JPH0419442A - Vibration preventing device for accurate analyzer - Google Patents

Abstract

PURPOSE:To obtain a very high vibration-preventing effect by forming a table, which is for mounting an accurate analyzer, of stratified vibro-isolating steel plates in a condition that a viscoelastic high molecular material is interposed between two sheets of the steel plates. CONSTITUTION:In the case of an X-ray diffraction device 6, a total unit of a table 5 and a total unit of a cover 15 are formed of vibro-isolating steel plates 3. A mounting seat 16, formed of the vibro-isolating plate 3, is mounted to the bottom surface of each leg part 14. That is, the goniometer 6 is mounted onto the table 5 through the vibro-isolating steel plates 3. This vibro-isolating steel plate 3 is constituted into a layer shape in a condition that a viscoelastic high molecular material 2 is interposed between two sheets of steel plates 1a, 1b, and thickness of each of these layers is set, for instance, to 0.8mm for the steel plates 1a, 1b and about 0.05mm for the viscoelastic high molecular material. A sufficient vibration-preventing effect can be obtained even by thickness of this degree.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vibration prevention device for preventing vibration of an X-ray diffraction device, a thermal analysis device, or other precision analysis device.

[Prior Art] The precision analyzer described above measures extremely minute changes in the state of a sample, and therefore, even the slightest vibration can cause an error in the measurement results. It ends up.

As a conventionally widely used method for preventing the occurrence of this vibration, there is a method of placing the precision analysis device on a table with a vibration-proof rubber interposed therebetween. This method attempts to prevent the precision analyzer from vibrating by absorbing vibrations with vibration-proof rubber.

[Problems to be Solved by the Invention] However, in the conventional vibration prevention device using anti-vibration rubber, it has not been possible to reliably prevent vibrations occurring in a precision analysis device. In addition, in order to increase the anti-vibration effect, it is necessary to use vibration-proof rubber with a large shape.
There have been problems in that the overall shape of the precision analyzer becomes larger and the state in which the precision analyzer is placed becomes unstable.

The present invention has been made in view of the above-mentioned problems in conventional devices, and it is possible to obtain a very high vibration prevention effect, without increasing the size of the precision analysis device, and furthermore, It is an object of the present invention to provide a vibration prevention device that does not make the mounting state of the device unstable.

[Means for resolving the division problem] In order to achieve the above object, in the vibration prevention device according to claim 1, the table on which the precision analysis device is placed is formed of a vibration damping steel plate.

In the vibration prevention device according to claim 2, a vibration generation source installed in the precision analysis device, such as a power transformer and a drive motor, is fixedly installed on a vibration damping steel plate.

In the vibration prevention device according to the third aspect of the present invention, a vibration damping steel plate is fixed to a portion of the leg portion of the precision analysis device that comes into contact with the table.

In the vibration prevention device according to the fourth aspect, the cover covering the entire precision analysis device is formed of a material containing a vibration damping steel plate.

In any of the above-mentioned vibration prevention devices, the damping steel plate is composed of a layered steel plate 3 with a viscoelastic polymer material 2 sandwiched between two steel plates 1a and 1b, as shown in FIG. ing. The thickness of each of these layers is, for example, steel plate 1
a, lb is 0.8 mm.

The length of the viscoelastic polymer material 2 is set to about 0.05111 m.

A sufficient vibration prevention effect can be obtained even with this thickness. Of course, it is also possible to set the thickness to any other thickness depending on the situation.

The viscoelastic polymeric material 2, as is well known per se, is a material that exhibits both elasticity and viscosity; for example, synthetic rubber can be considered.

When bending vibration occurs in the damping steel plate 3, so-called shear deformation occurs in the viscoelastic polymer material that is the intermediate layer, as shown in FIG. This is thought to attenuate vibrations between the two steel plates 1a and 1b.

[Function] The viscoelastic polymer material (
2) acts to damp vibrations when vibrations, particularly bending vibrations, are applied to the damping steel plate. By arranging this vibration-damping steel plate at various locations around the precision analysis device (X-ray diffraction device 6), vibrations are prevented from occurring in the precision analysis device.

[Example] FIG. 3 shows an example in which a vibration prevention device according to the present invention is applied to an X-ray diffraction apparatus as a precision analysis device.

In the figure, a table 5 is mounted on two beams 4.4 extending perpendicular to the plane of the paper.
An X-ray diffraction device 6 is disposed above it. In this X-ray diffraction device 6, X-rays emitted from an X-ray tube 7 are diffracted by a sample 9, and the intensity of the diffracted X-rays is detected by an X-ray detector 1o.

A sample stage 11 that supports the sample 9 and a detector arm 12 that supports the X-ray detector 10 are supported by a goniometer 13 fixedly installed on the goniometer base 8.

As is well known, the goniometer 13 intermittently rotates the sample stage 11 at a predetermined step angle and a predetermined step time (so-called θ rotation drive), and at the same time rotates the detector arm 12 at a step angle of the sample stage 11. Rotation drive is performed at twice the step angle (so-called 20 rotation drive).

The X-ray tube 7 is fixed to the table 5, and the gonio base 8 is placed on the table 5 via three legs 14. Further, the entire X-ray diffraction device W6 is covered with a cover 15 having a cylindrical or rectangular tube shape.

