JPH04151547A - Visual/microscope observing apparatus - Google Patents
Visual/microscope observing apparatusInfo
- Publication number
- JPH04151547A JPH04151547A JP27596690A JP27596690A JPH04151547A JP H04151547 A JPH04151547 A JP H04151547A JP 27596690 A JP27596690 A JP 27596690A JP 27596690 A JP27596690 A JP 27596690A JP H04151547 A JPH04151547 A JP H04151547A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage
- visual
- coordinates
- coordinate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000007 visual effect Effects 0.000 title claims abstract description 31
- 230000007547 defect Effects 0.000 abstract description 25
- 230000002950 deficient Effects 0.000 abstract description 6
- 239000000428 dust Substances 0.000 abstract description 5
- 238000005286 illumination Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 208000003464 asthenopia Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、例えば液晶表示用ガラス基板の表面の傷、塵
付着などの欠陥を発見、観察に適した目視・顕微鏡観察
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a visual/microscopic observation device suitable for discovering and observing defects such as scratches and dust adhesion on the surface of a glass substrate for liquid crystal display.
[従来の技術]
液晶表示用ガラス基板及び半導体ウェハ等の外観検査で
は、先ず裸眼による目視検査にて表面の傷、塵付着等の
異常を観察し、しかる後に目視検査で発見した異常部分
を顕微鏡検査するのが一般的である。[Prior art] In the appearance inspection of liquid crystal display glass substrates, semiconductor wafers, etc., abnormalities such as scratches and dust adhesion on the surface are first observed with the naked eye, and then abnormalities found during the visual inspection are examined using a microscope. It is common to inspect.
この種の外観検査に用いられる目視・顕微鏡観察装置の
構成例を第4図に示す。この目視・顕微鏡観察装置は、
本体ベース1と、この本体ベース1の板面端部に固定さ
れたL字状のアーム2と、このアーム2に支持され対物
レンズ3及び接眼レンズ4を有する顕微鏡本体5と、ア
ーム2に固定されたステージ支持台6と、このステージ
支持台6にX、Y方向に任意に移動可能に支持され、液
晶表示用ガラス基板等の試料Sを載置するX、Yステー
ジ7と、本体ベース1の近傍に配設されるスタンド8に
支持され、対物レンズ3の近傍に目視観察用照明光を照
射する目視観察用照明装置9から構成されている。FIG. 4 shows an example of the configuration of a visual/microscopic observation device used for this type of appearance inspection. This visual/microscopic observation device is
A main body base 1, an L-shaped arm 2 fixed to the plate end of this main body base 1, a microscope main body 5 supported by this arm 2 and having an objective lens 3 and an eyepiece 4, and fixed to the arm 2. a stage support 6, an X, Y stage 7 supported movably in the X and Y directions on the stage support 6, on which a sample S such as a glass substrate for liquid crystal display is placed, and a main body base 1. The apparatus includes a visual observation illumination device 9 that is supported by a stand 8 disposed near the objective lens 3 and irradiates visual observation illumination light in the vicinity of the objective lens 3.
このように構成された目視・顕微鏡観察装置において、
目視観察で試料Sに傷等の欠陥を発見したら対物レンズ
3の視野内と思われる位置に、該欠陥を位置決めするよ
うにXYステージ7を移動させ、低倍率の対物レンズ3
で該欠陥を視野内に入れ、さらに視野中心に位置決めし
た後、所望の倍率の対物レンズ3に交換後、試料Sの欠
陥の顕微鏡観察を行う。In the visual/microscopic observation device configured in this way,
If a defect such as a scratch is found on the sample S by visual observation, the XY stage 7 is moved to position the defect in a position that is considered to be within the field of view of the objective lens 3, and the low magnification objective lens 3 is moved.
After bringing the defect into the field of view and positioning it at the center of the field of view, the objective lens 3 is replaced with a desired magnification, and the defect in the sample S is observed with a microscope.
