JPH0359590B2 - - Google Patents
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- Publication number
- JPH0359590B2 JPH0359590B2 JP57181957A JP18195782A JPH0359590B2 JP H0359590 B2 JPH0359590 B2 JP H0359590B2 JP 57181957 A JP57181957 A JP 57181957A JP 18195782 A JP18195782 A JP 18195782A JP H0359590 B2 JPH0359590 B2 JP H0359590B2
- Authority
- JP
- Japan
- Prior art keywords
- casing
- housing
- magnetic
- magnetoresistive element
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
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- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Description
【発明の詳細な説明】
本発明は磁界の変化に応じて抵抗値が変化する
磁気抵抗素子を用いた磁気検出器の製造方法関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic detector using a magnetoresistive element whose resistance value changes in response to changes in a magnetic field.
InSb、InSb−NiSb、InAs等のキヤリヤ移動度
の高い半導体又はNi−Co、Ni−Fe、Ni−Fe−
Co等の強磁性体はこれに作用する磁界の状態に
応じて抵抗値が変化するという性質を有してお
り、この性質を利用して磁気の存在、磁性体の存
在、移動を検出する磁気検出器が実用化されてい
る。 Semiconductors with high carrier mobility such as InSb, InSb−NiSb, InAs, or Ni−Co, Ni−Fe, Ni−Fe−
Ferromagnetic materials such as Co have the property that their resistance value changes depending on the state of the magnetic field that acts on them, and this property is used to detect the presence of magnetism, the presence of magnetic material, and the movement of magnetic materials. The detector has been put into practical use.
第1図は従来の磁気検出器を示す正面断面図で
あり、図中21は筐体を示している。筐体21は
プラスチツクを素材として一体成形されており、
上面に形成した開口部21aはベリリウム一銅製
の薄膜よりなる保護板22にて閉鎖されている。
保護板22は筐体21に一体にモールドされてお
り、その外面には耐摩耗性向上のために必要に応
じてクロムメツキが施される。 FIG. 1 is a front sectional view showing a conventional magnetic detector, and numeral 21 in the figure indicates a housing. The housing 21 is integrally molded from plastic.
The opening 21a formed on the top surface is closed with a protective plate 22 made of a thin film made of copper beryllium.
The protection plate 22 is integrally molded with the housing 21, and its outer surface is chrome plated as necessary to improve wear resistance.
筐体21内にはこの保護板22と適当な間〓を
隔ててセンサユニツト23が配設されている。セ
ンキユニツト23はフエライト製の磁性体基板2
4上に接着用樹脂25を用いて磁気抵抗素子2
6,27を並設したものであり、この磁性体基板
24はプラスチツク製のマウント基板28に穿設
した穴に嵌合され、マウント基板28下面のリン
青銅製の底板28′を介して、その下面をバイア
ス用の永久磁石29に対向させてある。マウント
基板28上にはセンサユニツト23を囲繞する環
状スペーサ30が設けられており、保護板22の
周縁に該スペーサ30の上面を接触させて保護板
22と磁気抵抗素子26,27との間隔が所定値
になるようにしてある。各磁気抵抗素子26,2
7から引き出されたリードはマウント基板28上
のプリント配線を経、筐体21の内壁面に設けた
ターミナル31に一旦あずけた後、底板を通して
外部に導出されているリード線32に接続されて
いる。 A sensor unit 23 is disposed within the housing 21 with a suitable distance from the protective plate 22. Senki unit 23 is a magnetic substrate 2 made of ferrite.
Magnetoresistive element 2 is attached using adhesive resin 25 on 4.
6 and 27 are arranged in parallel, and this magnetic substrate 24 is fitted into a hole drilled in a plastic mount substrate 28, and the magnetic substrate 24 is inserted through a phosphor bronze bottom plate 28' on the lower surface of the mount substrate 28. The lower surface is opposed to a permanent magnet 29 for bias. An annular spacer 30 that surrounds the sensor unit 23 is provided on the mount board 28, and the upper surface of the spacer 30 is brought into contact with the periphery of the protection plate 22, thereby increasing the distance between the protection plate 22 and the magnetoresistive elements 26, 27. It is set to a predetermined value. Each magnetoresistive element 26, 2
The leads drawn out from 7 are connected to the terminal 31 provided on the inner wall surface of the housing 21 through the printed wiring on the mount board 28, and then connected to the lead wire 32 led out to the outside through the bottom plate. .
