JPH03213293A - Wiring device for turning angle limiting mechanism - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a wiring device for a rotation angle limiting mechanism, and in particular, to a technique for suppressing the rubbing of wiring. It relates to a device that can be used to wire a mechanism connected to a rotating shaft that is supported in a similar manner and rotates by a limited angle.

[Conventional technology]

Conventionally, when wiring to a drive mechanism connected to a rotating shaft that is supported at the tip of an articulated robot's arm and moves three-dimensionally, the device control section wires the wire along the robot arm to the driving mechanism connected to the rotating shaft. A method of routing is adopted,
The wiring can be moved according to the three-dimensional movement of the robot arm.

[Problem to be solved by the invention]

However, in such wiring technology, when the piping and wiring move with the movement of the robot arm, they come into contact with the outer surface of the robot, drive mechanism, etc., and the wiring may break or become damaged. A problem arises in that dust is generated due to the movement of the

When such robots and wiring techniques are used in the manufacturing process of semiconductor devices, if dust is scattered, there is a risk that the dust will adhere to the wafer.

In general, as a technique for ensuring electricity supply while allowing rotation between members, there is a technique for installing a slip ring between the members. It is also possible to make a slip ring on the drive mechanism snowproof and connect the wiring that connects the robot arm and the drive mechanism to the slip ring, but since the wiring moves on the slip ring as the robot arm moves, it may wear out. There is a risk that credibility will decline.

An object of the present invention is to provide a wiring device with a rotation angle limiting mechanism that can move wiring housed in a certain container in accordance with the movement of a rotating shaft.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means to solve the problem]

An overview of typical inventions disclosed in this application is as follows.

In other words, a connecting shaft is connected to a rotating shaft that rotates by a limited angle, an inner cylinder is fixed to the center of an approximately bowl-shaped outer cylinder, and a rotating shaft insertion hole is provided at the axes of the outer cylinder and the inner cylinder. a drum with a bearing mounting groove formed on the wall surface of the rotating shaft insertion hole of the inner cylinder, a bearing that is mounted in the bearing mounting groove of the drum and rotatably supports the connecting shaft, and a bearing that is fixed to the connecting shaft and the drum. A fixing member is formed to cover the open end side of the drum leaving a space between the drum and the fixing member that prevents movement of the connecting shaft in the axial direction, and is fixed to the axial end of the connecting shaft. The drum has a lid body connected to the drive mechanism on the opposite side, and a wiring insertion hole is formed in the outer cylinder of the drum and the lid body, and the wiring inserted from the outside of the outer cylinder into the wiring insertion hole is inserted into the drum. It is characterized by being locked to the outer peripheral surface of the cylinder and extending from the wiring insertion hole of the lid to the drive mechanism.

[Effect]

According to the above-mentioned means, when the rotating shaft that rotates by a limited angle rotates, the connecting shaft rotates in accordance with this rotation.

A lid is connected to the connecting shaft, and the lid rotates as the connecting shaft rotates. At this time, the drum is at rest;
The wiring housed within the drum moves within the drum as the lid rotates.

That is, when the rotating shaft rotates, the connecting shaft, the lid body, and the drive mechanism rotate, but the drum remains stationary, and the wiring moves within the drum to match the rotation of the drive mechanism. I can do it. Therefore, even if the wiring moves, the wiring does not come into contact with other members, and it is possible to prevent the wiring from breaking or scattering dust due to the movement of the wiring.

〔Example〕

FIG. 1 is a longitudinal cross-sectional view showing a wiring device for a rotation angle limiting mechanism which is an embodiment of the present invention, FIG. 21 is a plan cross-sectional view thereof, and FIG.
The figure is also a perspective view, and FIG. 4 is a schematic side view for explaining its function.

In this embodiment, a wiring device 10 for a rotation angle limiting mechanism according to the present invention is installed between a robot arm (only the tip part is shown) 11 and a hand 12 as a drive mechanism, and is installed flat. Cable I3 and piping tube 1
4 are installed respectively. robot arm, ll
The robot arm 11 is configured to be rotatable by an angle of 180 degrees or 270 degrees, and can also move about 200 mm in the vertical direction.In other words, the tip of the robot arm 11 can move in three dimensions. The hand 12 is equipped with a motor 15, a position sensor 16, etc., and is adapted to be moved three-dimensionally by the robot arm 11. Also,
The hand 12 is configured to hold a wafer 36 as a workpiece by vacuum suction and transfer it as desired.