[発明が解決しようとする課題]
第4図に示す従来の目視・顕微鏡観察装置は、次の様な
問題点がある。すなわち、顕微鏡本体5がアーム2に固
定されていること、および対物レンズ3は試料Sに対し
て僅かな上下動は可能であるものの対物レンズ3と試料
Sの離間距離か短いことから、目視観察の場所は、顕微
鏡本体に視野を遮られない対物レンズ3から離れた位置
にならざるを得ない。このため、目視観察で発見した欠
陥を顕微鏡観察するためには、先ず欠陥個所をステージ
7を移動して対物レンズ3下にもっていく。[Problems to be Solved by the Invention] The conventional visual/microscopic observation device shown in FIG. 4 has the following problems. That is, although the microscope body 5 is fixed to the arm 2 and the objective lens 3 can move slightly up and down relative to the sample S, the distance between the objective lens 3 and the sample S is short, so visual observation is difficult. must be located away from the objective lens 3 where the field of view is not blocked by the microscope body. Therefore, in order to observe a defect discovered through visual observation using a microscope, the defective location is first moved under the objective lens 3 by moving the stage 7.
続いて、低倍の対物レンズで接眼レンズをのぞきながら
ステージ7を微動送りし、視野内に欠陥を入れ、さらに
視野中心に位置決めする。その後、所望の倍率の対物レ
ンズ3に交換し観察する。即ち、顕微鏡の視野内に位置
させるのに、勘による作業があるためかなりの時間を必
要とし、操作者の眼の疲労等の肉体的苦痛、精神的苦痛
か多大である。Next, while looking through the eyepiece with a low-magnification objective lens, the stage 7 is slightly moved to place the defect within the field of view and further position it at the center of the field of view. Thereafter, the objective lens 3 is replaced with a desired magnification and observed. That is, it takes a considerable amount of time to position the object within the field of view of the microscope because it requires intuition, and the operator suffers from a great deal of physical and mental pain, such as eye fatigue.
本発明は、以上のような実情に鑑みてなされたもので、
試料の欠陥部等の所望の箇所を顕微鏡の視野内へ極めて
容易かつ正確に位置決めてき、操作者の負担を軽減でき
ると共に作業性を大幅に向上できる目視・顕微鏡観察装
置を提供することを目的とする。The present invention was made in view of the above circumstances, and
The purpose of the present invention is to provide a visual inspection/microscope observation device that can extremely easily and accurately position a desired location such as a defective part of a sample within the field of view of a microscope, thereby reducing the burden on the operator and greatly improving work efficiency. do.
[課題を解決するための手段]
上記目的を達成するため本発明に係る目視・顕微鏡観察
装置は、複数枚の試料か収納される試料収納箱と、試料
が載置され水平面方向に回転可能でかつその載置面を所
望の方向に傾斜できる目視観察用の試料載置台と、前記
試料載置台に載置された試料面上の指定された任意の座
標を認識する座標認識手段と、前記座標認識手段で認識
した座標を記憶する記憶手段と、試料が載置され互いに
直交するX、Y方向に移動可能なXYステージと、前記
試料収納箱内の試料を前記試料載置台上へ搬送すると共
に、該試料載置台上の試料及びまたは前記試料収納箱内
の試料を前記XYステージへ搬送するための試料搬送手
段と、前記XYステージに載置された試料を観察するた
めの顕微鏡と、前記記憶手段から読出した座標位置へ前
記XYステージを移動制御するXYステージ制御手段と
を具備するものとしj二。[Means for Solving the Problems] In order to achieve the above object, a visual/microscopic observation device according to the present invention includes a sample storage box in which a plurality of samples are stored, and a sample storage box in which the samples are placed and is rotatable in a horizontal direction. and a sample mounting table for visual observation whose mounting surface can be tilted in a desired direction; a coordinate recognition means for recognizing specified arbitrary coordinates on the sample surface placed on the sample mounting table; a storage means for storing the coordinates recognized by the recognition means; an XY stage on which a sample is placed and movable in mutually orthogonal X and Y directions; , a sample transport means for transporting the sample on the sample mounting table and/or the sample in the sample storage box to the XY stage, a microscope for observing the sample placed on the XY stage, and the memory. and XY stage control means for controlling the movement of the XY stage to the coordinate position read from the means.j2.
