JPH04155253A - Capacity type thin film moisture sensor and manufacture thereof - Google Patents
Capacity type thin film moisture sensor and manufacture thereofInfo
- Publication number
- JPH04155253A JPH04155253A JP27772090A JP27772090A JPH04155253A JP H04155253 A JPH04155253 A JP H04155253A JP 27772090 A JP27772090 A JP 27772090A JP 27772090 A JP27772090 A JP 27772090A JP H04155253 A JPH04155253 A JP H04155253A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- organic polymer
- humidity sensor
- film substrate
- conductive thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 229920000620 organic polymer Polymers 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000002904 solvent Substances 0.000 claims abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052802 copper Inorganic materials 0.000 claims abstract description 4
- 239000010949 copper Substances 0.000 claims abstract description 4
- 239000010935 stainless steel Substances 0.000 claims abstract description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 4
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 2
- 229920002678 cellulose Polymers 0.000 claims description 2
- 239000001913 cellulose Substances 0.000 claims description 2
- 239000002861 polymer material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 13
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 4
- 150000002736 metal compounds Chemical class 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001722 carbon compounds Chemical class 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、容量式薄膜湿度センサに係り。[Detailed description of the invention] [Industrial application field] The present invention relates to a capacitive thin film humidity sensor.
特に導電性薄膜基板にメツシュ穴を設けてこれを有機高
分子で被覆して湿度センサの電極を構成した容量式薄膜
湿度センサおよびその製造方法に関する。In particular, the present invention relates to a capacitive thin film humidity sensor in which the electrodes of the humidity sensor are formed by providing mesh holes in a conductive thin film substrate and coating the mesh holes with an organic polymer, and a method for manufacturing the same.
一般に、電気的な計測を行う湿度計は、湿度条件の変化
による電気的特性の変化を相対湿度として表示する一種
のトランスジューサとして理解され、その基本原理とし
ては電気抵抗の変化を利用するものと、静電容量の変化
を利用するものとの二種類に大別される。In general, a hygrometer that measures electrically is understood as a type of transducer that displays changes in electrical characteristics due to changes in humidity conditions as relative humidity, and its basic principle is to utilize changes in electrical resistance. There are two main types: those that utilize changes in capacitance.
このうち後者の静電容量式、すなわち感湿部が吸湿した
ときの静電容量の変化を測定して湿度を求める型式の湿
度センサでは、従来より陶磁器板やガラス繊維、アルマ
イト薄板を特殊加工したもの等が誘電体として用いられ
ているが、測定感度か劣るため実用化上問題があるとさ
れている。また、感湿部として機能する誘電体として有
機高分子を使用する湿・ 度センサが近年提案されて
おり、この種の技術は、例えば特開昭４９−７４５８８
号公報、特開昭５５−６６７４９号公報、特開昭５９−
２４２３４号公報および米国特許第３３５０９４１号明
細書等の各公報に開示されている。Among these, the latter type of capacitive humidity sensor, which measures the change in capacitance when the moisture sensing part absorbs moisture to determine humidity, traditionally uses specially processed ceramic plates, glass fibers, or thin alumite plates. However, it is said that there are problems in practical use because the measurement sensitivity is poor. In addition, humidity/temperature sensors that use organic polymers as dielectrics that function as humidity-sensing parts have been proposed in recent years, and this type of technology is known, for example, in Japanese Patent Application Laid-Open No. 49-74588.
No. 55-66749, JP-A-59-
It is disclosed in various publications such as Japanese Patent No. 24234 and US Pat. No. 3,350,941.
