JPH0389570A - Piezoelectric distortion element - Google Patents
Piezoelectric distortion elementInfo
- Publication number
- JPH0389570A JPH0389570A JP1224507A JP22450789A JPH0389570A JP H0389570 A JPH0389570 A JP H0389570A JP 1224507 A JP1224507 A JP 1224507A JP 22450789 A JP22450789 A JP 22450789A JP H0389570 A JPH0389570 A JP H0389570A
- Authority
- JP
- Japan
- Prior art keywords
- electric field
- piezoelectric ceramic
- piezoelectric
- field side
- ceramic plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 40
- 230000005684 electric field Effects 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 abstract description 12
- 230000028161 membrane depolarization Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 6
- 229910000906 Bronze Inorganic materials 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 239000010974 bronze Substances 0.000 description 5
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 241000274582 Pycnanthus angolensis Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011087 paperboard Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、圧電セラ壽ツクス板への電圧印加による該圧
電セラミックス板の伸縮を利用する圧電たわみ素子に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric deflection element that utilizes the expansion and contraction of a piezoelectric ceramic plate due to the application of a voltage to the piezoelectric ceramic plate.
従来、圧電セラミックス仮に電圧を印加することにより
該圧電セラミックス板を伸縮させ、この圧電セラミック
ス板のたわみ運動を駆動源として利用する圧電たわみ素
子が知られている。圧電たわみ素子をアクチエエータと
して使用する場合、所定の変位量と力量が必要で、例え
ば光路開閉装置等に用いる場合には、遮光板の移動量と
共に、その移動速度を大きくする必要があった。遮光板
の移動速度を大きくしようとする場合、遮光板を含む機
械的伝達系の全重量を軽減することも必要ではあるが、
特に圧電たわみ素子の応答速度を大きくすることが重要
である。2. Description of the Related Art Conventionally, a piezoelectric deflection element is known in which a piezoelectric ceramic plate is expanded and contracted by temporarily applying a voltage, and the deflection movement of the piezoelectric ceramic plate is used as a driving source. When a piezoelectric deflection element is used as an actuator, a predetermined amount of displacement and force are required. For example, when used in an optical path opening/closing device, etc., it is necessary to increase the amount of movement and the speed of movement of the light shielding plate. When trying to increase the moving speed of the light shielding plate, it is also necessary to reduce the total weight of the mechanical transmission system including the light shielding plate.
In particular, it is important to increase the response speed of the piezoelectric deflection element.
素子自体の共振周波数を大きくすることが考えられるが
、その場合、必要な変位量と力量が得られなくなる。又
圧電セラミックス板や金属性シム材の厚みを増せば素子
の剛性が高まり、共振周波数は上るが、逆に変形しにく
くなり、必要な変位量が得られなくなるといった問題点
があった。It is conceivable to increase the resonant frequency of the element itself, but in that case, the necessary displacement and force cannot be obtained. In addition, increasing the thickness of the piezoelectric ceramic plate or metallic shim material increases the rigidity of the element and raises the resonance frequency, but it also becomes difficult to deform, making it impossible to obtain the necessary amount of displacement.
本発明者らは以上のごとき従来技術の問題点を解決する
ために鋭意研究を行った結果本発明に至った。The present inventors conducted extensive research to solve the problems of the prior art as described above, and as a result, they arrived at the present invention.
本発明は、圧電セラミックス板と弾性を有する金属製シ
ム材とを複数枚交互に接着した圧電たわみ素子において
、逆電界側の圧電セラミックス板が１枚であり、順電界
側の圧電セラミックス板が複数枚であることを特徴とす
る圧電たわみ素子に関する。The present invention provides a piezoelectric deflection element in which a plurality of piezoelectric ceramic plates and elastic metal shims are bonded alternately, in which there is one piezoelectric ceramic plate on the reverse electric field side and a plurality of piezoelectric ceramic plates on the forward electric field side. The present invention relates to a piezoelectric deflection element characterized in that it is a piezoelectric deflection element.
以下に本発明を図面を参照して説明する。The present invention will be explained below with reference to the drawings.
第１図は、本発明の一実施態様を示す圧電たわみ素子の
縦断面である。FIG. 1 is a longitudinal cross-section of a piezoelectric deflection element showing one embodiment of the present invention.
