JPH04132150A - Electron beam irradiation type analyzer - Google Patents
Electron beam irradiation type analyzerInfo
- Publication number
- JPH04132150A JPH04132150A JP2253062A JP25306290A JPH04132150A JP H04132150 A JPH04132150 A JP H04132150A JP 2253062 A JP2253062 A JP 2253062A JP 25306290 A JP25306290 A JP 25306290A JP H04132150 A JPH04132150 A JP H04132150A
- Authority
- JP
- Japan
- Prior art keywords
- image
- sample
- electron beam
- points
- coordinates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 35
- 238000004458 analytical method Methods 0.000 claims abstract description 23
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 230000010287 polarization Effects 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000001000 micrograph Methods 0.000 abstract description 6
- 101000741289 Homo sapiens Calreticulin-3 Proteins 0.000 abstract description 4
- 101000969621 Homo sapiens Monocarboxylate transporter 12 Proteins 0.000 abstract description 4
- 102100021444 Monocarboxylate transporter 12 Human genes 0.000 abstract description 4
- 101100112083 Arabidopsis thaliana CRT1 gene Proteins 0.000 abstract description 3
- 101100238301 Arabidopsis thaliana MORC1 gene Proteins 0.000 abstract description 3
- 101100519629 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) PEX2 gene Proteins 0.000 abstract description 3
- 101100468521 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) RFX1 gene Proteins 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 238000004453 electron probe microanalysis Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は電子線マイクロアナライザ（ＥＰＭＡ）におけ
る試料位置自動設定装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an automatic sample position setting device in an electron beam microanalyzer (EPMA).
（従来の技術〉
鉱物性試料の分析で、試料を薄片状にして偏光透過像を
観察する方法があり、この方法とＸ線分光分析、２次電
子像による表面観察等の電子ビーム照射による分析法と
を併用する場合がある。このような場合従来は試料をＥ
ＰＭＡ内にセットし、試料下面から偏光を照射し、試料
透過光をＥＰＭＡに付設された光学顕微鏡で結像させて
試料の透過偏光像を目視観察し、電子ビーム照射による
分析を行う点を決め、手動的に試料を駆動させて、分析
点を顕微鏡の視野中心に持って行き、電子ビーム照射を
行うと云う方法をとっていたので、−試料で幾つかの点
で分析を行う場合、−々手動的操作で試料を動かさねば
ならず、大へん面倒であった。(Conventional technology) In the analysis of mineral samples, there is a method of making the sample into a thin section and observing a polarized light transmission image. In some cases, the sample is used in combination with the E method.
Set it in the PMA, irradiate polarized light from the bottom surface of the sample, form an image of the sample transmitted light with an optical microscope attached to the EPMA, visually observe the transmitted polarized image of the sample, and decide the point where analysis by electron beam irradiation will be performed. , the method used was to manually drive the sample, bring the analysis point to the center of the field of view of the microscope, and perform electron beam irradiation. The sample had to be moved manually, which was very troublesome.
（発明が解決しようとする課題）
本発明は、試料透過偏光像と電子ビーム照射を用いた分
析とを関係付けて行う場合において、電子ビーム照射型
分析装置に対する試料位ｉ設定を自動化することにより
、上述した操作上の面倒さを解消しようとするものであ
る。(Problems to be Solved by the Invention) The present invention provides a method for automating the sample position i setting for an electron beam irradiation analyzer when performing analysis using a transmitted polarized light image of a sample in relation to electron beam irradiation. , which attempts to eliminate the above-mentioned operational troubles.
