JPH0372353B2 - - Google Patents
Info
- Publication number
- JPH0372353B2 JPH0372353B2 JP57025333A JP2533382A JPH0372353B2 JP H0372353 B2 JPH0372353 B2 JP H0372353B2 JP 57025333 A JP57025333 A JP 57025333A JP 2533382 A JP2533382 A JP 2533382A JP H0372353 B2 JPH0372353 B2 JP H0372353B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode film
- vapor
- deposited film
- nozzle plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 229910000679 solder Inorganic materials 0.000 claims 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Electromagnetic Pumps, Or The Like (AREA)
Description
本発明は石油燃焼器などにおける液体霧化装置
の霧化ポンプに関するものである。
従来この種の霧化ポンプのノズル部は、第１図
に示すように構成されている。すなわち、電気振
動子１の相対向する平滑面には、主成分が銀系の
厚膜用導電性ペーストの焼結体からなる電極膜２
が形成され、この電極膜２の一方とノズル板４と
は半田３を介して半田付接合がされていた。
電気振動子１はPbO、TiO2、ZrO2、NbO、
MgOなどのセラミツク体で、円形中央部に開口
部を設けたリング形状を有し、ノズル板４は厚さ
約50μｍ程度の半田付に適した金属板が選ばれ、
その金属板中央部にはノズル５の貫通口（口径約
70〜100μｍ）が複数個設けられている。この構
成では、電気振動子１の電極膜２が銀系の厚膜用
導電性ペーストからなるため、半田付接合の際、
電極膜２中の銀が半田３中へマイグレーシヨンし
電極膜２が破壊されやすい、また半田付接合が出
きても接合強度が小さいといつた欠点を有してい
た。そこで、本発明に先立ち第２図に示す構成が
考えられた。この構成は電気振動子１の相対向す
る平滑面に電気的良導性を有した金属の蒸着膜６
ａ，６ｂを形成した後、この蒸着膜面とノズル板
４を半田３を介して、半田付接合したものであ
る。この構成は、後述するように、電気振動子１
と前記蒸着膜６ａ、ノズル板４と前記蒸着膜６ａ
との間で、信頼性の高い半田付接合ができる。し
かし、蒸着工程は焼結工程に比べ生産性に劣るの
で、高価格になるという欠点があつた。
本発明はかかる従来の欠点を除去するもので、
電気振動子とノズル板を接合する上で、低価格で
信頼性の高い接合方法を提供することを目的とす
る。
以下、本発明の一実施例を第３を用いて説明す
る。
実施例
第３図において、電気振動子１の相対向する平
滑面の一方の平滑面に焼結体電極膜２、他の平滑
面に蒸着電極膜６ａを形成し、その後半田３を介
して蒸着電極膜面６ａとノズル板４とが接合され
ている。
電気振動子１は主成分PbO、TiO2、ZrO2、
NbO、MgOで代表されるセラミツク体で外径約
10φmm、開口径約3.5mm、厚さ1.0mmのリング形状
を有したものを用いた。蒸着膜６ａはクロム、ニ
ツケルを第１層蒸着膜に銅、金、真鍮、洋白を第
２層蒸着膜に選び、真空蒸着法を用いて上記金属
膜を形成した。膜厚は各々約0.5μｍ、1.0μｍ、
10μｍを選んだ。これら蒸着膜６ａは上記以外で
第１層蒸着膜にセラミツクス体と付着力の強い金
属、例えば鉄、チタンジルコニウムなど、第２層
蒸着膜には半田付性のよい電気的良導体の金属な
らびにこれら群からなる複合物でも良く、蒸着方
法も例えばスパツタ法イオンビーム蒸着法など他
の方法でも可能であることは明らかなことであ
る。
ノズル板４は、従来構成と同じ厚さ約50μｍか
らなるコバール板を用いた。半田３は溶融温度域
が180〜194℃のものを用いた。この半田３を介し
上記の蒸着膜６ａとノズル板４が半田付接合され
る。また、ノズル板４の中央付近には、電気振動
子１の振動特性を利用し液体を噴霧化させるため
のノズル５が複数個の貫通口（口径約70〜100μ
ｍ）として設けられている。
上記構成において、半田付接合をおこなつたが
従来構成ではマイグレーシヨンが生じる為数秒間
の半田付時間であつたのに対し、本発明の構成で
は１分以上の半田付時間をおこなつてもマイグレ
ーシヨンではなく、全く蒸着膜６ａの破壊はなか
つた。但し、蒸着膜６ａの膜厚を0.5μｍ程度にし
た系では、蒸着膜６ａ面に半田３の濡れ性が悪い
という結果を得た。次に半田付接合した各々の試
料について、剥離強度試験をした。その結果を表
に示した。
The present invention relates to an atomizing pump for a liquid atomizing device in an oil combustor or the like. Conventionally, the nozzle portion of this type of atomizing pump is constructed as shown in FIG. That is, on the opposing smooth surfaces of the electric vibrator 1, there is an electrode film 2 made of a sintered body of a thick film conductive paste whose main component is silver.