The wiring device 10, the connecting shaft 17, the drum 18,
It is composed of a bearing 19, a lower part 120, etc., and the large diameter part 21 of the connecting shaft 17 is connected to a rotary shaft 22 rotatably supported at the tip of the robot arm 11 so as to rotate integrally therewith.

The inner cylinder 27 of the drum 18 is rotatably mounted on the small diameter portion 23 of the connecting shaft 17 via a bearing 19, and a nut 25 is fastened to a male threaded portion 24 formed at the end of the small diameter portion 23. Movement of the bearing 19 and the drum 18 in the axial direction of the connecting shaft 17 is prevented. That is, the nut 25 and the large diameter portion 21 form a fixing member. Furthermore, a lower cover 2 is provided at the lower end of the connecting shaft 17.
0 is fixed, and a hand 12 is connected to the lower part 1!20.

The drum 18 includes a substantially bowl-shaped outer cylinder 26 and an inner cylinder 27 fixed to the center of the outer cylinder 26, and is fixed to the robot arm 11 on the outside of the outer cylinder 26. A rotary shaft insertion hole 28 is formed at the axis of the outer cylinder 26 and the inner cylinder 27, and the connecting shaft 17 is inserted through this insertion hole within two days.

Further, a pair of bearing mounting grooves 29 are recessed in the wall surface of the insertion hole 28 of the inner cylinder 27, arranged vertically, and a bearing 19 is mounted in each bearing mounting groove 29, 29, respectively. The connecting shaft 1 is located at the center of the upper surface of the outer cylinder 26.
A dust seal 30 is fixed between the outer periphery of the large diameter portion 21 and the outer periphery of the large diameter portion 7 . A fastener 31 is fixed to the inner circumference of the side wall of the outer cylinder 26, a tube fixing member 32 is fixed to the outer circumference of the side wall, and a wiring insertion hole (not shown) is provided in the center of the side surface to which the tube fixing member 32 is fixed. Power has also been opened.

The lower I20 is formed into a substantially flat plate shape as a lid, and is attached to the drum 18.
It is formed so as to cover the open end side of the drum 18, leaving a space between. Then, the flat cable 13 wired inside the drum 18 is connected to the hand 12 at the lower 11F20.
A wire insertion hole 33 for guiding the wire is provided, and a fastener 34 is fixed near the wire insertion hole 33. The flat cable 13 inserted through the wiring insertion hole provided in the tube fixing member 32 of the outer cylinder 26 is connected to the stopper 31
After being wound a plurality of times (3 to 4 times) within the drum 18, it is locked with a stopper 34. Furthermore, the flat cable 13 is inserted into the wiring insertion hole 33.
The wires are routed through to the drive section of the hand 12. In addition, a force (not shown) (chave 14 is also piped in the same way).

Next, the action will be explained.

When the orientation of the wafer 36 adsorbed by the wafer adsorption fingers 35 of the hand 12 is changed, the robot arm 1
When the rotating shaft 22 supported by the rotating shaft 1 is rotated by a certain angle in the same direction, as shown in FIG. is rotated, so that the flat cable 13 locked to the stopper 34 moves in the opening direction as the lower cover 20 rotates. That is, when the drum 18 is in a stationary state and the lower cover 20 rotates together with the connecting shaft 17, the flat cable 13 is wound in a spiral shape within the drum 18. At this time, the flat cable 13 is connected to the drum 18.
The winding of the flat cable 13 prevents the flat cable 13 from breaking and generating dust by simply winding the flat cable 13 inside the flat cable without contacting other members.

If the rotating shaft 22 is rotated in the forward direction by a specific angle and then rotated in the opposite direction by a specific angle, the lower! As the cable 20 moves, the flat cable 13 is wound and rewound within the drum 18. In this case as well, the flat cable 13 is merely wound within the drum 18 without coming into contact with other members, thereby preventing wire breakage and generation of dust.

Note that negative pressure is supplied to the inside of the drum 18 through a piping tube (not shown), so that dust inside the drum 18 is evacuated.

