JPH0345145Y2 - - Google Patents
Info
- Publication number
- JPH0345145Y2 JPH0345145Y2 JP1985185780U JP18578085U JPH0345145Y2 JP H0345145 Y2 JPH0345145 Y2 JP H0345145Y2 JP 1985185780 U JP1985185780 U JP 1985185780U JP 18578085 U JP18578085 U JP 18578085U JP H0345145 Y2 JPH0345145 Y2 JP H0345145Y2
- Authority
- JP
- Japan
- Prior art keywords
- abnormality
- signal
- fluid
- coriolis
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 27
- 230000005856 abnormality Effects 0.000 claims description 19
- 239000012530 fluid Substances 0.000 claims description 15
- 230000002159 abnormal effect Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
【考案の詳細な説明】
技術分野
本考案は、コリオリカ式流量計の駆動、検出等
の電気的要素が断線等の影響で計測不能となるこ
とを防ぐ目的で殆同一の特性の各要素を複数取付
けて切替使用可能とすることを目的としたもので
ある。[Detailed description of the invention] Technical field This invention uses multiple elements with almost the same characteristics to prevent electrical elements such as the drive and detection of Coriolis flowmeters from becoming unmeasurable due to disconnection, etc. The purpose is to install and switch between them.
従来技術
質量流量の測定手段としてコリオリカ式流量計
がある。コリオリの力は、流管内を流動する流体
に対して回転または振動を与えると、これらの角
速度のベクトルと流速ベクトルと直交する向きに
発生し、この大きさは角速度を一定とすると流体
の質量流量に比例する。特開昭59−92314号公報
に開示された流量計は、加振エネルギーを少さく
し、圧力損失を小さくするため、流入、流出口を
もつたマニホールド内を各端部プレートで流体を
仕切り、仕切られた流体をマニホールド内に開口
して湾曲管を固着し、この固着点から僅かに離間
した位置に支持体を設け、この支持体を貫通固着
して、平面状のU字形湾曲管を実質的に平行して
各々等量の流体が流れるように構成されている。
即ち、平行した湾曲管は固着部を節とした音叉を
形成しているので、固有振動数で振動し、また、
並列流れとなるため加振エネルギー、圧力損失は
小さくなるものである。加振の手段はU字形湾曲
管の先端部に一方は環状コイル、他方にこの環状
コイルに挿入される磁石を装着し、環状コイルに
U字形湾曲管の固有振動数に等しい交流電流を印
加するもので、検出の手段もコイルと磁石とを
各々のU字形湾曲管流肩部に対向して装着し、静
止位置での基準面に対する位相差を時間差として
あらわし、これに比例する質量流量を求めてい
る。また、U字形湾曲管は流体を含めた固有振動
数で駆動されているが、温度の変化等で管材によ
つてはヤング率が変化して固有振動数の変化をも
たらし、前述のごとく誤差要因となる。このた
め、常通はU字管体の表面に抵抗線等の温度計を
取付けて温度を感知し、これに基づいて固有振動
数変化を補正している。Prior Art There is a Coriolis flowmeter as a means for measuring mass flow rate. Coriolis force occurs in a direction perpendicular to the angular velocity vector and the flow velocity vector when a fluid flowing in a flow tube is rotated or vibrated, and its magnitude is equal to the mass flow rate of the fluid when the angular velocity is constant. is proportional to. The flowmeter disclosed in Japanese Patent Application Laid-Open No. 59-92314 uses end plates to partition the fluid inside a manifold with inflow and outflow ports in order to reduce excitation energy and pressure loss. The curved pipe is fixed by opening the fluid in the manifold, a support is provided at a position slightly apart from this fixed point, and the planar U-shaped curved pipe is substantially fixed by penetrating and fixing the support. The structure is such that equal amounts of fluid flow in parallel to each other.