was formed, and one of the electrode films 2 and the nozzle plate 4 were soldered together via the solder 3. Electric vibrator 1 is made of PbO, TiO 2 , ZrO 2 , NbO,
The nozzle plate 4 is made of ceramic such as MgO and has a ring shape with an opening in the center, and the nozzle plate 4 is a metal plate suitable for soldering with a thickness of about 50 μm.
In the center of the metal plate is a through hole for the nozzle 5 (approx.
70 to 100 μm) are provided. In this configuration, since the electrode film 2 of the electric vibrator 1 is made of silver-based thick film conductive paste, during soldering,
The silver in the electrode film 2 migrates into the solder 3 and the electrode film 2 is easily destroyed, and even if a solder joint is formed, the joint strength is low. Therefore, prior to the present invention, the configuration shown in FIG. 2 was devised. This configuration has a metal vapor deposited film 6 having good electrical conductivity on the opposing smooth surfaces of the electric vibrator 1.
After forming layers a and 6b, the surface of the vapor-deposited film and the nozzle plate 4 are soldered together via the solder 3. This configuration, as described later, includes an electric vibrator 1
and the vapor deposited film 6a, the nozzle plate 4 and the vapor deposited film 6a.
A highly reliable solder joint can be made between the two. However, since the vapor deposition process is inferior in productivity to the sintering process, it has the disadvantage of being expensive. The present invention eliminates such conventional drawbacks,
The purpose of the present invention is to provide a low-cost and highly reliable joining method for joining an electric vibrator and a nozzle plate. Hereinafter, one embodiment of the present invention will be described using a third embodiment. Example In FIG. 3, a sintered electrode film 2 is formed on one of the opposing smooth surfaces of the electric vibrator 1, and a vapor-deposited electrode film 6a is formed on the other smooth surface, and then vapor-deposited via the solder 3. The electrode film surface 6a and the nozzle plate 4 are joined. Electric vibrator 1 has main components PbO, TiO 2 , ZrO 2 ,
Ceramic body represented by NbO and MgO with an outer diameter of approx.
A ring-shaped ring with a diameter of 10 mm, an opening diameter of approximately 3.5 mm, and a thickness of 1.0 mm was used. For the vapor deposited film 6a, chromium and nickel were selected as the first vapor deposited film, and copper, gold, brass, and nickel silver were selected as the second vapor deposited film, and the metal film was formed using a vacuum evaporation method. The film thickness is approximately 0.5μm, 1.0μm, respectively.