According to the embodiment described above, the following effects can be obtained.

(1) When moving the wafer 36, dust is prevented from being generated as the hand 12 rotates, and dust is prevented from adhering to the wafer 36, contributing to an improvement in the yield of the wafer 36. be able to.

(2) Since the flat cable 13 and piping tube 14 are prevented from being damaged within a day, it is possible to contribute to improving the reliability of the robot system.

(3) Since the piping tube 14 and the flat cable 13 are housed in a certain container, the finished appearance is beautiful and the commercial value of the robot can be improved.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, the way in which the flat cable 13 and tube 14 are wound within the drum 18 is not limited to simply winding them in a spiral shape, but also in a U-shaped manner as shown in FIGS. 5 and 6.
It may be wound after passing through the letter-shaped portion U.

Moreover, the configuration is not limited to the configuration in which the rotating side rotates, but may be configured so that the drum side rotates.

The present invention can be applied not only to a rotary device that is rotatably supported at the tip of a robot arm, but also to any wiring device for a rotation angle limiting mechanism that has a rotation shaft that rotates by a limited angle.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

As explained above, according to the present invention, the wiring is housed in a certain container and the wiring is wound in the container according to the rotation of the rotating shaft. It can prevent contact with other parts, extend the life of the wiring, and
Generation of dust can be suppressed.

[Brief explanation of drawings]

Fig. 1 is a vertical cross-sectional view showing a wiring device of a rotation angle limiting mechanism which is an embodiment of the present invention, and Fig. 2 is a plan cross-sectional view thereof. Similarly, J is a perspective view, and FIG. 4 is a schematic side view for explaining its function. FIG. 5 is a sectional plan view showing a modification of the wiring, and FIG. 6 is a sectional plan view illustrating its operation. 10... Wiring device, 11... Robot arm, 12
...Hand, 13...Flat cable, 14...
・Piping tube, 15...Motor, 16...Position sensor, 17...Connection shaft, 18...Drum, 19...
・Bearing, 20...Lower cover, 21...Large diameter part, 2
2... Rotating shaft, 23... Small diameter part, 24... Male thread part, 25... Nut, 26... Outer cylinder, 27... Inner cylinder, 28... Rotating shaft insertion hole, 29... Bearing mounting groove, 30... Dust seal, 31... Stopper, 3
2...Chape fixing member, 33...Wiring insertion hole, 3
4... Stopper, 35... Suction finger, 36...
wafer. Figure 1 Figure 3 CC) C)

Claims (1)

[Claims] 1. A connecting shaft and a drum are provided, which are arranged concentrically with each other and supported for relative rotation, and there is a margin between the connecting shaft and the drum to allow wiring to be wound. 1. A wiring device for a rotation angle limiting mechanism, characterized in that the wiring is connected to a connecting shaft and a drum at a pair of positions spaced apart from each other. 2. The wiring controls the relative rotation between the connecting shaft and the drum by 360 degrees.
2. The wiring device for a rotation angle limiting mechanism according to claim 1, wherein the wiring device is configured to allow more than 1 degree. 3. A connecting shaft connected to a rotating shaft that rotates by a limited angle, an inner cylinder fixed to the center of a roughly bowl-shaped outer cylinder, and a rotating shaft insertion hole opened at the axis of the outer cylinder and inner cylinder. a drum with a bearing mounting groove formed on the wall surface of the rotating shaft insertion hole of the inner cylinder, a bearing that is mounted in the bearing mounting groove of the drum and rotatably supports the connecting shaft, and a bearing that is fixed to the connecting shaft and the drum. A fixing member is formed to cover the open end side of the drum leaving a space between the drum and the fixing member that prevents movement of the connecting shaft in the axial direction, and is fixed to the axial end of the connecting shaft. The drum is equipped with a lid to which a drive mechanism is connected on the opposite side, and a wiring insertion hole is formed in the outer cylinder of the drum and the lid, respectively, and the wiring inserted from the outside of the outer cylinder into the wiring insertion hole is inserted. A wiring device for a rotation angle limiting mechanism, characterized in that the wiring device is locked to the outer peripheral surface of an inner cylinder and extends from a wiring insertion hole in a lid body to a drive mechanism.