In other words, the parallel curved tubes form a tuning fork with the fixed parts as nodes, so they vibrate at their natural frequency, and
Since the flow is parallel, the excitation energy and pressure loss are reduced. The excitation means is to attach a ring coil to the tip of the U-shaped curved tube on one side and a magnet inserted into the ring-shaped coil on the other side, and apply an alternating current equal to the natural frequency of the U-shaped curved tube to the ring coil. The detection means is to install a coil and a magnet facing each other on the shoulders of each U-shaped curved pipe, express the phase difference with respect to a reference plane at a stationary position as a time difference, and calculate the mass flow rate proportional to this. ing. In addition, the U-shaped curved pipe is driven by the natural frequency of the fluid, but depending on the pipe material, the Young's modulus changes due to changes in temperature, etc., causing a change in the natural frequency, which causes errors as described above. becomes. For this reason, a thermometer such as a resistance wire is usually attached to the surface of the U-shaped tube to sense the temperature, and the change in natural frequency is corrected based on this.
問題点
叙上のように従来のコリオリカ式流量計は駆動
エネルギー、圧力損失を小さくし、しかもコリオ
リの力をU字形湾曲管の軸に関して生ずるモーメ
ントに変換して検出しているため腕の長さに比例
して高感度な検出ができるものであるが、流量計
の形状が大きくなると、駆動手段、検出手段等に
おける電気構成要素が断線等の事故を起こしたと
き、事故要素の交換、並びに交換による特性変化
の有無を検査するのが固難で計測運転の休止が長
びくという問題点があつた。Problems As mentioned above, the conventional Coriolis flowmeter reduces driving energy and pressure loss, and detects the Coriolis force by converting it into a moment about the axis of the U-shaped curved pipe. However, as the shape of the flowmeter becomes larger, in the event of an accident such as disconnection of electrical components in the drive means, detection means, etc., it will be necessary to replace the accidental element or replace it. There was a problem in that it was difficult to inspect whether there were any changes in characteristics due to this, resulting in long suspensions of measurement operation.
問題点を解決するための手段
本考案は、叙上の問題点を解決するための駆動
手段、検出手段、温度感知手段等を各々複数並置
し、通常は、各々1個の手段で作動しているが、
断線等の問題点が生じたときは対応する複数の手
段の他の手段に切換えるものであり、更に、この
切換えを流量計作動中に印加され、出力される電
気周波数に分離可能な信号を重畳させ、この信号
の消滅を検出することにより自動的に行わしめる
ものである。以上に述べた技術は特開昭59−
92314号公報に開示された流量計に関するもので
あるが、本考案は、U字形湾曲管に限つたもので
はなく、直管方式のコリオリカ式流量計にも適用
されるものである。Means for Solving the Problems The present invention solves the above-mentioned problems by arranging a plurality of drive means, detection means, temperature sensing means, etc. in parallel, and usually each of them is operated by one means. There are, but
When a problem such as a disconnection occurs, the system switches to another of the corresponding multiple means, and furthermore, this switching is done by superimposing a separable signal on the electrical frequency that is applied and output during flowmeter operation. This is automatically performed by detecting the disappearance of this signal. The technology described above is
Although the present invention relates to the flowmeter disclosed in Japanese Patent No. 92314, the present invention is not limited to U-shaped curved pipes, but is also applicable to straight pipe type Coriolis type flowmeters.
