JPH03147606A - Material handling equipment in clean room - Google Patents

Abstract

PURPOSE:To enhance work efficiency in a material handling equipment in a clean room for semiconductor, etc., by forming transport path of a self- advancing carriage along the outside of the main body of a box-shaped storage equipment having a conveyor for warehousing/shipping and a material disposal part inside, and providing a material handling station facing to the material disposal part. CONSTITUTION:A self-advancing carriage 19 loaded with material 9 moves to a station 21 by a rail 18 and stops. On the other hand, a conveyor 7 for shipping and a warehousing conveyor 8 respectively move to the direction of arrows A to the extent of one stroke. At the same time, the material 9 carried out by a carry in/out device 10 are stored at storages b, c on the side of shipping and a material disposal part 6. Next, the material 9 on the carriage 19 and the material 9 in the material disposal part 6 are respectively supported at the same time by a transfer device 22, and are rotated 180 deg. to shift respective positions of the material 9. Then, warehousing by the warehousing conveyor 8 and transfer with the carriage 19 are respectively performed. On account of this construction, enhancement of efficiency can be attempted.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to cargo handling equipment in a clean room used for transporting and storing cargo (articles) such as semiconductors that are extremely sensitive to dust.

2. Prior Art Conventionally, this type of equipment was developed, for example, in the Utility Model Application No.
As shown in No. 3170, a transport route of a self-propelled cart guided by a rail device is passed to the side of the main body of the load storage device, a station is formed on the side of the main body, and a transfer device is used to
Loads are transferred between the station's self-propelled cart and the load support platform inside the main body. Further, a carrying-in hanging device for carrying a load between the load support stand and the shelf is disposed within the main body.

Problems to be Solved by the Invention According to the above-mentioned conventional configuration, for example, when loading and unloading loads is repeated, the loads transported by the self-propelled cart are transferred to the load support platform by the transfer device.

Next, using the carry-in lifting device, the load is carried from the load support platform to the shelf, firstly, the load to be shipped is taken out from the shelf and carried to the load support platform, and the transfer device is driven again to move the load on the load support platform. Transfer to a trolley,
Complete the issue. Since such a process is repeated, the waiting time for the self-propelled cart is long, and work efficiency is extremely low. Therefore, there is a problem in that it is not possible to cope with an increase in the number of times of inter-process transportation in producing highly integrated circuits, such as in a semiconductor factory.

It is an object of the present invention to solve the above problems and provide cargo handling equipment in a clean room that can shorten the waiting time of self-propelled carts, enable continuous loading and unloading operations, and improve work efficiency.

Means for Solving the Problems In order to solve the above problems, the present invention provides a rail device,
The self-propelled cart guided by this rail device constitutes a cargo transport device, and the transport path of this cargo transport device is formed by passing through the side of the cargo storage device surrounded by a box-shaped main body.
A conveyance path station is formed on the side of the main body, and a cargo handling section is arranged in the main body to face the station, a delivery conveyor is arranged from the delivery position to the material handling section, and a delivery conveyor is arranged from the delivery position to the material handling section. a warehousing conveyor disposed at a warehousing position; a transfer device for transferring loads between a self-propelled cart at a station position and a load handling section via an opening formed in the main body; This system is equipped with a carry-in hanging device that transfers cargo between the rack and the incoming and outgoing conveyors.

Effect In the above configuration, when loading and unloading cargo via the transfer device between the self-propelled cart that is guided by the rail device and stopped at the station position and the cargo handling section, the received cargo is stored on the warehousing conveyor. At the same time, by carrying the loads stored by the carry-in hanging device to the shelves, it is possible to consecutively store at least as many loads as the storage number of the warehousing conveyor into the load storage device. In addition, the cargo to be delivered is stored on the delivery conveyor, and the cargo is sequentially delivered from the material handling section to the self-propelled trolley via the transfer device, and the cargo on the shelf is transported to the delivery conveyor using the carry-in hanging device. By doing so, at least more loads than the storage capacity of the delivery conveyor can be continuously delivered to the self-propelled cart. Furthermore, the number of storage units on both conveyors allows for continuous loading and unloading.

Therefore, even if a plurality of moving carts stop at a station in succession, loading and unloading of goods can be performed continuously, and the waiting time of the moving carts can be extremely shortened, allowing efficient loading and unloading operations.

EXAMPLE An example of the present invention will be described below with reference to FIGS. 1 and 2.

