JPH03135761A - Quartz glass capillary column - Google Patents
Quartz glass capillary columnInfo
- Publication number
- JPH03135761A JPH03135761A JP1273219A JP27321989A JPH03135761A JP H03135761 A JPH03135761 A JP H03135761A JP 1273219 A JP1273219 A JP 1273219A JP 27321989 A JP27321989 A JP 27321989A JP H03135761 A JPH03135761 A JP H03135761A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- capillary
- glass capillary
- quartz
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 97
- 239000011248 coating agent Substances 0.000 claims abstract description 35
- 238000000576 coating method Methods 0.000 claims abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 31
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 27
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 26
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 230000005526 G1 to G0 transition Effects 0.000 claims abstract description 18
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 4
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 3
- 229910052718 tin Inorganic materials 0.000 claims abstract description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 36
- 239000010453 quartz Substances 0.000 abstract description 21
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 abstract description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 230000003252 repetitive effect Effects 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- 238000004817 gas chromatography Methods 0.000 description 6
- 239000005350 fused silica glass Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- -1 polydimethylsiloxane Polymers 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000009719 polyimide resin Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 3
- 235000011613 Pinus brutia Nutrition 0.000 description 3
- 241000018646 Pinus brutia Species 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000004255 ion exchange chromatography Methods 0.000 description 2
- 238000004811 liquid chromatography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000004808 supercritical fluid chromatography Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000000415 inactivating effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6052—Construction of the column body
- G01N30/6073—Construction of the column body in open tubular form
- G01N30/6078—Capillaries
Landscapes
- Treatment Of Liquids With Adsorbents In General (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は石英ガラスキャピラリカラムに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to fused silica capillary columns.
特に外表面が耐熱性保護膜で被覆された石英ガラスキャ
ピラリカラムに関する。In particular, it relates to a quartz glass capillary column whose outer surface is coated with a heat-resistant protective film.
石英ガラスキャピラリカラムはガスクロマトグラフィ、
液体クロマトグラフィ、超臨界流体クロマトグラフィ、
イオンクロマトグラフィ、電気泳動分析等に分離カラム
として有用である。石英ガラスキャピラリを用いたカラ
ムは、従来の充填カラム、SUSステンレス鋼等の金属
や多成分ガラスのキャピラリを用いたカラムに比べて優
れた性質をもち、今後さらに発展が期待される。石英ガ
ラスキャピラリカラムは例えば充填カラムに比し分離性
能においてすぐれ、また不純物が少ないため金属や多成
分ガラスのキャピラリを用いたカラムより吸着によるテ
ーリングが少ないという長所がある。Quartz glass capillary columns are used in gas chromatography,
liquid chromatography, supercritical fluid chromatography,
It is useful as a separation column for ion chromatography, electrophoretic analysis, etc. Columns using silica glass capillaries have superior properties compared to conventional packed columns and columns using metals such as SUS stainless steel or multi-component glass capillaries, and further development is expected in the future. A quartz glass capillary column has superior separation performance compared to, for example, a packed column, and has fewer impurities, so it has the advantage of less tailing due to adsorption than a column using a capillary made of metal or multi-component glass.
石英ガラスキャピラリは通常、外径0.2ないし1.5
跡、厚さ0,05ないし0.2mm程度の細いものであ
り、石英ガラスは可撓性に乏しいので、過大な外力によ
りたやすく破断してしまう。特に表面に傷があるとその
個所で折れ易い。それ故石英ガラスキャピラリの外面に
保護膜を設けることにより、破断に対する強度を増し、
同時に摩耗や湿気に対し保護している。Fused silica capillaries usually have an outer diameter of 0.2 to 1.5
The marks are thin with a thickness of about 0.05 to 0.2 mm, and since quartz glass has poor flexibility, it easily breaks due to excessive external force. In particular, if there are scratches on the surface, it is likely to break at that location. Therefore, by providing a protective film on the outer surface of the quartz glass capillary, it increases the strength against breakage.
