JPH03165486A - Temperature regulating device for treatment - Google Patents

Abstract

PURPOSE:To efficiently raise temperature, and thereby facilitate temperature control by forming a heat element layer in a membrane state over the whole area of the outer circumferential surface of a treatment through pipe, and thereby controlling electric power supply to the heat element layer based on the result of measurement by a temperature measuring means. CONSTITUTION:An insulating layer 11 is provided for the whole area of the outer circumferential surface of a resist fluid through pipe 10 over which a heating element layer 12 is formed in a membrane state, and an insulating layer 13 is then laminated over the aforesaid heating element layer. When electric power is supplied to the layer 12 from a power supply through an electrode 14, the whole area of the layer 12 is heated up, the temperature of resist within the pipe 10 is instantly raised. A temperature regulation controller compares the result of temperature measurement from a temperature sensor 17 with a set temperature to control electric power supply. When the layer 12 is thus formed over the whole area of the outer circumferential surface 10, resist can be uniformly heated up so that the temperature of resist can efficiently be raised up to a set value, and the temperature control of resist can thereby be executed with ease.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a processing liquid temperature control device.

(Prior Art) A processing liquid temperature control device is required to control a processing liquid, such as a coating liquid such as a resist or a developer, to an appropriate temperature on the surface of an object to be processed such as a semiconductor wafer.

2. Description of the Related Art Generally, in the manufacture of semiconductors such as ICs (integrated circuits) and LSIs (large scale integrated circuits), there is a step of applying a resist to the surface of an object to be processed, such as a semiconductor wafer.

In such a process, a resist coating device using a spin, spray, or electrostatic method is used.

By the way, in such a resist coating apparatus, it is necessary to heat the resist to be coated to, for example, about 21 to 25 degrees Celsius.

This is also one of the conditions for suppressing fluctuations in the viscosity of the resist in order to make the resist applied to the surface of the semiconductor wafer uniform.

4 and 5 show an example of a coating liquid temperature control device that is included in the above-mentioned resist coating apparatus and controls the temperature of the resist. A coating liquid passage tube 3 is inserted therein.

Then, when the pure water whose temperature is controlled to a set temperature by the thermo-controller 4 circulates in the circulation channel 2 in the warm water circulation pipe 1, the temperature of the resist flowing inside the coating liquid passage pipe 3 is controlled to the set temperature.

However, in such a coating liquid temperature control device, the thermocontroller 4 is tall and requires space for the pipes that make up the circulation system, so it is difficult to reduce the cost and size of a single coating liquid temperature device. It becomes a hindrance.

Therefore, in order to avoid such obstacles to cost reduction and miniaturization of the coating liquid temperature regulating apparatus, there is also a coating liquid temperature regulating apparatus as shown in FIG. 6, for example.

This coating liquid temperature control device has a structure in which a heat generating sheet 7 having a heating element 6 made of nichrome or the like is wrapped around the outer periphery of a coating liquid passing tube 5 made of, for example, aluminum.
Compared to the coating liquid temperature control device shown in the figure, the hot water circulation pipe 1, thermocontroller 4, etc. are not required, so that cost reduction and size reduction can be achieved.

(Problems to be Solved by the Invention) However, in the conventional coating liquid temperature control device described above, since the heating element 6 provided on the heat generating sheet 7 is linear, almost the entire area of the outer peripheral surface of the coating liquid passage tube 5 is cannot be heated evenly.

Furthermore, since the heat generating sheet 7 is in the form of a thin film, it is difficult to bring it into close contact with the outer circumferential surface of the coating liquid passage tube 5, resulting in uneven heat conduction to the coating liquid passage tube 5.

Therefore, if substantially the entire outer peripheral surface of the coating liquid passage tube 5 cannot be heated evenly, not only will the efficiency in raising the resist to a predetermined temperature deteriorate,
It is also difficult to control the temperature of the resist instantly.

The present invention was made in response to these circumstances, and
It is an object of the present invention to provide a treatment liquid 'tH degree adjusting device that can efficiently and instantaneously control the temperature of a treatment liquid.

[Means for Solving the Problems] A processing liquid passage pipe through which a processing liquid passes, an annular heating element layer provided on a pipe wall of the passage pipe and surrounding the processing liquid, and a power supply means for supplying power to the heating element layer to heat it;
a temperature measuring means for measuring the heat emitted from the heating element layer;
This ΔPI? The apparatus includes a control means for controlling the power supply based on the 1llll+ temperature result from the EL means and the set temperature value.

(Function) In the heating device of the present invention, a heating element layer is formed in the form of a thin film over, for example, the entire outer peripheral wall surface of the processing liquid passage tube, and electric power is supplied to the heating element layer from the power supply means.

At this time, the control means stops the power supply operation of the power supply means based on the temperature measurement result from the temperature measurement means that measures the heat of the heating element layer, if the temperature measurement result exceeds the set temperature level, and stops the supply operation of the power supply means.
When the first temperature result is lower than the set value, the power supply means is controlled to continue the supply operation.

Therefore, since the heating element layer heats substantially the entire area of the outer circumferential wall of the coating liquid passage tube, substantially the entire area of the outer circumferential surface can be heated evenly.

Furthermore, since the heating element layer is formed in a thin film form over substantially the entire outer circumferential wall of the coating/li liquid passage tube, uneven heat conduction to the coating liquid passage tube is eliminated.

Furthermore, since the heating element layer evenly heats almost the entire area of the outer peripheral wall of the coating liquid passage tube, the coating liquid can be efficiently raised to a predetermined temperature, making it possible to control the coating liquid instantly. can.