（課題を解決するための手段）
試料に電子ビームを照射する電子光学系と同軸的に構成
された光学顕微鏡と、試料移動台上の試料を下方から照
射する偏光照射手段と、上記光字類ｙａｓによる試料透
過偏光像を撮像し、映像表示する手段と、電子ビーム照
射された試料から放出される２次放射を検出する手段と
、その検出出力を映像表示する手段と、上２両映表示手
段における表示像で相互対応する３点を指定すると、そ
れら３点の各映像表示手段上の座標データから、透過偏
光像表示段における表示像上の任意の点に対する、試料
上の電子ビーム照射点の座標を算出し、透過偏光像表示
手段に表示された映像上で指定した複数点の座標を記憶
しておき順次この座標データから上記電子ビーム照射点
の座標を算出して試料移動台を駆動し、電子ビーム照射
による分析データを採取して行く制御装置とで電子ビー
ム照射型分析装置を構成した。(Means for solving the problem) An optical microscope configured coaxially with an electron optical system that irradiates the sample with an electron beam, a polarized light irradiation means that irradiates the sample on the sample moving table from below, and the above-mentioned optical type. a means for capturing a polarized image transmitted through the sample by YAS and displaying the image; a means for detecting secondary radiation emitted from the sample irradiated with the electron beam; a means for displaying the detection output as an image; When three mutually corresponding points are specified in the display image on the means, the coordinate data of these three points on each image display means determines the electron beam irradiation point on the sample for any point on the display image on the transmission polarization image display stage. calculates the coordinates of the electron beam irradiation point, stores the coordinates of multiple points specified on the image displayed on the transmitted polarization image display means, sequentially calculates the coordinates of the electron beam irradiation point from this coordinate data, and drives the sample moving stage. An electron beam irradiation type analyzer was constructed with a control device that collects analysis data by electron beam irradiation.
（作用）
電子ビーム照射型分析装置で電子光学系と同軸的に光学
顕微鏡を設けても、透過偏光像と試料面の電子ビームに
よる走査像とは、像の方向や倍率は興っている。しかし
両方の像で相互対応する点は目視観察により容易に見出
すことができる。また透過偏光像の表示面等で制御装置
に対し任意の点を指定することは表示面にカーソルを表
示し、それをマウスを用いて移動させる等周知の方法で
可能であり、このようにして、走査電子ビームによる像
と透過偏光像の互いに対応する３点を指定すると、透過
偏光像上の座標データを走査電子ビームによる像上の対
応点の座標データに変換することができる。従って透過
偏光像の表示面上で分析点を指定すると、走査電子ビー
ムの表示像上の座標が求められ、この座標が求まると、
電子光学系光軸に対して試料分析点の座標が決まり、そ
れに従って試料移動装置を駆動することができる。(Function) Even if an optical microscope is installed coaxially with the electron optical system in an electron beam irradiation analyzer, the transmitted polarized image and the scanned image of the sample surface by the electron beam are different in direction and magnification. However, mutually corresponding points in both images can be easily found by visual observation. In addition, specifying an arbitrary point on the display surface of a transmitted polarized light image to the control device is possible using well-known methods such as displaying a cursor on the display surface and moving it using a mouse. , by specifying three points corresponding to each other on the image formed by the scanning electron beam and the transmitted polarized light image, the coordinate data on the transmitted polarized light image can be converted into the coordinate data of the corresponding points on the image formed by the scanned electron beam. Therefore, when an analysis point is specified on the display surface of the transmitted polarized light image, the coordinates on the display image of the scanning electron beam are determined, and when these coordinates are determined,
The coordinates of the sample analysis point are determined with respect to the optical axis of the electron optical system, and the sample moving device can be driven accordingly.
分析点は何点であっても、記憶させておけばよいので、
−度分析点を指定してしまえば後は自動的に電子ビーム
照射による分析を行って行くことができる。No matter how many analysis points you have, you can just memorize them.
Once the analysis point is specified, analysis using electron beam irradiation can be performed automatically.
（実施例） 第１図は本発明の一実施例のＥＰＭＡを示す。(Example) FIG. 1 shows an EPMA according to an embodiment of the present invention.
１は電子鏡、２，３は電子レンズで電子ビームｅを試料
Ｓの表面に収束させる。４は電子ビームを偏向させて試
料面を走査する走査コイルである。1 is an electron mirror, and 2 and 3 are electron lenses that focus the electron beam e onto the surface of the sample S. 4 is a scanning coil that deflects the electron beam to scan the sample surface.
５は光学顕微鏡の対物鏡であり、６．７は光学顕微鏡の
光路をＥＰＭＡの筐体外に導く反射鋲であり、光学顕微
鏡の光軸゛と、電子レンズ２．３等からなる電子光学系
の光軸とは一致させである。８は試料移動台でｘｐ ｙ
、ｚ３方向に試料を移動させることができる。試料移動
台で試料の下の部分は開放されていて光源り、偏光子Ｐ
１集光レンズＧ等よりなる偏光照明系９が配置されて、
試料Ｓを下方から偏光で照明できるようになっている。5 is an objective mirror of the optical microscope, and 6.7 is a reflective stud that guides the optical path of the optical microscope to the outside of the EPMA housing. It should be aligned with the optical axis. 8 is the sample moving table xp y
, z3 direction. The lower part of the sample on the sample moving table is open, and the light source and polarizer P
1 A polarized illumination system 9 consisting of a condenser lens G etc. is arranged,
The sample S can be illuminated from below with polarized light.
