JPH027550A - Radiator for electronic device - Google Patents
Radiator for electronic deviceInfo
- Publication number
- JPH027550A JPH027550A JP15694288A JP15694288A JPH027550A JP H027550 A JPH027550 A JP H027550A JP 15694288 A JP15694288 A JP 15694288A JP 15694288 A JP15694288 A JP 15694288A JP H027550 A JPH027550 A JP H027550A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- radiator
- fin
- corrugated
- fins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052802 copper Inorganic materials 0.000 abstract description 6
- 239000010949 copper Substances 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- 238000007747 plating Methods 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 229910052709 silver Inorganic materials 0.000 abstract description 2
- 239000004332 silver Substances 0.000 abstract description 2
- 229910000679 solder Inorganic materials 0.000 abstract description 2
- 235000012054 meals Nutrition 0.000 abstract 1
- 239000002470 thermal conductor Substances 0.000 description 26
- 239000011347 resin Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 20
- 230000017525 heat dissipation Effects 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 230000005855 radiation Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000003507 refrigerant Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000001913 cellulose Substances 0.000 description 3
- 229920002678 cellulose Polymers 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 235000014676 Phragmites communis Nutrition 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- KQZLRWGGWXJPOS-NLFPWZOASA-N 1-[(1R)-1-(2,4-dichlorophenyl)ethyl]-6-[(4S,5R)-4-[(2S)-2-(hydroxymethyl)pyrrolidin-1-yl]-5-methylcyclohexen-1-yl]pyrazolo[3,4-b]pyrazine-3-carbonitrile Chemical compound ClC1=C(C=CC(=C1)Cl)[C@@H](C)N1N=C(C=2C1=NC(=CN=2)C1=CC[C@@H]([C@@H](C1)C)N1[C@@H](CCC1)CO)C#N KQZLRWGGWXJPOS-NLFPWZOASA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 235000000722 Celosia argentea Nutrition 0.000 description 1
- 240000008365 Celosia argentea Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- -1 alkalis Substances 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229940125877 compound 31 Drugs 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000003746 feather Anatomy 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 210000001364 upper extremity Anatomy 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
- F28F3/025—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being corrugated, plate-like elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電子機器用放熱器に関する。より詳しくは、
放熱性能のよいピンフィン付き電子機器用放熱器に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a heat sink for electronic equipment. For more details,
This invention relates to a heatsink for electronic equipment with a pin fin that has good heat dissipation performance.
〔従来の技術と発明が解決しようとする課題〕電子機器
において、半導体素子等に通電されると、その電気抵抗
により発熱する。一般に温度が高くなると半導体が誤動
作したり、短期間で破壊が生じるため、部品から発生し
た熱を速く放散させる必要があり、そのため半導体自身
や、半導体を取り付ける基板等に通常放熱フィンを取付
ける。[Prior Art and Problems to be Solved by the Invention] In electronic equipment, when a semiconductor element or the like is energized, heat is generated due to its electrical resistance. In general, when the temperature rises, semiconductors malfunction or break down in a short period of time, so it is necessary to quickly dissipate the heat generated by the components. For this reason, heat dissipation fins are usually attached to the semiconductor itself or the substrate on which the semiconductor is attached.
従来のフィンはプレート状のものを用い、放熱面積を拡
大するためにそのプレートをU字形、プレート形、プレ
ート状あるいはコルゲート形に加工して放熱面に取付け
ている。このようなプレート状フィンの場合、取付は放
熱面に対するフィンの放熱面積を飛躍的に拡大するには
、製造上困難であり、且つ、プレート表面に厚い境界層
が発生し、この境界層がフィン表面に滞溜して、断熱層
を形成するので高い熱交換効率が得られない等の問題点
があった。その点から、ピン状フィンの方が好ましく、
ビン状フィンの機器表面への取付は密度を高くすること
で放熱面積の拡大、更には、熱交換効率を高くすること
ができる。Conventional fins are plate-shaped, and in order to expand the heat radiation area, the plate is processed into a U-shape, plate shape, plate shape, or corrugated shape and attached to the heat radiation surface. In the case of such plate-shaped fins, mounting is difficult in manufacturing to dramatically expand the heat dissipation area of the fin relative to the heat dissipation surface, and a thick boundary layer occurs on the plate surface, and this boundary layer Since it accumulates on the surface and forms a heat insulating layer, there are problems such as high heat exchange efficiency cannot be obtained. From that point of view, pin-shaped fins are preferable.
By increasing the density of attaching the bottle-shaped fins to the surface of the equipment, it is possible to expand the heat radiation area and further increase the heat exchange efficiency.