実施例
第1図は、本考案によるコリオリカ式流量計の
一実施例を説明するための斜視図で、図中、1は
流管、2及び3は該流管1を図示しない被測定流
体管路に接続するためのフランジ、4及び5は管
路1内に設けられた仕切板、6,7は湾曲管、8
は支持板(振動固定板)、10A1,10A2;10
B1,10B2は検出手段、11A,11Bは駆動
手段、12A,12Bは感温手段で、各検出手段
10A1,10A2,10B1,10B2は磁石101
とコイル102とより成り、各駆動手段11A,
11Bは磁石111とコイル112より成つてお
り、周知のように、フランジ2から流管1内に導
入された被測定流体は、該流管1内の支切板4,
5で湾曲管6,7に各々等しい流量が分流され、
フランジ3を通して図示しない被測定流体管路に
流出される。支切板4,5の配置その他角度等は
前述の等分流量となるように選定されている。而
して、コリオリカ式流量計は、前述のようにして
湾曲管内を流体が流れる時に該湾曲管に働くコリ
オリの力を検出して被測定流体の質量流量を計測
するものであり、実際には湾曲管に働く捩りトル
クを検出している。換言すれば、湾曲管6,7に
おいて、それぞれ支持板8における固着点を結ん
だ第1の軸P1,P2に直交する第2軸Q1,Q2に対
して軸対称に各湾曲管6,7を配設し、該湾曲管
に働くコリオリの力の偶力によつて該湾曲管が第
2軸のまわりに旋回する旋回角度を湾曲管静止時
の中立面を基準とし、この基準面を湾曲管が通過
する位相差として検出手段によつて検出して計測
するものである。尚温度の検知は湾曲管の固着点
と支持体との間でコリオリカが及ばない区間に白
金線等を貼付けてありこの白金線の抵抗変化から
温度を検知し、湾曲管の温度変化によつて生ずる
固有振動数の変化を補正するためのものである。
その他圧力変化による湾曲管の膨張の影響を受け
て固有振動数の変化を補正する場合圧力検知手段
を付加することもある。而して、上述のごときコ
リオリカ式流量計において、計量計の形状が大き
くなると、前述のように、駆動手段、検出手段、
感温手段等における電気構成要素が断線等の事故
を起こした時、事故要素の交換、並びに、交換に
よる特性変化の有無を検査するのが困難で、計測
運転の休止が長びくという問題があつた。Embodiment FIG. 1 is a perspective view for explaining an embodiment of a Coriolis flowmeter according to the present invention. In the figure, 1 is a flow tube, and 2 and 3 are fluid tubes to be measured (not shown). flange for connecting to the pipe, 4 and 5 are partition plates provided in the pipe 1, 6 and 7 are curved pipes, 8
is support plate (vibration fixing plate), 10A 1 , 10A 2 ; 10
B 1 and 10B 2 are detection means, 11A and 11B are drive means, 12A and 12B are temperature sensing means, and each detection means 10A 1 , 10A 2 , 10B 1 and 10B 2 is a magnet 10 1
and a coil 102 , each driving means 11A,
11B is made up of a magnet 11 1 and a coil 11 2 , and as is well known, the fluid to be measured introduced from the flange 2 into the flow tube 1 passes through the dividing plate 4 in the flow tube 1,
5, an equal flow rate is divided into curved pipes 6 and 7,
The fluid flows out through the flange 3 into a measured fluid conduit (not shown). The arrangement, angles, etc. of the dividing plates 4, 5 are selected so as to achieve the above-mentioned equally divided flow rate. The Coriolis flowmeter measures the mass flow rate of the fluid to be measured by detecting the Coriolis force acting on the curved pipe when the fluid flows through the curved pipe as described above. The torsional torque acting on the curved pipe is detected. In other words, in the curved tubes 6 and 7, each curved tube is axially symmetrical with respect to the second axes Q 1 and Q 2 that are perpendicular to the first axes P 1 and P 2 connecting the fixed points on the support plate 8, respectively. 6 and 7, and the turning angle at which the curved tube turns around the second axis due to the Coriolis force couple acting on the curved tube is based on the neutral plane when the curved tube is at rest. The detection means detects and measures the phase difference when the curved tube passes through the reference plane. The temperature is detected by pasting a platinum wire or the like between the fixing point of the curved tube and the support in the section where Coriolis does not reach, and detecting the temperature from the resistance change of this platinum wire. This is to correct the change in natural frequency that occurs.
In addition, pressure detection means may be added when correcting changes in the natural frequency due to the influence of expansion of the curved pipe due to pressure changes. Therefore, in the Coriolis type flowmeter as described above, when the shape of the meter becomes large, as mentioned above, the driving means, the detection means,
When an electrical component in a temperature-sensing device, etc. causes an accident such as a disconnection, it is difficult to replace the faulty component and to inspect whether there is a change in characteristics due to the replacement, resulting in a prolonged suspension of measurement operation. .
