JPH03106579A - Laser numbering device by galvanomirror - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] The present invention relates to a numbering device using a galvanometer mirror, which is particularly effective when a character string is long in the horizontal direction, and is capable of eliminating focus shift and printing uniform dots. The purpose of the present invention is to provide a numbering device using a galvanometer mirror, which uses a laser to draw long character strings in the horizontal axis (X-axis) direction. 11), the first reflecting mirror (10
a) and a Y-axis galvanometer (6) having a second reflection mirror (10b) (galpano mirror) whose reflection direction can be varied in the vertical axis (Y-axis) direction, While operating the X-axis drive unit (11) and the Y-axis galvanometer (6) through the first reflection mirror (10a) and the second reflection mirror (10b) with the light as a parallel destination. The purpose is to draw characters.

[Industrial application field]

The present invention relates to a numbering device using a galvanometer mirror, and particularly to a numbering device that is effective when a character string is long in the horizontal direction.

[Conventional technology]

In the electronics industry that uses semiconductors, semiconductor substrates (wafers)
A laser beam with a spot of 50 to 150 J-φ is irradiated onto a predetermined wafer surface in order to inscribe a manufacturing loft number on the wafer as shown in FIG. The laser beam irradiation method includes a dot method and an engroove method, but galvanometer mirrors are usually used for X-axis and Y-axis driving in order to mark a predetermined position.

FIG. 3 is a schematic diagram for explaining a conventional numbering device using a galvanometer mirror.

As shown in FIG. 3, conventionally, a predetermined position (X
For example, when stamping character string 2 on a long axially
A laser beam is emitted from the YAG laser 3 to the first reflecting mirror 4a, and the light reflected by the mirror 4a is further irradiated to the second reflecting mirror 4b, and is reflected by the mirror 4b. In this case, the first reflecting mirror 4a is connected to an X-axis galvanometer 5 whose axis is fixed in order to move the light in the X-axis direction, while the first reflection mirror 4a is connected to a Y-axis galvanometer 6 whose axis is fixed to move the light in the Y-axis direction. This is achieved by connecting two reflecting mirrors 4b. When a character string is indented by a laser, it is done using a certain width of light, such as A, as shown in FIG. If the light intensity deviates to either B% or C, a certain character cannot be drawn.

[Problem to be solved by the invention]

As shown in Figure 2, when the character string becomes longer in the As shown in FIG. 6, the distance from the beam focus shifts and the laser printing quality worsens toward both left and right ends. In other words, in printing using the conventional method shown in Figure 3, if the character string is long in the X-axis direction, the focus of light is
The beam energy was weakened due to blurring, and there were problems with the numbering quality, such as not being able to obtain the specified dot diameter, or the dot shape becoming elliptical.

A method has also been used in which a lens 9 is disposed between the wafer 1 and the second reflecting mirror 4b so that the beam irradiation angle is perpendicular to the wafer surface. Problems similar to those described above also occurred due to distortion, aberrations, and the like.

Furthermore, if the character string is long in the X-axis direction, the X-axis galvanometer 5
Since the driving range of the galvanometer is as large as 20 to 30 marks, there is also the problem of instability due to vibration of the galvanometer itself.

SUMMARY OF THE INVENTION An object of the present invention is to provide a numbering device using a galvano mirror that can eliminate defocus and make uniform dots.

[Means to solve the problem]

According to the present invention, in a laser numbering device that uses a laser to draw a long character string in the horizontal axis (X-axis) direction, the first A Y-axis galvanometer (6) having a second reflecting mirror (10b) (galvanometer mirror) whose reflection direction can be varied in the vertical axis (Y-axis) direction is provided. The light emitted from the first reflecting mirror (10a) and the second reflecting mirror (10a)
0b) and the X-axis drive unit (11) and the Y-axis drive unit (11) via the
This problem is solved by a numbering device using a galvanometer mirror, which is characterized by drawing characters while operating an axial galvanometer (6).

[Function] Conventionally, light irradiation in the X-axis direction was performed only by rotating the first reflecting mirror, so the focus was blurred at both the left and right ends and the light intensity was not constant.However, according to the present invention, the light intensity is not constant. Since the second reflecting mirror can also be moved in the axial direction, the light intensity for character capture can be improved in the X-axis direction.

