JPH0348625U - - Google Patents
Info
- Publication number
- JPH0348625U JPH0348625U JP10905889U JP10905889U JPH0348625U JP H0348625 U JPH0348625 U JP H0348625U JP 10905889 U JP10905889 U JP 10905889U JP 10905889 U JP10905889 U JP 10905889U JP H0348625 U JPH0348625 U JP H0348625U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- air conditioning
- separation membrane
- conditioning equipment
- regulations
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004378 air conditioning Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Materials (AREA)
Description
第１図は本考案の一実施例の概略図である。
１……クリーンルーム、２……酸素分離膜、３
……フイルター、４……空調設備、５……プレフ
イルター、６……減圧ブロア、７……排気口。
FIG. 1 is a schematic diagram of an embodiment of the present invention. 1...Clean room, 2...Oxygen separation membrane, 3
... Filter, 4 ... Air conditioning equipment, 5 ... Pre-filter, 6 ... Decompression blower, 7 ... Exhaust port.
Claims (1)
備において、フイルターに酸素分離膜を用いたこ
とを特徴とする空調設備。 Air conditioning equipment for facilities that have regulations on the amount of dust in the atmosphere, and is characterized by using an oxygen separation membrane as a filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10905889U JPH0348625U (en) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10905889U JPH0348625U (en) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0348625U true JPH0348625U (en) | 1991-05-10 |
Family
ID=31657661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10905889U Pending JPH0348625U (en) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348625U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008136215A1 (en) * | 2007-04-26 | 2008-11-13 | C'stec Corporation | Clean unit, method of operating clean unit, and connected clean unit |
-
1989
- 1989-09-20 JP JP10905889U patent/JPH0348625U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008136215A1 (en) * | 2007-04-26 | 2008-11-13 | C'stec Corporation | Clean unit, method of operating clean unit, and connected clean unit |
| JP4451492B2 (en) * | 2007-04-26 | 2010-04-14 | シーズテック株式会社 | Clean unit, clean unit operation method and connected clean unit |
| JPWO2008136215A1 (en) * | 2007-04-26 | 2010-07-29 | シーズテック株式会社 | Clean unit, clean unit operation method and connected clean unit |