[作用]
本発明によれば、目視観察が顕微鏡ステージ上ではなく
目視観察用の試料載置台上で行われ、試料載置台を揺動
および回転させて試料を任意の角度から観察でき試料の
欠陥等の発見か容易となる。[Function] According to the present invention, visual observation is performed not on a microscope stage but on a sample holder for visual observation, and the sample holder can be swung and rotated to observe the sample from any angle, thereby detecting defects in the sample. etc. will be easier to discover.
また、目視観察で発見した試料の欠陥位置は座標認識手
段によって認識した後に記憶手段に記憶される。XYス
テージ制御手段は記憶手段に記憶されている座標情報を
読出して、その座標位置へXYステージを移動し、その
結果、前記座標位置が顕微鏡の視野内に位置合わせされ
る。Further, the defect position of the sample discovered through visual observation is recognized by the coordinate recognition means and then stored in the storage means. The XY stage control means reads the coordinate information stored in the storage means and moves the XY stage to the coordinate position, and as a result, the coordinate position is aligned within the field of view of the microscope.
[実施例]
以下、本発明の実施例について図面を参照して説明する
。[Examples] Examples of the present invention will be described below with reference to the drawings.
第1図(a)(b)は本発明による目視・顕微鏡観察装
置の一実施例を示す図である。本実施例は、試料L¥備
ユニット10と、口視観察部20と、顕微鏡観察部30
とから構成されている。FIGS. 1(a) and 1(b) are diagrams showing an embodiment of a visual/microscopic observation apparatus according to the present invention. This embodiment includes a sample L unit 10, a mouth observation section 20, and a microscope observation section 30.
It is composed of.
試料準備ユニット11−)は、薄板基板等からなる試料
11が複数枚収納された試料収納箱内「キャリア」と呼
称する)12が置台13に載置されている。キャリア]
2はLJ視観察ユニット20に対向する側面に開口が形
成されていて、この開口から任意の試料11を取出すこ
とができるようになっている。In the sample preparation unit 11-), a sample storage box 12 (referred to as a "carrier") in which a plurality of samples 11 made of thin plate substrates or the like are stored is placed on a mounting table 13. Career]
2 has an opening formed on the side surface facing the LJ observation unit 20, and any sample 11 can be taken out from this opening.
目視観察部20は、揺動及び回転可能な試料載置台21
と、この試料載置台21を揺動駆動(傾斜方向)及び回
転駆動する試料載置台駆動制御部と、この試料載置台駆
動制御部に回転制御信号を与える回転調節部と、試料ハ
ンドラ22をX、Y及びθ(回転)方向に移動させてキ
ャリア12内の任意の試料11を目視観察部および顕微
鏡観察部へロード及びアンロードする試料搬送装置23
と、アーム24によって試料載置台21斜め上方に取付
けられた指標投影装置25と、アーム24に取付けられ
た目視観察照明装置26と、試料載置台駆動制御部に対
して試料載置台21の傾斜角の指示を与えるジョイステ
ィック27と、指標投影装置25に対して指標投影方向
(指標投影角)の指示を与えるジョイスティック28と
からなる。The visual observation section 20 includes a sample mounting table 21 that can swing and rotate.
, a sample mounting table drive control section that drives the sample mounting table 21 to swing (in the tilt direction) and rotationally, a rotation adjustment section that provides a rotation control signal to this sample mounting table drive control section, and a sample handler 22 that rotates in the X direction. , Y, and θ (rotation) directions to load and unload any sample 11 in the carrier 12 to and from the visual observation section and the microscope observation section.
, an index projection device 25 attached diagonally above the sample holder 21 by an arm 24, a visual observation illumination device 26 attached to the arm 24, and an inclination angle of the sample holder 21 with respect to the sample holder drive controller. and a joystick 28 that gives instructions on the index projection direction (index projection angle) to the index projection device 25.
指標投影装置25は、ジョイスティック28から与えら
れる制御信号に応じて所定の投影角でレーザビーム光等
の指標を試料表面上に投影するものである。The target projection device 25 projects a target such as a laser beam onto the sample surface at a predetermined projection angle in response to a control signal given from the joystick 28 .