Reference numeral 1 denotes a cargo storage device installed in a clean room 2, which includes a rectangular box-shaped main body 3, a shelf 5 installed in this main body 3, and having a plurality of divided storage spaces 4 in the vertical and horizontal directions; Load handling section 6 formed and arranged in the upper center of the front side
, a warehousing conveyor 7 arranged horizontally from the warehousing position (A) to the material handling section 6, and a warehousing conveyor 7 arranged in a straight line with the warehousing conveyor 7 from the material handling section 6 to the warehousing position (to). and a loading/unloading device 10 that can freely transport loads 9 into and out between the unloading conveyor 7, the warehousing conveyor 8, and the partitioned storage space 4. The cargo handling section 6 includes a conveyor such as a conveyor or a pusher that can be driven in synchronization with the delivery conveyor 7 or the delivery conveyor 8, and the cargo receiving member 6a between the line of both conveyors 7.8 and the outer position thereof. and a slide means for moving it.

In the clean room 2, clean air is blown downward from the ceiling through a filter, and the descending clean air is sucked under the floor through a mesh-type floor. Moreover, a clean unit provided independently or a clean unit for the clean room 2 is provided within the main body 3, and an air filter 31 and an air duct 32 are provided. Furthermore, the carry-in hanging device 10 has guide rails 11 in the left and right direction.
A post 12 with a traveling machine base that can be guided by and freely travel along both conveyors 7.8, a lifting platform 13 that can be raised and lowered along the post 12, and a lifting platform 13 that can be freely rotated around a horizontal axis in the left and right direction. It is provided with a pair of left and right swing-out holding arms 14 that are attached and capable of holding the load 7.

An opening 15 is formed in the main body 3 at the front facing the material handling section 6, and a certain transport/return path 16 is provided outside the opening 15.
A load conveying device 17 having a load conveying device 17 is provided. This load conveyance device 17 is arranged along the conveyance path 16 and has an open upper surface.
A self-propelled trolley 1 having a letter-shaped rail device 18 and a loading platform 19a supported and guided by the rail device 18 via wheels etc.
9, and a duct 20 that surrounds the rail device 15 and the self-propelled cart 19 and sucks air. A station 21 is formed at a position facing the opening 15, and a self-propelled cart of the station 21 is inserted through the opening 15 into the opening 15.
A transfer device 22 that transfers the load 9 between the load handling section 9 and the load handling section 6 is provided. This transfer bag ff22 includes a rotating body 24 disposed on a base 23 so as to be freely rotatable around a vertical axis,
Two pairs of left and right support arms 25 are provided at symmetrical positions of the rotary body 24 and are movable up and down, and are movable toward and away from each other. A pair of left and right door bodies 26 are provided.

Although not shown, the load 9 has longitudinal protrusions formed on the upper portions of both left and right sides, and has a holding section 14 attached to the support arm 25 of the transfer bag [22 and the holding arm 14 of the loading/unloading device 10].
It is possible to support the protrusion by locking it from below with a.

Reference numerals 27A and 27B denote loading and unloading ports formed at the front lower part of the cargo storage device 1 for performing in-process processing, and loading and unloading conveyors 28A and 28B are disposed therein.

Next, the operation of the above embodiment will be explained.

The self-propelled cart 19 loaded with the cargo 9 on the cargo receiving platform 19a travels on the transport route 16 guided by the rail device 18, and is stopped at a station 21. At this time, the unloading and warehousing conveyors 7.8 are intermittently moved from the unloading position W (a) to the warehousing position (toward) by a predetermined stroke in the six directions of the arrows, and the feeding means of the material handling section 6 is synchronously driven. Loading/unloading device 1i1
Cargo 9 carried out by
(c) and storage in the material handling section 6. Next, the transfer device 22 is driven, and the support arms 25 in the separated state are lowered and moved closer to each other, and the load 9 of the self-propelled cart 19 and the load 9 of the load handling section 6 are respectively supported on the support arms 25 and raised. let me lift it up. Then, the rotating body 24 is rotated 180@ to move the support arm 25 down, move it apart, and raise it to move the load 9 of the self-propelled cart 19.
is transferred to the load handling section 6, and the load 9 from the load handling section 6 is transferred to the load receiving platform 19a of the self-propelled cart I9.

During the replacement work of the transfer device 22 and self-propelled trolley 19,
The carry-in/out device 8 is located at the warehousing position (to) on the warehousing conveyor 8.
The cargo 9 is carried into the intended compartmented storage space 4, and the cargo 9 to be unloaded from the targeted compartmented storage space 4 is transported to the unloading position tCa) of the unloading conveyor 7. Then, the feed means of the material handling section 6 and both conveyors 7.8 are driven synchronously to move the next cargo 9 to be delivered to the material handling section 6. Loading/unloading of the load 9 is carried out by repeating such operations.

Next, continuous warehousing work and continuous unloading work for the cargo 9 will be explained.

In the case of continuous warehousing, the warehousing conveyor 8 and the feeding means of the load handling section 6 are driven synchronously, and the loads 9 carried by the self-propelled carts 19 are sequentially transferred to the load handling section 6 via the transfer device 22. Then, it is sent from the receiving side storage positions (D) and (E) to the receiving position (H). At the same time, the loading/unloading device W10 is driven to continuously carry the cargo 9 from the storage position (D) (E) or the storage position (H) into the intended compartment storage space 4.