本考案は、上述のごとき問題点を解決するため
になされたもので、具体的には、図示のように、
検出手段、駆動手段、感温手段等の電気構成要素
が事故を引き起こしやすい部分が2組宛設けられ
ており、一方が故障した時に自動的に他方に切り
換つて計測運転を継続させ、その間に故障した部
品を修理又は交換し、次回の故障に備えるように
したものである。 The present invention was made to solve the above-mentioned problems, and specifically, as shown in the figure,
There are two sets of electric components such as detection means, drive means, temperature sensing means, etc. that are likely to cause accidents, and when one breaks down, it automatically switches to the other to continue measurement operation, and during that time This is to repair or replace failed parts in preparation for the next failure.
第2図は、前記駆動手段11Aと11Bとを切
り換える自動切り換え回路であるが、検出手段1
0A,10A1及び10A2と10B,10B1及び
10B2の切り換え、感温手段12Aと12Bと
の切り換えも同様にして行なうことができるもの
である。ただし、検出手段及び感温手段の場合、
更に、演算部、出力部の切り換えが加わる。第2
図において、21,22,23は切り換えスイツ
チ、24は駆動電源、25は異常検出電源、26
は信号分離回路、27は異常判別回路、28は切
り換え手段で、常時、駆動手段11Aが駆動電源
24より切換スイツチ21を介して固有振動数の
加振を続けている。異常検出電源25として微小
直流電流又は駆動周波数の数10倍程度以上の高周
波電流が切換スイツチ22を介して駆動電源に重
畳されている。斯様にして、駆動手段11Aは駆
動、異常検出電源電圧が重畳された電圧によつて
駆動されており、この重畳された信号が切換スイ
ツチ23を介して信号分離回路26に供給されて
おり、ここで異常信号が分離され、例えば、
(i) 異常検出電源が直流の場合は交流をカツト
し、
(ii) 異常検出電源が交流の場合は直流をカツト
し、
異常信号のレベルが所定値以下になつたか否か
を異常判別回路27にて判別し、所定値以下にな
つた時、切換手段28を作動して切換スイツチ2
1,22,23を駆動手段11B側に切換える。
以降、駆動手段11Bが切換スイツチ21及び2
2を介して駆動電源24及び異常検出電源25に
よつて駆動され、その異常が駆動手段11B側に
切換えられているスイツチ23を介して異常判別
回路27によつて監視される。同様の監視が検出
手段10A,10B間、及び、感温手段12A,
12B間においても行なわれる。 FIG. 2 shows an automatic switching circuit for switching between the driving means 11A and 11B.
Switching between 0A, 10A 1 and 10A 2 and 10B, 10B 1 and 10B 2 and switching between temperature sensing means 12A and 12B can be performed in the same manner. However, in the case of detection means and temperature-sensitive means,
Furthermore, switching of the calculation section and the output section is added. Second
In the figure, 21, 22, 23 are changeover switches, 24 is a drive power supply, 25 is an abnormality detection power supply, and 26
27 is a signal separation circuit, 27 is an abnormality determination circuit, and 28 is a switching means, in which the driving means 11A continues to vibrate at the natural frequency from the driving power source 24 via the switching switch 21. As the abnormality detection power supply 25, a minute direct current or a high frequency current of several tens of times the drive frequency or more is superimposed on the drive power supply via the changeover switch 22. In this way, the driving means 11A is driven by a voltage on which the driving and abnormality detection power supply voltages are superimposed, and this superimposed signal is supplied to the signal separation circuit 26 via the changeover switch 23, Here, the abnormal signal is separated, and for example, (i) if the abnormality detection power source is DC, the AC is cut off, (ii) if the abnormality detection power source is AC, the DC is cut off, and the level of the abnormal signal is below a predetermined value. The abnormality determination circuit 27 determines whether or not the value has decreased, and when the value has decreased to a predetermined value or less, the switching means 28 is activated to switch the changeover switch 2.