ところで、一般に、有機高分子膜からなる誘電体を感湿
層として使用する場合、この誘電体は湿度に対する応答
性に優れると共に反復再現性が良好であり、また湿度対
容量の相対関係が極めて直線的に表れるので、測定精度
が向上する等の利点を有する。しかしながら、他方では
、前記有機高分子膜誘電体は、過度の乾燥条件下、高湿
度条件下に長時開明されると基板からの剥落等を生じて
、感湿特性が劣化する難点がある。また、有機高分子膜
は有機溶剤（例えばアセトン）により侵され易いので、
印刷工場、塗料工場等のように有機溶剤蒸気が多量に存
在する雰囲気下では悪影響を受けるため、使用に供し得
ない等の難点が指摘される。By the way, in general, when a dielectric material made of an organic polymer film is used as a moisture-sensitive layer, this dielectric material has excellent responsiveness to humidity and good repeatability, and the relative relationship between humidity and capacitance is extremely linear. This has advantages such as improved measurement accuracy. However, on the other hand, the organic polymer film dielectric has the disadvantage that if it is exposed for a long time under excessively dry conditions or high humidity conditions, it may peel off from the substrate and its moisture-sensitive characteristics may deteriorate. In addition, since organic polymer films are easily attacked by organic solvents (e.g. acetone),
It has been pointed out that it is difficult to use in an atmosphere where a large amount of organic solvent vapor exists, such as in a printing factory or a paint factory, because it is adversely affected and cannot be used.
そこで、高温条件や有機溶剤雰囲気等の悪影響下でも、
好適に使用し得る機械的強度に優れた容量式湿度センサ
の実用化が、業界において強く要望されている。この種
の要望に応えるものとして、例えば特開昭５２−１２４
９７号公報「金属酸化膜感湿素子」や、特開昭５３−９
５９５号公報「アルミニウムの陽極酸化被膜を使用した
含湿量検出素子」等が提案されている。これらは、いず
れもアルミニウム板等の基板自体に電解その他の手段に
よって導電性の多孔性金属酸化被膜を形成するものであ
るが、素子表面が粗いため測定誤差が生じ易く、またこ
の金属酸化被膜自体の機械的強度も充分でない等、依然
として前記要求を満足するものではなかった。Therefore, even under adverse conditions such as high temperature conditions and organic solvent atmosphere,
There is a strong demand in the industry for practical use of a capacitive humidity sensor with excellent mechanical strength that can be used suitably. For example, Japanese Patent Application Laid-Open No. 52-124
No. 97 “Metal oxide film moisture sensitive device” and JP-A-53-9
No. 595, ``Moisture content detection element using aluminum anodic oxide coating,'' etc., has been proposed. In both of these methods, a conductive porous metal oxide film is formed on the substrate itself, such as an aluminum plate, by electrolysis or other means, but measurement errors tend to occur because the element surface is rough, and the metal oxide film itself However, the mechanical strength was not sufficient, and the above-mentioned requirements were still not met.
このような観点から、本発明者等は、先に基板自体に酸
化や電解により被膜を形成することに代えて、ガラス等
の酸化になじまない絶縁基板に金属化合物の膜を、高周
波電界内に対応金属の蒸気と酸素または窒素若しくはア
ンモニアガス、弗素ガスを導き、イオンブレーティング
により形成することによって、得られる金属化合物膜は
極めて大きな強度を有し薄膜化が可能となり、苛酷な環
境下での使用に充分耐え、しかも膜面も平滑で密となる
ので、応答性、反復再現性に優れて測定精度も向上する
ことができる湿度センサを開発し、特許出願を行った。From this perspective, the inventors of the present invention applied a film of a metal compound to an insulating substrate, such as glass, which is not compatible with oxidation, in a high-frequency electric field, instead of first forming a film on the substrate itself by oxidation or electrolysis. By introducing the vapor of the corresponding metal and oxygen, nitrogen, ammonia gas, or fluorine gas and forming it by ion blasting, the resulting metal compound film has extremely high strength and can be made into a thin film, making it suitable for use in harsh environments. We have developed a humidity sensor that is durable enough to withstand use, and has a smooth and dense membrane surface that improves responsiveness, repeatability, and measurement accuracy, and has filed a patent application.
その後、イオンブレーティング処理の改善や、金属化合
物膜面の粗面化およびその処理の改善等により、感湿特
性の向上を図ってきたが、例えば特定の温度範囲に合せ
て任意に感湿特性をコントロールし、しかもその湿度範
囲において一層感度を良好ならしめると共に良好な直線
性を得るための改善が要求され、そのための開発が残さ
れていた。Since then, attempts have been made to improve the moisture sensitivity characteristics by improving the ion blating treatment, roughening the surface of the metal compound film, and improving the treatment. There was a need for improvements to control the humidity, to improve sensitivity and to obtain good linearity in that humidity range, and development for this purpose remained.
