JPH0351834U - - Google Patents
Info
- Publication number
- JPH0351834U JPH0351834U JP11203689U JP11203689U JPH0351834U JP H0351834 U JPH0351834 U JP H0351834U JP 11203689 U JP11203689 U JP 11203689U JP 11203689 U JP11203689 U JP 11203689U JP H0351834 U JPH0351834 U JP H0351834U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- reaction chamber
- growth apparatus
- vertical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図および第２図は本考案の一実施例を示す
もので、第１図は要部を示す図、第２図は装置の
概略的構成図、第３図および第４図は従来装置を
示すもので、第３図は装置の概略的構成図、第４
図は反応室内における反応ガスの挙動を示す図で
ある。
５……ベルジヤ、７……反応室、２０……排気
手段（排気管）、２０ａ……吸込口、Ｇ……反応
ガス、Ｗ……被処理物（ウエハ）。
Figures 1 and 2 show an embodiment of the present invention, with Figure 1 showing the main parts, Figure 2 a schematic configuration diagram of the device, and Figures 3 and 4 showing the conventional device. Fig. 3 is a schematic diagram of the device, and Fig. 4 is a schematic diagram of the device.
The figure is a diagram showing the behavior of reaction gas in the reaction chamber. 5... Belgear, 7... Reaction chamber, 20... Exhaust means (exhaust pipe), 20a... Suction port, G... Reaction gas, W... Processing object (wafer).
Claims (1)
ガスを導き前記反応室内にある被処理物に対する
気相成長を行う縦型気相成長装置において、 前記反応室内頂部に吸込口を臨ませた排気手段
を設けたことを特徴とする縦型気相成長装置。 (2) 排気手段が、石英ガラスからなる排気管で
構成される請求項１記載の縦型気相成長装置。[Claims for Utility Model Registration] (1) In a vertical vapor phase growth apparatus for introducing a reaction gas into a reaction chamber surrounded by a bell gear and performing vapor phase growth on a workpiece in the reaction chamber, the top of the reaction chamber A vertical vapor phase growth apparatus characterized by having an exhaust means facing the suction port. (2) The vertical vapor phase growth apparatus according to claim 1, wherein the exhaust means comprises an exhaust pipe made of quartz glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203689U JPH0351834U (en) | 1989-09-27 | 1989-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11203689U JPH0351834U (en) | 1989-09-27 | 1989-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0351834U true JPH0351834U (en) | 1991-05-20 |
Family
ID=31660490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11203689U Pending JPH0351834U (en) | 1989-09-27 | 1989-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008136745A (en) * | 2006-12-04 | 2008-06-19 | Roiyaru:Kk | Attachment base for display and support device for display |
-
1989
- 1989-09-27 JP JP11203689U patent/JPH0351834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008136745A (en) * | 2006-12-04 | 2008-06-19 | Roiyaru:Kk | Attachment base for display and support device for display |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0167739U (en) | ||
| JPH0351834U (en) | ||
| JPS6139937U (en) | Diffusion furnace type vapor phase growth equipment | |
| JPS63140619U (en) | ||
| JPS59117138U (en) | semiconductor manufacturing equipment | |
| JPH02101529U (en) | ||
| JPS5458416A (en) | Pickup arm and production of the same | |
| JPS6449675U (en) | ||
| JPH01107124U (en) | ||
| JPH0245627U (en) | ||
| JPS6342156U (en) | ||
| JPH0244324U (en) | ||
| JPH0314165U (en) | ||
| JPH01110259U (en) | ||
| JPS6359319U (en) | ||
| JPS62126362U (en) | ||
| JPS61177440U (en) | ||
| JPS63199166U (en) | ||
| JPH0476031U (en) | ||
| JPS6190856U (en) | ||
| JPS6418729U (en) | ||
| JPS62136222U (en) | ||
| JPH0210470U (en) | ||
| JPS6150760U (en) | ||
| JPS6284926U (en) |