本図において、圧電たわみ素子は、電極が配設された圧
電セラ逅ツクス板１．２ａ、２ｂと弾性を有する金属製
シム材３ａ、３ｂとを複数枚交互に接着した構成となっ
ている。In this figure, the piezoelectric deflection element has a structure in which a plurality of piezoelectric ceramic plates 1.2a, 2b on which electrodes are arranged and a plurality of elastic metal shims 3a, 3b are adhered alternately.
図中、１は逆電界側の圧電セラミックス板であり、２ａ
、２ｂは順電界側の圧電セラミックス板である。In the figure, 1 is a piezoelectric ceramic plate on the reverse electric field side, and 2a
, 2b is a piezoelectric ceramic plate on the forward electric field side.
順電界側の圧電セラミックス板は、複数枚、好ましくは
２〜４枚積層される。該圧電セラミックス板の厚みは、
電圧印加時においても脱分極が起こることがないため、
大きな変形量を得るために逆電界側の圧電セラミックス
板よりも薄いものが選択される。また順電界側の圧電セ
ラミックス板の圧電ｄ□定数は、抗電界値を考慮する必
要がなく、大きな変形量を得るために逆電界側の圧電ｄ
、Ｉ定数よりも大きい材料が通常選択される。A plurality of piezoelectric ceramic plates, preferably 2 to 4 piezoelectric ceramic plates on the forward electric field side are laminated. The thickness of the piezoelectric ceramic plate is
Since depolarization does not occur even when voltage is applied,
In order to obtain a large amount of deformation, a piezoelectric ceramic plate that is thinner than the piezoelectric ceramic plate on the reverse electric field side is selected. In addition, the piezoelectric d□ constant of the piezoelectric ceramic plate on the forward electric field side does not require consideration of the coercive electric field value, and in order to obtain a large amount of deformation, the piezoelectric d□ constant on the reverse electric field side
, I constant is typically selected.
本発明の圧電たわみ素子は例えば以下に示す方法により
製造することができる。The piezoelectric deflection element of the present invention can be manufactured, for example, by the method shown below.
各圧電セラミックス板の両面に銀ペーストを塗布し、焼
き付けて電極を形成した後、分極処理を行い、次いで第
１図の構造になるように該各圧電セラξツクス板と弾性
を有する金属製シム材とを交互に接着する。After applying silver paste to both sides of each piezoelectric ceramic plate and baking it to form electrodes, a polarization treatment is performed, and then each piezoelectric ceramic plate is combined with an elastic metal shim so that the structure shown in Fig. 1 is obtained. Glue the materials alternately.
本発明のように圧電セラミックス板と金属製シム材とを
交互に積層した複層構造体とすることにより、素子の剛
性が上がり、たわみ変形量は多少減少するものの、所定
距離変形する時間はむしろ短縮でき、応答速度を上げる
ことができる。By forming a multilayer structure in which piezoelectric ceramic plates and metal shims are alternately laminated as in the present invention, the rigidity of the element increases and the amount of deflection deformation decreases somewhat, but the time it takes to deform a predetermined distance is rather short. It can be shortened and the response speed can be increased.
以下に本発明の一製造例を示し、本発明についてさらに
詳しく説明する。A manufacturing example of the present invention will be shown below, and the present invention will be explained in more detail.
製造例１
圧電セラミックス材料として第１表に示す圧電（１ｓｔ
定数と厚みのＰＺＴ系圧電磁器を使用した。Production Example 1 Piezoelectric (1st) shown in Table 1 as a piezoelectric ceramic material
A PZT piezoelectric ceramic having a constant thickness and constant thickness was used.
第１表
逆電界側の圧電セラ逅ツクス板１枚（サイズ：１０１０
ｍＸ３０及び順電界側の圧電セラミックス板２枚（サイ
ズ＝ １０ ｍ Ｘ ３０ ｍ） ノ各Ｍ、（Ｄ両面に
Ａｇペーストを塗布し、焼付後、分極処理を行って、第
１図の構造になるように圧電セラミックス板と厚さ４０
ａｍのリン青銅板からなるシム材とを接着した（試料１
）、シム材の厚みを４０μｍとした理由は、複層構造と
することで素子の剛性を上げ、かつ、不動体となるシム
材の厚みを減じることで素子のたわみ変形量の低下を最
低限におさえるためである。Table 1: One piezoelectric ceramic plate on the reverse electric field side (size: 1010
Two piezoelectric ceramic plates (size = 10 m x 30 m) on the forward electric field side (size = 10 m Piezoelectric ceramic plate and thickness 40
A shim material made of am phosphor bronze plate was adhered (Sample 1
), the reason why the thickness of the shim material was set to 40 μm is that the multilayer structure increases the rigidity of the element, and by reducing the thickness of the shim material, which is an immovable body, the decrease in the amount of deflection deformation of the element is minimized. This is to keep it in check.