なお筐体21内の空間部にはエポキシ樹脂(図
示せず)等が充填せしめられる。 Note that the space inside the housing 21 is filled with epoxy resin (not shown) or the like.
ところでこのような従来の磁気検出器の筐体は
プラスチツク製としてあるが、これは成形性に優
れ、このために磁気検出器自体の組立及び磁気検
出器の装置への取付け等の作業性、便宜性の向上
のための形状面での工夫を講じ易く、コスト面で
も安価であること等による。 By the way, the casing of such conventional magnetic detectors is made of plastic, which has excellent moldability, and this makes it difficult to assemble the magnetic detector itself and to attach it to the device. This is because it is easy to take measures in terms of shape to improve performance, and it is inexpensive in terms of cost.
通常磁気検出器は保護板22が被検物移動域に
臨み又はこれと摺接するように使用されるのであ
るが、検出感度を高めるべくリード線32に高増
幅度の増幅器を接続する場合は、磁気抵抗素子2
6,27、或は筐体内導体部分が受ける静電誘導
の影響により誤検出を招来するという問題点があ
る。また保護板22表面を摺接させて磁気インク
を用いている紙幣の識別に使用する場合には保護
板22周縁のプラスチツクと紙幣の紙との摩擦に
より静電気が発生して筐体が帯電し、これが素子
26,27又はこれに連なる電気回路に放電して
素子又は前述した如き増幅器等を破壊するという
問題点がある。また摩擦以外の理由によつても放
電が生じることがあるが、この場合の電撃に対し
ても素子等は無防備であり破壊の危険に曝されて
いる。 Normally, a magnetic detector is used so that the protection plate 22 faces or comes into sliding contact with the area of movement of the object to be measured, but when connecting a high-amplification amplifier to the lead wire 32 to increase detection sensitivity, Magnetoresistive element 2
6, 27, or there is a problem in that erroneous detection may occur due to the influence of electrostatic induction on the conductor portion within the housing. Furthermore, when the surface of the protective plate 22 is used to identify banknotes using magnetic ink by sliding the surface of the protective plate 22, static electricity is generated due to friction between the plastic around the protective plate 22 and the paper of the banknote, and the casing is charged. There is a problem in that this discharges into the elements 26, 27 or the electric circuits connected thereto, destroying the elements or the amplifier as described above. Discharge may also occur due to reasons other than friction, but the elements are defenseless against electric shock in this case and are exposed to the risk of destruction.
このため本発明者等は上述した如き静電誘導、
静電気放電の防止を図り、また筐体全体の強度を
図るために金属製筐体を用いることを着想するに
至つたが、筐体を金属製とする場合には次のよう
な問題がある。即ち、検出精度を向上させるため
には、センサユニツト23を構成する磁気抵抗素
子26,27と被検物との離隔寸法はこれを小さ
くするのが望ましいが、そのためには磁気抵抗素
子26,27と対向する部分の筐体の肉厚はこれ
を可及的に薄く形成する必要があり、一方筐体の
他の部分は実用的強度を維持するために、所定の
厚さに形成する必要があるが、このような局部的
に肉厚の異なる筐体を金属にて絞り加工するのは
極めて難しい。 For this reason, the present inventors have developed an electrostatic induction system as described above.
We came up with the idea of using a metal casing in order to prevent electrostatic discharge and increase the strength of the entire casing, but when the casing is made of metal, there are the following problems. That is, in order to improve the detection accuracy, it is desirable to reduce the distance between the magnetoresistive elements 26, 27 constituting the sensor unit 23 and the test object. The wall thickness of the part of the casing that faces the casing must be as thin as possible, while other parts of the casing must be formed to a predetermined thickness in order to maintain practical strength. However, it is extremely difficult to draw a metal casing with locally varying wall thicknesses.