光学顕微鏡においてＱは検光子、１０はビデオカメラで
、その出力映像信号はアンプＡｔ、Ａ、・′Ｄ変換器Ａ
ＤＩを通して画像メモリ１１に２博せしめられる。１２
は２次電子検出器で電子ビームｅの照射を受けた試料か
ら放出される２次電子を吸引検出し、その出力はアンプ
Ａ２．Ａｙ・′Ｄ変換器ＡＤ２を通して画像メモリ１３
に記憶せしめられる。ＣＲＴＩは画像メモリ１１の記憶
画像を表示し、ＣＲＴ２は画像メモリ１３に記憶された
画像を表示する。ＣＰＵは装置全体を制御している制御
装置である。１４はマウスでＣＲＴＩ或はＣＲＴ２に表
示されているカーソルを移動させて、表示画面上の任意
の点の座標データをＣＰＵに読込ませることができる。In the optical microscope, Q is an analyzer, 10 is a video camera, and the output video signal is transmitted through amplifiers At, A, and D converters A.
Two images are stored in the image memory 11 through the DI. 12
is a secondary electron detector that attracts and detects secondary electrons emitted from the sample irradiated with the electron beam e, and its output is sent to the amplifier A2. Image memory 13 through Ay/'D converter AD2
be memorized. The CRTI displays the image stored in the image memory 11, and the CRT2 displays the image stored in the image memory 13. The CPU is a control device that controls the entire device. Reference numeral 14 allows the CPU to read coordinate data of any point on the display screen by moving a cursor displayed on the CRTI or CRT 2 with a mouse.
試料Ｓに電子ビームと偏光を照射し、電子ビームで走査
を行い、ＣＲＴＩ、ＣＲＴ２を作動させると、ＣＲＴＩ
上には試料の偏光類ｍ鏡像が表示され、ＣＲＴ２には走
査型電子顕微鏡像が表示される。第２図Ａは走査電子像
、同Ｂは偏光顕微鏡像である。両像の目視観察により、
相互対応が明白である点が幾つも見出される。マウス１
４を使ってＣＲＴｌ、ＣＲＴ２の画面上で互いに対応す
る３対の点例えば第２図でＡ、Ｂ、Ｃ，Ａ’Ｂ’、Ｃ’
を指定すると、ＣＰＵはそれらの点の各画像上での座標
を検出して記憶し、両画像間の座標の変換式を作る。こ
の変換式の作成には画面上の任意の三点を指定すれば充
分である。その後マウス１４を操作して、ＣＲＴｌの画
面上で分析したい点を次々と指定して行（と、ＣＰＵは
それらの点の座標を検出し、走査電子像上の座標データ
に変換して登録して行（。その後ＣＰＵを自動分析モー
ドにすると、ＣＰＵは登録された座標データに基きし、
試料移動台８を駆動して、指定された分析点を順次分析
して行く。When the sample S is irradiated with an electron beam and polarized light, scanned with the electron beam, and the CRTI and CRT2 are activated, the CRTI
A polarized mirror image of the sample is displayed on the top, and a scanning electron microscope image is displayed on the CRT 2. FIG. 2A is a scanning electron image, and FIG. 2B is a polarizing microscope image. By visual observation of both images,
A number of points can be found where the correspondences are clear. mouse 1
4 to find three pairs of points corresponding to each other on the screens of CRT1 and CRT2, for example, A, B, C, A'B', C' in Fig. 2.
When , the CPU detects and stores the coordinates of those points on each image, and creates a coordinate conversion formula between the two images. To create this conversion formula, it is sufficient to specify three arbitrary points on the screen. After that, operate the mouse 14 to specify the points you want to analyze on the CRTl screen one after another (and the CPU detects the coordinates of those points, converts them to coordinate data on the scanning electron image, and registers them. line (. After that, when the CPU is set to automatic analysis mode, the CPU will automatically analyze the data based on the registered coordinate data.
The sample moving stage 8 is driven to sequentially analyze designated analysis points.
