JPH0338848A - Probe apparatus - Google Patents

Abstract

PURPOSE:To prevent a probe card from being damaged artificially by a method wherein a required card is selected automatically out of many probe cards, the probe card is conveyed automatically to a probe-card loading part and is loaded automatically on the probe-card loading part. CONSTITUTION:A probe card inside a probe-card storage warehouse 1 is carried out from an entrance and exist 3 by using a controller 2. The carried-out probe card is conveyed to a loading stage 5 by using a conveyance device 4. A belt, air or the like is used for the conveyance device. The probe card which has been conveyed to the loading stage 5 is aligned by using a sensor or the like; it is then set on a motherboard 6 and can be used. Thereby, it is possible to prevent the probe card from being damaged artificially.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a probe device for forming a contact on an IC or a circuit board.

[Summary of the invention]

The present invention improves the operating efficiency of a probe device in which a probe card is mounted by automating a series of operations for selecting, transporting, and mounting a probe card.

[Conventional technology]

Conventionally, the probe car 1 to be used was attached to the probe device by hand.

[Problem to be solved by the invention]

In the above-mentioned probe device, the probe card was manually attached, so there was a high risk that the probe card would be damaged due to improper handling.

[Means to solve the problem]

In order to solve these problems, the present invention automatically selects a necessary probe card from a large number of probe cards, automatically transports the probe card to the probe card mounting section, and transfers the probe card to the probe card mounting section. It is configured to be installed automatically.

[Effect]

With the above configuration, by automating the series of operations of selecting, transporting, and mounting the probe card, it is possible to prevent the probe card from being damaged artificially.

〔Example〕

Hereinafter, the present invention will be explained in detail with reference to Examples.

FIG. 1 shows an embodiment of the present invention, in which probe cards in a probe card storage 1 are taken out from a person exit 3 by a controller 2. In FIG. The unloaded probe card is transported to the mounting table 5 by the transport device 4. The transport device includes
Use heald or air. The probe card conveyed to the mounting table 5 is aligned by a sensor or the like, and then placed on the motherboard 6 and becomes ready for use. There are two ways to attach the power to the motherboard: one is to move the mounting base, and the other is to move the motherboard. FIG. 2 shows another embodiment of the present invention, and by combining it with a fully automatic prober 7, a large number of measurements can all be performed automatically.

〔Effect of the invention〕

As explained below, since the selection, transportation, and mounting of the probe cards can be performed automatically, it is possible to prevent artificial damage to the probe cards, and it becomes easier to manage the probe cards.

In addition, by combining it with a fully automatic prober,
It has the advantage that a large number of measurements can all be performed automatically.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention, FIG. 3 is a configuration diagram of another embodiment of the invention. 1...Probe card storage 2... Controller 3...Person exit 4... Conveyance device 5...Mounting stand 6...Motherboard 7...Full auto prober Figure 2 is a book that's all

Claims (1)

[Claims] In a probe device that mounts a probe card, a probe card storage that stores a large number of probe cards;
A probe device comprising: a controller that automatically selects an arbitrary probe card; and a transport device that transports the selected probe card to a mounting table.