1, 22, and 23 to the drive means 11B side.
From then on, the drive means 11B switches between the changeover switches 21 and 2.
It is driven by a drive power supply 24 and an abnormality detection power supply 25 via a drive means 11B, and its abnormality is monitored by an abnormality determination circuit 27 via a switch 23 which is switched to the driving means 11B side. Similar monitoring is performed between the detection means 10A and 10B and between the temperature sensing means 12A and 10B.
This is also done between 12B.
効 果
以上の説明から明らかなように、本考案による
と、稼動中の駆動手段、検出手段、又は、感温手
段等が故障したとしても、直ちに自動的に待機中
の他の駆動手段、検出手段、又は、感温手段に切
換えられるので、これら部品の故障にかかわらず
休止することなく連続運転が可能となる。Effects As is clear from the above explanation, according to the present invention, even if the operating drive means, detection means, temperature sensing means, etc. break down, other drive means, detection means, etc. that are on standby are automatically automatically activated. or temperature-sensing means, continuous operation is possible without interruption regardless of the failure of these parts.
第1図は、本考案によるコリオリカ式流量計の
一実施例を説明するための斜視図、第2図は、本
考案の実施例に使用する電気回路の一例を示す図
である。
1……被測定流体管路、2,3……フランジ、
4,5……支切板、6,7……湾曲管、10A1,
10A2,10B1,10B2……検出手段、11A,
11B……駆動手段、12A,12B……感温手
段、21〜23……切換スイツチ、24……駆動
電源、25……異常検出電源、26……信号分離
回路、27……異常判別回路、28……切換手
段。
FIG. 1 is a perspective view for explaining an embodiment of a Coriolis flowmeter according to the present invention, and FIG. 2 is a diagram showing an example of an electric circuit used in the embodiment of the present invention. 1... Fluid pipeline to be measured, 2, 3... Flange,
4, 5...Split plate, 6,7...Curved pipe, 10A 1 ,
10A 2 , 10B 1 , 10B 2 ... detection means, 11A,
11B... Drive means, 12A, 12B... Temperature sensing means, 21-23... Changeover switch, 24... Drive power supply, 25... Abnormality detection power supply, 26... Signal separation circuit, 27... Abnormality determination circuit, 28...Switching means.
Claims (1)
体を前記支持点回りに所定の振動数で駆動する駆
動手段と、前記駆動手段により管体に作用するコ
リオリの力を検出する検出手段とを有し、前記コ
リオリの力から流体の質量流量を検知するコリオ
リカ式流量計において、前記駆動手段および検出
手段等の電気構成要素を各々略同一特性をもつた
複数個とし、常時は複数個の電気構成要素の中、
一個のみを機能させ、前記複数個の電気構成要素
に対し、常時測定時に有する信号以外で分離可能
な異常検出信号を重畳させる異常検出電源と、前
記重畳信号の中から異常信号を分離する信号分離
手段と、分離された異常信号の異常を判別する異
常判別回路と、該異常判別回路の異常検出信号に
より、他の電気構成要素に切換える切換回路とを
具備したことを特徴とするコリオリカ式流量計。 A tube body supported at both ends and through which fluid flows, a driving means for driving the tube body around the support point at a predetermined frequency, and a detection means for detecting Coriolis force acting on the tube body by the driving means. In the Coriolis flowmeter, which detects the mass flow rate of fluid from the Coriolis force, the driving means, the detection means, and other electrical components are provided in plurality, each having substantially the same characteristics, and usually in plurality. Among the electrical components of
An abnormality detection power supply that allows only one to function and superimposes an abnormality detection signal that can be separated other than the signal that is present during regular measurement on the plurality of electrical components, and a signal separation that separates the abnormal signal from the superimposed signal. A Coriolis flowmeter comprising: a means for determining an abnormality in a separated abnormal signal; an abnormality determining circuit for determining an abnormality in a separated abnormal signal; and a switching circuit for switching to another electrical component based on an abnormality detection signal of the abnormality determining circuit. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985185780U JPH0345145Y2 (en) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985185780U JPH0345145Y2 (en) | 1985-12-02 | 1985-12-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6293729U JPS6293729U (en) | 1987-06-15 |
