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JPH0420230U - - Google Patents

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Publication number
JPH0420230U
JPH0420230U JP6158390U JP6158390U JPH0420230U JP H0420230 U JPH0420230 U JP H0420230U JP 6158390 U JP6158390 U JP 6158390U JP 6158390 U JP6158390 U JP 6158390U JP H0420230 U JPH0420230 U JP H0420230U
Authority
JP
Japan
Prior art keywords
heater
heaters
terminals
shared
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6158390U
Other languages
English (en)
Other versions
JP2519157Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990061583U priority Critical patent/JP2519157Y2/ja
Publication of JPH0420230U publication Critical patent/JPH0420230U/ja
Application granted granted Critical
Publication of JP2519157Y2 publication Critical patent/JP2519157Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案を実施した加熱炉の一部を破断
した外観図、第２図は該実施例のヒータ配置図、
第３図は同前回路図、第４図は従来例の加熱炉の
一部を破断した外観図、第５図は該従来例のヒー
タ配置図、第６図は同前回路図である。 ４ａ，４ｂは端子、５，６，７，８はヒータ、
９，１０，１１，１２は加熱ゾーンを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 加熱ゾーンを形成する複数のヒータを各ヒータ
    のヒータ端が同電位となる様に配列し、隣接する
    ヒータの低電位側のヒータ端用端子を共用とした
    ことを特徴とする半導体製造装置に於ける加熱装
    置。
JP1990061583U 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置 Expired - Lifetime JP2519157Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061583U JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061583U JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Publications (2)

Publication Number Publication Date
JPH0420230U true JPH0420230U (ja) 1992-02-20
JP2519157Y2 JP2519157Y2 (ja) 1996-12-04

Family

ID=31589959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061583U Expired - Lifetime JP2519157Y2 (ja) 1990-06-11 1990-06-11 半導体製造装置に於ける加熱装置

Country Status (1)

Country Link
JP (1) JP2519157Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017115758A1 (ja) * 2015-12-28 2017-12-28 日本碍子株式会社 円板状ヒータ及びヒータ冷却板アセンブリ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928691A (ja) * 1972-07-14 1974-03-14
JPS5143720U (ja) * 1974-09-28 1976-03-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928691A (ja) * 1972-07-14 1974-03-14
JPS5143720U (ja) * 1974-09-28 1976-03-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2017115758A1 (ja) * 2015-12-28 2017-12-28 日本碍子株式会社 円板状ヒータ及びヒータ冷却板アセンブリ
US10256105B2 (en) 2015-12-28 2019-04-09 Ngk Insulators, Ltd. Disc-shaped heater and heater-cooling-plate assembly

Also Published As

Publication number Publication date
JP2519157Y2 (ja) 1996-12-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term