JPH0283013A - Filter for fluids - Google Patents
Filter for fluidsInfo
- Publication number
- JPH0283013A JPH0283013A JP63234389A JP23438988A JPH0283013A JP H0283013 A JPH0283013 A JP H0283013A JP 63234389 A JP63234389 A JP 63234389A JP 23438988 A JP23438988 A JP 23438988A JP H0283013 A JPH0283013 A JP H0283013A
- Authority
- JP
- Japan
- Prior art keywords
- filter element
- filter
- gas
- electrodes
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000011148 porous material Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 210000002445 nipple Anatomy 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明はガス等の流体を濾過するフィルタ。[Detailed description of the invention] [Industrial application field] This invention is a filter that filters fluids such as gas.
特にＥ配流体を加熱するフィルタの構造に関するもので
ある。In particular, it relates to the structure of a filter that heats the E distribution fluid.
［従来の技術］
最近半導体製造装置やバイオテクノロジー等の分野で使
用されるガス用フィルタには非常に高い濾過精度が要求
されるため、フィルタエレメント−は非常に細かい孔を
有している。また腐食ガス等を使用するためフィルタエ
レメントにセラミック等が使われている。[Prior Art] Recently, gas filters used in fields such as semiconductor manufacturing equipment and biotechnology are required to have very high filtration accuracy, so the filter elements have very fine pores. Furthermore, since corrosive gases are used, ceramics or the like are used for the filter element.
［発明が解決しようとする課！］
従来のフィルタは以上のように構成されているので、フ
ィルタエレメントに対するガス分子の吸着面積が広くな
り、吸着ガス量が多くなる。フィルタの２次側が真空域
となる場合は、フィルタエレメントに吸着したガス分子
が徐々にフィルタエレメントより離れることにより、希
望した真空域に達するのに多大な時間を要し、また、同
一のガス系で時間により異なった種類のガスを流す場合
には、フィルタエレメントに吸着した切換え前のガスが
次のガスに混入する。[The problem that the invention attempts to solve! ] Since the conventional filter is configured as described above, the adsorption area of gas molecules to the filter element becomes large, and the amount of adsorbed gas increases. If the secondary side of the filter is in a vacuum region, the gas molecules adsorbed on the filter element will gradually move away from the filter element, and it will take a long time to reach the desired vacuum region. When different types of gas are flown over time, the gas adsorbed on the filter element before switching will mix with the next gas.
一方、沸点の高いガスは室温の変化や配管内の断熱膨張
により、フィルタ内で凝固し、滞留してしまうなどの問
題点があった。On the other hand, gases with high boiling points have the problem of solidifying and stagnation within the filter due to changes in room temperature or adiabatic expansion within the pipes.
そこでフィルタ自体や１次側配管を外部から加熱する方
法がある。しかし、本来はガス系路の機器のなかで、単
位面積あるいは単位体積あたりのガス吸著量としてはフ
ィルタエレメントが最も多いと考えられ、フィルタニレ
メン１−に多くの熱を与える必要があるが、フィルタと
フィルタエレメントとの間に空間が存在するため、効率
的に加熱できず、また、フィルタエレメントを加熱する
には多大な熱をフィルタ自体に加える必要があるが、ガ
ス及びガスケット等の高分子材料が変質するなどの問題
点があった。Therefore, there is a method of heating the filter itself or the primary side piping from the outside. However, among the equipment in the gas system, the filter element is considered to absorb the most amount of gas per unit area or unit volume, and it is necessary to apply a large amount of heat to the filter element. , since there is a space between the filter and the filter element, it cannot be heated efficiently, and heating the filter element requires applying a large amount of heat to the filter itself, but it There were problems such as deterioration of the molecular material.
この発明は上記のような問題点を解消するためになされ
たもので、フィルタニレメトが発熱し、効率的に気体を
加熱できる流体用フィルタを得ることを目的とする。This invention was made to solve the above-mentioned problems, and an object of the present invention is to obtain a fluid filter whose filter element generates heat and can efficiently heat gas.
［課顕を解決するための手段］
この発明に係る流体用フィルタは、微細孔を有するフィ
ルタエレメントを、電極を設けたセラミックや金属より
なる抵抗発熱体で構成したものである。[Means for Solving Problems] A fluid filter according to the present invention includes a filter element having micropores made of a resistance heating element made of ceramic or metal and provided with an electrode.