At the same time, it protects against wear and moisture.
第2図にガスクロマトグラフィ用の従来の石英ガラスキ
ャピラリの横断面の一例を示す。■は石英ガラスキャピ
ラリ、2は固定相、3は耐熱性保護膜である。耐熱性保
護膜は後述のように従来、ポリイミド樹脂等の耐熱性樹
脂あるいはアルミニウム等の金属で構成されていた。FIG. 2 shows an example of a cross section of a conventional quartz glass capillary for gas chromatography. 2 is a quartz glass capillary, 2 is a stationary phase, and 3 is a heat-resistant protective film. As will be described later, the heat-resistant protective film has conventionally been made of heat-resistant resin such as polyimide resin or metal such as aluminum.
このような石英ガラスキャピラリカラムを製造するには
、先ず無水合成された石英ガラス母材を温度約2000
℃の線引炉により細く延伸して石英ガラスキャピラリ1
を作り、延伸後直ちに耐熱性保護膜3を被覆する。ここ
で適当な長さに切り、石英ガラス管1の内面に、シラン
カプリング剤等で表面処理を施した後シリコーン(例え
ばポリジメチルシロキサン)、ポリエチレングリコール
等から成る固定相2を形成させる。To manufacture such a quartz glass capillary column, first, an anhydrous synthesized quartz glass base material is heated to a temperature of about 2000 ml.
A quartz glass capillary 1 is drawn thinly in a drawing furnace at ℃.
A heat-resistant protective film 3 is immediately coated after stretching. After cutting the quartz glass tube 1 to an appropriate length and subjecting the inner surface of the quartz glass tube 1 to surface treatment with a silane coupling agent or the like, a stationary phase 2 made of silicone (eg, polydimethylsiloxane), polyethylene glycol, etc. is formed.
上記表面処理は、ガラス表面に存在する水酸基を不活性
化するためで、高温における処理、例えば400 ’C
で十数時間の処理が多く用いられている。また完成され
た石英ガラスキャピラリカラムはガスクロマトグラフィ
に用いられる際、分析の目的により350°C程度の高
温で使用される場合も多い。従って、耐熱性保護膜は3
50°C以上の高温に耐えるものでなければならない。The above surface treatment is for inactivating the hydroxyl groups present on the glass surface, and is performed at a high temperature, for example at 40'C.
A process of more than 10 hours is often used. Furthermore, when a completed silica glass capillary column is used in gas chromatography, it is often used at a high temperature of about 350° C. depending on the purpose of analysis. Therefore, the heat-resistant protective film is 3
It must be able to withstand high temperatures of 50°C or higher.
従来石英ガラスキャピラリカラムの耐熱性保護膜には、
ポリイミド樹脂(例えば、特公昭62−36537号、
特開昭61−68561号各公報参照)、アルミニウム
等の金属等が用いられている。Conventional heat-resistant protective films for fused silica capillary columns include
Polyimide resin (for example, Japanese Patent Publication No. 62-36537,
(Refer to JP-A-61-68561), metals such as aluminum, etc. are used.
従来耐熱性保護膜として用いられているポリイミド樹脂
は通常芳香族ポリイミドで、例えばトレニース#200
0.#3000 (東し株式会社製)等である。Polyimide resins conventionally used as heat-resistant protective films are usually aromatic polyimides, such as Trenise #200.
0. #3000 (manufactured by Toshi Co., Ltd.), etc.
アルミニウム被覆は、加熱延伸した石英ガラスキャピラ
リをダイス内に充たした溶融アルミニウムに通すことに
より、施されている。The aluminum coating is applied by passing a heated drawn quartz glass capillary through molten aluminum filled in a die.
しかし上記耐熱性保護膜のうち、ポリイミド樹脂は、石
英ガラスとの接着が弱く、また400°C程度の高温に
長時間置かれると劣化して脆くなる。However, among the above-mentioned heat-resistant protective films, polyimide resin has weak adhesion to quartz glass and deteriorates and becomes brittle when left at a high temperature of about 400° C. for a long time.