10 μm was chosen. These vapor deposited films 6a are made of metals other than those mentioned above that have strong adhesion to the ceramic body, such as iron, titanium zirconium, etc., and metals that have good electrical conductivity with good solderability and groups thereof. It is obvious that other methods such as sputtering or ion beam evaporation may also be used for the evaporation method. As the nozzle plate 4, a Kovar plate having a thickness of approximately 50 μm, which is the same as in the conventional configuration, was used. Solder 3 used had a melting temperature range of 180 to 194°C. The vapor deposited film 6a and the nozzle plate 4 are soldered together via the solder 3. In addition, near the center of the nozzle plate 4, a plurality of through holes (about 70 to 100 μm in diameter) are provided with nozzles 5 for atomizing liquid using the vibration characteristics of the electric vibrator 1.
m). In the above configuration, soldering was performed, but in the conventional configuration, the soldering time was several seconds due to migration, whereas in the configuration of the present invention, the soldering time was over 1 minute. There was no migration, and no destruction of the deposited film 6a occurred. However, in a system in which the thickness of the vapor deposited film 6a was about 0.5 μm, the wettability of the solder 3 on the surface of the vapor deposited film 6a was poor. Next, a peel strength test was conducted on each soldered sample. The results are shown in the table.
【表】【table】
【表】
表より明らかなように、従来構成では、剥離強
度が高々１Kg／cm2以下であつたのに対し、本発明
の構成によれば、少なくとも３Kg／cm2以上の剥離
強度が得られた。
さらに蒸着膜６ａを単一層とし実験をするため
上述の第２層蒸着膜に用いた金属群を選び、蒸着
膜６ａを一層の膜形成ができる様、真空蒸着をし
た。その結果、剥離強度が前述の２層蒸着膜形成
の場合に比べ、２Kg／cm2以上と少し弱くなるが、
蒸着膜６ａの破壊などについては同様の結果であ
つた。
また、焼結体電極膜２側は、リード線と電気的
接続を半田付などによりする電極であり、半田付
面積が微量ですむためマイグレーシヨンの影響も
少なく電極部の破壊が起り難い。機械的強度もリ
ード線が細線のため比較的大きな値を必要としな
い。従つて、リード線接続側の電極膜は焼結体電
極膜２で充分である。焼結体電極膜２は印刷工
程、空気中での焼結工程で形成できるので、生産
性に優れる。他方、蒸着電極膜６ａは真空を必要
とするので、生産性に劣る。このことから明らか
なように、リード線接続側の電極膜として焼結体
電極膜２を採用することにより低価格を図れる。
また、実施例で述べた剥離強度は全て、蒸着膜
６ａと振動子１との接合界面で剥離（破壊）され
たものであつた。蒸着膜の形成で、蒸着方法なら
びに基板温度など蒸着条件により、蒸着膜の付着
強度は依存性を有することは衆知であり、したが
つてこれら条件を変えることにより剥離強度を高
めたものを実現できることは、容易に類推ができ
る。
以上のように本発明の霧化ポンプの接合方法に
よれば次の効果が得られる。
(1) 電子振動子の平滑面に蒸着膜を形成している
ので、半田付時にマイグレーシヨンなどによる
膜破壊がなく安定した半田付接合ができる。
(2) 上述の如く、従来構成では剥離強度が弱く高
高１Kg／cm2以下であつたが、本発明の構成では
最も低いものでも２Kg／cm2以上あり、充分実用
的価値の高いものが実現できる。
(3) リード線接続側と電極膜として焼結体電極膜
を採用することにより低価格を図れる。[Table] As is clear from the table, the conventional structure had a peel strength of at most 1 Kg/cm 2 or less, whereas the structure of the present invention achieved a peel strength of at least 3 Kg/cm 2 or more. Ta. Further, in order to perform an experiment with the vapor deposited film 6a as a single layer, the metal group used for the second layer vapor deposition film described above was selected, and vacuum vapor deposition was performed so that the vapor deposited film 6a could be formed as a single layer. As a result, the peel strength is a little weaker at 2 Kg/cm 2 or more compared to the case of forming a two-layer vapor-deposited film as described above, but
Similar results were obtained regarding destruction of the deposited film 6a. Further, the sintered electrode film 2 side is an electrode that is electrically connected to a lead wire by soldering or the like, and since only a small amount of soldering area is required, the influence of migration is small and destruction of the electrode portion is unlikely to occur. The mechanical strength does not require a relatively large value because the lead wire is thin. Therefore, the sintered electrode film 2 is sufficient as the electrode film on the lead wire connection side. Since the sintered electrode film 2 can be formed by a printing process or a sintering process in air, productivity is excellent. On the other hand, since the vapor-deposited electrode film 6a requires a