［作用コ
この発明における流体用フィルタは、電極を設けたセラ
ミックや金属等の抵抗発熱材で構成したフィルタエレメ
ントにより、上記電極に通電することにより、上記フィ
ルタエレメント自体が発熱し、気体を直接加熱する。[Function] The fluid filter of this invention has a filter element made of a resistance heating material such as ceramic or metal provided with electrodes, and when the electrodes are energized, the filter element itself generates heat and directly heats the gas. do.
［実施例コ
以下、この発明の一実施例である流体用フィルタを第１
図を用いて説明する。図において、１はフィルタであり
、ステンレス等の金属の筒体からなる。当該フィルタ１
は、端面より軸心方向に突出し、ガスタンクからのパイ
プが接続される１次側ニップル１ａと、半導体製造装置
へ接続される２次側ニップル１ｂとを備え、内部に筒体
状の抵抗発熱材であるＳｉＣ系セラミックスからなり微
細孔を有するフィルタエレメント５と、このフィルタエ
レメント５を固定する固定部１ｃと、上記フィルタ１と
フィルタエレメント５との接合部、すなわちフィルタエ
レメント５の端面５ａにフィルタ１の１次側１ｄと２次
側１ｅとをシールするガスケット３とを有する。上記フ
ィルタエレメント５は、両端部に電極６が設けられてい
る。上記電極６は電極シール７を介して、フィルタ１の
外部に取り出され図示しない電源に接続されている。[Example 1] Hereinafter, a fluid filter which is an example of the present invention will be described as a first example.
This will be explained using figures. In the figure, 1 is a filter, which is made of a metal cylinder such as stainless steel. The filter 1
has a primary side nipple 1a that protrudes from the end face in the axial direction and is connected to a pipe from the gas tank, and a secondary side nipple 1b that is connected to the semiconductor manufacturing equipment, and has a cylindrical resistance heating material inside. A filter element 5 made of SiC-based ceramics and having micropores, a fixing part 1c for fixing the filter element 5, and a joint part between the filter 1 and the filter element 5, that is, an end face 5a of the filter element 5. It has a gasket 3 that seals the primary side 1d and secondary side 1e of. The filter element 5 is provided with electrodes 6 at both ends. The electrode 6 is taken out to the outside of the filter 1 via an electrode seal 7 and connected to a power source (not shown).
上記構成において、電源から電気を供給し電極６に通電
すると、フィルタエレメント５自体が発熱する。すなわ
ちフィルタエレメント５を通過するガスが加熱される。In the above configuration, when electricity is supplied from the power source and the electrode 6 is energized, the filter element 5 itself generates heat. That is, the gas passing through the filter element 5 is heated.
また、上記フィルタエレメント５に吸着したガスも加熱
され、上記フィルタエレメント５から離れる。Further, the gas adsorbed on the filter element 5 is also heated and separated from the filter element 5.
なお、本実施例においては、フィルタエレメント５は抵
抗発熱材であるＳｉＣ系セラミックスからなるとしたが
、他のセラミックや金属及びセラミックと金属などから
なり、通電することで発熱し、微細孔を有する他の材料
で構成してもよい。また。In this embodiment, the filter element 5 is made of SiC-based ceramics, which is a resistance heating material, but it is made of other ceramics, metals, ceramics and metals, etc., and generates heat when energized, and has fine pores. It may be constructed from the following materials. Also.
第２図に示すように、フィルタエレメント５をフィルタ
１の１次側１ｄに粗い孔のフィルタエレメント ５ａを
、２次側１ｅに微細孔のフィルタエレメント５ｂとして
２層に分割し、１次側のフィルタエレメント５ａに電極
６を設けて、あらかじめガスを加熱し、微細孔のフィル
タエレメント５ｂにガスが吸着しにくいようにしてもよ
く、また、筒体状のフィルタエレメント５としたが、平
面状や円筒状に多数の穴を有するようなフィルタエレメ
ントでもよい。As shown in Fig. 2, the filter element 5 is divided into two layers: a filter element 5a with coarse holes on the primary side 1d of the filter 1, and a filter element 5b with fine holes on the secondary side 1e. An electrode 6 may be provided on the filter element 5a to heat the gas in advance to make it difficult for the gas to be adsorbed to the filter element 5b having micropores.Furthermore, although the filter element 5 is cylindrical, it may be flat or A filter element having a cylindrical shape and many holes may be used.
また、本発明においては、ガスがフィルタエレメント５
に吸着するのを防止するとしたが、バイオテクノロジに
おいて、ガスに含まれる細菌を滅菌することができる。Further, in the present invention, the gas is
In biotechnology, it is possible to sterilize bacteria contained in gases.
