JPH03295409A - Non-contact thickness measurement method for metal pipe surface coatings - Google Patents
Non-contact thickness measurement method for metal pipe surface coatingsInfo
- Publication number
- JPH03295409A JPH03295409A JP9733990A JP9733990A JPH03295409A JP H03295409 A JPH03295409 A JP H03295409A JP 9733990 A JP9733990 A JP 9733990A JP 9733990 A JP9733990 A JP 9733990A JP H03295409 A JPH03295409 A JP H03295409A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- thickness
- coating film
- distance
- eddy current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims description 58
- 239000002184 metal Substances 0.000 title claims description 32
- 238000000691 measurement method Methods 0.000 title description 2
- 239000011248 coating agent Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 16
- 239000010408 film Substances 0.000 description 42
- 239000003973 paint Substances 0.000 description 16
- 238000005259 measurement Methods 0.000 description 13
- 238000004364 calculation method Methods 0.000 description 7
- 239000004698 Polyethylene Substances 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 229920013716 polyethylene resin Polymers 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000009675 coating thickness measurement Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000010779 crude oil Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、金属管表面の塗膜厚みをオンラインで自動的
に非接触式に測定する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for automatically and non-contactly measuring the coating thickness on the surface of a metal tube online.
プラスチック被覆を施す金属管は、主にガス。 Metal pipes coated with plastic are mainly used for gas.
原油等の流体輸送用パイプラインや海洋構造物として使
用され，それらの用途の多くは、過酷な腐食環境条件下
で４０〜５０年にわたる長期間の耐久性を要求される。It is used as pipelines for transporting fluids such as crude oil and offshore structures, and many of these applications require long-term durability of 40 to 50 years under harsh corrosive environmental conditions.
その為、被覆材料としてのプラスチックは化学的安定性
の優れたものでなければならない。一方、パイプライン
の埋設や海洋構造物の施工においては、金属管への土砂
や岩石等による衝撃は不可避であり、その衝撃によって
発生した金属面まで達する塗膜の貫通疵部から周囲の腐
食因子や防食電流の影響によって塗膜剥離が進行し、金
属管の寿命を短縮させる。従って，金属管表面の塗膜は
機械的にも優れた強度を有する必要がある。Therefore, the plastic used as the coating material must have excellent chemical stability. On the other hand, when burying pipelines or constructing offshore structures, it is unavoidable that metal pipes will be impacted by earth, sand, rocks, etc., and corrosion factors in the surrounding area will be exposed to corrosion factors from the penetrating flaws in the coating that reach the metal surface caused by this impact. The coating film peels off due to the effects of corrosion protection and anticorrosion current, shortening the life of the metal pipe. Therefore, the coating film on the surface of the metal tube must have excellent mechanical strength.
以上のことから、被覆材料としてはポリエチレンやエポ
キシ樹脂が一般であり、それらによって成る塗膜の厚み
はポリエチレンで２〜６ Ｗｎ，エポキシ樹脂で３００
〜１０００μである。しかも、これらの被覆材料にはカ
ーボンブラックや金属酸化物が添加されている。From the above, polyethylene and epoxy resin are generally used as coating materials, and the thickness of the coating film made of them is 2 to 6 Wn for polyethylene and 300 Wn for epoxy resin.
~1000μ. Moreover, carbon black and metal oxides are added to these coating materials.
ところで、塗膜厚みは被覆金属管の需要家に対して保証
すべき必須項目であり、金属管被覆の製造ラインでは全
製品について該塗膜厚みを電磁式膜厚測定器やマグネチ
ック・ゲージ等の計器を用いてオフラインで接触方式に
よって測定する場合が多い。品質保証の立場からすれば
この要領で良いが、品質管理の立場からすれば塗膜厚み
の経時的な変化を的確に捉え、その情報を前工程にフィ
ードバックしてリアルタイムに塗膜厚みを制御するには
タイムラグが長く、必ずしも十分な管理体制とはいえな
い。厳格な塗膜厚み管理を実現するには、塗膜厚みをオ
ンラインで且つ被覆直後に連続的に測定できることが望
ましい。By the way, the coating thickness is an essential item that must be guaranteed to the customers of coated metal pipes, and in the metal pipe coating manufacturing line, the coating thickness of all products is measured using an electromagnetic film thickness measuring device, magnetic gauge, etc. It is often measured offline using a contact method using a meter. From a quality assurance standpoint, this procedure is fine, but from a quality control standpoint, it is necessary to accurately capture changes in paint film thickness over time and feed that information back to the previous process to control paint film thickness in real time. There is a long time lag, and the management system is not necessarily adequate. In order to achieve strict coating thickness control, it is desirable to be able to continuously measure coating thickness online and immediately after coating.
