JPH03165584A - X-ray preionized gas laser device - Google Patents
X-ray preionized gas laser deviceInfo
- Publication number
- JPH03165584A JPH03165584A JP30561289A JP30561289A JPH03165584A JP H03165584 A JPH03165584 A JP H03165584A JP 30561289 A JP30561289 A JP 30561289A JP 30561289 A JP30561289 A JP 30561289A JP H03165584 A JPH03165584 A JP H03165584A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- rays
- laser
- discharge
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 13
- 238000010894 electron beam technology Methods 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- 230000005284 excitation Effects 0.000 description 3
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
- H01S3/09716—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation by ionising radiation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は加工などに用いるXl!予備電離ガスレーザ装
置に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention provides Xl! The present invention relates to a pre-ionized gas laser device.
従来のX線予備電離ガスレーザ装置については、文献[
アプライド フィジックス レター(Applied
Physics Letter)」、 1983年、第
42巻第2号、第149頁から第151頁に詳細に記載
されているので、詳細は省略する。第2図は、上記文献
に記載された従来のX線予備電離ガスレーザ装置の断面
図である。レーザ容器5の外部に配置されたX線発生部
1において発生したX線は、X線取り出し窓6を通して
レーザ容器の内部へ導入される。レーザ容器内部に配置
されなレーザ励起のための放電を行う空間(以下、放電
空間)4のレーザガスは導入されたX線によって電離さ
れ、電子汀イオン対が生成される。この、電子−イオン
対の密度が充分であれば、一対の電極7間でレーザ励起
のための放電を安定したグロー放電とすることができ、
レーザ発振を得ることができる。Regarding the conventional X-ray preionization gas laser device, see the literature [
Applied Physics Letter
Physics Letter), 1983, Vol. 42, No. 2, pp. 149 to 151, so the details will be omitted. FIG. 2 is a cross-sectional view of the conventional X-ray preionization gas laser device described in the above-mentioned document. X-rays generated in the X-ray generating section 1 arranged outside the laser container 5 are introduced into the inside of the laser container through the X-ray extraction window 6. The laser gas in a space (hereinafter referred to as a discharge space) 4 in which discharge is performed for laser excitation, which is disposed inside the laser container, is ionized by the introduced X-rays, and electron and ion pairs are generated. If the density of these electron-ion pairs is sufficient, the discharge for laser excitation between the pair of electrodes 7 can be made into a stable glow discharge,
Laser oscillation can be obtained.
ここで、大きなレーザ出力が必要な場合、2台のレーザ
を用いて一方を発振器とし、他方を増幅器とした構成が
考えられる。第3図は、2台のレーザを用いて発振器と
増幅器を構成してなる従来のX線予備電離ガスレーザ装
置の外観図である。Here, if a large laser output is required, a configuration can be considered in which two lasers are used, one of which is used as an oscillator and the other used as an amplifier. FIG. 3 is an external view of a conventional X-ray pre-ionization gas laser device in which an oscillator and an amplifier are constructed using two lasers.
上述の場合と同様に、X線発生部1aにおいて発生した
X線によりレーザ容器5aの放電空間4aが予備電離さ
れ、安定したグロー放電によりレーザ発振が得られる。As in the case described above, the discharge space 4a of the laser container 5a is pre-ionized by the X-rays generated in the X-ray generator 1a, and laser oscillation is obtained by stable glow discharge.
一方、X線発生部1bによりレーザ容器5b中の放電空
間4bも予備電離され、安定なグロー放電によりレーザ
媒質が励起される。ここで、放電空間4aにおいて発振
したレーザ光を放電空間4bに導入すると、レーザ光は
放電空間4bにおいて増幅され、大きなレーザ出力を得
ることができる。On the other hand, the discharge space 4b in the laser container 5b is also pre-ionized by the X-ray generator 1b, and the laser medium is excited by stable glow discharge. Here, when the laser light oscillated in the discharge space 4a is introduced into the discharge space 4b, the laser light is amplified in the discharge space 4b, and a large laser output can be obtained.
従来のX線予備電離ガスレーザ装置では、大きなレーザ
出力を得るために発振器と増幅器からなる構成を用いる
場合、2個のX線発生部と2個のレーザ容器を必要とし
、装置の大きさが大きく、電気的な入力エネルギに対し
てレーザ出力エネルギが小さいという課題がある。In conventional X-ray pre-ionization gas laser equipment, when using a configuration consisting of an oscillator and an amplifier to obtain a large laser output, two X-ray generators and two laser containers are required, resulting in a large equipment size. However, there is a problem that the laser output energy is small compared to the electrical input energy.
本発明の目的は、従来の課題を解決し、小型でかつ電気
的な入力エネルギに対し大きなレーザ出力エネルギが得
られるX線予備電離ガスレーザ装置を提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to solve the conventional problems and provide an X-ray preionization gas laser device that is compact and can obtain large laser output energy relative to electrical input energy.