そこで、本発明者等は、従来の基板と、下部電極と、湿
気に活性な薄膜と、上部電極で構成される容量式薄膜湿
度センサにつきらに研究を進めた結果、湿気に活性な薄
膜して従来の金属化合物薄膜や有機高分子薄。Therefore, as a result of further research into a capacitive thin-film humidity sensor consisting of a conventional substrate, a lower electrode, a moisture-active thin film, and an upper electrode, the present inventors have developed a moisture-active thin film. conventional metal compound thin films and organic polymer thin films.
に代えて炭素化合物薄膜、特にアモルファ状炭素化合物
薄膜を付着させれば、従来技・につきまとう容量式湿度
センサの諸性質、１に感度および直線性について改善さ
れるこを突き止め、特許出願を行った（特開昭６−２１
７１５３号公報）。They discovered that by attaching a carbon compound thin film, especially an amorphous carbon compound thin film, instead of the conventional technology, the various properties of conventional capacitive humidity sensors, such as sensitivity and linearity, could be improved, and they filed a patent application. (Unexamined Japanese Patent Publication No. 6-21
Publication No. 7153).
しかしながら、この種の湿度センサにお（で、新規な材
料を使用した場合の感湿特性Ｃ安定性について若干問題
があり、さらに研３並びに改良を重ねた結果、導電性薄
膜基板ζメツシュ穴を設けてこれを有機高分子で被ぞし
て湿度センサの電極板を構成することに。However, this type of humidity sensor has some problems with the stability of the humidity sensitivity when using a new material, and as a result of further refinement and improvement, the conductive thin film substrate ζ mesh hole This was then covered with an organic polymer to form the electrode plate of the humidity sensor.
す、比較的簡単な構成でしかも簡便に製造することかで
き、さらに感湿特性の安定性ににれだ容量式薄膜湿度セ
ンサを得ることかでばることを突き止め、本発明の完成
に至った。The present inventors have discovered that it is possible to obtain a capacitive thin film humidity sensor with a relatively simple structure, which can be manufactured easily, and in addition, the stability of the moisture-sensing characteristics is critical, leading to the completion of the present invention. .
と 従って、本発明の目的は、導電性薄膜基板さ
と有機高分子とを組合せて湿度センサの電極と
を構成することにより、特定の温度範囲に合嘆 せて
任意に感湿特性をコントロールでき、さス らに直線
性の良好な範囲において感度を一層府 良好にし、し
かも低コストに製造することが時 できる容量式薄膜
湿度センサおよびその製造と 方法を提供することに
ある。Therefore, an object of the present invention is to provide a conductive thin film substrate.
and an organic polymer to form a humidity sensor electrode.
By configuring this, the moisture sensitivity characteristics can be controlled arbitrarily to suit a specific temperature range, and the sensitivity can be further improved in a range with good linearity, and it can be manufactured at low cost. An object of the present invention is to provide a capacitive thin film humidity sensor that can be used at the same time, and its manufacturing and method.
２ 〔課題を解決するための手段〕
本発明に係る容量式薄膜湿度センサは、導１） 電性
薄膜基板に所定寸法のメツシュ穴を穿設Ｄ した一対
の電極板を備え、前記各電極板に対見 し前記メツシ
ュ穴を含む全体を有機高分子で＝ 均一に被覆し、こ
れら電極板を重ね合せて有１ 機高分子の溶媒で接着
してなることを特徴と５ する。2 [Means for Solving the Problems] The capacitive thin film humidity sensor according to the present invention comprises: 1) a pair of electrode plates in which a mesh hole of a predetermined size is bored in an electrically conductive thin film substrate; In contrast, the electrode plate is characterized in that the entire area including the mesh holes is uniformly coated with an organic polymer, and these electrode plates are stacked and bonded using a solvent of the organic polymer.
ヒ 前記の容量式薄膜湿度センサにおいて、導Ｅ
電性薄膜基板は、ステンレス、銅、ニッケル、と
モリブデンよりなる群から選択することができる。また
、導電性薄膜基板は、厚さ５〜１５μｍの矩形体または
円形体からなり一側部に接続端子用突出部を備えた構成
とし、さらに導電性薄膜基板に穿設するメツシュ穴は３
００〜５００メツシュとすることができるなお、前記電
極を被覆する有機高分子の被膜厚さは１〜３μｍとすれ
ば好適である。H. In the capacitive thin film humidity sensor described above,
Conductive thin film substrates include stainless steel, copper, nickel, and
It can be selected from the group consisting of molybdenum. The conductive thin film substrate is a rectangular or circular body with a thickness of 5 to 15 μm, and has a protrusion for a connecting terminal on one side, and the number of mesh holes drilled in the conductive thin film substrate is 3.
