JPH0349019A - Laminated floating type magnetic head - Google Patents
Laminated floating type magnetic headInfo
- Publication number
- JPH0349019A JPH0349019A JP18538489A JP18538489A JPH0349019A JP H0349019 A JPH0349019 A JP H0349019A JP 18538489 A JP18538489 A JP 18538489A JP 18538489 A JP18538489 A JP 18538489A JP H0349019 A JPH0349019 A JP H0349019A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic head
- laminated
- film
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007667 floating Methods 0.000 title claims description 18
- 239000002131 composite material Substances 0.000 claims description 12
- 239000000696 magnetic material Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 19
- 239000011521 glass Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910000702 sendust Inorganic materials 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は磁気記録再生装置に用いる磁気ヘッドに関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head used in a magnetic recording/reproducing device.
［従来の技術］
磁気記録装置の記録密度の向上が強（要求されている昨
今においては、その一つの手段として磁気ヘッドの記録
ギャップ幅を小さ（することが重要である。このため第
４図に示すように、狭ギヤツプ幅からなる磁性体トラッ
ク部１６をガラス１４で補強したコア１５を、非磁性体
からなるスライダ一体９に挿入した、複合型ヘッドが考
茶され、実用化されている。[Prior Art] Nowadays, there is a strong demand to improve the recording density of magnetic recording devices, and as one means of achieving this, it is important to reduce the recording gap width of the magnetic head. For this reason, as shown in FIG. As shown in FIG. 2, a composite head has been considered and put into practical use, in which a core 15 in which a magnetic track portion 16 having a narrow gap width is reinforced with glass 14 is inserted into an integrated slider 9 made of a non-magnetic material. .
［発明が解決しよ５とする課題］
しかしながら前述の従来技術においては、ガラスによる
補強前のトラック部は、該幅が１０μｍ程度になると強
度的に弱（、磁気ヘッド製造中の作業で欠げてな（なり
工程の歩留りを下げるといつ課題を有していた。また、
ガラスが磁気ヘッドの浮動面に露出しているため経時変
化によりガラスが変化し、析出物が汚れ、削れを発生し
、磁気ヘッドの信頼性を著しく低下さ会るという課題を
有していた。[Problems to be Solved by the Invention] However, in the above-mentioned conventional technology, the track portion before being reinforced with glass has a weak strength when the width becomes about 10 μm (and is likely to be damaged during the manufacturing process of the magnetic head). There was always a problem with lowering the yield of the process.Also,
Since the glass is exposed on the floating surface of the magnetic head, the glass changes over time, causing deposits to stain and chipping, which significantly reduces the reliability of the magnetic head.
そこで、本発明はこのような課題を解決午るものであり
、その目的は磁気ヘッド製造中の作業において取り扱い
が容易で、かつ経時変化による劣下が大きなガラス等を
用いないで狭ギヤツプ幅を実現できる磁気ヘッドを提供
するところＫある。SUMMARY OF THE INVENTION The present invention aims to solve these problems, and its purpose is to provide a narrow gap width that is easy to handle during the manufacturing process of a magnetic head and does not require the use of glass, etc., which is subject to significant deterioration over time. There are several companies that provide magnetic heads that can achieve this goal.
［課題を解決するための手段］
本発明の複合浮動型磁気ヘッドは、浮動面を具備し非磁
性体からなるスライダ一体に、磁気ギャップを形成する
一対の磁性体コアを具備してなる複合型磁気ヘッドにお
いて、前記磁性体コアが磁気媒体進行方向に対して垂直
な方向に、磁性膜を積層したｆｉ／Δ型コアであること
を特徴とする。[Means for Solving the Problems] The composite floating type magnetic head of the present invention is a composite type comprising a pair of magnetic cores forming a magnetic gap formed integrally with a slider made of a non-magnetic material and having a floating surface. The magnetic head is characterized in that the magnetic core is an fi/Δ type core in which magnetic films are laminated in a direction perpendicular to the traveling direction of the magnetic medium.
［実施例コ 以下実施例にもとづいて詳細に説明する。[Example code] A detailed explanation will be given below based on examples.
