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JPH04195715A - Perpendicular magnetic recording medium - Google Patents

Perpendicular magnetic recording medium

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Publication number
JPH04195715A
JPH04195715A JP32370090A JP32370090A JPH04195715A JP H04195715 A JPH04195715 A JP H04195715A JP 32370090 A JP32370090 A JP 32370090A JP 32370090 A JP32370090 A JP 32370090A JP H04195715 A JPH04195715 A JP H04195715A
Authority
JP
Japan
Prior art keywords
magnetic recording
film
medium
perpendicular magnetic
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32370090A
Other languages
Japanese (ja)
Inventor
Masayuki Kimura
昌行 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP32370090A priority Critical patent/JPH04195715A/en
Publication of JPH04195715A publication Critical patent/JPH04195715A/en
Pending legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To eliminate a curl and obtain a sufficiently high playback output by a method wherein a metal thin film having a Young's modulus not less than 25.4X10<5> (kg.cm<-2>) is formed on the rear surface of a polymer film which is opposite to the magnetic recording surface. CONSTITUTION:A metal thin film 3 having a Young's modulus not less than 2.5X10<5> (kg.cm<-2>) is formed on the rear surface of a polymer film 2 which is opposite to the magnetic recording surface. As the film 3 has a high Young's modulus, a curl can be controlled with a thickness not larger than a half of the thickness of a conventional correction film. With this constitution, the curl can be eliminated while the low rigidity of the medium as a whole is maintained, so that an optimum application to a head can be obtained and the playback output of a perpendicular magnetic recording medium can be increased.

Description

【発明の詳細な説明】 イ3発明の目的 〔産業上の利用分野〕 本発明は、高分子フィルム上に磁気記録層が形成された
、垂直磁気記録用の連続磁性薄膜を用いた垂直磁気記録
媒体に関するものである。
Detailed Description of the Invention A3.Objective of the Invention [Field of Industrial Application] The present invention relates to perpendicular magnetic recording using a continuous magnetic thin film for perpendicular magnetic recording in which a magnetic recording layer is formed on a polymer film. It's about the medium.

〔従来の技術〕[Conventional technology]

近年、磁気記録の高密度化の要求に伴い、磁気記録層が
磁性材料のみによって形成される、いわゆる連続磁性媒
体の研究が盛んになっている。
In recent years, with the demand for higher density magnetic recording, there has been active research into so-called continuous magnetic media in which the magnetic recording layer is formed only of magnetic materials.

真空蒸着法、スパッタ法、あるいはメツキ法によって作
製される連続磁性媒体は磁気記録層が薄膜であるために
、長手記録は熱論のこと、垂直磁気記録方式において特
に記録密度の飛踊的向上が期待され、磁気テープや磁気
ディスクなど各種の製品化への開発研究が進められてい
る。
Since the magnetic recording layer of continuous magnetic media manufactured by vacuum evaporation, sputtering, or plating is a thin film, longitudinal recording is a hot topic, and a dramatic increase in recording density is expected, especially in perpendicular magnetic recording. Research and development is underway to commercialize various products such as magnetic tape and magnetic disks.

垂直磁気記録媒体の磁気記録層としてはCoCr合金膜
などが用いられている。垂直磁気記録媒体はリングヘッ
ドを用いても高密度まで記録再生できるため、現在市販
されているシステムとの互換性を取ることができ、市販
システムの延長上に応用が考えられている。
A CoCr alloy film or the like is used as the magnetic recording layer of a perpendicular magnetic recording medium. Since perpendicular magnetic recording media can record and reproduce data at high densities even when using a ring head, they are compatible with currently commercially available systems, and are being considered for application as an extension of commercially available systems.

従来の垂直磁気記録媒体を第3図に示す。耐熱性の高分
子フィルム2にスパッタ法などにより磁気記録層として
CoCr合金などの垂直磁気記録用薄膜を0.2μ■な
いし0.3μm形成している。また高分子フィルムの記
録再生面の反対側の裏面にも同じ材料を0.2μ墓ない
し0.3μ■成膜し、媒体のカールの発生を防ぐための
裏面補正層3を形成している。
A conventional perpendicular magnetic recording medium is shown in FIG. A thin film for perpendicular magnetic recording such as a CoCr alloy is formed as a magnetic recording layer to a thickness of 0.2 to 0.3 μm on a heat-resistant polymer film 2 by sputtering or the like. Further, the same material is deposited on the back surface of the polymer film opposite to the recording/reproducing surface to form a film of 0.2 μm to 0.3 μm to form a back surface correction layer 3 for preventing curling of the medium.

