JPH03294184A - Reticule taking off tool - Google Patents

Abstract

PURPOSE:To make it easy for tools to approach and retreat from their storage container, by providing a slider as a guide for inserting the m into the storage container. CONSTITUTION:A follower lever cradle 15 is moved in the direction away from a base plate 1 by the energizing force of a compressed spring, when a finger is released from an operation lever 13, a supporting projected part 10 supports a reticule R with its lifting with reticule interposing plates 5, 6 being ascended, interposing the reticule R together with reticule holding plates 8, 9. The reticule R can be taken off from a storage container RC, by drawing a reticule taking off tool from the storage container RC just as in this state. In the case of the reticule being stored in the storage container RC on the contrary, sliders 2, 3 are inserted into the storage container RC along the bottom plate upper face of the storage container RC just as the state of the reticule being placed on the reticule taking off tool. The reticule taking off tool is drawn out of the storage container RC in the state of the operation lever 13 being pulled, after the reticule being inserted to the specific position and the reticule is stored in the container.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a tool for taking out a glass substrate, such as a reticle (including one with a pellicle) for manufacturing semiconductor devices, from a storage container for glass substrates.

[Conventional technology]

Conventionally, the glass substrate of the reticle was taken in and out of the storage container directly by an operator without using any tools.

[Problem to be solved by the invention]

In the conventional method, the operator directly touches the reticle, resulting in foreign matter adhering to it and staining the reticle.

[Means to solve problems]

In order to solve the above problem, the present invention provides a tool for taking out a glass substrate such as a reticle from a storage container in which the glass substrate is stored. and a plurality of holding parts 5 that sandwich the glass substrate.
．． 6. 8. 9, and a holding part 5. 6. 8. a separating part 12 that moves the clamping surfaces of the clamping parts 5.9 in a direction away from each other; and a clamping part 5. 6. A reticle extraction tool is used, which is characterized by having a biasing portion 22 that moves the 8°9 clamping surfaces in a direction that biases them against each other.

[For production]

In the present invention, since the operator takes the reticle in and out of the storage container without directly touching it with his/her hand, the possibility of foreign matter adhering to the reticle is reduced.

〔Example〕

FIG. 1 is a diagram showing a schematic configuration of a reticle extraction tool according to an embodiment of the present invention. On the base plate 1, arm-shaped sliders 2 and 3 extending forward are placed through the bottom plate 4.
are fixedly installed in parallel at predetermined intervals. Further, the plate 7 is attached to the base plate 1 so as to be movable in the vertical direction.

The front end surface 4a of the bottom plate 4 has the function of coming into contact with the end of the container when the reticle retrieval tool enters the storage container, thereby restricting further entry.

However, the bottom plate 4 may be integrated with the base plate 1, or the base plate 1 may be used as is.

A reticle sandwiching plate 5.6 for holding the lower surface of the reticle is arranged at a predetermined distance above the sliders 2, 3, and both ends thereof are fixedly attached to the plate 7. For installation, a base 15 for the follower lever holder is fixedly installed below the plate 7.
One end of the follower lever 12 is supported. Follower lever 12
The other end is pivotally supported by the base plate 1, and is rotatable in conjunction with an operating lever 13 whose other end is similarly pivotally supported. Furthermore, a reticle holding plate 8.9 is fixedly provided on the base plate 1 to hold the corners of the upper surface of the reticle. This will be further explained below using FIGS. 2 and 3.

FIG. 2 is a plan view showing a schematic configuration of a reticle extraction tool according to an embodiment of the present invention. The follower lever 12 and the operating lever 13 are supported via a shaft 16 and can rotate together.

FIG. 3 is a side view showing a schematic configuration of a reticle extraction tool according to an embodiment of the present invention. A sliding sheet 17 is attached to the bottom and side surfaces of the slider 2 and the slider 3 (not shown) so as to slide smoothly on the bottom plate of the storage container. Further, on the upper surfaces of the reticle sandwiching plate 5 and the reticle sandwiching plate 6 (not shown), there are support protrusions 10 for supporting the reticle, and restriction bars 11 for restricting the movement of the reticle on the reticle sandwiching plate 5.6. is the provision.

In addition, in FIGS. 2 and 3, the state in which the reticle R is placed is shown by a broken line. Further, an anti-slip sheet 18 for preventing the reticle from slipping is attached to the bottom surfaces of the reticle holding plate 8 and the reticle holding plate 9 (not shown).

A grip 14 is fixed to the base plate 1 on which these members are integrally mounted.

FIG. 4 is a diagram showing a schematic configuration of an operating section of a reticle extraction tool according to an embodiment of the present invention. axis 16
The follower lever 12, which is connected to the operating lever 13 via the lever 12, has a bearing 19 rotatably supported at one end thereof. As shown in FIG. 5, this bearing 19 has a follower lever holder that is in contact with a horizontal surface 15a of a notch in the base 15, and when the operating lever 13 is rotated in the direction of the arrow in FIG. The follower lever receiver pushes down the stand 15.

FIG. 6 is a cross-sectional view showing a schematic configuration of the base plate of the follower lever receiver in the reticle extraction tool according to the embodiment of the present invention. The base 15 of the follower lever receiver has a plurality of shafts 20 for vertical movement, each of which has a linear ball bearing 21 in a hole 1a penetrating the base plate 1.
Insert it via . Further, in the follower lever receiver, a plurality of compression springs 22 are fixedly installed between the stand 15 and the base plate 1.
The follower lever receiver always urges the stand 15 and the base plate 1 in the direction of separating them.