そのため、固定相形成前のキャピラリ内面の表面処理で
劣化して脆くなり、さらに完成したカラムを高温で繰り
返し使用すると、保護膜が石英ガラスキャピラリから剥
離し、そのためにカラムが折れ易くなる。Therefore, the surface treatment of the inner surface of the capillary before the formation of the stationary phase deteriorates it and makes it brittle, and if the completed column is used repeatedly at high temperatures, the protective film will peel off from the quartz glass capillary, making the column more likely to break.
アルミニウム被覆は石英ガラスとの熱膨張係数の差が著
しく大きいため(石英ガラス 5,7×10−’ de
g −’ 、アルミニウム 2.3X10−’deg
−’) 、キャピラリに熱履歴を与えると石英ガラスと
アルミニウム膜との界面でのずれまたは剥離によりキャ
ピラリ表面に傷が生じ、キャピラリの曲げ強度が大幅に
低下する。Because the difference in thermal expansion coefficient between aluminum coating and quartz glass is extremely large (silica glass 5.7 x 10-' de
g-', aluminum 2.3X10-'deg
-') When the capillary is subjected to thermal history, scratches occur on the capillary surface due to displacement or peeling at the interface between the quartz glass and the aluminum film, and the bending strength of the capillary decreases significantly.
また温度660°C以上の熔融アルミニウム中に石英ガ
ラスキャピラリを通す際、混在する微小アルミニウム粒
と接触することによりキャピラリの外面に傷がつき、製
造工程でまたはカラムとして使用の際、キャピラリをコ
イル状に巻く七折れ易いことが問題であった。製造工程
での折れによる歩留まり低下は、キャピラリカラムの製
造コストを上昇させていた。Furthermore, when a quartz glass capillary is passed through molten aluminum at a temperature of 660°C or higher, the outer surface of the capillary may be damaged due to contact with the fine aluminum grains that are mixed in with it. The problem was that it easily broke when wrapped. A decrease in yield due to breakage during the manufacturing process has increased the manufacturing cost of capillary columns.
従って本発明の目的は、350℃以上の高温で長時間の
処理や繰り返し使用をした場合でも、取扱中に容易に折
れない石英ガラスキャピラリカラムを提供することであ
る。Therefore, an object of the present invention is to provide a silica glass capillary column that does not easily break during handling even when subjected to long-term processing or repeated use at high temperatures of 350° C. or higher.
本発明の他の目的は、コイル状に巻いたときに容易に折
れず、製造コストが低下した石英ガラスキャピラリカラ
ムを提供することである。Another object of the present invention is to provide a fused silica capillary column that does not easily break when wound into a coil, reducing manufacturing costs.
(課題を解決するための手段〕
上記目的を達成するために本発明では、石英ガラスキャ
ピラリの内面に固定相を有し、外面に耐熱性保護膜を設
けた石英ガラスキャピラリカラムにおいて、石英ガラス
キャピラリの外面をカーボンの被膜で被覆し、さらにそ
の外側を金属被膜で被覆するようにした。カーボン被膜
は石英ガラスキャピラリの外表面に直接接して設ける。(Means for Solving the Problems) In order to achieve the above object, the present invention provides a quartz glass capillary column having a stationary phase on the inner surface of the quartz glass capillary and a heat-resistant protective film on the outer surface. The outer surface of the quartz glass capillary is coated with a carbon film, and the outer surface of the capillary is further coated with a metal film.The carbon film is provided in direct contact with the outer surface of the quartz glass capillary.
本発明の耐熱性保護膜を有する石英ガラスキャピラリカ
ラムは、下記諸要素から成る。The quartz glass capillary column having a heat-resistant protective film of the present invention consists of the following elements.