本発明は、前記問題点を解消して、フィンの放熱面積を
拡大し、且つ、高い放熱性能を得る新規な電子機器用放
熱器を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to provide a new heat radiator for electronic equipment that increases the heat radiation area of the fins and provides high heat radiation performance.
本発明の目的は、フィンと、該フィンを支持すると共に
電子機器との熱伝導を仲介するフィン支持部材から成り
、前記フィンが互いに平行に間隔をあけ、且つコルゲー
ト状に湾曲して配置されている複数の線状熱伝導体から
成ることを特徴とするコルゲート状ピンフィン付き電子
機器用放熱器によって達成される。An object of the present invention is to provide a fin comprising a fin and a fin support member that supports the fin and mediates heat conduction with an electronic device, the fins being arranged parallel to each other at intervals and curved in a corrugated manner. This is achieved by a heat sink for electronic equipment with corrugated pin fins, which is characterized by being composed of a plurality of linear heat conductors.
以下添付図面を参照して、本発明による電子機器用放熱
器について説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS A heat sink for electronic equipment according to the present invention will be described below with reference to the accompanying drawings.
第1図は、本発明によるコルゲート状ピンフィン付き放
熱器の一実施例を示す断面図である。図に示すように、
熱伝導性の良い銅、アルミニウム等でできたスタッド1
を予じめセラミックケース2にろう付けしておき、ケー
ス2の凹部3に半4体素子4を固着させて、アルミニウ
ム、金等を主成分とした金属細線5で半専体素子4の電
極(図示せず)とケース2側のバッド(図示せず)とを
結線し、キャップ6で凹部3を封止した後、本発明によ
る放熱器7をスタンドlに嵌合し、放熱器として機能さ
せる。FIG. 1 is a sectional view showing an embodiment of a corrugated pin-fin radiator according to the present invention. As shown in the figure,
Stud 1 made of copper, aluminum, etc. with good thermal conductivity
is brazed to the ceramic case 2 in advance, the half-quad element 4 is fixed in the recess 3 of the case 2, and the electrodes of the semi-quad element 4 are connected with thin metal wires 5 mainly made of aluminum, gold, etc. (not shown) and a pad (not shown) on the case 2 side, and after sealing the recess 3 with the cap 6, the heat radiator 7 according to the present invention is fitted to the stand l, and functions as a heat radiator. let
本発明による前記放熱器7では、電子機器との熱伝導を
中介する部材として役立つフィン支持部材8の放熱面9
に複数の線状熱伝導体IOが互いに平行に間隔をあけて
配置され、しかも複数の線状熱伝導体10がコルゲート
形状に湾曲しており、その湾曲頂部11がフィン支持部
材8の放熱面9に固着されている。In the heat sink 7 according to the present invention, the heat radiation surface 9 of the fin support member 8 serves as a member that mediates heat conduction with electronic equipment.
A plurality of linear thermal conductors IO are arranged parallel to each other at intervals, and the plurality of linear thermal conductors 10 are curved in a corrugated shape, and the curved top portion 11 is the heat dissipation surface of the fin support member 8. It is fixed to 9.
本発明に用いられる線状熱伝導体としては、銀、銅、ア
ルミニウム等の純金属細線、或いは、合金細線、又は、
前記金属細線にハンダメツキ、スズメツキ等を施した金
属細線を用いることができる。The linear thermal conductor used in the present invention is a pure metal thin wire such as silver, copper, or aluminum, or an alloy thin wire, or
It is possible to use a thin metal wire obtained by subjecting the thin metal wire to solder plating, tin plating, or the like.
線状熱伝導体の断面形状については特に限定しないが、
放熱器のフィンとして用いる場合、圧力損失を小さく、
且つ、熱交換効率を大きくするためには、円形に近い断
面の線状熱伝導体を用いるとよい。線状熱伝導体の熱伝
導率は、0.40Caf /am・sec ・℃以上
が好ましく、用途によっては、更に適切な熱伝導率を有
する線状熱伝導体を選定して用いることができる。There is no particular limitation on the cross-sectional shape of the linear thermal conductor, but
When used as a heatsink fin, it reduces pressure loss and
In addition, in order to increase heat exchange efficiency, it is preferable to use a linear heat conductor with a nearly circular cross section. The thermal conductivity of the linear thermal conductor is preferably 0.40 Caf/am·sec·°C or higher, and depending on the application, a linear thermal conductor having a more appropriate thermal conductivity can be selected and used.