第１図は本発明による一実施例の複合浮動型磁気へット
“１の斜視図である。複合浮動型磁気ヘッド１は２つの
磁気ヘッドブロック３と４から構成されており、かつこ
の２つのブロックを対向させて複合することにより磁気
ギャップ１６を形成する。磁性膜を積層してなる積層磁
気コア２は、２つの磁気ヘッドブロック３と４に各々ス
パッタリング手法等により形成し各々非磁性ブロック６
を磁性膜に複合しておき、その形成の後に磁気ギャップ
１６を形成しつつ複合する。磁気ヘッドブロックの一方
、又は両方には、磁気信号と電気信号を相互変換をする
コイルを巻き線するための巻綜窓７と、巻線溝８が形成
されている。FIG. 1 is a perspective view of a composite floating magnetic head "1" according to an embodiment of the present invention.The composite floating magnetic head 1 is composed of two magnetic head blocks 3 and 4. A magnetic gap 16 is formed by composing two blocks facing each other.The laminated magnetic core 2, which is formed by laminating magnetic films, is formed on two magnetic head blocks 3 and 4 by a sputtering method or the like. 6
is composited into a magnetic film, and after its formation, the composite is performed while forming a magnetic gap 16. A winding window 7 and a winding groove 8 are formed in one or both of the magnetic head blocks for winding a coil that mutually converts magnetic signals and electrical signals.
浮動面５は磁気ヘッドブロック３と４を複合した後に空
気逃げ溝１０を研削加工等により設げることにより形成
される。The floating surface 5 is formed by combining the magnetic head blocks 3 and 4 and then providing an air escape groove 10 by grinding or the like.
本実施例においては非磁性体からなるスライダ一体には
チタン酸カルシウムなるセラミックスを用いている。本
実施例においてはスライダ一体に磁性膜を成膜したが、
非磁性体ブロック乙に成０．嘆してもかまわない。In this embodiment, a ceramic material such as calcium titanate is used for the slider integrally made of a non-magnetic material. In this example, a magnetic film was formed integrally with the slider, but
Non-magnetic block B is completed. It's okay to grieve.
さて積層磁気コア２は第２図に示すようにＦｅ−Ａｔ−
３ｉの三元系からなるセンダスト磁性薄膜１１を一層３
μｍとし、３層積層した樽造を用いている。成膜方法に
はスパッタリング法を用いている。本実施例の主な成膜
条件は、真空度１×１０−”Ｔｏｒｒ 、スパッタ電源
２ＫＷ、Ａｒ圧力２ｍＴＯｒｒｔ基板加熱なし、である
。なおセンダスト膜の成１漠条件はこれに限られるわけ
ではない。Now, the laminated magnetic core 2 is made of Fe-At-
One layer of Sendust magnetic thin film 11 consisting of ternary system of 3i
μm, and uses a three-layered barrel construction. A sputtering method is used for the film formation method. The main film-forming conditions of this example are a vacuum of 1 x 10-'' Torr, a sputtering power supply of 2 KW, an Ar pressure of 2 mTorr, and no substrate heating. Note that the conditions for forming the sendust film are not limited to these. .
積層膜にした理由は、一般にセンダストは電気的に導体
であるから磁束の流れＫともなう表皮効果により渦電流
を発生する。この渦電流により磁束が乱れ、結果として
高周波透磁率が悪化する。これを防止するために６μｍ
以下の膜厚に分割し、数回に渡り断続的にスパッタリン
グを行なう。この間第３図に示すようにたとえば１層目
のスパッタリングの後に中間／ｉ１２としてＯｒ、Ｔｉ
、３１、Ｎ４等の非磁性体を挿入することも効果がある
。また、センダスト磁性膜とは特性が異なり、電気的に
絶縁体であるフェライト等を中間層１２として挿入する
ことも可能である。又電気的に導体ではあるが電気伝導
度の異なるＮ ｉ −Ｆ ｅからなるパーマロイ磁性膜
を挿入しても、センダストと非連続的であるため同じ（
渦電流を低減するという効果を有する。The reason for using a laminated film is that Sendust is generally an electrical conductor, so it generates eddy currents due to the skin effect associated with the flow of magnetic flux K. This eddy current disturbs the magnetic flux, resulting in deterioration of high frequency magnetic permeability. To prevent this, 6 μm
Divide the film into the following film thicknesses and perform sputtering intermittently several times. During this time, as shown in FIG. 3, for example, after sputtering the first layer, Or, Ti, etc.