(1)石英ガラスキャピラリ
(2)石英ガラスキャピラリ内面に形成された固定相
(3)石英ガラスキャピラリの外面に形成されたカーボ
ン被膜
(4)カーボン被膜の外側に設けた金属被膜以下に各要
素について詳しく説明する。(1) Quartz glass capillary (2) Stationary phase formed on the inner surface of the quartz glass capillary (3) Carbon coating formed on the outer surface of the silica glass capillary (4) Metal coating provided on the outside of the carbon coating Below is a description of each element. explain in detail.
(1)石英ガラスキャピラリ
通常、内径0.05ないし1.0mm、厚さ0.05な
いし0’、2+nm程度のものを用いる。通常のように
、無水合成された比較的太い石英ガラス管を、温度約2
000°Cの線引炉により細く延伸して作ることができ
る。(1) Quartz glass capillary Usually, a capillary with an inner diameter of 0.05 to 1.0 mm and a thickness of about 0.05 to 0', 2+ nm is used. As usual, a relatively thick quartz glass tube made of anhydrous material is heated at a temperature of about 2
It can be made by thinly drawing it in a drawing furnace at 000°C.
(2)石英ガラスキャピラリ内面に形成された固定相本
発明の石英ガラスキャピラリカラムは、ガスクロマトグ
ラフィに用いるため、石英ガラスキャピラリ内面に固定
相が形成される。固定相を形成するには、内面を予め不
活性化処理した石英ガラスキャピラリ内に、固定相形成
物質の溶液を通過させた後適当な不活性気体を通して溶
媒を蒸発させる方法(ダイナミック法)や、不活性化処
理した石英キャピラリ内に固定相形成物質の溶液を充填
した後一端から順次溶媒を加熱蒸発させる方法(スタチ
ック法)がある。(2) Stationary phase formed on the inner surface of the quartz glass capillary Since the quartz glass capillary column of the present invention is used for gas chromatography, a stationary phase is formed on the inner surface of the quartz glass capillary. To form the stationary phase, a solution of the stationary phase forming substance is passed through a quartz glass capillary whose inner surface has been previously inactivated, and then an appropriate inert gas is passed through the capillary to evaporate the solvent (dynamic method). There is a method (static method) in which an inactivated quartz capillary is filled with a solution of a stationary phase forming substance and then the solvent is sequentially heated and evaporated from one end.
石英キャピラリ内面の不活性化処理は、ガラス表面に存
在する水酸基を不活性化するためで、シランカプリング
剤の存在下に高温(例えば400’C)で十数時間処理
することにより行うことができる。The deactivation treatment on the inner surface of the quartz capillary is to deactivate the hydroxyl groups present on the glass surface, and can be performed by treatment at a high temperature (for example, 400'C) for more than 10 hours in the presence of a silane coupling agent. .
固定相形成物質には、例えばポリジメチルシロキサン、
ポリフェニルメチルシロキサン等のシロキサン類、ポリ
エチレングリコール等を用いることができる。Stationary phase forming substances include, for example, polydimethylsiloxane,
Siloxanes such as polyphenylmethylsiloxane, polyethylene glycol, etc. can be used.
溶媒には、例えば塩化メチレン、n−ペンタン、アセト
ン、ジエチルエーテル等を用いることができる。For example, methylene chloride, n-pentane, acetone, diethyl ether, etc. can be used as the solvent.
(3)石英ガラスキャピラリ外面に形成されたカーボン
被膜
カーボン被膜は石英ガラスキャピラリの外面に設けられ
る。(3) Carbon coating formed on the outer surface of the quartz glass capillary A carbon coating is provided on the outer surface of the quartz glass capillary.