本発明のフィンの放熱面積を拡大し、且つ高い放熱性能
を得るためには、用いられる線状熱伝導体の大きさとコ
ルゲート状ピンフィンの配列密度について、下記の特定
の範囲に定めると良い。In order to expand the heat dissipation area of the fin of the present invention and obtain high heat dissipation performance, the size of the linear thermal conductor used and the arrangement density of the corrugated pin fins may be set within the following specific ranges.
0.25≦X≦2.5
0.25≦XY≦2.5
ここに、Xは、線状熱伝導体断面の外周長(龍)であり
、Yは、線状熱伝導体の配列密度であり、第2図に示す
ように、コルゲート状に変形された綿状熱伝導体につい
て同一線状体のコイル(コルゲート状態)の配列ピッチ
Y、(本/龍)と隣接する線状体との配列ピッチY2(
本/龍)との算術平均
Y、は0.1本/龍〜10本/m1・Y2は0.1本/
mm〜10本/璽璽の範囲で適宜選定すればよい。0.25≦X≦2.5 0.25≦XY≦2.5 Here, X is the outer circumference length (dragon) of the cross section of the linear thermal conductor, and Y is the arrangement density of the linear thermal conductor. As shown in Fig. 2, for a cotton-like heat conductor transformed into a corrugated shape, the arrangement pitch Y of coils (corrugated state) of the same linear body, (hon/dragon) and the adjacent linear body are array pitch Y2 (
The arithmetic average Y is 0.1 pieces/dragon~10 pieces/m1・Y2 is 0.1 pieces/
It may be appropriately selected within the range of mm to 10 pieces/seal.
X<0.25の場合は、線状熱伝導体の線径が小さすぎ
てその力学的特性が低くなりすぎるため、放熱器の製造
時の取り扱い性が極端に悪くなり生産効率が低下するの
で好ましくない。If X<0.25, the wire diameter of the linear thermal conductor is too small and its mechanical properties are too low, making it extremely difficult to handle when manufacturing the radiator and reducing production efficiency. Undesirable.
X > 2.5の場合は、線状熱伝導体の線径が大きす
ぎてビン状フィンとしての性能を発揮し難くなる。Xの
より好ましい範囲は0.5≦X≦2.0であり、断面円
形の線状熱伝導体の場合では、はぼ1601Irrlφ
に相当する。When X>2.5, the wire diameter of the linear thermal conductor is too large, making it difficult to exhibit the performance as a bottle-shaped fin. A more preferable range of X is 0.5≦X≦2.0, and in the case of a linear thermal conductor with a circular cross section, approximately
corresponds to
一方、XY<0.25の場合は、ピン状フィン用線状熱
伝導体の放熱面積としては、小さすぎて高い放熱性能が
得られない。On the other hand, when XY<0.25, the heat radiation area of the linear thermal conductor for pin-shaped fins is too small and high heat radiation performance cannot be obtained.
X Y > 2.5の場合は、放熱面積が大きくなるが
林立するフィン間の間隔が狭くなりすぎて冷却流体の圧
力損失が大きくなりすぎる。xyのより好ましい範囲は
、0.35≦XY≦1.2であり、断面円形の線径10
0庫φの線状熱伝導体の場合では、線状熱伝導体の配列
密度は、はぼ1.11本/龍2〜3.82鳳m2に相当
する。When X Y > 2.5, the heat dissipation area increases, but the distance between the fins becomes too narrow, and the pressure loss of the cooling fluid becomes too large. A more preferable range of xy is 0.35≦XY≦1.2, and the wire diameter of circular cross section is 10
In the case of a linear thermal conductor with a diameter of 0, the arrangement density of the linear thermal conductor is equivalent to 1.11 pieces/2 to 3.82 square meters.
次に本発明による放熱器の製造方法の一例を第3図から
第6図を参照して説明する。Next, an example of a method for manufacturing a heat sink according to the present invention will be described with reference to FIGS. 3 to 6.
第3図に示すように複数本の線状熱伝導体10は図示し
てないパフケージ形状に巻き取られてりリール13に所
要本数だけ仕掛けられ、後述の一対の加熱プレスロール
21 、21 ’によって引き出される。その際、複数
本の線状熱伝導体10は、目板14、前肢15を経てテ
ンションバー16を介して引き出されることによって張
力が均一に揃えられ、その後、溝付きガイドローラ17
および筬18を経て一平面内に実質的に等ピンチに揃え
られる。一方、溶解性樹脂から成るシート12は、シー
トロール12′から引き出され、ガイドロール19 、
20を経て、前記線状熱伝導体10の群とともに一対の
加熱プレスロール21 、21 ’に導かれる。As shown in FIG. 3, a plurality of linear thermal conductors 10 are wound into a puff cage shape (not shown), and are set in a required number on a reel 13, and are moved by a pair of heating press rolls 21 and 21', which will be described later. drawn out. At that time, the plurality of linear thermal conductors 10 are pulled out through the battens 14 and the forelimbs 15 and then through the tension bars 16, so that the tension is made uniform, and then the grooved guide rollers 17
And through the reed 18, they are arranged in substantially equal pinches within one plane. On the other hand, the sheet 12 made of soluble resin is pulled out from the sheet roll 12', and the guide roll 19,
20, it is guided together with the group of linear heat conductors 10 to a pair of heated press rolls 21 and 21'.
