board. Bubbles often exist on the surface or inside the through-holes of wiring boards, such as by adhering to the surface or inside the through-holes, and photoresist can be deposited by electrodeposition in areas where these bubbles exist. First, as a result, pinholes occur in the photoresist coating, which ultimately results in defective defects in the circuit formed by etching.

【0005】本発明は上記の点に鑑みてなされたもので
あって、気泡によるフォトレジストの析出異常の発生を
防ぐことができるプリント配線板の製造方法を提供する
ことを目的とするものである。
The present invention has been made in view of the above points, and it is an object of the present invention to provide a method for manufacturing a printed wiring board that can prevent the occurrence of abnormal precipitation of photoresist due to air bubbles. .

【0006】[0006]

【課題を解決するための手段】本発明は、金属層を表面
に設けた配線基板を電着フォトレジスト液に浸漬して通
電することによって金属層の表面にフォトレジストを電
着塗装し、このフォトレジストを露光・現像した後にエ
ッチング処理して回路形成することによってプリント配
線板を製造するにあたって、配線基板を電着フォトレジ
スト液に浸漬してから少なくとも通電の初期に至るまで
電着フォトレジスト液中で配線基板に振動を与えること
を特徴とするものである。
[Means for Solving the Problems] The present invention involves electrodepositing a photoresist on the surface of the metal layer by immersing a wiring board with a metal layer on the surface in an electrodeposition photoresist solution and applying electricity. When manufacturing printed wiring boards by exposing and developing a photoresist and then etching it to form a circuit, the wiring board is immersed in the electrodeposited photoresist solution until at least the initial stage of energization. It is characterized by applying vibration to the wiring board.

【0007】また電着フォトレジスト液中で配線基板に
衝撃を与えるようにしてもよい。以下本発明を詳細に説
明する。配線基板としてはプリント配線板の製造に用い
られるものであれば何ら限定されるものではなく、例え
ば表面に銅箔等の金属箔を貼って金属層を積層したフェ
ノール樹脂積層板、エポキシ樹脂積層板、イミド樹脂積
層板などの金属張り積層板を用いることができる。そし
てこの配線基板を必要に応じて前処理した後、金属層の
表面に電着型のフォトレジストを電着塗装する。
[0007] Alternatively, a shock may be applied to the wiring board in the electrodeposited photoresist solution. The present invention will be explained in detail below. The wiring board is not limited in any way as long as it is used in the manufacture of printed wiring boards, such as phenol resin laminates and epoxy resin laminates with metal foil such as copper foil pasted on the surface and a metal layer laminated thereon. , a metal-clad laminate such as an imide resin laminate can be used. After this wiring board is pretreated as necessary, an electrodeposition type photoresist is electrodeposited on the surface of the metal layer.

【0008】電着のフォトレジストには既出の特開昭6
3−23389号公報に報告されているようにカチオン
型とアニオン型があるが、一般に提供されている任意の
ものを用いることができる。そして配線基板を電着フォ
トレジスト液に浸漬すると共に電着フォトレジスト液に
電極を差込み、配線基板の金属層をカチオン型電着フォ
トレジスト液の場合は陰極に、アニオン型電着フォトレ
ジスト液の場合には陽極にそれぞれ接続すると共に、電
極をカチオン型電着フォトレジスト液の場合は陽極に、
アニオン型電着フォトレジスト液の場合は陰極にそれぞ
れ接続して直流電流を流すことによって、金属層の表面
にフォトレジストを析出させてフォトレジストの電着塗
装をおこなうことができる。
[0008] For electrodeposited photoresists, the previously published Japanese Patent Application Laid-open No. 6
As reported in Japanese Patent No. 3-23389, there are cationic and anionic types, but any commonly available types can be used. Then, the wiring board is immersed in the electrodeposition photoresist solution, and an electrode is inserted into the electrodeposition photoresist solution. In the case of a cationic electrodeposition photoresist solution, connect the electrodes to the anodes respectively, and
In the case of an anionic electrodeposition photoresist solution, the photoresist can be deposited on the surface of the metal layer by connecting each to the cathode and passing a direct current, thereby performing electrodeposition coating of the photoresist.