本発明はかかる事情に鑑みなされたものであつ
て、その目的とするところは磁気抵抗素子を収納
すべき金属製筐体における磁気抵抗素子を対向位
置させるべき平坦な壁部を外方に膨出せしめて筐
素体を得、その膨出壁部の外面を平坦に研摩し、
この部分を他の部分よりも薄肉化することによ
り、厚肉部分と薄肉部分とを有する筐体を容易に
製造することが出来て筐体全体の機械的強度が大
きく、外部からの湿気等の侵入も防止出来、また
薄肉部分はより薄く成形出来て感度の向上も図れ
るようにした磁気検出器の製造方法を提供するに
ある。 The present invention has been made in view of the above circumstances, and its purpose is to bulge outward the flat wall portion of a metal casing in which the magnetoresistive element is to be placed, in which the magnetoresistive element is to be positioned opposite. The outer surface of the bulging wall portion is polished to a flat surface.
By making this part thinner than other parts, it is possible to easily manufacture a casing with thick and thin parts, which increases the mechanical strength of the entire casing and prevents moisture from coming in from the outside. It is an object of the present invention to provide a method for manufacturing a magnetic detector that can prevent intrusion, and also allows the thin portion to be molded thinner to improve sensitivity.
以下本発明方法をその実施状態を示す図面に基
いて具体的に説明する。第2図は本発明方法に係
る磁気検出器の製造方法により得た磁気検出器の
正面断面図、第3図は同じく部分破砕側面図、第
4図イ,ロは本発明方法による筐体の製造工程を
示す説明図であり、図中1は筐体、11は筐体1
を構成する本体部分、12は底板部分を示してい
る。 Hereinafter, the method of the present invention will be specifically explained based on the drawings showing its implementation state. Fig. 2 is a front sectional view of a magnetic detector obtained by the method of manufacturing a magnetic detector according to the method of the present invention, Fig. 3 is a partially fragmented side view of the same, and Fig. 4 A and B are of the casing obtained by the method of the present invention. It is an explanatory diagram showing the manufacturing process, in which 1 is a housing, and 11 is a housing 1.
12 indicates a bottom plate portion.
本体部分11は黄銅を素材にして上端部を閉鎖
され、四隅部に若干の丸味を与えた四角筒状に形
成され、下端部は底板部分12にて閉鎖され、内
部にはマウント基板2、センサユニツト3、永久
磁石4等が配設され、センサユニツト3のスペー
サ5で囲われた部分を除く他の空間部には合成樹
脂が充填せしめられている。この本体部分11は
先ず、第4図イに示す如く黄銅板に絞り加工を施
して上端部が閉鎖された肉厚が一様(0.5mm程度)
な四角筒形をなし、且つ、磁気抵抗素子7,8を
対向させるべき上部壁の中央部を外方に膨出せし
めた状態の筐素体10を成形する。筐素体10の
上部壁における膨出部11aの外方への膨出寸法
は筐素体10の肉厚寸法よりも僅かに小さくして
おき、次いで第4図ロに示す如く膨出部11aの
外壁を破線で示す位置迄研摩し、膨出部11a外
面をその周囲の面と面一となるよう平坦面に仕上
げる。これによつて上部壁の中央に外面が平坦面
であつて内面に凹み11bを有し、肉厚が0.1mm
程度の薄肉部分11cを備えた本体部分11が形
成される。 The main body part 11 is made of brass and has a closed upper end and a rectangular tube shape with slightly rounded corners.The lower end is closed with a bottom plate part 12, and inside there are a mounting board 2 and a sensor. A unit 3, a permanent magnet 4, etc. are arranged, and the space other than the part surrounded by the spacer 5 of the sensor unit 3 is filled with synthetic resin. This main body part 11 is first made of a brass plate which is drawn to have a uniform thickness (approximately 0.5 mm) with its upper end closed, as shown in Figure 4A.