vacuum, productivity is poor. As is clear from this, the cost can be reduced by employing the sintered electrode film 2 as the electrode film on the lead wire connection side. Furthermore, all of the peel strengths described in the examples were due to peeling (destruction) at the bonding interface between the deposited film 6a and the vibrator 1. It is well known that the adhesion strength of a deposited film is dependent on the deposition method and deposition conditions such as substrate temperature; therefore, it is possible to achieve a product with increased peel strength by changing these conditions. can be easily inferred. As described above, according to the atomization pump joining method of the present invention, the following effects can be obtained. (1) Since a vapor-deposited film is formed on the smooth surface of the electronic resonator, stable solder joints can be achieved without film damage due to migration etc. during soldering. (2) As mentioned above, the conventional structure had a weak peel strength of less than 1 Kg/cm 2 , but the structure of the present invention has the lowest peel strength of 2 Kg/cm 2 or more, and has sufficient practical value. realizable. (3) Low cost can be achieved by using a sintered electrode film for the lead wire connection side and the electrode film.
第１図は従来の霧化ポンプのノズル部構成を示
す断面図、第２図は本発明に先立ち考えられた霧
化ポンプの接合方法を示す断面図、第３図は本発
明の一実施例を示す霧化ポンプの接合方法を示す
断面図である。
６ａ……蒸着膜。
Fig. 1 is a sectional view showing the nozzle configuration of a conventional atomizing pump, Fig. 2 is a sectional view showing a method of joining an atomizing pump considered prior to the present invention, and Fig. 3 is an embodiment of the present invention. FIG. 3 is a sectional view showing a method of joining an atomizing pump. 6a... Vapor deposited film.
Claims (1)
面に焼結体電極膜、他の平滑面に蒸着電極膜を形
成し、その後半田を介して前記蒸着電極膜面とノ
ズル板とを接合した霧化ポンプの接合方法。 ２ 蒸着電極膜は電気的良導性を有した金属で、
厚さ1μｍ以上の単一層あるいは２層以上の多層
膜から構成された特許請求の範囲第１項記載の霧
化ポンプの接合方法。[Scope of Claims] 1. A sintered electrode film is formed on one of the opposing smooth surfaces of an electric vibrator, and a vapor-deposited electrode film is formed on the other smooth surface, and then the surface of the vapor-deposited electrode film is formed via solder. and a nozzle plate. 2 The deposited electrode film is a metal with good electrical conductivity,
2. A method for joining an atomizing pump according to claim 1, which is composed of a single layer or a multilayer film of two or more layers with a thickness of 1 μm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57025333A JPS58143186A (en) | 1982-02-18 | 1982-02-18 | Binding method of atomizing pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57025333A JPS58143186A (en) | 1982-02-18 | 1982-02-18 | Binding method of atomizing pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58143186A JPS58143186A (en) | 1983-08-25 |
| JPH0372353B2 true JPH0372353B2 (en) | 1991-11-18 |
Family
ID=12162997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57025333A Granted JPS58143186A (en) | 1982-02-18 | 1982-02-18 | Binding method of atomizing pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58143186A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4006152A1 (en) * | 1990-02-27 | 1991-08-29 | Fraunhofer Ges Forschung | MICROMINIATURIZED PUMP |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138191A (en) * | 1975-05-23 | 1976-11-29 | Yoshiharu Taniguchi | Method of manufacturing ultrasonic transmitter/receiver |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397617U (en) * | 1977-01-12 | 1978-08-08 |
-
1982
- 1982-02-18 JP JP57025333A patent/JPS58143186A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138191A (en) * | 1975-05-23 | 1976-11-29 | Yoshiharu Taniguchi | Method of manufacturing ultrasonic transmitter/receiver |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58143186A (en) | 1983-08-25 |
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