［発明の効果］
以上のように、この発明によれば流体用フィルタを、フ
ィルタエレメントを電極を設けた抵抗発熱材で構成した
ので、上記電極に通電し上記フィルタエレメントを加熱
することにより、気体への加熱の効率がよく、また、加
熱効率がよいので多くの熱を加えなくて済み、ガス及び
ガスケット等の高分子材料が変質しない。[Effects of the Invention] As described above, according to the present invention, a fluid filter is constructed in which the filter element is made of a resistance heating material provided with an electrode. Also, since the heating efficiency is good, there is no need to apply much heat, and the gas and polymeric materials such as gaskets do not change in quality.
第１図はこの発明の一実施例である流体用フィルタの断
面図、第２図は他の実施例の流体用フィルタの断面図で
ある。
１・・・・・・フィルタ、５・・・・・・フィルタエレ
メント、６・・・・・・電極、７・・・・・・電極シー
ル。FIG. 1 is a cross-sectional view of a fluid filter according to one embodiment of the present invention, and FIG. 2 is a cross-sectional view of a fluid filter according to another embodiment. 1... Filter, 5... Filter element, 6... Electrode, 7... Electrode seal.
Claims (3)
ントを設けた流体用フィルタにおいて、上記フィルタエ
レメントを、電極を設けた抵抗発熱体で構成したことを
特徴とする流体用フィルタ。(1) A fluid filter in which a filter element having micropores is provided in a gas path, wherein the filter element is constituted by a resistance heating element provided with an electrode.
属、セラミック及び金属よりなる抵抗発熱体で構成した
特許請求の範囲第１項記載の流体用フィルタ。(2) The fluid filter according to claim 1, wherein the filter element is constituted by a resistance heating element made of ceramic or metal, or ceramic and metal.
抵抗発熱体で構成した特許請求の範囲第１項記載の流体
用フィルタ。(3) The fluid filter according to claim 1, wherein the filter element is constituted by a resistance heating element made of ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63234389A JPH0616810B2 (en) | 1988-09-19 | 1988-09-19 | Fluid filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63234389A JPH0616810B2 (en) | 1988-09-19 | 1988-09-19 | Fluid filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0283013A true JPH0283013A (en) | 1990-03-23 |
| JPH0616810B2 JPH0616810B2 (en) | 1994-03-09 |
Family
ID=16970233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63234389A Expired - Lifetime JPH0616810B2 (en) | 1988-09-19 | 1988-09-19 | Fluid filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616810B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02203913A (en) * | 1989-02-01 | 1990-08-13 | Ngk Insulators Ltd | Method for removing moisture adhered to dust collecting filter |
| JP2005137871A (en) * | 2003-10-17 | 2005-06-02 | Sanwa Newtec Co Ltd | Air cleaner |
| JP2006142262A (en) * | 2004-11-24 | 2006-06-08 | Asahi Kogyosha Co Ltd | Filter apparatus |
| JP2013531212A (en) * | 2010-05-12 | 2013-08-01 | リンデ アクチエンゲゼルシャフト | Method for producing a sterile cryogenic liquid |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193517A (en) * | 1984-03-02 | 1985-10-02 | Karupisu Shokuhin Kogyo Kk | Removing method of microorganism |
| JPS6178415A (en) * | 1984-09-27 | 1986-04-22 | Kiyoshi Hajikano | Heat acting filter made of ceramic |
-
1988
- 1988-09-19 JP JP63234389A patent/JPH0616810B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193517A (en) * | 1984-03-02 | 1985-10-02 | Karupisu Shokuhin Kogyo Kk | Removing method of microorganism |
| JPS6178415A (en) * | 1984-09-27 | 1986-04-22 | Kiyoshi Hajikano | Heat acting filter made of ceramic |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02203913A (en) * | 1989-02-01 | 1990-08-13 | Ngk Insulators Ltd | Method for removing moisture adhered to dust collecting filter |
| JP2005137871A (en) * | 2003-10-17 | 2005-06-02 | Sanwa Newtec Co Ltd | Air cleaner |
| JP4636803B2 (en) * | 2003-10-17 | 2011-02-23 | 三和ニューテック株式会社 | Air purification device |
| JP2006142262A (en) * | 2004-11-24 | 2006-06-08 | Asahi Kogyosha Co Ltd | Filter apparatus |
| JP2013531212A (en) * | 2010-05-12 | 2013-08-01 | リンデ アクチエンゲゼルシャフト | Method for producing a sterile cryogenic liquid |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0616810B2 (en) | 1994-03-09 |
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