【0009】上記のように電着塗装をおこなうにあたっ
ては、電着フォトレジスト液に配線基板を浸漬して液中
に所定時間保持した後、所定時間を要して電流値を零か
ら序々に高めるようにして通電の開始をおこない(ソフ
トスタートと称される)、そして所定電流値にまで達し
た後に、一定電圧に保持するようにして通電を制御する
のが好ましい。そして本発明では、配線基板を電着フォ
トレジスト液に浸漬して保持する間及び少なくとも通電
の初期の間、電着フォトレジスト液中で配線基板に振動
を与えるようにするものである。配線基板を電着フォト
レジスト液に浸漬する際に空気を巻き込んで配線基板の
表面に気泡が付着したり、また配線基板に設けたスルー
ホール内に空気が残ってスルーホール内に気泡が付着し
たりするおそれがあるが、本発明では上記のように配線
基板を電着フォトレジスト液に浸漬して保持する間、電
着フォトレジスト液中で配線基板に振動を与えるために
、これらの気泡を配線基板から剥がして除去することが
できるものである。また通電して電着塗装をおこなうと
、電着フォトレジスト液の電解によってH2 やO2 
などが電着フォトレジスト液中にガスとして発生し、こ
のガスが配線基板の表面に気泡になって付着したり、ス
ルーホール中に気泡になって入り込んだりするおそれが
あり、このガスの発生は特に通電の初期において著しい
。 このために本発明は上記のように少なくとも通電の初期
の間、電着フォトレジスト液中で配線基板に振動を与え
るものであり、振動によってこれらの気泡を配線基板か
ら剥がして除去することができるものである。勿論、通
電する間を通して最後まで振動を与えるようにしてもよ
く、振動を与える時間が長いほど良好な結果を得ること
ができるが、少なくとも通電の初期(例えば通電開始後
30秒程度)の間に振動を与えることによって十分な結
果を得ることができるものである。またこの振動に代え
て、あるいは振動を与えるのに併用して、電着フォトレ
ジスト液中で配線基板に衝撃を与えるようにしてもよい
。この衝撃は配線基板を電着フォトレジスト液に浸漬し
てから電着塗装を終えるまで通して所定の時間間隔で与
えるようにするのがよい。
[0009] When performing electrodeposition coating as described above, the wiring board is immersed in an electrodeposition photoresist solution and held in the solution for a predetermined period of time, and then the current value is gradually increased from zero over a predetermined period of time. It is preferable to start the energization in this manner (referred to as a soft start), and after reaching a predetermined current value, to control the energization so as to maintain it at a constant voltage. In the present invention, vibration is applied to the wiring board in the electrodeposited photoresist solution while the wiring board is immersed in the electrodeposition photoresist solution and during at least the initial period of energization. When a wiring board is immersed in an electrodeposited photoresist solution, air may be drawn in and bubbles may adhere to the surface of the wiring board, or air may remain in the through holes provided on the wiring board and air bubbles may adhere to the through holes. However, in the present invention, while the wiring board is immersed and held in the electrodeposited photoresist solution as described above, these bubbles are removed in order to give vibration to the wiring board in the electrodeposition photoresist solution. It can be peeled off and removed from the wiring board. Also, when electricity is applied and electrodeposition coating is performed, H2 and O2 are generated due to electrolysis of the electrodeposited photoresist solution.
etc. are generated as a gas in the electrodeposited photoresist solution, and this gas may adhere as bubbles to the surface of the wiring board or enter the through holes as bubbles. This is especially noticeable at the beginning of energization. To this end, as described above, the present invention applies vibration to the wiring board in the electrodeposited photoresist solution at least during the initial period of energization, and these bubbles can be peeled off and removed from the wiring board by the vibration. It is something. Of course, the vibration may be applied throughout the energization until the end, and the longer the vibration is applied, the better the results can be obtained. Sufficient results can be obtained by applying vibration. Furthermore, in place of this vibration, or in combination with the vibration, a shock may be applied to the wiring board in the electrodeposited photoresist solution. This impact is preferably applied at predetermined time intervals from the time the wiring board is immersed in the electrodeposited photoresist solution until the end of the electrodeposition coating.