以下、従来のオンライン塗膜厚み測定技術を列記する。Below, conventional online coating thickness measurement techniques are listed.
■特開昭６０−１４４６０３号公報、特開昭６３−８５
１１号公報に記載されたように、金属管に接触したガイ
ドロールで塗膜厚み測定センサーをサポー１−すること
によって塗膜厚み測定センサーと塗膜面とを既知の基準
距離に固定し、該塗膜厚み測定センサーによって該塗膜
厚み測定センサー自身と金属面との距離を測定して、こ
の検出距離と前記基準距離との差をとって塗膜厚みを測
定する。■JP-A-60-144603, JP-A-63-85
As described in Publication No. 11, by supporting the coating film thickness measurement sensor with a guide roll in contact with a metal tube, the coating film thickness measurement sensor and the coating surface are fixed at a known reference distance, and the coating film thickness measurement sensor and the coating surface are fixed at a known reference distance. The distance between the coating film thickness measurement sensor itself and the metal surface is measured by the coating film thickness measurement sensor, and the difference between this detected distance and the reference distance is calculated to measure the coating film thickness.
■特開昭５８−１８１０９号公報、実開昭６１−１６３
９１５号公報に記載されたように被測定塗膜に照射され
た赤外線が塗膜内を透過し金属面で反射して再び塗膜内
を透過して戻ってきたときに、その反射光強度を検出し
て塗膜の赤外線吸収量を測定すれば、赤外線吸収量は塗
膜厚みよって一義的に決まる量であることを利用して、
容易に塗膜厚みを求めることができる。■Unexamined Japanese Patent Publication No. 58-18109, Utility Model Application No. 61-163
As described in Publication No. 915, when the infrared rays irradiated on the coating film to be measured are transmitted through the coating film, reflected on the metal surface, and returned again after passing through the coating film, the intensity of the reflected light is measured. If you detect it and measure the amount of infrared absorption of the paint film, you can use the fact that the amount of infrared absorption is uniquely determined by the thickness of the paint film.
The coating thickness can be easily determined.
次に、従来のオンライン塗膜厚み測定技術の問題点を下
記■〜■に列記する。Next, problems with conventional online coating film thickness measurement techniques are listed below.
■前記特開昭６０−１４４６０３号公報、特開昭６３−
８５１１号公報に記載の方法は、ガイドロールが塗膜面
に接触する為に塗膜が半溶融の柔らかい状態では塗膜に
疵を付けることは明らかである。■The above-mentioned JP-A-60-144603, JP-A-63-
It is clear that the method described in Japanese Patent No. 8511 causes scratches on the coating film when the coating film is semi-molten and soft because the guide roll comes into contact with the coating surface.
■上述問題点■を避ける為に、塗膜を十分に同化または
硬化させた後、前記特開昭６０−１４／！６０３号公報
、特開昭６３−８５１１号公報に記載の方法を適用しよ
うとすれば、塗膜の同化または硬化の間にも金属管の被
覆は引き続き行われるので、塗膜厚み測定情報のフィー
ドバックによるリアルタイムの制御を少ないタイムラグ
で実現するという本来の目的には適さない。■In order to avoid the above-mentioned problem (■), after sufficiently assimilating or curing the coating film, the above-mentioned JP-A-60-14/! If we try to apply the method described in JP-A No. 603 and JP-A-63-8511, the coating of the metal tube will continue even during the assimilation or curing of the coating, so the feedback of the coating thickness measurement information will not be possible. It is not suitable for the original purpose of realizing real-time control with a small time lag.