(Example) Hereinafter, details of an example of the present invention will be described based on the drawings.

FIGS. 1 and 2 show processing solutions of the present invention, such as coating solutions a, 2!, which control the temperature of resist. This shows an example in which the present invention is applied to a J device.

As shown in these figures, an insulating layer 11 made of, for example, alumina with insulation property H is formed in the form of a thin film over the entire outer peripheral surface of the passage tube 10 made of aluminum, for example, of the rectangular tube or cylindrical coating liquid passage tube 9. It is formed. The heating element layer 1 is formed on the outer peripheral surface of the insulating layer 11 with a slight portion left at both ends of the insulating layer 11.
2 is formed in the form of a thin film, and an insulating layer 13 is further formed on the outer peripheral surface of the heating element layer 12 with a slight portion left at both ends of the heating element layer 12.
is formed into a thin film. That is, the heating element 12 is formed in an annular shape so as to surround the resist liquid.

For example, a ring-shaped electrode 14 is fitted into each exposed end portion 12a of the heat generating layer 12.

Each electrode 14 is connected to an AC power source 15 that supplies, for example, 200 square meters of alternating current.

A temperature controller 16 is connected to the AC power supply 15 .

The temperature controller 16 controls the supply of power from the AC power supply 15 based on the aFI temperature signal from the temperature sensor 17 attached to the passage pipe 10.

Next, an example of a method for manufacturing the coating liquid passage tube 9 will be explained using FIG. 3.

First, an insulating layer 11 of alumina is formed in the form of a thin film over the entire outer peripheral surface of the passage tube 10 using a process such as thermal spraying or explosion spraying.

Next, a heating element layer 12 such as a heating element film is formed into a thin film shape using a process similar to the above, leaving both ends of the insulation layer 11 uncut on the outer peripheral surface of the insulation layer 11.
Using the same process, an insulating layer 13 is formed in the form of a thin film on the outer peripheral surface of the heat generating layer 12, leaving both ends of the heat generating layer 12 intact.

In this way, by using a process such as thermal spraying or explosion spraying, each thin film of the heating element layer 12 and the insulating layer 11.
13 is tightly formed on the outer peripheral surface of the passage tube 10.

Next, a coating liquid temperature control device having such a configuration will be explained.

First, when the temperature controller 16 is set to the temperature of the resist to be 9/+i within a range of, for example, 21 to 25 degrees Celsius, the temperature controller 16 reaches the set value based on the temperature measurement signal from the temperature sensor 17. The AC power supply 15 is caused to supply power until the end.

Electric power supplied from the AC power source 15 is supplied to the heat generating layer 12 via each electrode 14.

When the entire region of the heating element layer 12 generates heat, the temperature of the resist flowing inside the passage tube 10 rises due to this heat generation.

At this time, the temperature controller 16 controls the supply operation of the AC power source 15 based on the 7IllI temperature signal from the temperature sensor 17.

In other words, for example, if the temperature measurement result exceeds the set temperature based on the II iEL signal from the temperature sensor 17, the supply operation is stopped 1-1, and conversely, if the side temperature result falls below the set temperature If so, continue the supply operation.

As described above, in this example, since the heating element layer was formed over almost the entire outer circumferential surface of the tube through which the resist should pass, it is possible to uniformly heat almost the entire outer circumferential surface of the tube. temperature can be efficiently and instantaneously raised to a predetermined value.

In addition, since the heating element layer and insulating layer are formed on almost the entire outer circumferential surface of the tube using a process such as thermal spraying or explosion spraying, these thin films and the outer circumferential surface of the tube are tightly bonded, which allows heat to be conducted evenly. can be done.

In this example, the case where the present invention is applied to a coating liquid temperature control device that controls the temperature of a resist is explained, but the present invention is not limited to this example. It may also be applied to a temperature control device.

In the above embodiment, an example was described in which the heating element was attached to the outer wall surface of the processing liquid passage tube, but it may be attached to the inner wall surface of the tube. In this case, heat is applied directly to the processing liquid, so there is a rapid heating effect.

Furthermore, although on/off control has been described as a temperature control method, a PID controller or the like may also be used.

[Effects of the Invention] As explained above, according to the processing liquid temperature control device of the present invention, the heating element layer heats the outer circumferential wall of the coating liquid passage tube in an annular manner along the circumferential wall. It can be heated from the surrounding surface. Furthermore, the temperature of the coating solution can be efficiently controlled.

[Brief explanation of the drawing]

FIG. 1 is a schematic view showing an embodiment of the present invention applied to a coating liquid temperature control device for controlling the temperature of a resist, and FIG. Figure 3 is a diagram showing the manufacturing procedure of the coated IT liquid passage tube shown in Figure 1;
4 and 5 are diagrams showing an example of a conventional coating liquid temperature regulating device, and FIG. 6 is a diagram showing another example of the conventional coating liquid temperature regulating device. 9... Coating liquid passage pipe, 10... Supply pipe, 11.13
... Insulating layer, 12 ... Heating element layer, 14 ... Electrode, 15 ... AC power supply, 16 ... Temperature controller,
17...in sensing sensor.

Claims (1)

[Claims] (1) A processing liquid passage pipe through which the processing liquid passes; an annular heating element layer provided on the wall of the passage pipe and surrounding the processing liquid; and a power supply supplying electric power to the heating element layer to heat it. a temperature measuring means for measuring the heat emitted from the heating element layer; and a control means for controlling the supply of electric power based on the temperature measurement result by the temperature measuring means and a set temperature value. Features processing liquid temperature control device.