【0010】ここで、配線基板をハンガー等に吊り下げ
た状態で電着フォトレジスト液に浸漬することによって
電着塗装をおこなう場合には、このハンガーにバイブレ
ーター等で振動を加えることによって電着フォトレジス
ト液中で配線基板に振動を与えることができるものであ
り、またハンガーにハンマーリング装置等で衝撃を加え
ることによって電着フォトレジスト液中で配線基板に衝
撃を与えることができるものである。振動は30〜10
0000Hz程度の振動数で与えるようにするのが好ま
しく、また衝撃は4〜100kg程度の力で与えるよう
にするのが好ましい。そしてこのように配線基板に振動
や衝撃を与えることによって、上記のように配線基板の
表面やスルーホール内から気泡を除去することができ、
フォトレジストの析出異常を防止してフォトレジストの
塗膜にピンホールが発生することを防ぐことができるも
のである。
[0010] When electrocoating is performed by dipping the wiring board suspended on a hanger or the like in an electrodeposition photoresist solution, the electrodeposition photoresist is applied by applying vibration to the hanger using a vibrator or the like. It is capable of applying vibrations to the wiring board in the resist liquid, and it is also possible to apply impact to the wiring board in the electrodeposition photoresist liquid by applying impact to the hanger with a hammering device or the like. Vibration is 30-10
It is preferable to apply the impact at a frequency of about 0,000 Hz, and it is preferable to apply the impact with a force of about 4 to 100 kg. By applying vibration and impact to the wiring board in this way, air bubbles can be removed from the surface of the wiring board and inside the through holes as described above.
It is possible to prevent abnormal precipitation of photoresist and to prevent pinholes from occurring in the photoresist coating.

【0011】上記のようにして配線基板の金属層の表面
にフォトレジストを電着塗装した後、フォトマスクをフ
ォトレジストの表面に重ねて密着させ、紫外線等の光を
照射して露光をおこない、さらに現像液で処理すること
によってフォトレジストの不要部分を除去し、そしてさ
らにエッチング液に浸漬したりエッチング液をスプレー
したりしてエッチング処理をおこなうことによって、金
属層のフォトレジストで覆われない部分を溶解除去して
回路形成することができるものである。
After electrodepositing a photoresist on the surface of the metal layer of the wiring board as described above, a photomask is placed on the surface of the photoresist and brought into close contact with the surface, and exposure is performed by irradiating light such as ultraviolet rays. The unnecessary parts of the photoresist are removed by further treatment with a developer, and the parts of the metal layer that are not covered with the photoresist are etched by immersion in or spraying an etching solution. can be dissolved and removed to form a circuit.

【0012】0012

【実施例】次に本発明を実施例によって例証する。 実施例1  厚み18μの銅箔を積層したFR−4タイ
プのエポキシ樹脂積層板を配線基板として用い、銅箔の
表面にバフ研磨処理、40〜50℃に調整した3%メタ
珪酸溶液で60秒処理する脱脂処理、シプレー社製のソ
フトエッチング液で5分処理するソフトエッチング処理
、10%硫酸溶液で1分間処理する中和処理をそれぞれ
おこなって前処理を施した。
EXAMPLES The invention will now be illustrated by examples. Example 1 An FR-4 type epoxy resin laminate laminated with 18μ thick copper foil was used as a wiring board, and the surface of the copper foil was buffed and treated with a 3% meta-silicic acid solution adjusted to 40-50°C for 60 seconds. Pretreatment was carried out by performing a degreasing treatment, a soft etching treatment using a soft etching solution manufactured by Shipley for 5 minutes, and a neutralization treatment using a 10% sulfuric acid solution for 1 minute.