本発明で用いるカーボン被膜は、有機物、例えば炭素含
有量の大きい炭化水素の熱分解で形成させることができ
る。例えば加熱炉中にベンゼンを含む窒素ガス気流を供
給してベンゼンを熱分解し、加熱炉を通過する石英ファ
イバの表面にカーボン層を形成させる。The carbon film used in the present invention can be formed by thermal decomposition of an organic substance, for example, a hydrocarbon with a large carbon content. For example, a nitrogen gas flow containing benzene is supplied into the heating furnace to thermally decompose the benzene, and a carbon layer is formed on the surface of the quartz fiber passing through the heating furnace.
カーボン被膜の厚さは通常約200Å以上、約1000
Å以下が適当である。The thickness of the carbon film is usually about 200 Å or more, about 1000 Å thick.
A value of Å or less is appropriate.
(4)カーボン被膜の外側に設けた金属被膜石英ガラス
キャピラリの外側のカーボン被膜の上に、金属被膜を設
ける。(4) Metal coating provided on the outside of the carbon coating A metal coating is provided on the carbon coating on the outside of the quartz glass capillary.
金属被膜を構成する好適な金属は例えば、アルミニウム
、インジウム、チタン、錫、ビスマス等である。アルミ
ニウムとチタンが好ましい。Suitable metals constituting the metal coating include, for example, aluminum, indium, titanium, tin, bismuth, and the like. Aluminum and titanium are preferred.
金属被膜は、加熱延伸した石英ガラスキャピラリをダイ
ス内に充たした溶融金属に通すことにより、形成させる
ことができる。カーボン被膜を陰極として金属塩溶液中
で、電気メツキにより金属被膜を形成させてもよい。The metal coating can be formed by passing a heated and stretched quartz glass capillary through molten metal filled in a die. The metal coating may be formed by electroplating in a metal salt solution using the carbon coating as a cathode.
金属被膜の厚さは通常約10μm以上、20μm以下が
適当である。The thickness of the metal coating is usually approximately 10 μm or more and 20 μm or less.
本発明の石英ガラスキャピラリカラムは、ガスクロマト
グラフィのみならず、液体クロマトグラフィ、超臨界流
体クロマトグラフィ、イオンクロマトグラフィ等におけ
る分離カラムとしても有用である。The quartz glass capillary column of the present invention is useful not only in gas chromatography but also as a separation column in liquid chromatography, supercritical fluid chromatography, ion chromatography, and the like.
本発明の石英ガラスキャピラリカラムの有する耐熱性保
護膜は、金属被膜がカーボンの層を介して石英ガラスの
上に設けられているので、金属被膜を単独で用いた場合
よりガラスキャピラリに対し遥かに優れた密着性を有す
る。金属被膜と石英ガラスとの熱膨張係数の差が大きく
ても、両者の間に介在するカーボン被膜が緩衝層として
働くため、熱履歴を与えても石英ガラスとの界面で被膜
の部分的なずれや剥離を生じないので、金属を石英ガラ
スキャピラリに直接被覆した場合と異なり、折れに対す
る保護膜の効果が保たれる。その結果保護膜として金属
被膜を単独に用いた場合より優れた耐熱性を示す。すな
わち、製造中の取扱およびカラムとしての使用時に高温
で繰り返し熱履歴を受けても、細い石英ガラスキャピラ
リが折り曲げに対して保護され、容易に折れない。The heat-resistant protective film of the quartz glass capillary column of the present invention has a metal coating provided on the quartz glass via a carbon layer, so it is much more effective against the glass capillary than when a metal coating is used alone. Has excellent adhesion. Even if the difference in thermal expansion coefficient between the metal coating and quartz glass is large, the carbon coating interposed between the two acts as a buffer layer, so even if thermal history is applied, the coating will not partially shift at the interface with the quartz glass. Unlike the case where a quartz glass capillary is directly coated with metal, the effect of the protective film against breakage is maintained. As a result, it exhibits better heat resistance than when a metal film is used alone as a protective film. That is, the thin fused silica capillary is protected against bending and does not break easily, even when subjected to repeated thermal history at high temperatures during handling during manufacturing and use as a column.