顕微鏡観察部30は、ベース31に固定された支持アー
ム32a、32bに顕微鏡33が支持されている。顕微
鏡33の対物レンズと対向する位置には互いに直交する
X、Y方向へ移動可能なXYステージ34が設けられて
いる。このXYステージ34は不図示のステージ制御装
置によって移動制御される。さらに顕微鏡観察部30に
は、試料載置台21において指標投影装置25で投影さ
れた指標の座標を算出する座標認識装置及びこの座標認
識装置で認識された座標位置を記憶する記憶装置が設け
られている。In the microscope observation section 30, a microscope 33 is supported by support arms 32a and 32b fixed to a base 31. An XY stage 34 that is movable in mutually orthogonal X and Y directions is provided at a position facing the objective lens of the microscope 33. The movement of this XY stage 34 is controlled by a stage control device (not shown). Furthermore, the microscope observation section 30 is provided with a coordinate recognition device that calculates the coordinates of the index projected by the index projection device 25 on the sample mounting table 21, and a storage device that stores the coordinate position recognized by this coordinate recognition device. There is.
第2図を参照して座標認識装置について説明する。The coordinate recognition device will be explained with reference to FIG.
ジョイステライク28から指標投影装置25へ与えられ
た指標投影角と、ジョイスティック27及び回転調節部
21aから試料載置台駆動制御部21bへ与えられた試
料載置台21の傾斜角度。The index projection angle given from the joystick 28 to the index projection device 25, and the inclination angle of the sample mounting table 21 given from the joystick 27 and the rotation adjustment section 21a to the sample mounting table drive control section 21b.
回転量とが、座標認識装置35へ与えられる。座標認識
装置35は、これら入力情報に基づいて試料のある基準
からの指標投影点の(X、Y)座標を演算する機能を有
する。この算出結果は、外部からトリガ信号が入力する
と読出されて記憶装置36へ記憶されるようになってい
る。記憶装置36には複数の座標情報を記憶できる。The amount of rotation is given to the coordinate recognition device 35. The coordinate recognition device 35 has a function of calculating the (X, Y) coordinates of the index projection point from a certain reference of the sample based on this input information. This calculation result is read out and stored in the storage device 36 when a trigger signal is input from the outside. The storage device 36 can store a plurality of pieces of coordinate information.
また、顕微鏡観察部30のステージ制御部には、顕微鏡
観察部30の操作部37によって記憶装置36に記憶さ
れている座標情報が与えられる。このステージ制御部は
、座標情報に応してXYステージを移動させることによ
って、顕微鏡33の対物レンズ光軸が上記座標位置に位
置合わせされるように設定されている。Further, the stage control section of the microscope observation section 30 is given coordinate information stored in the storage device 36 by the operation section 37 of the microscope observation section 30 . This stage control section is set so that the optical axis of the objective lens of the microscope 33 is aligned with the above coordinate position by moving the XY stage according to the coordinate information.
次に、以上のように構成された本実施例の動作について
説明する。Next, the operation of this embodiment configured as above will be explained.
試料搬送装置23によりキャリア12内の任意の試料1
1を目視観察部20の試料載置台21上に搬送する。試
料載置台21上には目視観察照明装置26から照明光が
照射された状態で、ジョイスティック27から傾斜角制
御信号を与えると共に、回転調節部21aから回転制御
信号を与えて試料載置台21を任意の方向へ移動させて
試料11にある傷や塵付着等の欠陥を発見する。傷や塵
付着等の欠陥を発見した場合には、ジョイスティック2
8を操作して、欠陥部分に指標を投影し、座標データの
取込みを行う。座標認識装置35には、試料載置台駆動
制御部21bから試料載置台21の傾斜情報および回転
情報が入力され、指標投影装置25から指標の投影角情
報が入力される。Any sample 1 in the carrier 12 by the sample transport device 23
1 onto the sample mounting table 21 of the visual observation section 20. With illumination light irradiated from the visual observation illumination device 26 onto the sample stage 21, a tilt angle control signal is given from the joystick 27, and a rotation control signal is given from the rotation adjustment section 21a to arbitrarily control the sample stage 21. The specimen 11 is moved in the direction of , and defects such as scratches and dust adhesion on the specimen 11 are discovered. If you find any defects such as scratches or dust, remove the joystick 2.