−毅にカールの測定は、第2図に示すように中央の金属
ハブ取付部の平面の延長上で媒体の端部のずれを測定す
る。2“のディスクの磁気記録媒体の場合、規格は第2
図に示すように、端部より2+u内側でカールはOmm
平面に対して0.4!I11以下となっている。
- Measurement of curl is to measure the deviation of the edge of the medium on the extension of the plane of the central metal hub attachment part, as shown in FIG. In the case of magnetic recording media with 2" disks, the standard is
As shown in the figure, the curl is 0mm inside 2+u from the end.
0.4 for the plane! It is below I11.

しかしながらこのようにして作製された磁気記録媒体は
、市販のドライバーを用いた場合、記録再生における出
力が低いという問題があり、メタル磁性粉を用いた市販
の磁気記録媒体(以下媒体と記す)の2分の1程度と出
力が低下し、実用上支障となっていた。(第5図参照) 〔発明が解決しようとする課題〕 本発明は、垂直磁気記録用薄膜を磁気記録層として形成
した垂直磁気記録媒体において、カールが発生しにくく
、市販のドライバーで十分高い再生出力の得られる垂直
磁気記録媒体を提供しようとするものである。
However, the magnetic recording medium produced in this way has a problem of low output during recording and reproduction when a commercially available driver is used. The output was reduced to about one-half, which was a practical problem. (See Figure 5) [Problems to be Solved by the Invention] The present invention provides a perpendicular magnetic recording medium in which a thin film for perpendicular magnetic recording is formed as a magnetic recording layer, which is less likely to curl and which can be reproduced at a sufficiently high level using a commercially available driver. The present invention aims to provide a perpendicular magnetic recording medium that can provide high output.

口1発明の構成 〔課題を解決するための手段〕 以上前述の問題を解決するため、本発明者は、第1図に
示すように、媒体の裏面に設けたカール補正用の膜とし
てヤング率が25.4X 105[kg−cm−こ]以
上の金属薄膜を形成することにより、カールの発生が殆
どなく、再生出力を向上させることができることを見い
たいした。即ち、本発明は、高分子フィルム上に蒸着法
、スパッタ法、イオンプレーティング法などにより、磁
性薄膜の磁気記録層を形成する垂直磁気記録媒体におい
て、高分子フィルムの磁気記録面の反対側となる裏面に
25.4X105[kg−cm−2]以上のヤング率を
持つ金属薄膜を形成することを特徴とした垂直磁気記録
媒体である。
1. Structure of the Invention [Means for Solving the Problems] In order to solve the above-mentioned problems, the present inventor has developed a method using Young's modulus as a curl correction film provided on the back surface of the medium, as shown in FIG. We would like to show that by forming a metal thin film with a thickness of 25.4 x 105 [kg-cm-2] or more, it is possible to improve the reproduction output with almost no curling. That is, the present invention provides a perpendicular magnetic recording medium in which a magnetic recording layer of a magnetic thin film is formed on a polymer film by vapor deposition, sputtering, ion plating, or the like. This is a perpendicular magnetic recording medium characterized by forming a metal thin film having a Young's modulus of 25.4×105 [kg-cm-2] or more on the back surface.

〔作用〕[Effect]

磁気記録媒体の再生出力を低下させる原因の一つとして
スペーシングロスがある。記録再生中のヘッドと媒体と
の当たり具合の状態は第4図(a)に示すようにヘッド
と媒体の曲率が一致し、ヘッドと媒体が密着しているの
が望ましいが、従来の構成の垂直記録媒体の場合、ベー
スの高分子フィルムと磁気記録層と裏面補正層をあわせ
た媒体全体の厚さが厚く剛性が高いため、媒体とヘッド
の当たり具合は第4図(b)のようになり、スペーシン
グが大きくなってヘッドと媒体の密着が悪くなり、再生
出力が低下する。剛性を下げる為に高分子フィルム裏面
の裏面補正層を薄くすると、カールが制御できず規格に
合った性能を得られない。
Spacing loss is one of the causes of reducing the reproduction output of magnetic recording media. It is desirable that the head and medium contact each other during recording and reproduction, as shown in Figure 4(a), so that the curvatures of the head and medium match and the head and medium are in close contact. In the case of a perpendicular recording medium, the thickness of the entire medium including the base polymer film, magnetic recording layer, and back correction layer is thick and rigid, so the contact between the medium and the head is as shown in Figure 4 (b). As a result, the spacing becomes large and the adhesion between the head and the medium becomes poor, resulting in a reduction in reproduction output. If the back correction layer on the back side of the polymer film is made thinner in order to lower the rigidity, curling cannot be controlled and performance that meets the standards cannot be obtained.