さらに本発明によると、金属被膜を付けるため石英キャ
ピラリを溶融金属に通しても、カーボン被nりがあるた
め石英キャピラリの表面に傷が付かないので、製造工程
であるいは使用時にコイル状に巻いたときに折れること
がない。Furthermore, according to the present invention, even if the quartz capillary is passed through molten metal to apply a metal coating, the surface of the quartz capillary will not be damaged due to the carbon coating. It never breaks.
以下、実施例により本発明をさらに具体的に説明する。Hereinafter, the present invention will be explained in more detail with reference to Examples.
〔実施例1〕
無水合成石英ガラス管を、温度約2000°Cの線引炉
により軟化させ、内径0.35mm、外径0.45+n
mの石英キャピラリに延伸した。延伸後直ちに、下記の
ようにして石英キャピラリの外面をカーボンおよび金属
で被覆し、さらに内面に固定相を設けて、第1図に示す
断面をもつ石英ガラスキャピラリカラムを得た。1は石
英ガラスキャピラリ、2は固定相、4はカーボン被膜、
5はさらにその上に設けた金属被膜である。[Example 1] An anhydrous synthetic quartz glass tube was softened in a drawing furnace at a temperature of about 2000°C, and had an inner diameter of 0.35 mm and an outer diameter of 0.45+n.
m quartz capillary. Immediately after stretching, the outer surface of the quartz capillary was coated with carbon and metal as described below, and a stationary phase was further provided on the inner surface to obtain a quartz glass capillary column having the cross section shown in FIG. 1 is a quartz glass capillary, 2 is a stationary phase, 4 is a carbon film,
5 is a metal coating further provided thereon.
温度1200℃の加熱炉中で、外径20mm、内径16
mmの石英マツフル中に上方から石英ファイバを送り込
み、石英マツフルの上部に設けた窒素ガス供給口から窒
素ガスを供給しつつ、石英マツフルの中央部に設けた混
合ガス供給口からベンゼンを含む窒素ガス気流を供給し
て、ベンゼンを熱分解し、石英ファイバの表面に厚さ約
500人のカーボン層を形成させた。In a heating furnace at a temperature of 1200°C, the outer diameter is 20 mm and the inner diameter is 16 mm.
A quartz fiber is fed from above into a quartz pine full of mm size, and while nitrogen gas is supplied from the nitrogen gas supply port provided at the top of the quartz pine full, nitrogen gas containing benzene is supplied from the mixed gas supply port provided at the center of the quartz pine full. An air flow was supplied to thermally decompose the benzene and form a carbon layer with a thickness of about 500 nm on the surface of the quartz fiber.
カーボン被覆に続き石英キャピラリを、温度660°C
の溶融アルミニウム中に通して、デイツプ法により厚さ
15μmのアルミニウムで被覆した。Carbon coating followed by quartz capillary at 660°C.
It was passed through molten aluminum and coated with aluminum with a thickness of 15 μm by the dip method.
耐熱性保護膜で被覆された石英キャピラリを長さ100
mに切断し、常法により石英キャピラリ内面をシリル化
し、内面にポリジメチルシロキサンの薄膜を形成させた
。A 100mm long quartz capillary coated with a heat-resistant protective film
The inner surface of the quartz capillary was silylated by a conventional method to form a thin film of polydimethylsiloxane on the inner surface.
こうして得られた石英ガラスギヤピラリカラムを外径2
0mmのマンドレルに巻きつけて、温度500″Cに保
たれた恒温槽中に30分分間−たところ、キャピラリの
折損は認められなかった。The quartz glass gear pillar column obtained in this way was
When the capillary was wound around a 0 mm mandrel and placed in a constant temperature bath maintained at a temperature of 500''C for 30 minutes, no breakage of the capillary was observed.
マンドレルに巻きつけた状態で温度−80°Cから50
0°Cの間でヒートサイクルを10回与えた後、キャピ
ラリカラムの曲げ強度試験を行った。When wrapped around a mandrel, the temperature ranges from -80°C to 50°C.