比較例として、第２図及び第３図に示すような２種類（
試料２、試料３）の圧電たわみ素子を以下のような方法
により作成した。As comparative examples, two types (
The piezoelectric deflection elements of Sample 2 and Sample 3) were produced by the following method.
第１表の逆電界側の圧電セラ逅ツクス板ｉ（サイズ１０
鵬Ｘ３０ｍ）と順電界側の圧電セラ逅ツクス板２ａ（サ
イズ１０＋＋ｍＸ３０＋＋ａ）とを厚さ８０μｍのリン
青銅板の両側に接着し、更に順電界側圧電セラミックス
板２ａの上に、順電界圧電セラξツクス板２ｂ（サイズ
１０１１０１１１Ｘ２０を接着し、シム材が１枚のみの
複層圧電たわみ素子を作成した（試料２）。Piezoelectric ceramic plate i (size 10) on the reverse electric field side in Table 1
A piezoelectric ceramic plate 2a (size 10++m x 30++a) on the forward electric field side is glued to both sides of a phosphor bronze plate with a thickness of 80 μm, and a forward electric field piezoelectric ceramic plate ξ A multilayer piezoelectric deflection element having only one shim material was created by bonding a Tux board 2b (size 10110111x20) (sample 2).
又、第１表の逆電界側圧電セラミックス板ｆ（サイズ１
０ｆｆＩＩｌ×３０１１ＩＩｌ）と順電界側の圧電セラ
ミックス板２ａ（サイズ１０ｍｎ＋Ｘ３０ｍｍ）とを厚
さ８０ｔＩｍのリン青銅板３ａの両側に接着し、従来公
知のバイモルフ構造の圧電たわみ素子を作成した（試料
３）。In addition, the reverse electric field side piezoelectric ceramic plate f (size 1
0ffIIl x 3011IIl) and the forward electric field side piezoelectric ceramic plate 2a (size 10 mm + x 30 mm) were adhered to both sides of a phosphor bronze plate 3a with a thickness of 80 tIm to create a piezoelectric deflection element with a conventionally known bimorph structure (Sample 3).
次いで前記試料１、試料２及び試料３を片持ばり支持と
し、圧電たわみ素子の共振周波数を測定するために±２
５Ｖのサイン波を印加し、素子先端振幅の最大となる周
波数を共振周波数とした。Next, sample 1, sample 2, and sample 3 are supported on a cantilever, and ±2 is used to measure the resonance frequency of the piezoelectric deflection element.
A sine wave of 5 V was applied, and the frequency at which the amplitude of the tip of the element was maximum was determined as the resonance frequency.
又、素子の先端に１５ｇの重りを下げ、２００Ｖの直流
電圧を印加した時の素子先端変位量を求めた。Further, a 15 g weight was lowered to the tip of the element, and the amount of displacement at the tip of the element was determined when a DC voltage of 200 V was applied.
次に、各素子の先端に１０ｇの重りを下げ、２００ｖま
でｌ ｍ５ｅｃで昇圧した時、素子先端が５００μｍ移
動するのに要した所要時間を求めた。これらの結果を第
２表に示す。Next, when a weight of 10 g was lowered to the tip of each element and the voltage was increased to 200 V at 1 m5ec, the time required for the tip of the element to move 500 μm was determined. These results are shown in Table 2.
第２表
第２表に示すように圧電セラミックス板とシム材とを交
互に積層した複層構造の素子は５００ａｍ変位するのに
必要な所要時間が短く、応答速度が向上することは明ら
かである。複層構造とすることで変位量は低下するが、
応答速度の向上が達成できる。Table 2 As shown in Table 2, it is clear that an element with a multilayer structure in which piezoelectric ceramic plates and shim materials are alternately laminated takes less time to displace by 500 am and improves response speed. . Although the displacement is reduced by having a multilayer structure,
Improved response speed can be achieved.
