JPH0310539U - - Google Patents
Info
- Publication number
- JPH0310539U JPH0310539U JP7087889U JP7087889U JPH0310539U JP H0310539 U JPH0310539 U JP H0310539U JP 7087889 U JP7087889 U JP 7087889U JP 7087889 U JP7087889 U JP 7087889U JP H0310539 U JPH0310539 U JP H0310539U
- Authority
- JP
- Japan
- Prior art keywords
- tool holder
- bonding
- positioning
- spherical bearing
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Wire Bonding (AREA)
Description
第１図は本考案に係る平行割出装置の要部縦断
面図、第２図はその装置を備えるボンデイング装
置の正面図、第３図は平行度検出器の１例を示す
４個の圧電素子の平面図、第４図及び第５図はそ
れぞれ従来例を示す要部縦断正面図である。
１……ボンデイングツール、１ａ……ボンデイ
ングツールの圧着面、２……ツールホルダ、３…
…ツールホルダの支軸、５……自在ブロツク、１
０……球面軸受、１５……押圧ブロツク、２０…
…位置決め手段、３０……ボンデイングステージ
、３１……平行度検出器、３３……圧電素子、３
５……制御手段。
Fig. 1 is a vertical cross-sectional view of the main part of a parallel indexing device according to the present invention, Fig. 2 is a front view of a bonding device equipped with the device, and Fig. 3 is a diagram showing an example of a parallelism detector using four piezoelectric The plan view of the element, FIGS. 4 and 5, are longitudinal sectional front views of main parts showing conventional examples, respectively. DESCRIPTION OF SYMBOLS 1...Bonding tool, 1a...Crimping surface of bonding tool, 2...Tool holder, 3...
... Tool holder spindle, 5... Flexible block, 1
0... Spherical bearing, 15... Pressing block, 20...
... positioning means, 30 ... bonding stage, 31 ... parallelism detector, 33 ... piezoelectric element, 3
5... Control means.
Claims (1)
、ツールホルダを一体に組み付けた自在ブロツク
と、自在ブロツクを介してツールホルダの支軸を
傾動自在に支持する球面軸受と、球面軸受を備え
た押圧ブロツクと、押圧ブロツクに組み込まれ、
球面軸受で支持したツールホルダの支軸をＸ−Ｙ
方向へ傾動して位置決めする位置決め手段と、ボ
ンデイングステージ上へ着脱自在に載置される平
行度検出器と、平行度検出器からの検出信号を受
けて位置決め手段を駆動制御する制御手段とを具
備して成り、 平行度検出器は同一平面内に配列され、ボンデ
イングツールの圧着面に当接する複数の圧電素子
を備え、各圧電素子から出力される電圧の差圧に
基づき、ツールホルダの支軸を位置決め制御する
ように構成したことを特徴とするボンデイング装
置の平行割出装置。[Claims for Utility Model Registration] A tool holder that holds a bonding tool, a swivel block in which the tool holder is assembled integrally, a spherical bearing that tiltably supports the spindle of the tool holder via the swivel block, and a spherical bearing. A pressure block with a
The spindle of the tool holder supported by a spherical bearing is
It is equipped with a positioning means for positioning by tilting in the direction, a parallelism detector detachably placed on the bonding stage, and a control means for driving and controlling the positioning means in response to a detection signal from the parallelism detector. The parallelism detector includes a plurality of piezoelectric elements arranged in the same plane and in contact with the crimping surface of the bonding tool, and detects the support shaft of the tool holder based on the differential pressure of the voltage output from each piezoelectric element. A parallel indexing device for a bonding device, characterized in that the parallel indexing device is configured to control the positioning of the bonding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087889U JPH0310539U (en) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087889U JPH0310539U (en) | 1989-06-16 | 1989-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310539U true JPH0310539U (en) | 1991-01-31 |
Family
ID=31607417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7087889U Pending JPH0310539U (en) | 1989-06-16 | 1989-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310539U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51108333A (en) * | 1975-03-20 | 1976-09-25 | Matsushita Electric Ind Co Ltd | EKITAINENRYONEN SHOSOCHI |
| JPS51108334A (en) * | 1975-03-20 | 1976-09-25 | Matsushita Electric Ind Co Ltd | EKITAINENRYONEN SHOSOCHI |
| JPS52120072A (en) * | 1976-04-02 | 1977-10-08 | Sky Bussan Kk | Airradjustable combustion apparatus with annular air path |
| JPS52120071A (en) * | 1976-04-02 | 1977-10-08 | Sky Bussan Kk | Airradjustable combustion apparatus |
| JPS5377442U (en) * | 1976-11-30 | 1978-06-28 | ||
| JPS56149221U (en) * | 1981-03-26 | 1981-11-10 | ||
| JPS56169124U (en) * | 1981-04-02 | 1981-12-14 |
-
1989
- 1989-06-16 JP JP7087889U patent/JPH0310539U/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51108333A (en) * | 1975-03-20 | 1976-09-25 | Matsushita Electric Ind Co Ltd | EKITAINENRYONEN SHOSOCHI |
| JPS51108334A (en) * | 1975-03-20 | 1976-09-25 | Matsushita Electric Ind Co Ltd | EKITAINENRYONEN SHOSOCHI |
| JPS52120072A (en) * | 1976-04-02 | 1977-10-08 | Sky Bussan Kk | Airradjustable combustion apparatus with annular air path |
| JPS52120071A (en) * | 1976-04-02 | 1977-10-08 | Sky Bussan Kk | Airradjustable combustion apparatus |
| JPS5761965B2 (en) * | 1976-04-02 | 1982-12-27 | Sukai Bussan Kk | |
| JPS5377442U (en) * | 1976-11-30 | 1978-06-28 | ||
| JPS56149221U (en) * | 1981-03-26 | 1981-11-10 | ||
| JPS5741530Y2 (en) * | 1981-03-26 | 1982-09-11 | ||
| JPS56169124U (en) * | 1981-04-02 | 1981-12-14 |