After 10 heat cycles at 0°C, the capillary column was subjected to a bending strength test.
曲げ直径20mmでの破断確率は0%であった。The probability of breakage at a bending diameter of 20 mm was 0%.
〔比較例1〕
実施例1においてカーボン被膜を省略し、石英ガラスの
外表面に直接にアルミニウム被覆した。[Comparative Example 1] In Example 1, the carbon coating was omitted, and the outer surface of the quartz glass was directly coated with aluminum.
膜厚は15μmとした。実施例1と同様にして石英管内
面に固定相を形成させた。The film thickness was 15 μm. A stationary phase was formed on the inner surface of the quartz tube in the same manner as in Example 1.
得られた石英ガラスキャピラリカラムを外径20mmの
マンドレルに巻きつけ、温度−80°Cから500°C
の間のと一トサイクルを10回与えた後、曲げ強度試験
を行った。曲げ直径50mmでの破断確率は50%、曲
げ直径20mmでの破断確率は100%であった。The obtained quartz glass capillary column was wound around a mandrel with an outer diameter of 20 mm, and the temperature was adjusted from -80°C to 500°C.
A bending strength test was conducted after 10 cycles between the two. The probability of breakage at a bending diameter of 50 mm was 50%, and the probability of breakage at a bending diameter of 20mm was 100%.
〔比較例2〕
実施例1と同様に延伸した石英キャピラリに、延伸後直
ちに石英キャピラリの外面を下記のようにしてポリイミ
ド保護膜で被覆した。得られるキャピラリカラムの断面
は第1図に示す通りである。[Comparative Example 2] A quartz capillary was stretched in the same manner as in Example 1, and immediately after stretching, the outer surface of the quartz capillary was coated with a polyimide protective film in the following manner. The cross section of the resulting capillary column is as shown in FIG.
石英キャピラリの外面にピロメリット酸二無水物と3,
3″−ジアミノジフェニルエーテルの反応により得られ
たポリアミック酸を25%含有するN−メチルピロリド
ン溶液を塗布し、温度500″Cの電気炉を通して、乾
燥、硬化させ、厚さ15μmのポリイミド保護膜を形成
させた。Pyromellitic dianhydride and 3,
An N-methylpyrrolidone solution containing 25% of polyamic acid obtained by the reaction of 3"-diaminodiphenyl ether was applied, and dried and cured in an electric furnace at a temperature of 500"C to form a polyimide protective film with a thickness of 15 μm. I let it happen.
次いで、実施例1と同様にして石英キャピラリ内面に固
定相を形成させた。Next, in the same manner as in Example 1, a stationary phase was formed on the inner surface of the quartz capillary.
得られた石英ガラスキャピラリカラムを外径20mmの
マンドレルに巻きつけ、温度350°Cに保たれた恒温
槽中に30分分間−たところ、キャピラリカラムの所々
で保護層の剥離が見られ、かつその個所でキャピラリカ
ラムが折損していた。When the obtained quartz glass capillary column was wound around a mandrel with an outer diameter of 20 mm and placed in a constant temperature bath kept at a temperature of 350°C for 30 minutes, peeling of the protective layer was observed in some places on the capillary column. The capillary column was broken at that point.
本発明のキャピラリカラムは、石英ガラスキャピラリの
外面に有する耐熱性保護膜が充分な機械的強度をもち、
石英ガラスとの接着性が優れ、しかも熱劣化しないので
、固定相形成、コイル巻き取り等の製造中の取扱および
カラムとしての使用時に、高温で繰り返し熱履歴を受け
るような条件下でも容易に折れることがない。In the capillary column of the present invention, the heat-resistant protective film on the outer surface of the silica glass capillary has sufficient mechanical strength,
It has excellent adhesion to quartz glass and does not deteriorate due to heat, so it easily breaks even under conditions where it is subjected to repeated thermal cycling at high temperatures during handling during production such as stationary phase formation and coil winding, and when used as a column. Never.