The thickness of the organic polymer coating covering the electrode is preferably 1 to 3 μm.
また、本発明に係る容量式薄膜湿度センサの製造方法は
、導電性薄膜基板に接続端子用突８部を除いてほぼ全面
的にメツシュ穴を穿設加工し、この導電性薄膜基板をア
セテートセルロース等からなる有機高分子材料の浴に浸
漬し、メツシュ穴を含む導電性薄膜基板全体を所定厚さ
の有機高分子被膜で被覆して電極板を成形し、次いで前
記一対の電極板をそれぞれ接続端子用突出部が重ならな
いように重ね合せると共に有機高分子の溶媒で接着し前
記電極板の各接続端子用突出部にリード線を導通接続す
ることを特徴とする。Further, in the method for manufacturing a capacitive thin film humidity sensor according to the present invention, mesh holes are formed almost entirely on the conductive thin film substrate except for the 8 protrusions for connecting terminals, and the conductive thin film substrate is made of acetate cellulose. The entire conductive thin film substrate including the mesh holes is coated with an organic polymer film of a predetermined thickness to form an electrode plate, and then the pair of electrode plates are connected to each other. The electrode plate is characterized in that the protrusions for terminals are overlapped so as not to overlap and are adhered with an organic polymer solvent, and a lead wire is electrically connected to each protrusion for connection terminals of the electrode plate.
この場合、導電性薄膜基板におけるメツシュ穴の穿設加
工は、エツチングまたはレーザにより行うことができる
。In this case, the mesh holes can be formed in the conductive thin film substrate by etching or laser.
本発明によれば、導電性薄膜基板に加工を。 加えて
、これに従来より知られている有機高分子被膜を形成す
ることによって湿度センサの電極板を構成することによ
り、簡単な構成でしかも簡便かつ低コストに製造するこ
とができ、感度および直線性も向上しかつ安定したもの
となる容量式薄膜湿度センサが得られる。According to the present invention, a conductive thin film substrate can be processed. In addition, by forming the electrode plate of the humidity sensor by forming a conventionally known organic polymer film on this, it can be manufactured with a simple structure and at low cost, and has excellent sensitivity and linearity. A capacitive thin film humidity sensor with improved performance and stability can be obtained.
次に、本発明に係る容量式薄膜湿度センサの好適な実施
例につき、その製造方法との関係において添付図面を参
照しながら以下詳細に説明する。Next, a preferred embodiment of the capacitive thin film humidity sensor according to the present invention will be described in detail below in relation to its manufacturing method with reference to the accompanying drawings.
第１図は、本発明に係る容量式薄膜湿度センサの電極を
作成するための導電性薄膜基板ｌＯの一実施例を示す。FIG. 1 shows an example of a conductive thin film substrate lO for making electrodes of a capacitive thin film humidity sensor according to the present invention.
この導電性薄膜基板１０は、例えばステンレス、銅、ニ
ッケル、モリブデンあるいはこれらの合金等を使用する
ことかできる。また、この導電性薄膜基板１０は、約５
〜１５μｍの厚さのものを好適に使用することができる
。しかるに、第１図に示す実施例の導電性薄膜基板１０
は、例えば横ａ×縦すの寸法を６ｘ７ｍｍの矩形状に設
定し、−側部に接続端子用突出部１２を設けた構成とす
る。前記導電性薄膜基板１０の矩形状部分のほぼ全体に
亘ってメツシュ穴１４を形成する。メツシュ穴の寸法は
、約３００〜５００メツシュ程度が好適範囲であり、特
に４００メツシュ程度が好適である。This conductive thin film substrate 10 may be made of, for example, stainless steel, copper, nickel, molybdenum, or an alloy thereof. Further, this conductive thin film substrate 10 has a thickness of about 5
Thicknesses of ~15 μm can be suitably used. However, the conductive thin film substrate 10 of the embodiment shown in FIG.