そこで、本発明者は裏面カール補正用として、ヤング率
の高イIr、 Os、 Cr、 Bi、 W、 Ru、
 No、 Be、 Rh等の膜を成膜した。これらの膜
はヤング率が高いため従来の補正膜の2分の1以下の膜
厚でカールを制御することができる。
Therefore, the present inventor used materials with high Young's modulus such as Ir, Os, Cr, Bi, W, Ru, etc. for back surface curl correction.
Films of No, Be, Rh, etc. were formed. Since these films have a high Young's modulus, curl can be controlled with a film thickness less than half that of conventional correction films.

スペーシングロスの原因となる媒体の剛性は媒体全体の
厚さに影響する。 しかしながら本発明の裏面補正膜を
用いることにより、媒体全体の剛性は低いままでカール
を除去できる。よって最適なヘッドとの当たり具合を得
ることにより垂直磁気記録媒体の再生出力を増大できる
ことを見いだした。
The stiffness of the media, which causes spacing loss, affects the overall thickness of the media. However, by using the back surface correction film of the present invention, the curl can be removed while the rigidity of the entire medium remains low. Therefore, it has been found that the reproduction output of a perpendicular magnetic recording medium can be increased by obtaining the optimum contact condition with the head.

〔実施例〕〔Example〕

以下に、本発明による実施例及び比較例について、図を
参照しながら詳しく説明する。本発明の実施例は、第1
図に示すように高分子フィルム2上に垂直磁気記録用の
磁気記録層1を形成し、その表面に保護膜4を形成する
。高分子フィルム2の裏面にはカールを補正するため裏
面補正層3を形成したものである。以下比較例及び実施
例について媒体の作成条件を示す。
Examples according to the present invention and comparative examples will be described in detail below with reference to the drawings. The embodiment of the present invention is the first embodiment of the present invention.
As shown in the figure, a magnetic recording layer 1 for perpendicular magnetic recording is formed on a polymer film 2, and a protective film 4 is formed on the surface thereof. A back surface correction layer 3 is formed on the back surface of the polymer film 2 in order to correct curls. The conditions for producing media for Comparative Examples and Examples are shown below.

(比較例) ベースとなる厚さ30μ馬のポリイミドフィルムの高分
子フィルム2上に、RFマグネトロン法により、垂直磁
気記録用の磁気記録層1である厚さ0.3μ層のCoC
r(Cr:17wt$、 Co:bal)膜を形成し、
その上に保護膜4としてCを20オンク゛ストローム形
成した。高分子フィルム2の裏面にも同様にCoCr膜
を裏面補正層3として形成した。このときのスパッタ圧
力は0.1[Pa]であり、RFパワー密度は2.74
[w/Cm2]、ターゲットと基板の間の距離は90!
l!lとした。スパッタはキャン装置を使用した。
(Comparative example) A 0.3 μm thick layer of CoC, which is a magnetic recording layer 1 for perpendicular magnetic recording, was formed on a polymer film 2 of a polyimide film with a thickness of 30 μm as a base by an RF magnetron method.
Form a r (Cr: 17 wt$, Co: bal) film,
A protective film 4 of C was formed thereon to a thickness of 20 angstroms. A CoCr film was similarly formed on the back surface of the polymer film 2 as a back surface correction layer 3. The sputtering pressure at this time was 0.1 [Pa], and the RF power density was 2.74
[w/Cm2], the distance between the target and the substrate is 90!
l! It was set as l. A can device was used for sputtering.