Therefore, it is possible to continuously receive at least as many items as the storage capacity of the warehousing conveyor 8 at extremely high speed, and the self-propelled cart 19 is moved to the station 2 for warehousing.
You can respond quickly even if you concentrate on Moreover, since the goods 9 can be kept on standby while being stored on the delivery conveyor 7, the loading/unloading operation or unloading operation can be started immediately.
It is possible to carry in and take out 9 loads of storage items continuously.

In addition, in the case of continuous unloading, the unloading conveyor 7 and the feeding means of the handling unit 6 are driven synchronously, and the goods are carried in by the loading/unloading device 10 and moved from the unloading position (a) to the unloading side storage positions (b) and (c). The cargo 9 sent to the cargo handling section 6 via the transfer bag! 22, the cargo is sequentially transferred to the receiving platform 19a of the self-propelled cart 19 that stops at the station 21. At the same time, the loading/unloading device io is driven to move from the predetermined compartment storage space 4 to the loading position (
b) Or storage on the receiving side! (b) Add load 9 to 1 m in (c). Therefore, at least the number of items stored on the delivery conveyor 7 or more can be delivered continuously at extremely high speed, and the self-propelled cart 19
Even if the number of stations is concentrated at the station 21, the waiting time can be extremely reduced. Furthermore, since the goods 9 can be stored on the warehousing conveyor 7, the loading/unloading operation or the loading operation can be started immediately.

FIG. 3 shows another embodiment, in which an opening 15 is formed in the side surface of the main body 3, and a conveying path 16 is arranged on the side of this opening 15. Therefore, the outgoing conveyor 7 and the incoming conveyor 8 in the main body 3 are disposed parallel to each other in a direction perpendicular to the conveyance path 16, and the outlet and inlet portions of the conveyors 7.8 are arranged parallel to the conveyance path 16. The operation of connecting the load handling section 42 with the load handling conveyor 41 to form a U-shape in plan view can be performed almost in the same manner as in the previous embodiment, but the handling position of the load 9 by the carry-in lifting device IO is in both directions. There are only the receiving position (a) and the exiting position (b) of the conveyor 7.8.

Effects of the Invention As described above, according to the present invention, the unloading conveyor and the warehousing conveyor that can deliver loads to the load handling section of the load storage device are provided, so that the transfer device can be moved from the self-propelled cart. Loads transferred to the load handling section via the storage device can be stored on the warehousing conveyor, and by sequentially transporting the stored loads to the shelves using the loading/unloading device, it is possible to wait for at least as many loads as are stored on the warehousing conveyor. It is possible to stock items continuously without any time. In addition, the loads stored on the unloading conveyor can be unloaded continuously from the load handling section to the self-propelled trolley via the transfer device without waiting time, and the load can be transported from the shelf onto the unloading conveyor using the loading lifting device. By doing so, it is possible to continuously take out at least as many loads as the storage capacity of the delivery conveyor. Furthermore, continuous loading and unloading can be performed for at least the number of storage units on each conveyor. Therefore, even when a large number of self-propelled carts are parked at a station, it is possible to carry out continuous loading and unloading with extremely short waiting times depending on the situation, and efficient loading and unloading work is possible. .

[Brief explanation of the drawing]

Figures 1 and 2 show one embodiment of the present invention, Figure 1 is a partially cutaway perspective view, Figure 2 is a partially cutaway plan view, and Figure 3 is a partially cutaway diagram showing another embodiment. FIG. 1... cargo storage equipment, 2... clean room, 3...
・Main body, 4... Compartment storage space, 5... Shelf, 6...
Load handling section, 7... Outgoing conveyor, 8... Incoming conveyor, 9... Load, 10... Carrying in/hanging device, 15.
...Opening, I6...Transportation route. 17... Load transport device, 18... Rail device, 19.
... Self-propelled trolley, 21 ... Stage number, 22 ... Transfer device, 41 ... Material handling conveyor, (A) ... Output position, (B) - (E) ... Storage position, (to)・
...Receiving position.

Claims (1)

[Claims] 1. A load transport device is constructed by a rail device and a self-propelled cart guided by this rail device, and the transport path of this load transfer device passes through the side of the load storage device surrounded by a box-shaped main body. a conveyance path station is formed on the side of the main body, a cargo handling section disposed within the main body opposite to the station, and a delivery conveyor arranged from the delivery position to the material handling section; A warehousing conveyor is provided from the material handling section to a warehousing position, and a transfer device is provided for transferring cargo between the self-propelled cart at the station position and the material handling section through an opening formed in the main body, A cargo handling equipment in a clean room, characterized by being provided with a loading/unloading device for transferring cargo between a shelf provided in the main body, an incoming conveyor, and an outgoing conveyor.