この理由としては、圧電セラ壽ンクス板のヤング率は６
０ＧＰａ、リン青銅板のヤング率は１１８ＧＰａである
ので、ヤング率の大きいリン青銅板が圧電セラミックス
板と複層接着することによって圧電たわみ素子の剛性が
向上するために共振周波数が向上し、結果として５００
μｍ変位に要する時間が短縮したものと考えられる。The reason for this is that the Young's modulus of the piezoelectric ceramic board is 6.
0 GPa, and the Young's modulus of the phosphor bronze plate is 118 GPa, so the phosphor bronze plate with a large Young's modulus is bonded to the piezoelectric ceramic plate in multiple layers, which improves the rigidity of the piezoelectric deflection element and improves the resonant frequency. 500
This is thought to be due to the reduction in the time required for μm displacement.
又、圧電たわみ素子の構成として、積層する順電界側の
圧電セラミックス板の間にシム材を入れない場合（試料
２）には、共振周波数を若干向上させる効果はあるが不
充分である。Further, in the configuration of the piezoelectric deflection element, when no shim material is inserted between the laminated piezoelectric ceramic plates on the forward electric field side (sample 2), there is an effect of slightly improving the resonance frequency, but it is insufficient.
本発明の圧電たわみ素子は、応答速度の早さを要求され
る分野の好適に使用することができる。The piezoelectric deflection element of the present invention can be suitably used in fields where high response speed is required.
第１図は、本発明に係わる圧電たわみ素子の縦断面図で
ある。
第２図は、シム材が１枚のみの複層素子の縦断面図であ
る。
第３図は従来の圧電たわみ素子の縦断面図である。
１：逆電界側の圧電セラ
ｂ：順電界側の圧電セラξ
ｂ：シム材、４：支点、５
ξツクス板、２ａ。
ックス板、３ａ、３
：電源FIG. 1 is a longitudinal sectional view of a piezoelectric deflection element according to the present invention. FIG. 2 is a longitudinal sectional view of a multilayer element including only one shim material. FIG. 3 is a longitudinal cross-sectional view of a conventional piezoelectric deflection element. 1: Reverse electric field side piezoelectric cellar b: Forward electric field side piezoelectric cellar ξ b: Shim material, 4: Fulcrum, 5 ξx plate, 2a. Box board, 3a, 3: Power supply
Claims (1)
複数枚交互に接着した圧電たわみ素子において、逆電界
側の圧電セラミックス板が１枚であり、順電界側の圧電
セラミックス板が複数枚であることを特徴とする圧電た
わみ素子。In a piezoelectric deflection element in which a plurality of piezoelectric ceramic plates and elastic metal shims are bonded alternately, there is one piezoelectric ceramic plate on the reverse electric field side and multiple piezoelectric ceramic plates on the forward electric field side. A piezoelectric deflection element characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1224507A JPH0389570A (en) | 1989-09-01 | 1989-09-01 | Piezoelectric distortion element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1224507A JPH0389570A (en) | 1989-09-01 | 1989-09-01 | Piezoelectric distortion element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389570A true JPH0389570A (en) | 1991-04-15 |
Family
ID=16814885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1224507A Pending JPH0389570A (en) | 1989-09-01 | 1989-09-01 | Piezoelectric distortion element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389570A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5715233A (en) * | 1993-03-23 | 1998-02-03 | Matsushita Electric Industrial Co., Ltd. | Cartridge adaptor and a cartridge to be accommodated in the cartridge adaptor |
-
1989
- 1989-09-01 JP JP1224507A patent/JPH0389570A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5715233A (en) * | 1993-03-23 | 1998-02-03 | Matsushita Electric Industrial Co., Ltd. | Cartridge adaptor and a cartridge to be accommodated in the cartridge adaptor |
| US5867476A (en) * | 1993-03-23 | 1999-02-02 | Matsushita Electric Industrial Co., Ltd. | Cartridge adaptor and a cartridge to be accommodated in the cartridge adaptor |
| US5923630A (en) * | 1993-03-23 | 1999-07-13 | Matsushita Electric Industrial Co., Ltd. | Cartridge adaptor and a cartridge to be accommodated in the cartridge adaptor |
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