加熱プレスロール21 、21 ’では、線状熱伝導体
10の群と溶解性樹脂シート12とが加熱押圧され、シ
ート12の中に線状熱伝導体が埋込まれたような状態で
一体化される。前記線状熱伝導体10の群と溶解性樹脂
シiト12の一体化は、第3図の方法以外に線状熱伝導
体10の群の両側から溶解性樹脂シート12を加熱押圧
する方法、或いは、前記方法の熱を用いず、溶剤等を用
いて溶解性樹脂シート12表面を溶解させて線状熱伝導
体10と熔解性樹脂シート12とを一体化させる方法に
よって行ってもよい。On the heating press rolls 21 and 21', the group of linear thermal conductors 10 and the soluble resin sheet 12 are heated and pressed, and are integrated with the linear thermal conductors in a state where the linear thermal conductors are embedded in the sheet 12. be done. The group of linear thermal conductors 10 and the soluble resin sheet 12 can be integrated by a method other than the method shown in FIG. 3, in which the soluble resin sheet 12 is heated and pressed from both sides of the group of linear thermal conductors 10. Alternatively, a method may be used in which the surface of the soluble resin sheet 12 is melted using a solvent or the like to integrate the linear thermal conductor 10 and the soluble resin sheet 12 without using the heat of the above method.
前記溶解性樹脂シー)12としては、有機溶剤、アルカ
リ、酸等で溶解するものであればよく、例えば、ポリエ
ステル系、ポリアミド系、酢酸セルロース系、セルロー
ス系誘導体や該誘導体とセルロースパルプの混合シート
等を用いることができる。又、例えば、カルボキシメチ
ルセルロースとセルロースバルブを混合したシートにポ
リビニルアルコールをコーティングやラミネートしたも
のでもよく、各種樹脂を適宜組合せてもよい、ただし、
その取扱い性の容易さからポリビニル系が好ましく、中
でも温水で容易に溶解させるためにはけん化度85〜9
0%の部分けん化物で重合度が500程度のものがより
好ましい。The soluble resin sheet 12 may be any material that can be dissolved in organic solvents, alkalis, acids, etc., such as polyester-based, polyamide-based, cellulose acetate-based, cellulose-based derivatives, and mixed sheets of such derivatives and cellulose pulp. etc. can be used. Alternatively, for example, a sheet made of a mixture of carboxymethyl cellulose and cellulose bulb may be coated or laminated with polyvinyl alcohol, or various resins may be appropriately combined. However,
Polyvinyl type is preferable because of its ease of handling, and among them, the saponification degree is 85 to 9 in order to easily dissolve it in hot water.
It is more preferable to use a partially saponified product of 0% and a degree of polymerization of about 500.
本発明でいう溶解性樹脂シート12の幅、厚みについて
は、適宜選定すればよいが、例えば、幅は0.5m 〜
1.5m、厚みは10〜200 trmのものが取扱い
上好ましい。The width and thickness of the soluble resin sheet 12 in the present invention may be appropriately selected, but for example, the width is 0.5 m to 0.5 m.
1.5 m and a thickness of 10 to 200 trm are preferable for handling.
前記加熱プレスロール21 、21 ’を通過し一体化
された複合シート22は一対の送り出しロール23゜2
3′を経た後、巻取りロール24により複合シート22
を巻き取る。The composite sheet 22 that has passed through the heated press rolls 21 and 21' and is integrated is transferred to a pair of delivery rolls 23°2.
3', the composite sheet 22 is rolled up by the winding roll 24.
wind up.