A housing body 10 is formed into a rectangular cylindrical shape, with the center part of the upper wall where the magnetoresistive elements 7 and 8 are to face bulging outward. The outward bulging dimension of the bulging portion 11a on the upper wall of the housing body 10 is made slightly smaller than the wall thickness dimension of the housing body 10, and then, as shown in FIG. The outer wall of the bulged portion 11a is polished to the position shown by the broken line, and the outer surface of the bulged portion 11a is finished to be flat so that it is flush with the surrounding surface. As a result, the outer surface is flat and the inner surface has a recess 11b in the center of the upper wall, and the wall thickness is 0.1 mm.
A main body portion 11 is formed having a thin portion 11c of about 100 mL.
なお、本体部分11の形成態様については特に
上述した態様にのみ限定するものではなく、例え
ば第5図イに示す如く、絞り加工によつて形成さ
れる筐素体10′の上部壁における膨出部11′a
の周縁部からの膨出寸法を肉厚以上とし、次いで
膨出部11′a外面を破線で示す如く0.1mm程度の
厚さに迄研摩して第5図ロに示す如く内面に凹み
11′bを有し、薄肉部分11′cを備えた本体部
分11′を形成してもよい。 Note that the form of the main body portion 11 is not limited to the above-mentioned form; for example, as shown in FIG. Part 11'a
The size of the bulge from the peripheral edge of the bulge is equal to or larger than the wall thickness, and then the outer surface of the bulge 11'a is polished to a thickness of about 0.1 mm as shown by the broken line, and a recess 11' is formed on the inner surface as shown in FIG. 5B. b, and a main body portion 11' having a thin wall portion 11'c may be formed.
底板部分12は例えばプラスチツク成形品であ
つて本体部分11の下端開口部に嵌合固定されて
いる。 The bottom plate portion 12 is, for example, a plastic molded product, and is fitted and fixed into the lower end opening of the main body portion 11.
マウント基板2は前記した各部材によつて形成
される筐体1内に本体部分11の薄肉部分11
c,11′cに面して位置し、薄肉部分11c,
11′cの下面に上端部を突き当てたスペーサ5
によりこれと所要の間隔を隔てて配設され、上面
には凹み11b,11′b内に位置してセンサユ
ニツト3が、また下面には円柱状の永久磁石4の
一磁極端面が固定されている。センサユニツト3
はマウント基板2上面の磁性体基板6上に接着用
樹脂6aを用いて2個の磁気抵抗素子7,8を並
列固定して形成され、各磁気抵抗素子7,8から
引き出したリードはマウント基板2に穿つた孔を
通してその下面に導かれ、ここでリード板9a,
9b,9cの各一端に接続されており、その各他
端は底板部分12に穿つた孔を通してその下方に
夫々所要長にわたつて延在されている。9dは筐
体1の本体部分11内面に一端を接続されたアー
ス用のリード板であつてその他端は同じく底板部
分12に穿つた孔を通してその下方に延在せしめ
られている。 The mount board 2 has a thin part 11 of the main body part 11 inside the casing 1 formed by the above-mentioned members.
c, 11'c, and the thin portion 11c,
Spacer 5 whose upper end is in contact with the lower surface of 11'c
Therefore, the sensor unit 3 is arranged at a required distance from this, and the sensor unit 3 is fixed to the upper surface of the magnet located in the recesses 11b and 11'b, and the end face of one pole of a cylindrical permanent magnet 4 is fixed to the lower surface. There is. Sensor unit 3
is formed by fixing two magnetoresistive elements 7 and 8 in parallel on the magnetic substrate 6 on the upper surface of the mount board 2 using adhesive resin 6a, and the leads drawn out from each magnetoresistive element 7 and 8 are attached to the mount board 2. 2 through the holes drilled in the lead plates 9a,
9b and 9c, and the other ends thereof extend downwardly through a hole bored in the bottom plate portion 12 over a required length. Reference numeral 9d denotes a grounding lead plate having one end connected to the inner surface of the main body portion 11 of the casing 1, and the other end extending downward through a hole made in the bottom plate portion 12.