■よしんば上述問題点■に目をつむったとしても、ガイ
ドロールによる塗膜への疵付きを防ぐ為には、ガイドロ
ールは塗膜よりも柔らかい材質のものでなければならな
いので、ガイドロールが摩耗して測定値が不正確になる
。■YoshibaEven if we ignore the above-mentioned problem■, in order to prevent the guide roll from scratching the paint film, the guide roll must be made of a softer material than the paint film, so the guide roll will wear out. This will result in inaccurate measurements.
■前記特開昭５８−１８１０９号公報、実開昭６１−１
６３９１５号公報に記載の方法は、１００μ以下の薄膜
の厚み測定に適し、また赤外線の波長を適当に選べば透
明塗膜で１ｍ程度まで、顔料を含まない白色塗膜では多
少ばらつきは増すが５００μ程度までは測定できる。し
かし、カーボンブラックや金属酸化物を添加したポリエ
チレンやエポキシ樹脂では測定可能な塗膜厚み限界４０
０μであり、これを超える厚みの塗膜には適用できない
。■The above-mentioned Japanese Unexamined Patent Publication No. 18109/1983, Utility Model Application No. 61-1
The method described in Publication No. 63915 is suitable for measuring the thickness of thin films of 100μ or less, and if the wavelength of infrared rays is selected appropriately, it can measure up to about 1m for transparent coatings, and 500μ for white coatings that do not contain pigments, although there is some variation. It can be measured to a certain degree. However, with polyethylene or epoxy resins containing carbon black or metal oxides, the measurable coating thickness limit is 40.
0μ, and cannot be applied to coatings with a thickness exceeding this.
本発明は、従来の技術における上述の問題点に注目して
、着色添加物を含み、厚みが３００μ〜６ｍの範囲のポ
リエチレンやエポキシ樹脂から成る塗膜の厚みを、オン
ラインにおいて完全な非接触式で自動的に高精度で測定
できる方法を提供するものである。The present invention focuses on the above-mentioned problems in the conventional technology, and provides an online, non-contact method for measuring the thickness of a coating film made of polyethylene or epoxy resin containing coloring additives and having a thickness ranging from 300 μm to 6 m. This provides a method that can automatically measure with high accuracy.
塗膜厚みをオンラインにおいて完全な非接触式で自動的
に高精度で測定する２本発明の方法は、下記３点から構
成される。The method of the present invention for automatically and highly accurately measuring coating film thickness online in a completely non-contact manner consists of the following three points.
■渦電流センサーを用いて金属管の表面の位置を検出す
る。■Detect the position of the surface of the metal tube using an eddy current sensor.
■光学式センサーを用いて塗膜表面の位置を検出する。■Detect the position of the coating surface using an optical sensor.
■金属管の表面の位置と塗膜表面の位置との差をとって
塗膜厚みとする、
〔作用及び実施例〕
以下、本発明の塗膜厚み測定方法について図に示す実施
例に基づいて詳細に説明する。■The difference between the position of the surface of the metal tube and the position of the paint film surface is taken as the paint film thickness. [Function and Examples] Hereinafter, the method for measuring the paint film thickness of the present invention will be explained based on the example shown in the figure. Explain in detail.
第１図は、本発明の方法を実施するための装置構成の概
要を示すブロック図である。第１図において、渦電流セ
ンサー１及び１１ が光学式センサー２の近傍に配設さ
れており、渦電流センサー１及び１′ によって金属面
７の位置を検出して、金属面位置演算部４によって金属
面位置に応じた電気信号を距離に変換して、渦電流セン
サー１及び１′の距離信号の平均値が金属面の位置とし
て出力される。一方、光学式センサー２によって塗膜面
６の位置を検出して、塗膜面位置演算部３によって塗膜
面位置に応じた電気信号を距離に変換して出力する。金
属面距離演算部４によって出力された距離信号と塗膜面
演算部３によって出力された距離信号は、更に膜厚演算
部５に送信されそこで塗膜厚みが演算される。FIG. 1 is a block diagram showing an outline of an apparatus configuration for implementing the method of the present invention. In FIG. 1, eddy current sensors 1 and 11 are arranged near an optical sensor 2, and the eddy current sensors 1 and 1' detect the position of a metal surface 7, and the metal surface position calculation section 4 detects the position of a metal surface 7. The electrical signal corresponding to the metal surface position is converted into a distance, and the average value of the distance signals from the eddy current sensors 1 and 1' is output as the metal surface position. On the other hand, the optical sensor 2 detects the position of the coating surface 6, and the coating surface position calculating section 3 converts an electric signal corresponding to the coating surface position into a distance and outputs the converted signal. The distance signal output by the metal surface distance calculation section 4 and the distance signal output by the paint film surface calculation section 3 are further transmitted to the film thickness calculation section 5, where the coating film thickness is calculated.