次に複合シート22をコルゲート状態に成形する。成形
方法としては、従来公知のコルゲート型熱交換器のコル
ゲートフィンを成形するコルゲート成形機、例えば一対
のコルゲート成形プレスによって複合シート22をコル
ゲート状に圧縮成形する方法や市販のプリーツ成形機を
応用すればよい。特に線状熱伝導体10の線径が200
μφと細い場合は、アコーディオン型プリーツ成形機が
十分適用できる。Next, the composite sheet 22 is formed into a corrugated state. As a forming method, a conventionally known corrugate forming machine for forming corrugated fins of a corrugated heat exchanger, for example, a method in which the composite sheet 22 is compression-molded into a corrugate shape using a pair of corrugate forming presses, or a commercially available pleat forming machine may be applied. Bye. In particular, the wire diameter of the linear thermal conductor 10 is 200 mm.
If the material is as thin as μφ, an accordion-type pleating machine is fully applicable.
次に前記コルゲート状に成形した長尺なピンフィン部材
25a (第3図)の片端面、すなわち、放熱部材8に
接合する端面を第4図に示すように線状熱伝導体lOが
Δh+(o〜1m/m)だけ露出するように、溶解性樹
脂12を溶解或いは、機械的に除去してピンフィン部材
25bを得る。一方、前記方法以外に第3図に例示した
複合シート22を製造する時にあらかじめ線状熱伝導体
10が溶解性樹脂シート12上に露出するように加熱プ
レスロール圧を調整することでピンフィン部材25bが
得られ、前記樹脂除去工程を省略することができる。こ
のピンフィン部材25bを放熱器7のフィン支持部材8
に接合させるために、フィン支持部材8のサイズにピン
フィン部材25bを切断してコルゲート状ピンフィン部
材25cを得る− (第5図参照入前記フィン支持部材
8としては、熱伝導性の良い銅、アルミニウム等を用い
るとよい。Next, as shown in FIG. 4, one end surface of the long pin fin member 25a (FIG. 3) molded into the corrugated shape, that is, the end surface joined to the heat dissipation member 8, is heated as shown in FIG. The pin fin member 25b is obtained by melting or mechanically removing the soluble resin 12 so that only 1 m/m) is exposed. On the other hand, in addition to the method described above, when manufacturing the composite sheet 22 illustrated in FIG. is obtained, and the resin removal step can be omitted. This pin fin member 25b is attached to the fin support member 8 of the radiator 7.
In order to join the fin support member 8 to the fin support member 8, the pin fin member 25b is cut to the size of the fin support member 8 to obtain a corrugated pin fin member 25c. It is recommended to use
次にコルゲート状ピンフィン部材25cをフィン支持部
材8の表面9にろう付けする。最後にピンフィン部材2
5c中に残存する溶解性樹脂シート12を熔解除去し、
ピンフィン付き放熱器(第6図参照)が得られ、第1図
に示すスタッド1に嵌合して放熱器として機能させる。Next, the corrugated pin fin member 25c is brazed to the surface 9 of the fin support member 8. Finally, pin fin member 2
The soluble resin sheet 12 remaining in 5c is melted and removed,
A heatsink with pin fins (see FIG. 6) is obtained, which is fitted into the stud 1 shown in FIG. 1 to function as a heatsink.
第7図に、本発明による電子機器用放熱器を装着したI
Cパッケージの断面図を示す。この図において、ICパ
ッケージ26にはコルゲート状ピンフィン放熱器27が
装着されており、tCパッケージ26は接地ビン28に
よって基板29に実装されている。ICパッケージ26
の内部で発生した熱は、ICパフケージ26上面を介し
てコルゲート状ピンフィン放熱器27に伝達され、線状
熱伝導体10から放熱される。FIG. 7 shows I equipped with the heat sink for electronic equipment according to the present invention.
A cross-sectional view of the C package is shown. In this figure, a corrugated pin fin heat sink 27 is attached to an IC package 26, and the tC package 26 is mounted on a substrate 29 via a grounding pin 28. IC package 26
The heat generated inside the IC puff cage 26 is transmitted to the corrugated pin fin heat radiator 27 via the upper surface of the IC puff cage 26, and is radiated from the linear heat conductor 10.
第7図に示した放熱器付きICパッケージは次のよう“
にして製造される。第4図に示したコルゲート状ピンフ
ィン部材25bを熱伝導性の良い銅、アルミニウム等の
フィン支持部材30の表面にろう付けする。次にピンフ
ィン部材25b中に残存する溶解性樹脂シート12を溶
解除去し、ピンフィン付き放熱器(第8図参照)が得ら
れ、第7図に示したICパッケージ26の寸法に合せて
切断し、コルゲート状放熱器27 (図示せず)を得る
。次にICパッケージ26表面に熱伝導性の良いコンパ
ウンド31、例えばシリコーングリス等を塗布し、IC
パッケージ26とコルゲート状放熱器27を接合してI
Cパッケージ用放熱器が得られる。The IC package with heatsink shown in Figure 7 is as follows.