JPH0345145Y2 true JPH0345145Y2 (en) | 1991-09-24 |
Family
ID=31134726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985185780U Expired JPH0345145Y2 (en) | 1985-12-02 | 1985-12-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0345145Y2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008502900A (en) * | 2004-06-14 | 2008-01-31 | マイクロ・モーション・インコーポレーテッド | Coriolis flow meter and method for determining cabling and signal difference at first and second pickoff sensors |
JP2009528537A (en) * | 2006-02-27 | 2009-08-06 | マイクロ・モーション・インコーポレーテッド | Flow meter and method for detecting cable damage in a cable of the flow meter |
JP2012154943A (en) * | 2012-04-09 | 2012-08-16 | Micro Motion Inc | Apparatus and method for detecting cable damage in flowmeter and cable of flowmeter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57203198A (en) * | 1981-06-10 | 1982-12-13 | Fuji Electric Co Ltd | Multiplexing measuring system |
-
1985
- 1985-12-02 JP JP1985185780U patent/JPH0345145Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57203198A (en) * | 1981-06-10 | 1982-12-13 | Fuji Electric Co Ltd | Multiplexing measuring system |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008502900A (en) * | 2004-06-14 | 2008-01-31 | マイクロ・モーション・インコーポレーテッド | Coriolis flow meter and method for determining cabling and signal difference at first and second pickoff sensors |
JP4739333B2 (en) * | 2004-06-14 | 2011-08-03 | マイクロ・モーション・インコーポレーテッド | Coriolis flow meter and method for determining cabling and signal difference at first and second pickoff sensors |
JP2009528537A (en) * | 2006-02-27 | 2009-08-06 | マイクロ・モーション・インコーポレーテッド | Flow meter and method for detecting cable damage in a cable of the flow meter |
JP2012154943A (en) * | 2012-04-09 | 2012-08-16 | Micro Motion Inc | Apparatus and method for detecting cable damage in flowmeter and cable of flowmeter |
Also Published As
Publication number | Publication date |
---|---|
JPS6293729U (en) | 1987-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR960000099B1 (en) | Coriolis type mass flow meter | |
AU731518B2 (en) | Coriolis mass flow meter | |
US5728952A (en) | Vibration measuring instrument | |
US4781069A (en) | Mode selection apparatus for multiple tube coriolis type mass flow meters | |
US4852410A (en) | Omega-shaped, coriolis-type mass flow rate meter | |
CA2837794C (en) | Mass flowmeter | |
JPH0711436B2 (en) | Mass flow meter | |
JPH01296112A (en) | Coriolis mass flowmeter | |
AU2007362570A1 (en) | A vibrating flow device and method for fabricating a vibrating flow device | |
JPH0345145Y2 (en) | ||
JP5874193B2 (en) | Flow control device and flow sensor unit | |
JP3327325B2 (en) | Coriolis mass flowmeter | |
JP2793699B2 (en) | Mass flow meter | |
JP2885768B1 (en) | Coriolis mass flowmeter | |
JPH10104040A (en) | Mass flowmeter converter | |
JP2008209223A (en) | Coriolis mass flow meter | |
JP3756819B2 (en) | Micro flow Coriolis meter | |
JPH10227677A (en) | High-temperature type coriolis flowmeter | |
JPH11351939A (en) | Coriolis mass flowmeter | |
JP2001108501A (en) | Coriolis mass flowmeter | |
JPH04220529A (en) | Mass flow meter | |
JP3757559B2 (en) | Coriolis mass flow meter | |
JPH0835872A (en) | Vibration measuring device | |
JPH02262019A (en) | mass flow meter | |
JP2003279393A (en) | Electromagnetic flowmeter |