For example, the configuration is such that the dimensions of width a x length are set to a rectangular shape of 6 x 7 mm, and the connecting terminal protrusion 12 is provided on the negative side. A mesh hole 14 is formed over almost the entire rectangular portion of the conductive thin film substrate 10. The size of the mesh holes is preferably about 300 to 500 meshes, and particularly preferably about 400 meshes.
そこで、メツシュ穴１４の形状としては、例えば第２図
に示すように、整列された矩形状とし、甚大１４の寸法
を１０ＸＩ Ｏμｍ〜２０Ｘ２０μｍとし、これら穴１
４の間隔すなわち線幅ｌを約１０〜２０μｍに設定する
ことができる。Therefore, the shape of the mesh holes 14 is, for example, as shown in FIG.
4, that is, the line width l can be set to about 10 to 20 μm.
代案として、前記メツシュ穴１４の形状としては、第２
図に示すように、ちどり状に配置した円形とすることか
できる。この場合、甚大の直径φは約０，０１〜０．１
０μｍとし、甚大の間隔ｄは約０．０１μｍに設定する
ことができる。As an alternative, the mesh hole 14 may have a second shape.
As shown in the figure, they can be arranged circularly in a zigzag pattern. In this case, the enormous diameter φ is approximately 0.01-0.1
0 μm, and the significant spacing d can be set to about 0.01 μm.
なお、これら導電性薄膜基板１０に対するメツシュ穴１
４の穿設加工は、エツチングまたはレーザにより簡便に
かつ精密に行うことができる。Note that the mesh holes 1 for these conductive thin film substrates 10
The drilling process 4 can be easily and precisely performed by etching or laser.
次に、前述したようにメツシュ穴１４を穿設加工した導
電性薄膜基板１０を、有機高分子の溶液中に浸漬して、
接続端子用突出部１２の一部を除く全体表面に対し均一
に有機高分子被膜１６を形成する。なお、有機高分子材
料としては、例えばアセテートセルロース等が好適であ
り、これを適当な溶媒で溶解させた状態で使用すること
ができる。この有機高分子被膜１６は、第４図に示すよ
うに、導電性薄膜基板１００表面に対し、約１〜３μｍ
の厚さに設定する。この場合、前記メツシュ穴１４の内
部においても、前記有機高分子が均一に充填されるよう
処理する必要がある。このようにして、本発明の湿度セ
ンサを構成する一方の電極板２０が作成される。Next, the conductive thin film substrate 10 with the mesh holes 14 formed therein as described above is immersed in an organic polymer solution.
An organic polymer coating 16 is uniformly formed on the entire surface of the connecting terminal protrusion 12 except for a portion thereof. Note that as the organic polymer material, for example, cellulose acetate is suitable, and it can be used in a state in which it is dissolved in an appropriate solvent. As shown in FIG. 4, this organic polymer coating 16 has a thickness of about 1 to 3 μm with respect to the surface of the conductive thin film substrate 100.
Set the thickness to . In this case, it is necessary to perform treatment so that the organic polymer is uniformly filled inside the mesh holes 14 as well. In this way, one electrode plate 20 constituting the humidity sensor of the present invention is created.
そこで、本発明においては、前記のようにして作成され
た同一構成からなる一対の電極板２０ｘ、２０ｂを使用
して、これらを第５図に示すように重ね合せて接合する
。接合方法としては、例えば前記有機高分子の溶媒を使
用して簡便かつ容易に接着することができる。Therefore, in the present invention, a pair of electrode plates 20x and 20b having the same structure and made as described above are used, and these are overlapped and bonded as shown in FIG. 5. As a bonding method, for example, the organic polymer solvent can be used for simple and easy bonding.
このようにして、本発明の容量式薄膜湿度センサを得る
ことができる。なお、第５図に示 ４゜すように作成さ
れた湿度センサは、一対の接続端子用突出部１２ｘ、１
２ｂにそれぞれリード線を導通接続して、適宜電気計器
との接続を行うよう構成する。In this way, the capacitive thin film humidity sensor of the present invention can be obtained. Note that the humidity sensor manufactured as shown in FIG. 5 has a pair of connecting terminal protrusions 12
Lead wires are conductively connected to each of the terminals 2b to connect to an electric meter as appropriate.