In the present invention, a Nd-YAG laser is mainly used as a laser. Further, the light emitted from this laser beam is made to enter the first reflecting mirror as parallel light using, for example, a beam expander so as to be able to cope with changes in the beam diameter.

Also, the movement of the X-axis drive unit in the X-axis direction during operation is approximately 300 degrees.
A speed of w/s is preferred.

The present invention is used to draw character strings, but it also includes not only characters but also symbol copying.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

FIG. 1 is a schematic diagram showing one embodiment of the present invention.

Figure 1 shows the X-axis reflecting mirror (first reflecting mirror) 10.
An X-axis drive unit 1l, in which the Y-axis galvanometer 6 and the Y-axis galvanometer 6 are fixed, is arranged to be movable in the direction of the arrow (X-axis direction).

The X-axis drive unit 11 can be operated stably at high speed using a commonly used linear motor, air bearing (not shown), or the like. A second reflecting mirror 10b is connected to the Y-axis galvanometer 6 in the X-axis direction, as in the prior art. A beam expander (not shown) is provided so that the beam emitted from the Nd-YAG laser 3 always hits the first reflecting mirror 10a in parallel.

The device of this embodiment is used for character strings 2 that are long in the X-axis direction, and the X-axis drive unit 11 is moved by a linear motor or the like for each character, and the reflecting mirror 10a is set at a predetermined position. To print that one character, move the X-axis drive unit 11 to
While driving linearly in the axial direction, the Y-axis is moved by the galpano mirror 6.
This is done by driving the In this case, the laser beam is applied to the first reflecting mirror 1.
0a and is reflected by the second reflecting mirror 10b to draw a predetermined character on the wafer 1.

FIG. 2 is a schematic diagram showing another embodiment of the present invention.

In Figure 2, in the numbering device shown in Figure 1,
A galvanometer is connected to the X-axis fixed mirror (first reflection mirror) fixed to the axis drive unit, and the galvanometer is connected not only in the Y-axis direction but also in
Printing can also be performed in the axial direction within the rotation range.

In Figure 2, it is possible to engrave engraved type letters. In this example, only the letters are written, but ○,
Symbols such as → are also used.

〔Effect of the invention〕

As explained above, according to the present invention, during printing, the focus shift, especially in the etc.).

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing one embodiment of the present invention, FIG. 2 is a schematic diagram showing another embodiment of the present invention, and FIG. 3 is a schematic diagram for explaining one embodiment of a conventional device. FIG. 4 is a diagram showing an example of numbering in the X-axis direction (parallel) of the wafer, FIG. 5 is a diagram showing the used light intensity part of the laser beam, and FIG. It is a diagram showing the spread of light of a conventional galvanometer mirror (X axis). l...Wafer 2...Character string, 3...N
d-YAG laser, 4a, 4b...first and second reflecting mirrors 5...X-ring galvanometer, 6...Y-axis galvanometer, 10a. 10b--first and second reflecting mirrors, 11...
・X-axis drive unit, 12...Y-axis galvanometer. Example Fig. 1 l...Wafer 2...Character string 3...Nd-YAG lasers 4a, 4b...1st and 2nd reflecting mirrors 5...X@galvanometer 6...Y dry galvanometer conventional Example 3rd Example 2...Character string 10a. ]Ob. -@1. 27m mirror 11...
X drive unit 12... 1' axis galezometer Fig. 4

Claims (1)

[Claims] 1. In a laser numbering device that uses a laser to draw a long character string in the horizontal axis (X-axis) direction, a first reflective mirror (
10a) and a Y-axis galvanometer (6) having a second reflection mirror (10b) (galvanometer mirror) whose reflection direction can be varied in the vertical axis (Y-axis) direction,
) is converted into parallel light by the first reflecting mirror (
10a) and the second reflecting mirror (10b), the X-axis drive unit (11) and the Y-axis galvanometer (6)
) is a numbering device using a galvanometer mirror that draws characters while operating the . 2. The galvanometer mirror according to claim 1, wherein an X-axis galvanometer is connected to the first reflecting mirror so that the direction of reflection of the first reflecting mirror can be varied in the X-axis direction. numbering device.