本発明にあつては筐体1を金属製とし、磁気抵
抗素子7,8を対向させるべき部分の壁部を外方
に膨出せしめた筐素体10,10′を得、この筐
素体10,10′における膨出部11a,11′a
を研摩し、薄肉化して製造することとしているか
ら、表面が平滑であつて、従来の如く筐体と保護
板との間における如き段差が形成されず、被検物
が係止する等の不都合がなく、また薄肉化部分1
1c,11′cは周縁部が厚肉部分に一体的に連
らなつているため、強度が大きく、より薄肉化す
ることも可能で、検出感度の大幅な向上も図れ
る。更に被検物との摩擦によつて摩擦電気が生じ
てもアース用リード板9dを通じて放電されるこ
ととなり、静電誘導、電撃等からも磁気抵抗素子
7,8を保護することが出来る。しかも筐体1は
底板部分12を除いて一体的に形成されるため、
気密性が高く、湿気の侵入による磁気抵抗素子
7,8の特性劣化も生じない。 In the present invention, the casing 1 is made of metal, and the casing bodies 10 and 10' are made such that the wall portions of the portions where the magnetoresistive elements 7 and 8 are to face each other are bulged outward. Swelling parts 11a and 11'a at 10 and 10'
Since it is manufactured by polishing and thinning the surface, the surface is smooth and there is no difference in level between the casing and the protective plate as in the conventional case, which causes problems such as the object to be inspected getting stuck. There is no thinning part 1.
1c and 11'c have peripheral edges that are integrally connected to the thick portion, so they have great strength, can be made thinner, and can greatly improve detection sensitivity. Further, even if frictional electricity is generated due to friction with the test object, it will be discharged through the grounding lead plate 9d, and the magnetoresistive elements 7 and 8 can be protected from electrostatic induction, electric shock, etc. Moreover, since the housing 1 is integrally formed except for the bottom plate portion 12,
The airtightness is high, and the characteristics of the magnetoresistive elements 7 and 8 do not deteriorate due to moisture intrusion.
以上の如く本発明方法にあつては金属製筐体に
おける磁気抵抗素子と対向する平坦な壁部を外方
に膨出せしめた後、この膨出部の外面を平坦に研
摩して薄肉化する工程を含むから磁気抵抗素子を
壁部、更には被検物と平行に均一な離隔寸法で対
向せしめ得るから検出値のばらつきが少なく精度
も高く、また筐体を一体成形することが出来て筐
体全体としての機械的強度が大きく、また静電誘
導、電撃から磁気抵抗素子を保護することが出
来、更に筐体内部の気密性が高く、湿気等の侵入
を確実に防止でき、更に薄肉化部分を一層薄く形
成出来るため被検物と磁気抵抗素子との離隔寸法
を短縮出来て検出精度を大幅に向上し得るなど本
発明は優れた効果を奏するものである。 As described above, in the method of the present invention, after the flat wall portion of the metal casing facing the magnetoresistive element is bulged outward, the outer surface of the bulged portion is polished flat to reduce its thickness. Because it involves a manufacturing process, the magnetoresistive element can be faced parallel to the wall and even the object to be tested with uniform spacing, resulting in less variation in detection values and high accuracy.Also, the housing can be integrally molded, making it possible to It has high mechanical strength as a whole, can protect the magnetoresistive element from electrostatic induction and electric shock, and has high airtightness inside the casing to reliably prevent moisture from entering, and is also thinner. The present invention has excellent effects such as being able to make the portion thinner, thereby shortening the distance between the object to be inspected and the magnetoresistive element, and greatly improving detection accuracy.