第２図は、第１図の方法における考え方を示したもので
ある。第２図に示すように、渦電流センサー１によって
金属管までの距離Ｌ１を測定し、渦電流センサー１′
によって金属管までの距離Ｌ２を測定し、光学式センサ
ー２によって塗膜までの距離Ｈを測定すれば、渦電流セ
ンサー１と光学式センサー２とのギャップａ１と渦電流
センサー１’ と光学式センサー２とのギャップａ２
は既知の量とすることができるので下記（１）式からの
塗膜厚みｔが計算できる。FIG. 2 shows the concept behind the method of FIG. 1. As shown in FIG. 2, the distance L1 to the metal tube is measured by the eddy current sensor 1, and the eddy current sensor 1'
If the distance L2 to the metal tube is measured by and the distance H to the coating film is measured by the optical sensor 2, the gap a1 between the eddy current sensor 1 and the optical sensor 2, the eddy current sensor 1' and the optical sensor Gap a2 with 2
Since can be taken as a known quantity, the coating film thickness t can be calculated from the following equation (1).
Ｌｌ ＋Ｌ２ ＋ａ１ ＋ａ２
ｔ＝ −Ｈ・・・（１）次に、
第３図及び第４図に、本発明の方法によって塗膜厚みを
測定した結果の１例を示す。Ll +L2 +a1 +a2 t= -H...(1) Next,
FIG. 3 and FIG. 4 show an example of the results of measuring the coating film thickness by the method of the present invention.
第３図は、所定量の金属酸化物を含んだ粉体エポキシ樹
脂を１３０〜７００μの塗膜厚みに塗装したものを測定
用サンプルとして供し、センサー２は光学式センサーと
して可視光を光源とする最大１０Ｗｌの距離まで測定可
能な市販のセンサーを用い、また渦電流センサー１．Ｉ
Ｌ として最大５ＩＩｆｆｉｌの距離まで測定可能な市
販のセンサーを用いた結果である。実際の厚みに対して
、測定された厚みはｙ＝Ｘの直線上に分布し、±５０μ
程度の精度が得られた。In Figure 3, a sample coated with powdered epoxy resin containing a predetermined amount of metal oxide to a coating thickness of 130 to 700μ is used as a measurement sample, and sensor 2 is an optical sensor that uses visible light as a light source. A commercially available sensor that can measure up to a distance of 10 Wl was used, and an eddy current sensor 1. I
These are the results using a commercially available sensor that can measure up to a distance of 5Iffil as L. Relative to the actual thickness, the measured thickness is distributed on the straight line y=X, ±50μ
A certain degree of accuracy was obtained.
第４図は、所定量のカーボンブラックを含んだポリエチ
レンを２．３〜６．４■の塗膜厚みに被覆したものを測
定用サンプルとして供し、センサー２は光学式センサー
として第３図の測定と同じセンサーを用い、また渦電流
センサー１，１′ として最大１０ｗｎの距離まで測定
可能な市販のセンサーを用いた結果である。実際の厚み
に対して、測定された厚みはｙ＝ｘの直線上に分布し、
±１００μ以内の精度が得られた。In Figure 4, a sample coated with polyethylene containing a predetermined amount of carbon black to a coating thickness of 2.3 to 6.4 cm was used as a measurement sample, and sensor 2 was used as an optical sensor for the measurements shown in Figure 3. The results are obtained by using the same sensor as eddy current sensor 1, 1', and using a commercially available sensor capable of measuring up to a distance of 10 wn. Relative to the actual thickness, the measured thickness is distributed on the straight line y=x,
Accuracy within ±100μ was obtained.