(実施例1) 比較例において、高分子フィルムの裏面に裏面補正層と
してIr膜を0,1μ履形成した(実施例2) 比較例において、高分子フィルムの裏面に裏面補正層と
してOs膜を0.1μ−形成した(実施例3) 比較例において、高分子フィルムの裏面に裏面補正層と
してCr膜を0.1μ■形成した(実施例4) 比較例において、高分子フィルムの裏面に裏面補正層と
してBi膜を0.1μm形成した(実施例5) 比較例において、高分子フィルムの裏面に裏面補正層と
してW膜を0.1μm形成した(実施例6) 比較例において、高分子フィルムの裏面に裏面補正層と
してRu膜を0.1μ層形成した(実施例7) 比較例において、高分子フィルムの裏面に裏面補正層と
してMo膜を0.1μ麿形成した(実施例8) 比較例において、高分子フィルムの裏面に裏面補正層と
してBe膜を0.1μ扉形成した(実施例9) 比較例において、高分子フィルムの裏面に裏面補正層と
してRh膜を0.1μ重形成した以上の比較例および実
施例1から実施例9の条件で作成した媒体素材より2イ
ンチサイズの円板を打ち抜き、2インチフロッピーディ
スクを作成し、電磁変換特性を評価した。
(Example 1) In a comparative example, an Ir film of 0.1 μm was formed as a back correction layer on the back side of a polymer film. (Example 2) In a comparative example, an Os film was formed as a back correction layer on the back side of a polymer film. (Example 3) In a comparative example, a Cr film of 0.1 μm was formed as a back correction layer on the back side of a polymer film (Example 4) In a comparative example, a Cr film of 0.1 μm was formed on the back side of a polymer film as a back correction layer. A 0.1 μm Bi film was formed as a correction layer (Example 5) In a comparative example, a 0.1 μm W film was formed as a back correction layer on the back side of a polymer film (Example 6) In a comparative example, a 0.1 μm layer of Ru film was formed as a back correction layer on the back surface of the polymer film (Example 8). In the example, a 0.1 μm thick Be film was formed as a back correction layer on the back side of the polymer film (Example 9). In the comparative example, a 0.1 μm thick Rh film was formed on the back side of the polymer film as a back correction layer. A 2-inch disk was punched out from the medium material prepared under the conditions of the comparative example and Examples 1 to 9, and a 2-inch floppy disk was prepared, and the electromagnetic conversion characteristics were evaluated.

このときの記録再生システムとしてFUJIX−HR5
000を用いた。
FUJIX-HR5 was used as the recording/playback system at this time.
000 was used.

第5図にメタル磁性粉を用いた市販媒体と比較例および
実施例1における記録周波数特性を示す。
FIG. 5 shows the recording frequency characteristics of a commercially available medium using metal magnetic powder, a comparative example, and Example 1.

第6図に実施例1から実施例9における10MHzでの
市販媒体との出力の比を示す。実施例1から実施例9の
すべてについてメタル磁性粉を用いた市販媒体の2倍以
上の再生出力があることがわかる。
FIG. 6 shows the output ratio at 10 MHz in Examples 1 to 9 with respect to commercially available media. It can be seen that all of Examples 1 to 9 have reproduction outputs that are more than twice that of commercially available media using metal magnetic powder.

第1表に本実施例の裏面補正層に用いた金属薄膜のヤン
グ率を示す。第1表の結果より、ヤング率が25.4 
X 105[kg−cm−2コ以上の金属膜を裏面補正
層に用いるこしにより、再生出力の大きい媒体が得られ
ている。
Table 1 shows the Young's modulus of the metal thin film used for the back surface correction layer of this example. From the results in Table 1, Young's modulus is 25.4
A medium with a high reproduction output has been obtained by using a metal film with a thickness of 105 kg-cm-2 or more as the backside correction layer.

第1表 本実施例では裏面補正層としてIr、 Os、 Cr、
 Bi、 W。
Table 1 In this example, the backside correction layer contains Ir, Os, Cr,
Bi, W.

Ru、 Mo、 Be、 Rh等の膜を用いたが、ヤン
グ率が25.4X105[kg−C−一2]以上の膜で
あれば金属単体でもまたその合金でもよく、その材質に
左右されない。また、本実施例では2″媒体について説
明したが、3.5″媒体やテープでもよく、その形状に
左右されず効果があった。
Although films of Ru, Mo, Be, Rh, etc. were used, films with a Young's modulus of 25.4×105 [kg-C-12] or more may be made of a single metal or an alloy thereof, and are not affected by the material. Further, in this embodiment, a 2'' medium was described, but a 3.5'' medium or tape may also be used, and the effect was obtained regardless of the shape.