Manufactured by The corrugated pin fin member 25b shown in FIG. 4 is brazed to the surface of a fin support member 30 made of copper, aluminum, or the like having good thermal conductivity. Next, the soluble resin sheet 12 remaining in the pin fin member 25b is dissolved and removed to obtain a heat sink with pin fins (see FIG. 8), which is cut to match the dimensions of the IC package 26 shown in FIG. A corrugated heat sink 27 (not shown) is obtained. Next, a compound 31 with good thermal conductivity, such as silicone grease, is applied to the surface of the IC package 26, and the IC
The package 26 and the corrugated heat sink 27 are joined together to form an I
A heatsink for C package is obtained.
第9A図および第9B図に本発明による電子機器用放熱
器の他の実施例を示す。すなわち第9A図並びに第9B
図は、半導体素子33を冷却する放熱器の正面並びに側
断面図である。この図においてスタック32には、半導
体素子33の許容上限温度以下の温度で沸騰する冷媒3
4が封入され、本発明の放熱器35と一体化されており
、冷媒蒸気凝縮部36を空冷することで前記半導体素子
33の発熱で気化した冷媒蒸気を凝縮させており、冷媒
沸騰部36には前記半導体素子33に接続する電極端子
39が取付けである。FIGS. 9A and 9B show another embodiment of the heat sink for electronic equipment according to the present invention. That is, Figures 9A and 9B
The figures are front and side sectional views of a heat sink that cools the semiconductor element 33. In this figure, the stack 32 includes a refrigerant 3 that boils at a temperature below the allowable upper limit temperature of the semiconductor element 33.
4 is sealed and integrated with the radiator 35 of the present invention, and by cooling the refrigerant vapor condensing section 36 with air, the refrigerant vapor vaporized by the heat generated by the semiconductor element 33 is condensed, and the refrigerant vapor is condensed into the refrigerant boiling section 36. The electrode terminal 39 connected to the semiconductor element 33 is attached.
第9図Aおよび第9図Bに示した放熱器35の製造方法
の一例を第4図並びに第1O図から第11図を参照して
説明する。第4図に示したコルゲート状ピンフィン部材
25bを熱伝導性の良い銅、アルミニウム等のパイプ3
6表面に巻回した後ろう付けする(第10図参照)。次
にピンフィン部材25b中に残存する溶解性樹脂シー)
12を溶解除去してピンフィン付き放熱器35 (第1
1図A、第10図参照)が得られ、前記放熱器35と冷
媒沸騰部37、ヘッダ38をろう付は等により接合して
、高性能の半導体素子冷却用放熱器が得られる。An example of a method for manufacturing the heat sink 35 shown in FIGS. 9A and 9B will be described with reference to FIG. 4 and FIGS. 1O to 11. The corrugated pin fin member 25b shown in FIG.
6. Wrap around the surface and braze (see Figure 10). Next, the soluble resin sheet remaining in the pin fin member 25b)
12 is melted and removed to form a pin fin radiator 35 (first
1A and 10) is obtained, and by joining the heat radiator 35, the refrigerant boiling part 37, and the header 38 by brazing or the like, a high-performance heat radiator for cooling semiconductor devices is obtained.
以上上として本発明の背景となった分野である半導体の
一部について本発明の詳細な説明したが、放熱面積の拡
大、更には放熱性能の向上を必要とする他の電子機器に
ついて本発明の放熱器を適用することができる。As above, the present invention has been described in detail with respect to a part of semiconductors, which is the background field of the present invention, but the present invention can be applied to other electronic devices that require expansion of heat dissipation area and further improvement of heat dissipation performance. A heatsink can be applied.
次に本発明による電子機器用放熱器の実施例を示し、併
せて比較例のコの字プレート形放熱器(第12図参照)
を用いた場合の放熱性能を比較した。Next, an example of a heatsink for electronic equipment according to the present invention will be shown, along with a comparative example of a U-shaped plate-shaped heatsink (see Fig. 12).
We compared the heat dissipation performance when using
実施■
第3図に示す装置に準じた装置を用いて線状熱伝導体l
Oと熔解性樹脂12からなるシートをコルゲート成形し
たピンフィン部材25bを下記条件で製造し第7図に示
すようなコルゲート状ピンフィン付き放熱器を作り実施
例とした。Implementation■ Using a device similar to the device shown in Figure 3, a linear thermal conductor l
A pin fin member 25b formed by corrugating a sheet made of O and meltable resin 12 was manufactured under the following conditions, and a radiator with corrugated pin fins as shown in FIG. 7 was prepared as an example.