（発明の効果）
走査電子顕微鏡像はきわめて鮮鋭であるが、主として試
料面の形状を表示しているので、微細な不純物等識別困
難な場合があり、Ｘ線分光分析等を行うための分析点の
選定がむつかしかったが、本発明によれば、偏光顕微鏡
によって分析点を指定するので、偏光顕微鏡像は試料の
物質の集合組織を明瞭に表現するから、分析点の選定が
容易的確にでき、予め分析点を指定しておけば、以後は
自動的に分析が行われるので、分析作業が能率的になる
。(Effect of the invention) Scanning electron microscope images are extremely sharp, but since they mainly display the shape of the sample surface, it may be difficult to identify minute impurities, and analysis points for performing X-ray spectroscopic analysis, etc. However, according to the present invention, since the analysis points are specified using a polarizing microscope, the polarizing microscope image clearly expresses the texture of the material of the sample, so the analysis points can be easily and accurately selected. If an analysis point is specified in advance, analysis will be performed automatically thereafter, making analysis work more efficient.
第１図は本発明の一実施例装置のブロック図、第２図は
同実施例における表示画面の図である。
１・・・電子鏡、２．３・・・電子レンズ、５・・・対
物鏡、８・・・試料移動台、Ｓ・・・試料、９・・・偏
光照明系、１０・・・撮像カメラ、１１．１３・・・画
像メモリ、１４・・・マウス。
代理人 弁理士 縣 浩 介FIG. 1 is a block diagram of an apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram of a display screen in the same embodiment. DESCRIPTION OF SYMBOLS 1...Electronic mirror, 2.3...Electronic lens, 5...Objective mirror, 8...Sample moving stage, S...Sample, 9...Polarized illumination system, 10...Imaging Camera, 11.13... Image memory, 14... Mouse. Agent Patent Attorney Kosuke Agata
Claims (1)
された光学顕微鏡と試料移動台上の試料を下方から照射
する偏光照射手段と、上記光学顕微鏡による試料透過偏
光像を撮像し、映像表示する手段と、電子ビーム照射さ
れた試料から放出される２次放射を検出する手段と、そ
の検出出力を映像表示する手段と、上記両映表示手段に
おける表示像で相互対応する３点を指定すると、それら
３点の各映像手段上の座標データから、透過偏光像表示
段における表示像上の任意の点に対する、試料上の電子
ビーム照射点の座標を算出し、透過偏光像表示手段に表
示された映像上で指定した複数点の座標を記憶しておき
、順次この座標データから上記電子ビーム照射点の座標
を算出して電子ビーム照射点を設定し、電子ビーム照射
による分析データを採取して行く制御装置とよりなるこ
とを特徴とする電子線照射型分析装置。An optical microscope configured coaxially with an electron optical system that irradiates the sample with an electron beam, a polarized light irradiation means that irradiates the sample on the sample moving table from below, and a polarized light image transmitted through the sample by the optical microscope and displayed as an image. A means for detecting secondary radiation emitted from a sample irradiated with an electron beam, a means for displaying the detection output as an image, and three mutually corresponding points in the display images of both of the above image display means are specified. , from the coordinate data on each of these three points on the image means, calculate the coordinates of the electron beam irradiation point on the sample with respect to any point on the display image on the transmission polarization image display stage, and display the coordinates on the transmission polarization image display means. The coordinates of multiple points specified on the image are memorized, the coordinates of the electron beam irradiation point are calculated from this coordinate data, the electron beam irradiation point is set, and the analysis data from the electron beam irradiation is collected. An electron beam irradiation type analyzer characterized by comprising a control device and a control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253062A JP2913807B2 (en) | 1990-09-21 | 1990-09-21 | Electron beam irradiation analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253062A JP2913807B2 (en) | 1990-09-21 | 1990-09-21 | Electron beam irradiation analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04132150A true JPH04132150A (en) | 1992-05-06 |
| JP2913807B2 JP2913807B2 (en) | 1999-06-28 |
Family
ID=17245964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2253062A Expired - Lifetime JP2913807B2 (en) | 1990-09-21 | 1990-09-21 | Electron beam irradiation analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2913807B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006331852A (en) * | 2005-05-26 | 2006-12-07 | Jeol Ltd | Surface observation analyzer |
-
1990
- 1990-09-21 JP JP2253062A patent/JP2913807B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006331852A (en) * | 2005-05-26 | 2006-12-07 | Jeol Ltd | Surface observation analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2913807B2 (en) | 1999-06-28 |
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