【0013】次に電着フォトレジスト液として25±1
℃に調整した日本ペイント社製「フォトED  P−1
000」を用い、この電着フォトレジスト液にハンガー
で縦に吊るした配線基板を浸漬して通電をおこなうこと
によって、銅箔の表面にフォトレジストを電着塗装した
。 ここで電着塗装をおこなうにあたって、配線基板を電着
フォトレジスト液に浸漬したまま30秒間保持したのち
に(この30秒間を保持期間という)、配線基板の銅箔
を陰極として電着フォトレジスト液を陽極として直流電
流の通電を開始し、30秒を要して零から序々に50m
A/dm2 まで電流密度を高め(この30秒間をソフ
トスタート期間という)、次いで電圧を一定に保ちなが
ら105秒間通電を保持するように(この105秒間を
電圧保持期間という)、通電を制御しておこない、6〜
7μの塗膜厚で銅箔の表面にフォトレジストを電着塗装
した。
Next, as an electrodeposition photoresist solution, 25±1
"Photo ED P-1" manufactured by Nippon Paint Co., Ltd. adjusted to ℃
A wiring board hung vertically with a hanger was immersed in this electrodeposited photoresist solution and energized, thereby electrodepositing a photoresist on the surface of the copper foil. When performing electrodeposition coating, the wiring board is immersed in the electrodeposition photoresist solution and held for 30 seconds (this 30 seconds is called the holding period), and then the electrodeposition photoresist solution is applied using the copper foil of the wiring board as a cathode. Start applying direct current using the electrode as an anode, and it takes 30 seconds to gradually increase the distance from zero to 50m.
The current density is increased to A/dm2 (this 30 seconds is called a soft start period), and then the current is controlled so that the current is maintained for 105 seconds while keeping the voltage constant (this 105 seconds is called a voltage hold period). Do it, 6~
A photoresist was electrodeposited on the surface of the copper foil to a coating thickness of 7 μm.

【0014】そしてこのように電着塗装をおこなう際に
、保持期間の30秒間及びソフトスタート期間の30秒
間を通して、ハンガーにバイブレータで振動を加えるこ
とによって60Hzの振動数の振動を配線基板に与えた
。 実施例2  保持期間の30秒間及びソフトスタート期
間の30秒間を通して振動を配線基板に与えると共に、
配線基板を電着フォトレジスト液に浸漬する期間を通し
て5秒毎にピンシリンダーでハンガーを打撃することに
よって配線基板に衝撃を与えるようにし、他は実施例1
と同様にしてフォトレジストの電着塗装をおこなった。
[0014] When performing electrodeposition coating in this manner, vibrations at a frequency of 60 Hz were applied to the wiring board by applying vibration to the hanger with a vibrator during a 30-second holding period and a 30-second soft start period. . Example 2 Vibrations were applied to the wiring board during a 30-second holding period and a 30-second soft start period, and
The wiring board was shocked by hitting the hanger with a pin cylinder every 5 seconds throughout the period that the wiring board was immersed in the electrodeposited photoresist solution, and the rest was as in Example 1.
Photoresist was electrodeposited in the same manner as above.

【0015】実施例3  保持期間の30秒間及びソフ
トスタート期間の30秒間及び電圧保持期間の最初の3
0秒間を通して振動を配線基板に与えるようにし、他は
実施例1と同様にしてフォトレジストの電着塗装をおこ
なった。 実施例4  保持期間の30秒間及びソフトスタート期
間の30秒間及び電圧保持期間の最初の30秒間を通し
て振動を配線基板に与えると共に、配線基板を電着フォ
トレジスト液に浸漬する期間を通して5秒毎に配線基板
に衝撃を与えるようにし、他は実施例1と同様にしてフ
ォトレジストの電着塗装をおこなった。
Example 3 30 seconds of holding period, 30 seconds of soft start period and first 3 seconds of voltage holding period
Electrodeposition of photoresist was performed in the same manner as in Example 1 except that vibration was applied to the wiring board for 0 seconds. Example 4 Vibration was applied to the wiring board throughout the 30 seconds of the holding period, 30 seconds of the soft start period, and the first 30 seconds of the voltage holding period, and vibration was applied every 5 seconds throughout the period of immersing the wiring board in the electrodeposited photoresist solution. Electrodeposition of photoresist was carried out in the same manner as in Example 1 except that the wiring board was subjected to impact.

【0016】実施例5  保持期間の30秒間及びソフ
トスタート期間の30秒間及び電圧保持期間の最初の6
0秒間を通して振動を配線基板に与えるようにし、他は
実施例1と同様にしてフォトレジストの電着塗装をおこ
なった。 実施例6  保持期間の30秒間及びソフトスタート期
間の30秒間及び電圧保持期間の最初の60秒間を通し
て振動を配線基板に与えると共に、配線基板を電着フォ
トレジスト液に浸漬する期間を通して5秒毎に配線基板
に衝撃を与えるようにし、他は実施例1と同様にしてフ
ォトレジストの電着塗装をおこなった。
Example 5 30 seconds of the hold period, 30 seconds of the soft start period and the first 6 seconds of the voltage hold period
Electrodeposition of photoresist was performed in the same manner as in Example 1 except that vibration was applied to the wiring board for 0 seconds. Example 6 Vibrations were applied to the wiring board throughout the 30 seconds of the hold period, 30 seconds of the soft start period, and the first 60 seconds of the voltage hold period, and vibrations were applied every 5 seconds throughout the period of immersing the wiring board in the electrodeposition photoresist solution. Electrodeposition of photoresist was carried out in the same manner as in Example 1 except that the wiring board was subjected to impact.