線状熱伝導体
断面形状・・・円 形
太さ(線径)・・・200側φ
材 質・・・銅
クリール本数・・・500本
給糸方法・・・ボビン回転よこ取り
フィードロール周速・・・1m/分
使用筬ピッチ・・・25.4羽/1nch(したがって
ピッチ1菖l)
溶解性樹脂シート・・・PVAフィルム 厚さ;200
趨(倉庫セーレン社製)
加熱プレス条件・・・温度;200℃、荷重;なしコル
ゲート成形機・・・東洋工機社製
(アコーディオンプリーツマ
シン)
コルゲート成形条件・・・Y1=1本/■■、h=8m
m、コルゲート状ピンフィン配列密度・・・Y=1本/
mm、得られたコルゲート状ピンフィン部材25bをろ
う材(#@ニホンゲンマ社製、融点;152℃)を用い
て銅板(厚み;0,2+n)に接合してコルゲート状ピ
ンフィン付き放熱器をつくり実施例とした。Linear heat conductor cross-sectional shape...circle Thickness (wire diameter)...200 side φ Material...copper creel Number of threads...500 Yarn feeding method...Bobbin rotation weft removal feed roll circumference Speed: 1m/min Reed pitch: 25.4 feathers/1nch (therefore pitch: 1 liter) Soluble resin sheet: PVA film Thickness: 200
(Manufactured by Soko Seiren Co., Ltd.) Heat press conditions: Temperature: 200℃, Load: None Corrugate forming machine: Manufactured by Toyo Koki Co., Ltd. (Accordion pleat machine) Corrugate forming conditions: Y1 = 1 piece/■■ , h=8m
m, corrugated pin fin arrangement density...Y=1 piece/
mm, the obtained corrugated pin fin member 25b was bonded to a copper plate (thickness: 0.2+n) using a brazing material (#@Nihon Genma Co., Ltd., melting point: 152°C) to create a radiator with corrugated pin fins. And so.
北較■
第12図Aおよび第12図Bに示すような形状を有する
市販の放熱器(水容電気工業社製)を用いて比較例とし
た。Northern Comparison ■ A commercially available radiator (manufactured by Suiyo Denki Kogyo Co., Ltd.) having a shape as shown in FIGS. 12A and 12B was used as a comparative example.
なお放熱性能を調査するため熱流センサーを用いて放熱
量を測定した。In order to investigate heat dissipation performance, we measured the amount of heat dissipated using a heat flow sensor.
第1表
第1表より、本発明によるコルゲート状ピンフィン付き
放熱器を用いることにより放熱性能が向上することが証
明された。Table 1 From Table 1, it was proven that the heat radiation performance is improved by using the corrugated pin fin radiator according to the present invention.
本発明による電子機器用放熱器は前述のように構成され
ているので高い放熱性能を有し、且つ線径、配列密度の
変更が容易であり、それによって所望の放熱性能を有す
る放熱器を容易に製造することができる。Since the heat sink for electronic equipment according to the present invention is configured as described above, it has high heat dissipation performance, and the wire diameter and arrangement density can be easily changed, thereby making it easy to create a heat sink with desired heat dissipation performance. can be manufactured.
第1図は本発明のコルゲート状ピンフィン付き放熱器を
具備した電子機器の一例を示す断面図であり、第2図は
本発明の放熱器で用いられるコルゲート状ピンフィン部
材の一例を示す斜視図であり、第3図はビジフィン部材
を製造するために用いられる装置の一例を示す正面図で
あり、第4図はコルゲート状ピンフィン部材の頂部樹脂
を一部除去して線状熱伝導体の頂部を露出した状態を示
す正面図であり、第5図はコルゲート状ピンフィン部材
を所定サイズに切断した状態を示す斜視図であり、第6
図は放熱部材とコルゲート状ピンフィン部材を接合し、
ピンフィン部材中の樹脂を熔解除去し放熱器が得られた
状態を示す正面図であり、第7図は本発明による放熱器
を用いたICパッケージの断面図であり、第8図は第7
図のICパンケージで用いられるコルゲート状ピンフィ
ン付き放熱器を示す正面画であり、第9図Aは、本発明
による放熱器を用いた半導体素子を冷却する装置の正面
図であり、第9図Bはその側断面図であり、第10図は
、コルゲート状ピンフィン部材をパイプに巻付けてパイ
プ・フィン部材一体物を示す斜視図であり、第11図A
はピンフィン部材中の溶解性樹脂を溶解除去し、コルゲ
ート状ピンフィン付き放熱器が得られた状態を示す正面
図であり、第11図Bはその断面図であり、第12図A
は市販のコの字プレート形放熱器の正面図であり、第1
2図Bはその断面図である。
7.27.35・・・放熱器、 10・・・線状熱伝導
体、12・・・溶解性樹脂シート、
25a、25b・・・コルゲート状ピンフィン部材、8
.30・・・フィン支持部材。
5a
第2図
第
図
隼
図
ノ
5c
第
図
俸9A図
1B
第9B図
(A)
第
図
(A)
俸
図
第12
図
(B)
(B)FIG. 1 is a sectional view showing an example of an electronic device equipped with a radiator with corrugated pin fins of the present invention, and FIG. 2 is a perspective view showing an example of a corrugated pin fin member used in the radiator of the present invention. Fig. 3 is a front view showing an example of the apparatus used to manufacture the bisi-fin member, and Fig. 4 shows the top part of the linear heat conductor by partially removing the top resin of the corrugated pin fin member. FIG. 5 is a front view showing the exposed state; FIG. 5 is a perspective view showing the corrugated pin fin member cut into a predetermined size;
The figure shows a heat dissipation member and a corrugated pin fin member joined together.