第1図は従来の磁気検出器の正面断面図、第2
図は本発明方法により製造した磁気検出器の正面
断面図、第3図は同じく部分破砕側面図、第4図
イ,ロは本発明方法による筐体の製造態様を示す
説明図、第5図イ,ロは同じく筐体の他の製造態
様を示す説明図である。
1……筐体、2……マウント基板、3……セン
サユニツト、4……永久磁石、5……スペーサ、
6……磁性体基板、6a……接着剤、7,8……
磁気抵抗素子、9a,9b,9c,9d……リー
ド板、10,10′……筐素体、11,11′……
本体部分、11a,11′a……膨出部、11b,
11′b……凹所、11c,11′c……薄肉部
分、12……底板部分。
Figure 1 is a front sectional view of a conventional magnetic detector;
The figure is a front sectional view of a magnetic detector manufactured by the method of the present invention, FIG. 3 is a partially fragmented side view, FIG. A and B are explanatory diagrams similarly showing other manufacturing modes of the casing. 1... Housing, 2... Mount board, 3... Sensor unit, 4... Permanent magnet, 5... Spacer,
6... Magnetic substrate, 6a... Adhesive, 7, 8...
Magnetoresistive element, 9a, 9b, 9c, 9d... Lead plate, 10, 10'... Housing body, 11, 11'...
Main body portion, 11a, 11'a...bulging portion, 11b,
11'b... recess, 11c, 11'c... thin wall portion, 12... bottom plate portion.
Claims (1)
る上端の閉鎖した金属性筐体で且つ前記磁気抵抗
素子を対向位置させるべき前記金属性筐体の平坦
上部壁を外方に膨出する第1の工程と、この上部
壁の膨出部を平坦研磨し、他の部分より薄肉化す
る第2の工程と、前記膨出したとき筐体内面に生
じた凹みに、少なくともスペーサおよびリードと
を備えた磁気抵抗素子を収納する第3の工程と、
前記金属性筐体内に樹脂を注入する第4の工程と
を備え、前記第2の工程以降にアース用のリード
を筐体の内面に接続する工程を有する磁気検出器
の製造方法。1. A metal casing with a closed upper end that houses a magnetic resistance element by drawing a metal plate, and a flat upper wall of the metal casing that is to face the magnetic resistance element and bulges outward. Step 1, a second step of flattening the bulging part of the upper wall to make it thinner than other parts, and adding at least a spacer and a lead to the dent formed on the inner surface of the casing when the bulging part was bulged. a third step of storing the provided magnetoresistive element;
A method for manufacturing a magnetic detector, comprising a fourth step of injecting a resin into the metal casing, and a step of connecting a grounding lead to the inner surface of the casing after the second step.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57181957A JPS5969978A (en) | 1982-10-15 | 1982-10-15 | Manufacture of magnetic detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57181957A JPS5969978A (en) | 1982-10-15 | 1982-10-15 | Manufacture of magnetic detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5969978A JPS5969978A (en) | 1984-04-20 |
JPH0359590B2 true JPH0359590B2 (en) | 1991-09-11 |
Family
ID=16109825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57181957A Granted JPS5969978A (en) | 1982-10-15 | 1982-10-15 | Manufacture of magnetic detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5969978A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149466U (en) * | 1984-09-04 | 1986-04-03 | ||
DE3447312A1 (en) * | 1984-12-24 | 1986-07-10 | Standard Elektrik Lorenz Ag | MAGNETIC SENSOR |
JPH02124575U (en) * | 1989-03-24 | 1990-10-15 | ||
JP4583789B2 (en) * | 2004-03-29 | 2010-11-17 | 有限会社大新製作所 | Thin plate substrate polishing method and thin plate vibration element manufacturing method |
JP4919176B2 (en) * | 2009-03-23 | 2012-04-18 | 日立金属株式会社 | Magnetic sensor assembly and magnetic encoder |
JP5346071B2 (en) * | 2011-12-02 | 2013-11-20 | ファナック株式会社 | Magnetic encoder with thin detection surface |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296877A (en) * | 1976-02-10 | 1977-08-15 | Denki Onkyo Co Ltd | Magnetic center device |
-
1982
- 1982-10-15 JP JP57181957A patent/JPS5969978A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296877A (en) * | 1976-02-10 | 1977-08-15 | Denki Onkyo Co Ltd | Magnetic center device |
Also Published As
Publication number | Publication date |
---|---|
JPS5969978A (en) | 1984-04-20 |
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