本発明によるX線予備電離ガスレーザ装置は、電子銃か
らの電子ビームをターゲットに衝突させて制御輻射によ
りX線を発生する1つのX線発生部と、X線発生部から
X線を取り出すX線取り出し窓とX線取り出し窓から取
り出したX線により予備電離され、かつ、一対の電極間
の放電によりレーザ媒質を励起する複数の放電空間を少
なくとも有し、ターゲットの周囲のX線が発散する位置
に各X線取り出し窓を配置し、各X線取り出し窓からX
線が出射する位置にそれぞれ各放電空間を配置したこと
を特徴とする構成になっている。The X-ray pre-ionized gas laser device according to the present invention includes one X-ray generating section that generates X-rays by controlled radiation by colliding an electron beam from an electron gun with a target, and an X-ray generating section that extracts X-rays from the X-ray generating section. A position where the X-rays around the target diverge, having at least a plurality of discharge spaces that are pre-ionized by the X-rays taken out from the extraction window and the X-ray extraction window and excite the laser medium by discharge between a pair of electrodes. Each X-ray extraction window is placed in the
The structure is characterized in that each discharge space is arranged at a position where a line is emitted.
本発明によるX線予備電離ガスレーザ装置は、X線発生
部と、少なくとも2個以上X線取り出し窓とレーザ励起
のための放電を行う放電空間とを有し、X線発生部から
X線が発散する位置に各々の前記放電空間を配置する。The X-ray pre-ionization gas laser device according to the present invention has an X-ray generation section, at least two X-ray extraction windows, and a discharge space for performing discharge for laser excitation, and X-rays are emitted from the X-ray generation section. Each of the discharge spaces is arranged at a position.
X線発生部のターゲットからでるX線は、ターゲットか
らの距離が離れるにつれて発散するので、X線が発散す
る位置に複数のX線取り出し窓と放電空間を配置するこ
とにより、それぞれの放電空間にX線を導き、予備電離
することができる。この場合、各々の放電空間に対して
X線発生部は1個しか必要なく、従って装置が小型化で
きる。また、電気的な入力エネルギはX線発生部が1個
しか必要ない分だけ減少する。この結果、従来の課題を
解決したX線予備電離ガスレーザ装置を提供することが
できる。X-rays emitted from the target of the X-ray generator diverge as the distance from the target increases, so by arranging multiple X-ray extraction windows and discharge spaces at the positions where the X-rays diverge, each discharge space can be X-rays can be guided and pre-ionized. In this case, only one X-ray generating section is required for each discharge space, and the device can therefore be made smaller. Also, the electrical input energy is reduced by the fact that only one X-ray generator is required. As a result, it is possible to provide an X-ray pre-ionization gas laser device that solves the conventional problems.
次に、図面を用いて本発明を説明する。 Next, the present invention will be explained using the drawings.
第1図は、本発明によるX線予備電離ガスレーザ装置の
実施例の断面図である。X線発生部1の電子銃2におい
て発生した電子ビームは、ターゲット3に衝突して制動
輻射によりX線を発生する。この、X線をタラゲートか
らの距離が等しい2個のX線取り出し窓6を通して2個
の放電空間4に照射し、レーザ媒質を予備電離する。こ
こで、ターゲット3において発生したX線は電子ビーム
の入射方向に近い角度においては均一な強度で等方的に
発散する。よって、各々の放電空間におけるX線の強度
は等しく、各々の放電空間に対して別のX線発生部から
X線を照射した場合と同じ予備電離効果がある。この、
放電空間の両端に配置した一対の電極7間で放電を行い
、レーザ発振を得る。このとき、本発明によるX線予備
電離ガスレーザ装置は従来のX線発生部を2個具備した
場合と比べ、X線発生部の数が1個少なく、小型である
。また、電気的な入力エネルギがX線発生部1個分少な
いが、2個の放電空間が同様に予備電離できるために大
きなレーザ出力を得ることができる。FIG. 1 is a sectional view of an embodiment of an X-ray preionization gas laser device according to the invention. The electron beam generated in the electron gun 2 of the X-ray generator 1 collides with the target 3 and generates X-rays by bremsstrahlung radiation. These X-rays are irradiated into the two discharge spaces 4 through the two X-ray extraction windows 6 that are at the same distance from the cod gate to pre-ionize the laser medium. Here, the X-rays generated at the target 3 are isotropically diverged with uniform intensity at an angle close to the incident direction of the electron beam. Therefore, the intensity of the X-rays in each discharge space is equal, and there is the same pre-ionization effect as when each discharge space is irradiated with X-rays from a separate X-ray generating section. this,
A discharge is generated between a pair of electrodes 7 placed at both ends of the discharge space to obtain laser oscillation. At this time, the X-ray pre-ionization gas laser device according to the present invention has one less X-ray generating section than the conventional case having two X-ray generating sections, and is compact. Further, although the electrical input energy is less than that of one X-ray generating section, a large laser output can be obtained because the two discharge spaces can be pre-ionized in the same way.