このようにして得られた本発明の容量式薄膜湿度センサ
の湿度特性を、公知の湿度槽を使用して測定した結果、
第６図に示す特性が得られた。この結果、本発明の容量
式薄膜湿度センサによれば、感湿特性、特にその直線性
において極めて優れていることが確認された。なお、前
述した実施例においては、導電性薄膜基板１０の形状と
して矩形状のものを示したが、これ以外に例えば円形状
とすることもできる。The humidity characteristics of the capacitive thin film humidity sensor of the present invention thus obtained were measured using a known humidity chamber, and the results were as follows:
The characteristics shown in FIG. 6 were obtained. As a result, it was confirmed that the capacitive thin film humidity sensor of the present invention has extremely excellent moisture sensitivity characteristics, especially its linearity. In the above embodiments, the conductive thin film substrate 10 has a rectangular shape, but it can also have a circular shape, for example.
以上、本発明の好適な実施例について説明したが、本発
明は前述した実施例に限定されることなく、本発明の精
神を逸脱しない範囲内において種々の設計変更をなし得
ることは勿論である。Although preferred embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and it goes without saying that various design changes can be made without departing from the spirit of the present invention. .
第１図は本発明に係る容量式薄膜湿度センサの電極を構
成する導電性薄膜基板の一実施例を示す平面図、第２図
は第１図に示す基板に設けるメツシュ穴の一構成例を示
す要部拡大平面図、第３図は第１図に示す基板に設ける
メツシュ穴の別の構成例を示す要部拡大平面図、第４図
は第１図に示す導電性薄膜基板により作成した電極板の
要部拡大断面図、第５図は第１図に示す導電性薄膜基板
により作成した一対の電極板を接合して作成した本発明
に係る容量式薄膜湿度センサの概略斜視図、第６図は本
発明に係る容量式薄膜湿度センサの湿度特性を示す特性
線図である。
１０・・・導電性薄膜基板
１２・・・接続端子用突出部
１４・・・メツシュ穴
１６・・・有機高分子被膜
２０・・・電極板
＼FIG. 1 is a plan view showing one embodiment of a conductive thin film substrate constituting an electrode of a capacitive thin film humidity sensor according to the present invention, and FIG. 2 shows an example of the configuration of mesh holes provided in the substrate shown in FIG. 3 is an enlarged plan view of the main part showing another configuration example of mesh holes provided in the substrate shown in FIG. 1, and FIG. 4 is an enlarged plan view of the main part shown in FIG. 1. FIG. 5 is an enlarged cross-sectional view of the main part of an electrode plate, and FIG. FIG. 6 is a characteristic diagram showing the humidity characteristics of the capacitive thin film humidity sensor according to the present invention. 10... Conductive thin film substrate 12... Connection terminal protrusion 14... Mesh hole 16... Organic polymer coating 20... Electrode plate\
Claims (7)
た一対の電極板を備え、前記各電極板に対し前記メッシ
ュ穴を含む全体を有機高分子で均一に被覆し、これら電
極板を重ね合せて有機高分子の溶媒で接着してなること
を特徴とする容量式薄膜湿度センサ。(1) A conductive thin film substrate is provided with a pair of electrode plates in which mesh holes of a predetermined size are bored, and each of the electrode plates, including the mesh holes, is uniformly coated with an organic polymer. A capacitive thin film humidity sensor characterized by being stacked and bonded using an organic polymer solvent.
モリブデンよりなる群から選択される請求項１記載の容
量式薄膜湿度センサ。(2) The conductive thin film substrate is made of stainless steel, copper, nickel,
The capacitive thin film humidity sensor of claim 1 selected from the group consisting of molybdenum.
たは円形体からなり一側部に接続端子用突出部を備えた
請求項１記載の容量式薄膜湿度センサ。(3) The capacitive thin film humidity sensor according to claim 1, wherein the conductive thin film substrate is a rectangular or circular body with a thickness of 5 to 15 μm and has a protrusion for a connecting terminal on one side.
〜５００メッシュからなる請求項１記載の容量式薄膜湿
度センサ。(4) The number of mesh holes drilled in the conductive thin film substrate is 300.