本発明による石英ガラスキャピラリカラムの耐熱性は、
金属被膜を単独に設けた石英ガラスキャピラリカラムよ
りはるかに優れる。それ故、ガスクロマトグラフィにお
いて高温で繰り返し使用されても折れない。The heat resistance of the quartz glass capillary column according to the present invention is as follows:
Much superior to silica glass capillary columns with a single metal coating. Therefore, it does not break even when used repeatedly at high temperatures in gas chromatography.
本発明の石英ガラスキャピラリカラムは、コイル状に巻
いたときの折れに起因する歩留まりの低下がなく、製造
コストが低下する。The silica glass capillary column of the present invention does not have a decrease in yield due to bending when wound into a coil shape, and the manufacturing cost is reduced.
第1図は本発明の石英ガラスキャピラリカラムの一実施
例の断面図である。第2図は従来の石英ガラスキャピラ
リカラムの断面図である。
符号の説明
1−一−−−−−−−−石英ガラスキャピラリ2−−−
−−−一固定相
3−−−−−−−−−−耐熱性保護膜
4−−−−−−一・−カーボン被膜
5・−・−−一一一−−−金属被膜
・−石英キャビラ
・−・−固定相
・−・・−耐熱性保護膜
カーボン被膜
・−金属被膜
すFIG. 1 is a cross-sectional view of one embodiment of a silica glass capillary column of the present invention. FIG. 2 is a cross-sectional view of a conventional silica glass capillary column. Explanation of symbols 1-1----- Quartz glass capillary 2----
----Stationary phase 3--------Heat-resistant protective film 4---Carbon coating 5----Metal coating--Quartz Cabilla・・・−Stationary phase・−・・−Heat resistant protective film Carbon coating・−Metal coating
Claims (2)
面に耐熱性保護膜を有する石英ガラスキャピラリカラム
であって、 前記耐熱性保護膜が前記石英ガラスキャピラリの外面に
接するカーボン被膜と、その外側に設けられた金属被膜
から成ることを特徴とする石英ガラスキャピラリカラム
。(1) A quartz glass capillary column having a stationary phase on the inner surface of the quartz glass capillary and a heat-resistant protective film on the outer surface, the heat-resistant protective film comprising a carbon coating in contact with the outer surface of the silica glass capillary, and A quartz glass capillary column characterized by consisting of a metal coating provided on the outside.
ン、錫、またはビスマスから選ばれた少なくとも一つの
金属から成る請求項第1項の石英ガラスキャピラリカラ
ム。(2) The silica glass capillary column according to claim 1, wherein the metal coating is made of at least one metal selected from aluminum, indium, titanium, tin, or bismuth.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1273219A JPH03135761A (en) | 1989-10-20 | 1989-10-20 | Quartz glass capillary column |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1273219A JPH03135761A (en) | 1989-10-20 | 1989-10-20 | Quartz glass capillary column |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03135761A true JPH03135761A (en) | 1991-06-10 |
Family
ID=17524771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1273219A Pending JPH03135761A (en) | 1989-10-20 | 1989-10-20 | Quartz glass capillary column |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03135761A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010521673A (en) * | 2007-03-13 | 2010-06-24 | バリアン・インコーポレイテッド | Method and apparatus for using a shrinkable support in a porous monolith material |
CN104407080A (en) * | 2014-12-08 | 2015-03-11 | 同方威视技术股份有限公司 | Portable gas chromatographic capillary column module |
-
1989
- 1989-10-20 JP JP1273219A patent/JPH03135761A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010521673A (en) * | 2007-03-13 | 2010-06-24 | バリアン・インコーポレイテッド | Method and apparatus for using a shrinkable support in a porous monolith material |
CN104407080A (en) * | 2014-12-08 | 2015-03-11 | 同方威视技术股份有限公司 | Portable gas chromatographic capillary column module |
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