なお、上述の例においては2個の放電空間を有する場合
について記したが、3個以上有してもよい、また、各々
の放電空間において必要なX線強度が異なる場合には、
ターゲットからの距離が異なる位置にそれぞれの放電空
間を配置してもよい、さらに、上述の例では、各々の放
電空間4を別々のレーザ容器5内に配置したが、1つの
レーザ容器内に配置してもよい。In addition, in the above example, the case is described in which there are two discharge spaces, but it is also possible to have three or more, and if the required X-ray intensity is different in each discharge space,
The respective discharge spaces may be arranged at different distances from the target.Furthermore, in the above example, each discharge space 4 is arranged in separate laser containers 5, but it may be arranged in one laser container. You may.
また、本発明によるX線予備電離ガスレーザ装置は、複
数の放電空間を注入同期のなめに用いたり、各々の放電
空間に異なる種類のレーザ媒質を入れることにより異な
る種類のレーザ光を発振させることも可能である。これ
らの場合にも、装置が小型となる利点やエネルギ効率が
よい利点は同様である。Furthermore, the X-ray pre-ionized gas laser device according to the present invention can oscillate different types of laser light by using a plurality of discharge spaces for injection locking or by putting different types of laser media into each discharge space. It is possible. In these cases as well, the advantages of a small device and good energy efficiency are the same.
以上のことから、本発明によるX線予備電離ガスレーザ
装置により、従来の課題を解決し、小型でかつ電気的な
入力エネルギに対し大きなレーザ出力エネルギが得られ
るX線予備電離ガスレーザ装置を提供することができる
。In view of the above, it is an object of the present invention to provide an X-ray pre-ionization gas laser device that solves the conventional problems and is compact and can obtain large laser output energy with respect to electrical input energy. Can be done.
第1図は、本発明によるX線予備電離ガスレーザ装置の
一実施例の断面図、第2図は、従来のX線予備電離ガス
レーザ装置の断面図、第3図は、2台のレーザを用いて
発振器と増幅器を構成してなる従来のX線予備電離ガス
レーザ装置の外観図である。
図において、1.la、lb・・・X線発生部、2・・
・電子銃、3・・・ターゲット、4.4a、4b・・・
放電空間、5.5a、5b・・・レーザ容器、6・・・
X線取り出し窓、7・・・電極である。FIG. 1 is a cross-sectional view of an embodiment of an X-ray pre-ionization gas laser device according to the present invention, FIG. 2 is a cross-sectional view of a conventional X-ray pre-ionization gas laser device, and FIG. 3 is a cross-sectional view of an X-ray pre-ionization gas laser device using two lasers. 1 is an external view of a conventional X-ray preionization gas laser device configured with an oscillator and an amplifier. In the figure, 1. la, lb...X-ray generation part, 2...
・Electron gun, 3...Target, 4.4a, 4b...
Discharge space, 5.5a, 5b... Laser container, 6...
X-ray extraction window, 7... electrode.
Claims (1)
ーザ装置において、電子銃からの電子ビームをターゲッ
トに衝突させて制動輻射によりX線を発生する1つのX
線発生部と、前記X線発生部からX線を取り出す複数の
X線取り出し窓と、前記X線取り出し窓から取り出した
X線により予備電離され、かつ、一対の電極間の放電に
よりレーザ媒質を励起する複数の放電空間とを少なくと
も有し、前記ターゲットの周囲のX線が発散する位置に
前記X線取り出し窓を複数配置し、前記X線取り出し窓
からX線が出射する位置にそれぞれ前記各放電空間を配
置したことを特徴とするX線予備電離ガスレーザ装置。In a gas laser device that uses X-ray preionization for preionization of a gas laser, one
a ray generating section, a plurality of X-ray extraction windows that take out X-rays from the X-ray generation section, and a laser medium that is pre-ionized by the X-rays taken out from the X-ray extraction windows and that is activated by a discharge between a pair of electrodes. at least a plurality of discharge spaces to be excited, a plurality of X-ray extraction windows are arranged at positions from which X-rays around the target are emitted, and each of the X-ray extraction windows is arranged at a position from which X-rays are emitted from the X-ray extraction windows. An X-ray pre-ionization gas laser device characterized by disposing a discharge space.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30561289A JPH03165584A (en) | 1989-11-24 | 1989-11-24 | X-ray preionized gas laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30561289A JPH03165584A (en) | 1989-11-24 | 1989-11-24 | X-ray preionized gas laser device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03165584A true JPH03165584A (en) | 1991-07-17 |
Family
ID=17947238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30561289A Pending JPH03165584A (en) | 1989-11-24 | 1989-11-24 | X-ray preionized gas laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03165584A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220200225A1 (en) * | 2020-12-21 | 2022-06-23 | Hamamatsu Photonics K.K | Light emitting sealed body and light source device |
-
1989
- 1989-11-24 JP JP30561289A patent/JPH03165584A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220200225A1 (en) * | 2020-12-21 | 2022-06-23 | Hamamatsu Photonics K.K | Light emitting sealed body and light source device |
US11862922B2 (en) * | 2020-12-21 | 2024-01-02 | Energetiq Technology, Inc. | Light emitting sealed body and light source device |
US12191623B2 (en) * | 2020-12-21 | 2025-01-07 | Hamamatsu Photonics K.K. | Light emitting sealed body and light source device |
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