【0017】比較例1  配線基板に振動や衝撃を与え
ないで、他は実施例1と同様にしてフォトレジストの電
着塗装をおこなった。 比較例2  保持期間の30秒間のみ振動を配線基板に
与えるようにし、他は実施例1と同様にしてフォトレジ
ストの電着塗装をおこなった。 比較例3  保持期間の30秒間のみ振動を配線基板に
与えると共に、配線基板を電着フォトレジスト液に浸漬
する期間を通して5秒毎に配線基板に衝撃を与えるよう
にし、他は実施例1と同様にしてフォトレジストの電着
塗装をおこなった。
Comparative Example 1 Electrodeposition of photoresist was carried out in the same manner as in Example 1 except that no vibration or impact was applied to the wiring board. Comparative Example 2 Electrodeposition of photoresist was carried out in the same manner as in Example 1 except that vibration was applied to the wiring board for only 30 seconds during the holding period. Comparative Example 3 Vibration was applied to the wiring board only for 30 seconds during the holding period, and impact was applied to the wiring board every 5 seconds throughout the period in which the wiring board was immersed in the electrodeposited photoresist solution, but the rest was the same as in Example 1. Then, the photoresist was electrodeposited.

【0018】比較例4  保持期間の30秒間のみ振動
を配線基板に与えると共に、配線基板を電着フォトレジ
スト液に浸漬する期間を通して1.5秒毎に配線基板に
衝撃を与えるようにし、他は実施例1と同様にしてフォ
トレジストの電着塗装をおこなった。 比較例5  配線基板に振動を与えずに、配線基板を電
着フォトレジスト液に浸漬する期間を通して5秒毎に配
線基板に衝撃を与えるようにし、他は実施例1と同様に
してフォトレジストの電着塗装をおこなった。
Comparative Example 4 Vibrations were applied to the wiring board only for 30 seconds during the holding period, and shocks were applied to the wiring board every 1.5 seconds throughout the period in which the wiring board was immersed in the electrodeposited photoresist solution. Electrodeposition of photoresist was performed in the same manner as in Example 1. Comparative Example 5 The photoresist was coated in the same manner as in Example 1 except that the wiring board was subjected to impact every 5 seconds throughout the period of immersion of the wiring board in the electrodeposited photoresist solution without applying vibration to the wiring board. Electrodeposition painting was performed.

【0019】上記実施例1〜6及び比較例1〜5でフォ
トレジストを電着塗装した配線基板について、フォトレ
ジストの析出異常の有無を検査した。検査は、配線基板
に予め設けた直径0.3mmのスルーホール800個に
ついて、内周に形成されるフォトレジスト塗膜にピンホ
ールが生じたものの個数を計測することによっておこな
った。この場合、800個のスルーホールのうち、電着
フォトレジスト液に配線基板を縦にして浸漬する状態で
の上部の400個のスルーホールをA群、下部の400
個のスルーホールをB群としてそれぞれの群について計
測した。結果を次表に示す。
The wiring boards on which the photoresists were electrodeposited in Examples 1 to 6 and Comparative Examples 1 to 5 were examined for abnormal deposition of the photoresists. The inspection was carried out by counting the number of pinholes formed in the photoresist coating formed on the inner periphery of 800 through holes with a diameter of 0.3 mm that were previously provided on the wiring board. In this case, among the 800 through holes, the upper 400 through holes are group A, and the lower 400 are
Through-holes were defined as Group B, and measurements were taken for each group. The results are shown in the table below.