ハ1発明の効果 〔発明の効果〕 以上述べたように、本発明によれば大幅に再生出力が増
大したカールの発生のない垂直磁気記録媒体が供給でき
る。
C1. Effects of the Invention [Effects of the Invention] As described above, according to the present invention, a perpendicular magnetic recording medium with significantly increased reproduction output and no curling can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明における垂直磁気記録媒体の構成を説明
する説明図である。 第2図は2″デイスクのカール測定法を説明する説明図
である。 第3図は従来の垂直磁気記録媒体の構成を説明する説明
図である。 第4図はヘッドと媒体との当たり具合を説明する説明図
で第4図(a)はヘッドと媒体の密接した状態、第4図
(b)はスペーシングが大きく密着の悪い状態を示す。 第5図は市販磁気記録媒体、従来の垂直磁気記録媒体、
及び本発明による垂直磁気記録媒体の再生出力の記録周
波数特性を示す。 第6図は市販磁気記録媒体と本発明による各実施例の垂
直磁気記録媒体の再生出力の比を示す図である。 1・・磁気記録層、2・・・高分子フィルム、3・・・
裏面補正層、4・・・保護膜、5・・媒体、6・・・ヘ
ッド、7・・・金属ハブ。 特許出願人  株式会社トーキン 第7図 第2図 第3図 第4図 (Q) (b) 第5図 第6図 倉
FIG. 1 is an explanatory diagram illustrating the configuration of a perpendicular magnetic recording medium according to the present invention. FIG. 2 is an explanatory diagram illustrating the curl measurement method for a 2" disk. FIG. 3 is an explanatory diagram illustrating the structure of a conventional perpendicular magnetic recording medium. FIG. 4 is an explanatory diagram illustrating the contact between the head and the medium. Fig. 4(a) shows a state in which the head and medium are in close contact, and Fig. 4(b) shows a state in which the spacing is large and the adhesion is poor. Fig. 5 shows a commercially available magnetic recording medium and a conventional magnetic recording medium. perpendicular magnetic recording medium,
1 and 2 show the recording frequency characteristics of the reproduction output of the perpendicular magnetic recording medium according to the present invention. FIG. 6 is a diagram showing the reproduction output ratio of a commercially available magnetic recording medium and a perpendicular magnetic recording medium of each embodiment according to the present invention. 1... Magnetic recording layer, 2... Polymer film, 3...
Back correction layer, 4...protective film, 5...medium, 6...head, 7...metal hub. Patent applicant Tokin Co., Ltd. Figure 7 Figure 2 Figure 3 Figure 4 (Q) (b) Figure 5 Figure 6 Storehouse

Claims (1)

【特許請求の範囲】[Claims] 1、高分子フィルム上に蒸着法、スパッタ法、イオンプ
レーティング法などにより、磁性薄膜の磁気記録層を形
成する垂直磁気記録媒体において、高分子フィルムの磁
気記録面の反対側となる裏面に25.4×10^5[k
g・cm^−^2]以上のヤング率を持つ金属薄膜を形
成することを特徴とした垂直磁気記録媒体。
1. In a perpendicular magnetic recording medium in which a magnetic recording layer of a magnetic thin film is formed on a polymer film by vapor deposition, sputtering, ion plating, etc., a .4×10^5[k
A perpendicular magnetic recording medium characterized by forming a metal thin film having a Young's modulus of 1 g·cm^-^2] or more.
JP32370090A 1990-11-26 1990-11-26 Perpendicular magnetic recording medium Pending JPH04195715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32370090A JPH04195715A (en) 1990-11-26 1990-11-26 Perpendicular magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32370090A JPH04195715A (en) 1990-11-26 1990-11-26 Perpendicular magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH04195715A true JPH04195715A (en) 1992-07-15

Family

ID=18157626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32370090A Pending JPH04195715A (en) 1990-11-26 1990-11-26 Perpendicular magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH04195715A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1046726A3 (en) * 1999-04-22 2003-07-23 Komag, Inc. Sputtering method for the formation of carbon films

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1046726A3 (en) * 1999-04-22 2003-07-23 Komag, Inc. Sputtering method for the formation of carbon films

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