FIG. 7 is a front view showing a state in which a heat sink is obtained by melting and removing the resin in the pin fin member, FIG. 7 is a cross-sectional view of an IC package using the heat sink according to the present invention, and FIG.
9A is a front view showing a heatsink with a corrugated pin fin used in the IC pancase of the present invention; FIG. 9A is a front view of a device for cooling a semiconductor device using the heatsink according to the present invention; FIG. 9B 10 is a side sectional view thereof, and FIG. 10 is a perspective view showing the pipe and fin member integrated by winding a corrugated pin fin member around a pipe.
11B is a front view showing a state in which a corrugated pin fin-equipped radiator is obtained by dissolving and removing the soluble resin in the pin fin member, FIG. 11B is a cross-sectional view thereof, and FIG. 12A is a
is a front view of a commercially available U-shaped plate-shaped heatsink;
Figure 2B is a sectional view thereof. 7.27.35... Heat sink, 10... Linear thermal conductor, 12... Meltable resin sheet, 25a, 25b... Corrugated pin fin member, 8
.. 30...Fin support member. 5a Figure 2 Figure 5c Figure Salary 9A Figure 1B Figure 9B (A) Figure (A) Salary Figure 12 (B) (B)
Claims (1)
導を仲介するフィン支持部材から成り、前記フィンが互
いに平行に間隔をあけ、且つコルゲート状に湾曲して配
置されている複数の線状熱伝導体から成ることを特徴と
するコルゲート状ピンフィン付き電子機器用放熱器。A plurality of linear heating elements comprising a fin and a fin support member that supports the fin and mediates heat conduction with the electronic device, and the fins are arranged parallel to each other at intervals and curved in a corrugate shape. A heatsink for electronic equipment with a corrugated pin fin characterized by being made of a conductor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15694288A JPH027550A (en) | 1988-06-27 | 1988-06-27 | Radiator for electronic device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15694288A JPH027550A (en) | 1988-06-27 | 1988-06-27 | Radiator for electronic device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH027550A true JPH027550A (en) | 1990-01-11 |
Family
ID=15638716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15694288A Pending JPH027550A (en) | 1988-06-27 | 1988-06-27 | Radiator for electronic device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH027550A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03250652A (en) * | 1990-02-28 | 1991-11-08 | Hitachi Ltd | Lsi cooling device and computer cooling device |
EP0706212A3 (en) * | 1994-10-03 | 1997-02-12 | Sumitomo Metal Ind | Assembly of cooling fins for an LSI box |
JP2001298139A (en) * | 2000-04-18 | 2001-10-26 | Ts Heatronics Co Ltd | Heat sink and manufacturing method thereof |
WO2012067044A1 (en) * | 2010-11-15 | 2012-05-24 | 株式会社事業創造研究所 | Heat sink |
-
1988
- 1988-06-27 JP JP15694288A patent/JPH027550A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03250652A (en) * | 1990-02-28 | 1991-11-08 | Hitachi Ltd | Lsi cooling device and computer cooling device |
EP0706212A3 (en) * | 1994-10-03 | 1997-02-12 | Sumitomo Metal Ind | Assembly of cooling fins for an LSI box |
JP2001298139A (en) * | 2000-04-18 | 2001-10-26 | Ts Heatronics Co Ltd | Heat sink and manufacturing method thereof |
WO2012067044A1 (en) * | 2010-11-15 | 2012-05-24 | 株式会社事業創造研究所 | Heat sink |
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