【0020】[0020]

【表1】[Table 1]

【0021】表の結果にみられるように、振動を保持期
間の間だけ与えるのでは効果は不十分であり(比較例2
)、振動を保持期間から少なくともソフトスタート期間
においても与える必要があることが確認される。また衝
撃を併用することによって効果を高めることができるが
、衝撃だけでは十分な効果を得ることはできないという
ことも確認される。
As can be seen from the results in the table, applying vibration only during the holding period is insufficiently effective (Comparative Example 2).
), it is confirmed that it is necessary to apply vibrations from the holding period to at least the soft start period. It is also confirmed that although the effect can be enhanced by using impact in combination, it is not possible to obtain a sufficient effect with impact alone.

【0022】[0022]

【発明の効果】上記のように本発明は、配線基板を電着
フォトレジスト液に浸漬してから少なくとも通電の初期
に至るまで電着フォトレジスト液中で配線基板に振動を
与えるようにしたので、配線基板を電着フォトレジスト
液に浸漬する際に付着する気泡や、電着フォトレジスト
液中で発生して配線基板に付着する気泡は、電着フォト
レジスト液中で配線基板に与える振動によって除去する
ことができるものであり、フォトレジストの析出異常を
防止してフォトレジストの塗膜にピンホールが発生する
ことを防ぐことができるものである。
[Effects of the Invention] As described above, the present invention applies vibration to the wiring board in the electrodeposited photoresist solution from the time the wiring board is immersed in the electrodeposition photoresist solution until at least the initial stage of energization. Bubbles that adhere when the wiring board is immersed in the electrodeposited photoresist solution, or bubbles that are generated in the electrodeposition photoresist solution and adhere to the wiring board, are caused by vibrations applied to the wiring board in the electrodeposition photoresist solution. It can be removed, and it can prevent abnormal precipitation of photoresist and pinholes from occurring in the photoresist coating.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  金属層を表面に設けた配線基板を電着
フォトレジスト液に浸漬して通電することによって金属
層の表面にフォトレジストを電着塗装し、このフォトレ
ジストを露光・現像した後にエッチング処理して回路形
成することによってプリント配線板を製造するにあたっ
て、配線基板を電着フォトレジスト液に浸漬してから少
なくとも通電の初期に至るまで電着フォトレジスト液中
で配線基板に振動を与えることを特徴とするプリント配
線板の製造方法。
Claim 1: A wiring board with a metal layer provided on the surface is immersed in an electrodeposition photoresist solution and electricity is applied to electrodeposit a photoresist on the surface of the metal layer, and after this photoresist is exposed and developed. When manufacturing a printed wiring board by etching to form a circuit, the wiring board is immersed in an electrodeposited photoresist solution and the wiring board is subjected to vibration in the electrodeposition photoresist solution until at least the initial stage of energization. A method for manufacturing a printed wiring board, characterized by:
【請求項2】  電着フォトレジスト液中で配線基板に
衝撃を与えることを特徴とする請求項1に記載のプリン
ト配線板の製造方法。
2. The method for manufacturing a printed wiring board according to claim 1, wherein the wiring board is subjected to an impact in an electrodeposited photoresist solution.
JP813791A 1991-01-28 1991-01-28 Manufacture of printed circuit board Pending JPH04250690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP813791A JPH04250690A (en) 1991-01-28 1991-01-28 Manufacture of printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP813791A JPH04250690A (en) 1991-01-28 1991-01-28 Manufacture of printed circuit board

Publications (1)

Publication Number Publication Date
JPH04250690A true JPH04250690A (en) 1992-09-07

Family

ID=11684909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP813791A Pending JPH04250690A (en) 1991-01-28 1991-01-28 Manufacture of printed circuit board

Country Status (1)

Country Link
JP (1) JPH04250690A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6380593A (en) * 1986-09-24 1988-04-11 名幸電子工業株式会社 Manufacture of through-hole printed wiring board
JPS63307299A (en) * 1987-06-05 1988-12-14 Ube Ind Ltd Device for deforming substrate for printed wiring board
JPH01132798A (en) * 1987-11-18 1989-05-25 Mitsubishi Electric Corp Method and device for electrodeposition coating of photosensitive resin

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6380593A (en) * 1986-09-24 1988-04-11 名幸電子工業株式会社 Manufacture of through-hole printed wiring board
JPS63307299A (en) * 1987-06-05 1988-12-14 Ube Ind Ltd Device for deforming substrate for printed wiring board
JPH01132798A (en) * 1987-11-18 1989-05-25 Mitsubishi Electric Corp Method and device for electrodeposition coating of photosensitive resin

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