8 to project the index onto the defective part and import the coordinate data. The coordinate recognition device 35 receives input of tilt information and rotation information of the sample mounting table 21 from the sample mounting table drive control section 21b, and inputs projection angle information of the index from the index projection device 25.
例えば、傾斜情報として、αX、αy及び基準からの回
転角γ、即ちf (ax、 αy、γ)の情報が入力
され、投影角情報としてβX、βy、即ちg(βX、β
y)の情報が人力される。座標認識装置35では、これ
らの人力情報から投影指標が投影された位置を試料の基
準からの座標(X、Y)として算出する。操作者が、座
標認識装置35に対してトリガ信号を入力することによ
りこの座標情報が記憶装置36に記憶される。欠陥を発
見する度に、同様に指標を投影してトリガ信号を入力し
て座標情報を記憶装置36に記憶していく。For example, information on αX, αy and the rotation angle γ from the reference, that is, f (ax, αy, γ), is input as the tilt information, and βX, βy, that is, g (βX, β
y) Information is manually generated. The coordinate recognition device 35 calculates the position where the projection index is projected from this manual information as coordinates (X, Y) from the reference of the sample. When the operator inputs a trigger signal to the coordinate recognition device 35, this coordinate information is stored in the storage device 36. Every time a defect is discovered, an index is similarly projected, a trigger signal is input, and the coordinate information is stored in the storage device 36.
この様にして任意の試料11に対して欠陥位置の座標情
報を取込んだならば、次にこの座標情報を用いて顕微鏡
観察を行う。即ち、目視観察の終了した試料11を試料
搬送装置23によって顕微鏡観察部30のXYステージ
34上にセットしてその試料の基準位置にXYテーブル
34の基準位置を合わせる。次に、その試料11の欠陥
位置の座標情報を記憶装置36から一つづつ読出す。記
憶装置36から読出された座標情報はステージ移動制御
部へ与えられる。ステージ移動制御部は、入力した座標
位置へXYステージを移動させることによって、対物レ
ンズの光軸上に試料11の欠陥位置が位置合わせされる
。次に、顕微鏡33の倍率を所望の倍率にして顕微鏡観
察する。試料中の全ての欠陥または所望の欠陥について
顕微鏡観察の終了した試料はキャリア12へ戻される。Once the coordinate information of the defect position has been acquired for any sample 11 in this manner, microscopic observation is then performed using this coordinate information. That is, the sample 11 that has been visually observed is set on the XY stage 34 of the microscope observation section 30 by the sample transport device 23, and the reference position of the XY table 34 is aligned with the reference position of the sample. Next, the coordinate information of the defect positions of the sample 11 is read out from the storage device 36 one by one. The coordinate information read from the storage device 36 is given to the stage movement control section. The stage movement control section aligns the defect position of the sample 11 on the optical axis of the objective lens by moving the XY stage to the input coordinate position. Next, the magnification of the microscope 33 is set to a desired magnification for microscopic observation. After microscopic observation of all defects or desired defects in the sample has been completed, the sample is returned to the carrier 12.
この様に本実施例によれば、目視観察部20と顕微鏡観
察部30を分離して、目視観察で発見した欠陥は、その
欠陥位置を座標情報として取り込み、顕微鏡観察時にこ
の座標情報に基づいてXYステージ34を移動制御して
顕微鏡33の対物レンズ光軸上に試料の欠陥位置が位置
合わせされるようにした。従って、試料の所望の箇所(
欠陥位置等)を顕微鏡の視野内へ極めて容易かつ正確に
位置決めでき、操作者の負担を大幅に軽減できると共に
作業性を向上できる。As described above, according to the present embodiment, the visual observation section 20 and the microscope observation section 30 are separated, and when a defect is discovered through visual observation, the defect position is taken in as coordinate information, and the defect position is captured based on this coordinate information during microscopic observation. The movement of the XY stage 34 was controlled so that the defect position of the sample was aligned on the optical axis of the objective lens of the microscope 33. Therefore, the desired location of the sample (
The defect position, etc.) can be positioned extremely easily and accurately within the field of view of the microscope, greatly reducing the burden on the operator and improving work efficiency.