, 31, N4 or the like is also effective. Further, it is also possible to insert ferrite or the like, which has different characteristics from the Sendust magnetic film and is an electrical insulator, as the intermediate layer 12. Also, even if a permalloy magnetic film made of Ni-Fe, which is an electrical conductor but has a different electrical conductivity, is inserted, it is discontinuous with sendust, so it will not be the same (
This has the effect of reducing eddy currents.
本実施例においてはセンダスト磁性膜を主磁性展とした
が、他の磁性膜、すなわち、７θ磁性膜００．１層アモ
ルファス磁性膜を用いることもできる。In this embodiment, the Sendust magnetic film was used as the main magnetic film, but other magnetic films, such as a 7θ magnetic film and a 00.1 layer amorphous magnetic film, may also be used.
さらに磁性膜の形成方法もスパッタリング法の他にイオ
ンビーム法、ＯＶＤ法等も使用することが可能である。Further, as a method for forming the magnetic film, in addition to the sputtering method, an ion beam method, an OVD method, etc. can also be used.
さて前述のように形成された本実施例においては、磁性
膜３層で、１層が３μｍであるため、計９μｍという狭
ギヤツプ幅を実現している。これに対し従来技術では１
２μｍ程度が限界である。In this embodiment formed as described above, there are three magnetic layers, each layer having a thickness of 3 .mu.m, so that a narrow gap width of 9 .mu.m in total is realized. On the other hand, in the conventional technology, 1
The limit is about 2 μm.
また本実施例において、檀ｊ−数を２層にすればギャッ
プ幅が６μ扉に、１層にすれば３μｍという狭ギヤツプ
幅を実現できる。さらに製造工程中においても磁性膜は
磁気ヘッドブロック３及び４に常に保持されているため
作業中のミスによる破損がない。また、ガラス等の長期
安定性の低い物質は浮動面５に露出していない。Furthermore, in this embodiment, if the number of layers is two, a gap width of 6 μm can be achieved, and if the number of layers is one, a narrow gap width of 3 μm can be achieved. Furthermore, even during the manufacturing process, the magnetic film is always held by the magnetic head blocks 3 and 4, so there is no damage caused by mistakes during operation. Furthermore, substances with low long-term stability such as glass are not exposed on the floating surface 5.
［発明の効果］
以上、実施例により説明した様に本実施例によれば、浮
動面を具備し非磁性体からなるスライダ一体に、磁気ギ
ャップを形成する一対の磁性体コアを具備してなる複合
浮動磁気ヘッドにおいて、前記磁性体コアが、磁気媒体
進行方向に対して垂直方向に、磁性膜を積層した積層型
コアであることにより、磁気ギャップ幅を５μｍ以下に
も狭（することができるという効果を有する。また磁気
ヘッド製造作業中に磁気コアを破損することがなく工程
歩留りを上昇することができるという効果を有する。さ
らにガラス等経時的に不安定な物質を浮動面に露出して
いないため、磁気ヘッドの長期信頼性を太き（向上する
ことができるという効果を有する。[Effects of the Invention] As described above with reference to the embodiments, according to the present embodiment, a slider having a floating surface and made of a non-magnetic material is integrally provided with a pair of magnetic cores forming a magnetic gap. In the composite floating magnetic head, the magnetic core is a laminated core in which magnetic films are laminated in a direction perpendicular to the traveling direction of the magnetic medium, so that the magnetic gap width can be narrowed to 5 μm or less. It also has the effect of increasing the process yield without damaging the magnetic core during the magnetic head manufacturing process.Furthermore, it has the effect of increasing the process yield without damaging the magnetic core during the magnetic head manufacturing process.Furthermore, it is possible to avoid materials that are unstable over time, such as glass, from being exposed on the floating surface. This has the effect of increasing (improving) the long-term reliability of the magnetic head.