Using the reticle removal tool with the above-mentioned configuration, 1.・The procedure for putting in and taking out the chicle is explained below.

First, the operator pulls the operating lever 13, and the follower lever 12
(7) The follower lever holder pushes down the stand 15 toward the base plate 1. That is, the reticle sandwiching plate 5 and the reticle holding plate 8
, and the reticle sandwiching plate 6 and the reticle holding plate 9<! : Provide a distance that is at least the thickness of the reticle. Next, sliders 2 and 3 and reticle sandwiching plates 5 and 6 are inserted under the reticle along the bottom plate of the storage container. At this time, the reticle sandwich plate 5.6 is also inserted into the lower part of the reticle.

FIG. 7 is a sectional view showing a state in which the reticle retrieval tool according to the embodiment of the present invention is inserted into a storage container in which a reticle is present. Incidentally, the storage container used in this embodiment has the structure disclosed in Japanese Patent Application Laid-Open No. 58-95812. In this state, the distance between the upper surface of the pressed down reticle sandwiching plate 5 (strictly speaking, the upper surface of the supporting convex portion IO) and the lower surface of the slider 2 (strictly speaking, the lower surface of the sliding sheet 17) is the reticle R Distance h between the lower surface of the storage container RC and the upper surface of the bottom plate of the storage container RC! shorter than Also, the reticle holding plate 8
The thickness t (including the anti-slip sheet 18) is thinner than the distance hs between the upper surface of the reticle R and the lower surface of the upper plate of the storage container RC. Furthermore, the distance h4 between the lower surface of the reticle holding plate 8 (including the anti-slip sheet 18) and the lower surface of the slider 2 (strictly speaking, the lower surface of the sliding sheet 17) is the distance between the upper surface of the reticle R and the upper surface of the bottom plate of the storage container RC. ri, longer than. That is, the reticle R consists of reticle holding plates 8, 9, reticle sandwiching plates 5,
It is sandwiched between 6. Next, when you release your finger from the operating lever 13, the biasing force of the compression spring 22 causes the follower lever holder to move in the direction in which the stand 15 moves away from the base plate 1, and the reticle sandwiching plates 5 and 6 move up, causing the supporting protrusion 10 lifts and supports the reticle R, and holds the reticle R together with the reticle holding plates 8 and 9.
to hold. In this state, the reticle R can be taken out from the storage container RC by pulling out the reticle removal tool from the storage container RC.

Conversely, when storing the reticle in the storage container RC, with the reticle placed on the reticle removal tool, insert the slider 2.3 into the storage container RC along the top surface of the bottom plate of the storage container RC. To go. After the reticle has been inserted to a predetermined position, that is, after the front end surface 4a of the bottom plate 4 has come into contact with the end of the storage container RC, if the reticle removal tool is pulled out from the storage container RC while pulling the operation lever 13, the reticle can be removed. can be stored in the storage container RC.

〔Effect of the invention〕

According to the present invention, a slider with a sliding sheet pasted thereon is provided as a guide for inserting the tool into the storage container, making it easier to enter and exit the tool into the storage container, and reducing the possibility of inadvertent contact with the reticle. . Further, by providing the support convex portion on the reticle sandwiching plate, the contact surface with the reticle can be minimized, and the adhesion of dust to the reticle during the work process can be minimized.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of a reticle extraction tool according to an embodiment of the present invention, and FIG. 2 is a plan view showing a schematic configuration of a reticle extraction tool 5 according to an embodiment of the present invention.
3 is a side view showing a schematic configuration of a reticle extraction tool according to an embodiment of the present invention, FIG. 4 is a diagram showing a schematic configuration of an operating section of a reticle extraction tool according to an embodiment of the invention, The figure is a cross-sectional view showing the structure of the separated part of the reticle take-out tool according to the embodiment of the present invention, and FIG. FIG. 7 is a sectional view showing a state in which a reticle retrieval tool according to an embodiment of the present invention is inserted into a storage container in which a reticle is present. [Explanation of symbols of main parts] l...Base plate, 2.3...Slider, 5.6.
... Reticle sandwiching plate, 8, 9... Reticle holding plate, 1
0... Support convex portion, 12... Follower lever, 13...
Operation lever, 14... Grip, 15... Follower lever holder is stand, 17... Sliding sort, 18... Anti-slip sheet, ] 9... Bearing, 20... Shaft for downward movement, 21... Linear ball bearing, 22... Compression spring, R... Reticle, RC... Storage container.

Claims (3)

[Claims] (1) A tool for taking out a glass substrate such as a reticle from a storage container that stores the glass substrate, the tool comprising: a plurality of entry members arranged so as to be able to enter horizontally into the storage portion of the storage container; and the glass substrate. a plurality of clamping members that sandwich the clamping members; a spacing member that moves the clamping parts of the clamping members in a direction that separates them from each other; and a biasing member that moves the clamping parts of the clamping members in a direction that urges each other. Reticle removal tool. (2) The reticle retrieval tool according to claim 1, wherein the entrance member is provided with a wear-resistant member on a side surface to prevent wear due to friction between the entrance member and the storage container. (3) The reticle retrieval tool according to claim 1, wherein the holding member has a protrusion for supporting the glass substrate while reducing its contact surface with the glass substrate.