座標認識装置の変形例を第3図に示す。A modified example of the coordinate recognition device is shown in FIG.
この変形例はガラス基板等の透明試料の検査に適してい
る。試料載置台を走査線表示装置40で構成する。走査
線表示装置40としては、液晶デイスプレィやELデイ
スプレィがある。走査線表示装置40のX、Y走査線4
1a、41bを表示性行する走査線表示駆動装置42に
、ジョイスティック43から制御信号を与えて、X、Y
走査線41a、41bを任意の位置へ移動させるように
する。This modification is suitable for inspecting transparent samples such as glass substrates. The sample mounting table is composed of a scanning line display device 40. The scanning line display device 40 may be a liquid crystal display or an EL display. X and Y scanning lines 4 of the scanning line display device 40
A control signal is given from a joystick 43 to a scanning line display driving device 42 that displays 1a and 41b.
The scanning lines 41a and 41b are moved to arbitrary positions.
このように構成された変形例におい、透明試料を用いた
場合には、試料を通してX、Y走査線41a、41bか
見えるので、X、Y走査線41a、41bの交点で試料
の任意の位置を指定することができる。この交点座標(
X、Y)を記憶させておけば試料の所望の箇所を顕微鏡
の視野内へ極めて容易に位置&わせてきる。In a modified example configured in this way, when a transparent sample is used, the X and Y scanning lines 41a and 41b can be seen through the sample, so it is possible to locate any position on the sample at the intersection of the X and Y scanning lines 41a and 41b. Can be specified. This intersection coordinate (
By memorizing the X, Y), it is extremely easy to locate and position a desired part of the sample within the field of view of the microscope.
なお、本発明は上記実施例および変形例に限定されるも
のではなく、種々変形可能である。Note that the present invention is not limited to the above embodiments and modifications, and can be modified in various ways.
例えば、指標投影装置と試料照明装置とを一体化させた
構成とすることもできる。For example, it is also possible to adopt a configuration in which the index projection device and the sample illumination device are integrated.
また、走査線表示装置40として、LEDをマトリクス
状に並べたものを用いることもできる。Further, as the scanning line display device 40, an arrangement of LEDs arranged in a matrix can also be used.
[発明の効果コ
以上詳記したように本発明によれば、試料の欠陥部等の
所望の箇所を顕微鏡の視野内へ極めて容易かつ正確に位
置決めでき、操作者の負担を軽減できると共に作業性を
大幅に向上できる目視・顕微鏡観察装置を提供できる。[Effects of the Invention] As described in detail above, according to the present invention, it is possible to extremely easily and accurately position a desired location such as a defective portion of a sample within the field of view of a microscope, reducing the burden on the operator and improving work efficiency. It is possible to provide visual and microscopic observation equipment that can significantly improve performance.
第1図(a)は本発明の一実施例に係る目視・顕微鏡観
察装置の上面図、第1図(b)は同実施例の正面図、第
2図は同実施例の座標認識装置に関連する部分のブロッ
ク図、第3図は座標認識装置の変形例を示す図、第4図
は従来の目視・顕微鏡観察装置の斜視図である。
10・・・試料準備ユニット、11・・・試料、12・
・・試料収納箱、20・・・目視観察部、21・・・試
料載置台、23・・・試料搬送装置、25・・・指標投
影装置、26・・・試料照明装置、27,2.B・・・
ジョイスティック、30・・・顕微鏡観察部、33・・
・顕微鏡、34・・・XYステージ、35・・・座標認
識装置、36・・・記憶装置。FIG. 1(a) is a top view of a visual/microscopic observation device according to an embodiment of the present invention, FIG. 1(b) is a front view of the same embodiment, and FIG. 2 is a coordinate recognition device of the same embodiment. FIG. 3 is a block diagram of related parts, FIG. 3 is a diagram showing a modified example of the coordinate recognition device, and FIG. 4 is a perspective view of a conventional visual/microscopic observation device. 10... Sample preparation unit, 11... Sample, 12.