In this embodiment, the entire table 5 and the entire cover 15 are formed of the damping copper plate 3 shown in FIG. Furthermore, a pedestal 16 formed of a damping steel plate 3 is adhered to the bottom surface of each leg portion 14. That is, the goniometer 6 is placed on the table 5 via the damping steel plate 3 (FIG. 1). It is placed.

Incidentally, inside the goniometer 13, a drive source, for example, a pulse motor 17, for rotationally driving the sample stage 11 and the detector arm 12 is disposed. This pulse motor 17 itself is a vibration generation source that generates vibrations. In this embodiment, a pedestal 18 is fixed on the gonio base 8 by fastening means such as bolts, and a pulse motor 17 is fixed on the pedestal 18. And that pedestal 18
It is also formed by the damping steel plate 3 shown in FIG. Inside the goniometer 13, in addition to the pulse motor 17, various vibration generating sources, such as a power transformer 19 as shown in FIG. 4, are also installed. It is preferable that all of these various vibration generating sources be provided on the pedestal 18 formed by the damping steel plate 3.

As described above, by arranging the members formed by the damping steel plate 3 at each location, the vibrations generated at each location are reliably damped, as explained in relation to the tJ2 diagram, and as a result, the X-ray It is possible to reliably prevent vibrations from occurring in the diffraction device 6.

The damping steel plates provided at each of the above locations may be a single plate as shown in Figure 1, or several damping steel plates stacked parallel to each other may be used. good.

Although the present invention has been described above with reference to one embodiment, the present invention is not limited to that embodiment.

For example, a precision analysis device to which the present invention can be applied is not limited to an X-ray diffraction device, but can also be applied to a thermal analysis device or any other device that requires strict measurement accuracy.

In the embodiment shown in FIG. 3, vibration damping steel plates 3 (FIG. 1) are used simultaneously at various locations. However, the method of using the damping steel plate 3 is not limited to such a method of simultaneously using it at various locations, but may also be a method of selectively using at least one of them.

For example, even when a vibration-damping steel plate is placed only on the bottom surface of the leg portion 14, the desired vibration-preventing effect of the X-ray diffraction device 6 can be obtained.

[Effects of the Invention] According to the present invention, the vibration damping effect is high! Since the single-vibration steel plate was placed around the precision analyzer, it became possible to reliably prevent vibrations occurring in the precision analyzer.

Further, by stacking and arranging a plurality of vibration-damping steel plates, vibration can be prevented even more reliably.

In addition, compared to the conventional case of using anti-vibration rubber,
Since the size of the vibration damping steel plate can be made very small to obtain the same vibration damping effect, the entire device will not become unnecessarily large.

Furthermore, when using anti-vibration rubber, there was a risk that the precision analyzer would be placed in an unstable state due to the elasticity of the anti-vibration rubber. is resolved.

[Brief explanation of drawings]

Figure 1 is a cross-sectional view of an example of a damping steel plate, and Figure Ii2 is a diagram showing the state of the damping steel plate when subjected to bending vibration.
Figure R1 and Figure 3 are side cross-sectional WI diagrams showing an example in which the vibration prevention device according to the present invention is applied to an X-ray diffraction device as a precision analysis device, and Figure 4 is a side cross-sectional view showing an example where the present invention is applied to a vibration source. FIG. la, lb...-steel plate, 2... viscoelastic polymer material. 3... Vibration damping steel plate, 5... Table, 6... X-ray diffraction device, 14... Legs of precision analyzer, 15... Cover 16... Pedestal, 17... Pulse Motor, 18・
...Pedestal, 19...-Power transformer diagram

Claims (5)

[Claims] (1) A vibration prevention device for preventing the precision analysis device from vibrating, in which the table on which the precision analysis device is placed is formed of a vibration-damping steel plate, and the vibration-damping steel plate consists of two pieces. A vibration prevention device for a precision analysis device, characterized in that it is a layered steel plate with a viscoelastic polymer material sandwiched between the steel plates. (2) A vibration prevention device for preventing the precision analysis device from vibrating, wherein the precision analysis device has a vibration generation source, and the vibration generation source is fixed on a vibration damping steel plate. A vibration prevention device for a precision analysis instrument, wherein the vibration damping steel plate is a layered steel plate with a viscoelastic polymer material sandwiched between two steel plates. (3) A vibration prevention device for preventing a precision analysis device from vibrating, the precision analysis device being placed on a table via its legs, and one of the legs making contact with the table. A vibration-damping steel plate is fixed to the part where the vibration-damping steel plate is applied, and the vibration-damping steel plate is a layered steel plate with a viscoelastic polymer material sandwiched between two steel plates. anti-vibration device. (4) A vibration prevention device for preventing vibration of a precision analysis device, wherein the precision analysis device is entirely covered with a cover including a vibration damping steel plate, and the vibration damping steel plate is a vibration prevention device for a precision analysis device, characterized in that it is a layered steel plate with a viscoelastic polymer material sandwiched between two steel plates. (5) The vibration prevention device according to any one of claims 1 to 4, for a precision analysis device, characterized in that a plurality of vibration damping steel plates are stacked and provided.