また磁性体コアを非磁性体ブロックに挿入し、複合する
という工程がな（なるため工数の削減となり、磁気ヘッ
ドの低価格化を実現できるという効果を有する。さらに
、一体で作ることから、小型化が一層進んだ場合でも取
り扱い易いという効果も有する。また部品点数の削減と
いう効果も有する。In addition, there is no need to insert a magnetic core into a non-magnetic block and combine them, which reduces man-hours and reduces the cost of the magnetic head.Furthermore, since it is made in one piece, it is compact and It also has the effect of being easy to handle even if the technology is further advanced.It also has the effect of reducing the number of parts.
Ｗ、１図は、本実施例による複合浮動型ロスヘッドの斜
視図。
第２図、第６図は積層磁気コアの部分斜視図。
第４図は、従来技術による複合浮動型ロスヘッドの斜視
図。
１・・・・・・・・・・・・複合浮動型磁気ヘッド２・
・・・・・・・・・・・積層磁気コア３．４・・・・・
・磁気ヘンドブロック５・・・・・・・・・・・・浮動
面
６・・・・・・・・・・・・非磁性ブロック７・・・・
・・・・・・・・巻線窓
８・・・・・・・・・・・・巻線溝
９・・・・・・・・・・・・スライダ一体１０・・・・
・・・・・空気逃げ溝
１１・・・・・・・・・センダスト磁性薄膜１２・・・
・・・・・・中間層
１６・・・・・・・・・磁性体トラック部１４・・・・
・・・・・ガラス
１５・・・・・・・・・コア
１６・・・・・・・・・磁気ギャップ
以上W. Figure 1 is a perspective view of a composite floating loss head according to this embodiment. FIGS. 2 and 6 are partial perspective views of the laminated magnetic core. FIG. 4 is a perspective view of a composite floating loss head according to the prior art. 1......Composite floating magnetic head 2.
・・・・・・・・・・・・Laminated magnetic core 3.4・・・・・・
・Magnetic hend block 5...Floating surface 6...Non-magnetic block 7...
...... Winding window 8 ...... Winding groove 9 ...... Slider integrated 10 ...
...Air escape groove 11...Sendust magnetic thin film 12...
......Intermediate layer 16......Magnetic track portion 14...
・・・・・・Glass 15・・・・・・Core 16・・・・・・More than magnetic gap
Claims (1)
ギャップを形成する一対の磁性体コアを具備してなる複
合浮動型磁気ヘッドにおいて、前記磁性体コアが、磁気
媒体進行方向に対して垂直方向に、磁性膜を積層した積
層型コアであることを特徴とする複合浮動型磁気ヘッド
。In a composite floating magnetic head comprising a slider having a floating surface and made of a non-magnetic material, and a pair of magnetic cores forming a magnetic gap, the magnetic cores are perpendicular to the direction in which the magnetic medium travels. A composite floating magnetic head characterized by a laminated core in which magnetic films are laminated in a direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18538489A JPH0349019A (en) | 1989-07-18 | 1989-07-18 | Laminated floating type magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18538489A JPH0349019A (en) | 1989-07-18 | 1989-07-18 | Laminated floating type magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0349019A true JPH0349019A (en) | 1991-03-01 |
Family
ID=16169867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18538489A Pending JPH0349019A (en) | 1989-07-18 | 1989-07-18 | Laminated floating type magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349019A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574092A (en) * | 1991-09-12 | 1993-03-26 | Matsushita Electric Ind Co Ltd | Floating type magnetic head |
| US5485332A (en) * | 1992-11-30 | 1996-01-16 | Minebea Co., Ltd. | Floating magnetic head having a chamfered magnetic head core |
| US5548459A (en) * | 1992-12-14 | 1996-08-20 | Minebea Co., Ltd. | Floating magnetic head |
-
1989
- 1989-07-18 JP JP18538489A patent/JPH0349019A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574092A (en) * | 1991-09-12 | 1993-03-26 | Matsushita Electric Ind Co Ltd | Floating type magnetic head |
| US5485332A (en) * | 1992-11-30 | 1996-01-16 | Minebea Co., Ltd. | Floating magnetic head having a chamfered magnetic head core |
| US5548459A (en) * | 1992-12-14 | 1996-08-20 | Minebea Co., Ltd. | Floating magnetic head |
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