... Sample storage box, 20... Visual observation unit, 21... Sample mounting table, 23... Sample transport device, 25... Index projection device, 26... Sample illumination device, 27, 2. B...
Joystick, 30... Microscope observation section, 33...
・Microscope, 34...XY stage, 35...Coordinate recognition device, 36...Storage device.
Claims (1)
れ水平面方向に回転可能でかつその載置面を所望の方向
に傾斜できる目視観察用の試料載置台と、前記試料載置
台に載置された試料面上の指定された任意の座標を認識
する座標認識手段と、前記座標認識手段で認識した座標
を記憶する記憶手段と、試料が載置され互いに直交する
X、Y方向に移動可能なXYステージと、前記試料収納
箱内の試料を前記試料載置台上へ搬送すると共に、該試
料載置台上の試料及びまたは前記試料収納箱内の試料を
前記XYステージへ搬送するための試料搬送手段と、前
記XYステージに載置された試料を観察するための顕微
鏡と、前記記憶手段から読出した座標位置へ前記XYス
テージを移動制御するXYステージ制御手段とを具備し
た目視・顕微鏡観察装置。A sample storage box in which a plurality of samples are stored; a sample mounting table for visual observation on which a sample is placed and is rotatable in a horizontal direction and the mounting surface can be tilted in a desired direction; Coordinate recognition means for recognizing specified arbitrary coordinates on the surface of the sample placed thereon; storage means for storing the coordinates recognized by the coordinate recognition means; a movable XY stage; and a movable XY stage for transporting the sample in the sample storage box onto the sample mounting stand, and transporting the sample on the sample mounting stand and/or the sample in the sample storage box to the XY stage. Visual/microscopic observation comprising a sample transport means, a microscope for observing the sample placed on the XY stage, and an XY stage control means for controlling the movement of the XY stage to the coordinate position read from the storage means. Device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2275966A JP3021599B2 (en) | 1990-10-15 | 1990-10-15 | Visual observation device and visual / microscope observation device using it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2275966A JP3021599B2 (en) | 1990-10-15 | 1990-10-15 | Visual observation device and visual / microscope observation device using it |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15286899A Division JP3188250B2 (en) | 1999-05-31 | 1999-05-31 | Visual observation device and visual / microscope observation device using it |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04151547A true JPH04151547A (en) | 1992-05-25 |
JP3021599B2 JP3021599B2 (en) | 2000-03-15 |
Family
ID=17562903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2275966A Expired - Fee Related JP3021599B2 (en) | 1990-10-15 | 1990-10-15 | Visual observation device and visual / microscope observation device using it |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3021599B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6362884B1 (en) | 1997-09-24 | 2002-03-26 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
WO2003040708A1 (en) * | 2001-11-05 | 2003-05-15 | Olympus Corporation | Holder device |
US6671041B2 (en) | 1997-09-24 | 2003-12-30 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
CN106475731A (en) * | 2015-08-24 | 2017-03-08 | 帆宣系统科技股份有限公司 | Vertical repairing machine and repairing method thereof |
-
1990
- 1990-10-15 JP JP2275966A patent/JP3021599B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6362884B1 (en) | 1997-09-24 | 2002-03-26 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
US6671041B2 (en) | 1997-09-24 | 2003-12-30 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
US6707546B2 (en) | 1997-09-24 | 2004-03-16 | Olympus Optical Co., Ltd. | Apparatus for inspecting a substrate |
WO2003040708A1 (en) * | 2001-11-05 | 2003-05-15 | Olympus Corporation | Holder device |
CN106475731A (en) * | 2015-08-24 | 2017-03-08 | 帆宣系统科技股份有限公司 | Vertical repairing machine and repairing method thereof |
Also Published As
Publication number | Publication date |
---|---|
JP3021599B2 (en) | 2000-03-15 |
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