また、光学式センサー２の光源にレーザー光を用いると
可視光源を用いた場合に比べ２割程度測定精度は低下す
るが、やはりｙ＝ｘの直線上に分布した。Furthermore, when a laser beam is used as the light source of the optical sensor 2, the measurement accuracy is reduced by about 20% compared to when a visible light source is used, but the measurement accuracy is still distributed on the straight line of y=x.
以上述べた本発明の方法によって、厚みが３００μ〜６
■の着色塗膜であってもオンラインで完全な非接触式に
よって測定できることから塗膜が柔らかいうちに塗膜厚
みが測定でき、塗膜厚み測定情報のフィードバックによ
るリアルタイムの制御を少ないタイムラグで実現できる
。By the method of the present invention described above, the thickness can be reduced from 300 μm to 6 μm.
Even colored paint films can be measured online using a completely non-contact method, so the thickness of the paint film can be measured while the film is still soft, and real-time control can be achieved with less time lag by feedback of paint film thickness measurement information. .
第１図は本発明の方法を一態様で実施する装置構成を示
すブロック図である。
第２図は、第１図に示すセンサと塗膜面および金属面と
の距離関係を示す説明図である。
第３図及び第４図は、第１図の装置を使用して本発明に
より測定した結果を示すグラフである。
１及び１゛：渦電流センサー
２：光学式センサー ３：塗膜位置演算部４：金
属面位置演算部 ５：塗膜厚み演算部６：塗膜面
７：金属面Ｌ１：渦電流センサー１と金
属面との距離Ｌ２：渦電流センサー１′ と金属面との
距離ａ１：渦電流センサー１と光学式センサー２とのギ
ャップａ２：渦電流センサー１１ と光学式センサー
２とのギャップＨ：光学式センサー２と塗膜面との距離
ｔ：塗膜厚み
第２図FIG. 1 is a block diagram showing the configuration of an apparatus for carrying out one embodiment of the method of the present invention. FIG. 2 is an explanatory diagram showing the distance relationship between the sensor shown in FIG. 1 and a coating surface and a metal surface. 3 and 4 are graphs showing the results of measurements according to the present invention using the apparatus of FIG. 1. 1 and 1゛: Eddy current sensor 2: Optical sensor 3: Paint film position calculation section 4: Metal surface position calculation section 5: Paint film thickness calculation section 6: Paint film surface
7: Metal surface L1: Distance between eddy current sensor 1 and metal surface L2: Distance a1 between eddy current sensor 1' and metal surface: Gap between eddy current sensor 1 and optical sensor 2 A2: Eddy current sensor 11 and Gap H with optical sensor 2: Distance t between optical sensor 2 and coating surface: Coating film thickness Fig. 2
Claims (2)
覆膜厚みを測定する方法において、渦電流センサーと光
学式センサーの位置関係を一定に保持し、前記渦電流セ
ンサーによって金属管までの距離を測定し、光学式セン
サーによって塗膜までの距離を測定することによって、
これらの測定値と前記センサー間の位置関係とから塗膜
厚みを測定することを特徴とする金属管表面塗膜の非接
触式厚み測定方法。(1) In a method for measuring the thickness of a coating film applied to the outer surface of a metal tube that is moving in the tube axis direction, the positional relationship between an eddy current sensor and an optical sensor is maintained constant, and the eddy current sensor is By measuring the distance to the metal pipe and the distance to the coating film using an optical sensor,
A non-contact method for measuring the thickness of a coating film on the surface of a metal pipe, characterized in that the coating thickness is measured from these measured values and the positional relationship between the sensors.