2. The capacitive thin film humidity sensor according to claim 1, comprising .about.500 mesh.
μｍからなる請求項１記載の容量式薄膜湿度センサ。(5) The thickness of the organic polymer coating on the electrode plate is 1 to 3
2. The capacitive thin film humidity sensor according to claim 1, which comprises micrometers.
全面的にメッシュ穴を穿設加工し、この導電性薄膜基板
をアセテートセルロース等からなる有機高分子材料の浴
に浸漬し、メッシュ穴を含む導電性薄膜基板全体を所定
厚さの有機高分子被膜で被覆して電極板を成形し、次い
で前記一対の電極板をそれぞれ接続端子用突出部が重な
らないように重ね合せると共に有機高分子の溶媒で接着
し、前記電極板の各接続端子用突出部にリード線を導通
接続することを特徴とする容量式薄膜湿度センサの製造
方法。(6) Mesh holes are formed on almost the entire surface of the conductive thin film substrate except for the protrusions for connection terminals, and the conductive thin film substrate is immersed in a bath of an organic polymer material such as acetate cellulose. The entire conductive thin film substrate including the holes is coated with an organic polymer coating of a predetermined thickness to form an electrode plate, and then the pair of electrode plates are overlapped so that the protrusions for connecting terminals do not overlap, and the organic polymer coating is applied. A method for manufacturing a capacitive thin film humidity sensor, which comprises adhering with a molecular solvent and electrically connecting lead wires to each connection terminal protrusion of the electrode plate.
、エッチングまたはレーザにより行うことからなる請求
項６記載の容量式薄膜湿度センサの製造方法。(7) The method of manufacturing a capacitive thin film humidity sensor according to claim 6, wherein the mesh holes are formed in the conductive thin film substrate by etching or laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27772090A JP2810779B2 (en) | 1990-10-18 | 1990-10-18 | Capacitive thin film humidity sensor and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27772090A JP2810779B2 (en) | 1990-10-18 | 1990-10-18 | Capacitive thin film humidity sensor and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04155253A true JPH04155253A (en) | 1992-05-28 |
| JP2810779B2 JP2810779B2 (en) | 1998-10-15 |
Family
ID=17587383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27772090A Expired - Lifetime JP2810779B2 (en) | 1990-10-18 | 1990-10-18 | Capacitive thin film humidity sensor and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2810779B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523302C (en) | 2007-04-25 | 2009-08-05 | 太原钢铁(集团)有限公司 | High-silicon cast iron battery lead plate and preparation method thereof |
| WO2018062379A1 (en) * | 2016-09-30 | 2018-04-05 | ミツミ電機株式会社 | Humidity sensor |
| CN113063995A (en) * | 2021-03-16 | 2021-07-02 | 中国海洋大学 | A carbon-based conductive polymer membrane underwater electric field sensor |
-
1990
- 1990-10-18 JP JP27772090A patent/JP2810779B2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523302C (en) | 2007-04-25 | 2009-08-05 | 太原钢铁(集团)有限公司 | High-silicon cast iron battery lead plate and preparation method thereof |
| WO2018062379A1 (en) * | 2016-09-30 | 2018-04-05 | ミツミ電機株式会社 | Humidity sensor |
| CN109690302A (en) * | 2016-09-30 | 2019-04-26 | 三美电机株式会社 | Humidity sensor |
| JPWO2018062379A1 (en) * | 2016-09-30 | 2019-07-11 | ミツミ電機株式会社 | Humidity sensor |
| EP3502680A4 (en) * | 2016-09-30 | 2019-09-11 | Minebea Mitsumi Inc. | Humidity sensor |
| JP2020190567A (en) * | 2016-09-30 | 2020-11-26 | ミネベアミツミ株式会社 | Humidity sensor |
| US10948448B2 (en) | 2016-09-30 | 2021-03-16 | Minebea Mitsumi Inc. | Humidity sensor |
| CN109690302B (en) * | 2016-09-30 | 2022-07-19 | 美蓓亚三美株式会社 | Humidity sensor |
| CN113063995A (en) * | 2021-03-16 | 2021-07-02 | 中国海洋大学 | A carbon-based conductive polymer membrane underwater electric field sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2810779B2 (en) | 1998-10-15 |
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