に１台ずつ設けることを特徴とする前記特許請求の範囲
第（１）項記載の金属管表面塗膜の非接触式厚み測定方
法。(2) A non-contact thickness measuring method for a metal tube surface coating film according to claim (1), characterized in that one eddy current sensor is provided on both sides of the optical sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9733990A JPH03295409A (en) | 1990-04-12 | 1990-04-12 | Non-contact thickness measurement method for metal pipe surface coatings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9733990A JPH03295409A (en) | 1990-04-12 | 1990-04-12 | Non-contact thickness measurement method for metal pipe surface coatings |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03295409A true JPH03295409A (en) | 1991-12-26 |
Family
ID=14189725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9733990A Pending JPH03295409A (en) | 1990-04-12 | 1990-04-12 | Non-contact thickness measurement method for metal pipe surface coatings |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03295409A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002148012A (en) * | 2000-11-08 | 2002-05-22 | Ulvac Japan Ltd | Apparatus and method for measurement of film thickness |
| US6966816B2 (en) | 2001-05-02 | 2005-11-22 | Applied Materials, Inc. | Integrated endpoint detection system with optical and eddy current monitoring |
| US7042558B1 (en) * | 2001-03-19 | 2006-05-09 | Applied Materials | Eddy-optic sensor for object inspection |
| US7101254B2 (en) | 2001-12-28 | 2006-09-05 | Applied Materials, Inc. | System and method for in-line metal profile measurement |
| JP2007212278A (en) * | 2006-02-09 | 2007-08-23 | Bridgestone Corp | Old rubber gauge measuring apparatus |
| JP2008304471A (en) * | 2000-03-28 | 2008-12-18 | Toshiba Corp | Film thickness measuring device, film thickness measuring method, and recording medium |
| JP2011043406A (en) * | 2009-08-21 | 2011-03-03 | Jfe Steel Corp | Pipe end joint position detection apparatus of resin-coated pipe and method |
| CN103712588A (en) * | 2013-12-13 | 2014-04-09 | 天津大学 | Deposition mass simulation measurement system and method for thickness of oil film absorbed by internal wall surface of engine cylinder |
| JP2018105849A (en) * | 2016-11-11 | 2018-07-05 | フルークコーポレイションＦｌｕｋｅ Ｃｏｒｐｏｒａｔｉｏｎ | Non-contact current measurement system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0158110B2 (en) * | 1981-07-09 | 1989-12-08 | Hoechst Celanese Corp |
-
1990
- 1990-04-12 JP JP9733990A patent/JPH03295409A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0158110B2 (en) * | 1981-07-09 | 1989-12-08 | Hoechst Celanese Corp |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008304471A (en) * | 2000-03-28 | 2008-12-18 | Toshiba Corp | Film thickness measuring device, film thickness measuring method, and recording medium |
| JP2002148012A (en) * | 2000-11-08 | 2002-05-22 | Ulvac Japan Ltd | Apparatus and method for measurement of film thickness |
| US7042558B1 (en) * | 2001-03-19 | 2006-05-09 | Applied Materials | Eddy-optic sensor for object inspection |
| US6966816B2 (en) | 2001-05-02 | 2005-11-22 | Applied Materials, Inc. | Integrated endpoint detection system with optical and eddy current monitoring |
| US7195536B2 (en) | 2001-05-02 | 2007-03-27 | Applied Materials, Inc. | Integrated endpoint detection system with optical and eddy current monitoring |
| US7682221B2 (en) | 2001-05-02 | 2010-03-23 | Applied Materials, Inc. | Integrated endpoint detection system with optical and eddy current monitoring |
| US7101254B2 (en) | 2001-12-28 | 2006-09-05 | Applied Materials, Inc. | System and method for in-line metal profile measurement |
| JP2007212278A (en) * | 2006-02-09 | 2007-08-23 | Bridgestone Corp | Old rubber gauge measuring apparatus |
| JP2011043406A (en) * | 2009-08-21 | 2011-03-03 | Jfe Steel Corp | Pipe end joint position detection apparatus of resin-coated pipe and method |
| CN103712588A (en) * | 2013-12-13 | 2014-04-09 | 天津大学 | Deposition mass simulation measurement system and method for thickness of oil film absorbed by internal wall surface of engine cylinder |
| JP2018105849A (en) * | 2016-11-11 | 2018-07-05 | フルークコーポレイションＦｌｕｋｅ Ｃｏｒｐｏｒａｔｉｏｎ | Non-contact current measurement system |
| US11237192B2 (en) | 2016-11-11 | 2022-02-01 | Fluke Corporation | Non-contact current measurement system |
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