JPH0274567A - Setter for calcination of ceramic substrate - Google Patents

Abstract

PURPOSE:To shorten the binder-removing time and sintering time of a ceramic substrate by forming a plurality of small holes for ejecting air or other gases. CONSTITUTION:A ceramic substrate is produced by calcining a ceramic green sheet laminate 3 using the following device. A plurality of small holes 1-1 are opened on a calcination setter for a ceramic substrate for holding a laminate 3. A bank-shaped ridge 1-2 having a height of about 2mm is formed on the circumference of the setter 1 to prevent the falling of the substrate from the setter 1 in the case of floating the substrate by air flow ejected from the holes 1-1. The setter 1 is stacked on an air-intake assistant setter 2, a laminate 3 is placed on the setter 1 and air is supplied to an intake hole 2-1 and blasted from the small holes 1-1 against the lower face of the laminate 3 to float the laminate. When the binder-removing operation is carried out in the above state, the combustion gas of the binder is exhausted also from the lower side of the substrate to shorten the removing time and prevent the peeling, cracking, etc., of the substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a setter on which a ceramic green sheet laminate is placed when manufacturing a ceramic substrate by firing the ceramic green sheet laminate.

[Conventional technology]

Conventionally, when firing ceramic substrates, surface force (ceramic green sheet laminate is held on a flat flat plate setter, and the center and ceramic green sheet laminate are simultaneously heated in a firing furnace and fired. was.

[Problem to be solved by the invention]

The firing process for ceramic substrates can be divided into a binder removal process in which the organic binder component is burned out, and a sintering process in which the inorganic powder component is sintered.

When using a conventional center with a flat plate with a smooth surface, in the binder removal process, the substrate (to prevent warping, voids, peeling, etc.) You need to do it slowly and take your time. (Reference: Materials Forum N [Llo
1987. Ceramic substrates for functional circuits, edited by the Electronic Materials Industries Association, 1985 >Also, shrinkage of ceramic substrates occurs during the sintering process, and at this time, the movement of the substrate due to shrinkage is large, especially in the periphery of the substrate. Friction with the center may cause variations in shrinkage rate and cracks in the ceramic substrate. These drawbacks become more noticeable as the thickness and size of the ceramic substrate increases, and become a major problem.

[Means to solve the problem]

The present invention provides a setter for firing a ceramic substrate on which a ceramic green sheet laminate is placed when manufacturing a ceramic substrate by firing the ceramic green sheet laminate, which is provided with a plurality of micropores for blowing out air or other gas. It is characterized by having been provided.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a plan view of an embodiment of the present invention, in which a setter 1 with micro-holes is provided with micro-holes 1-1 having a diameter of 1 square inch at a pitch of 10 mm both in the vertical and horizontal directions. setter 1
The material is 92-99% alumina ceramic. The setter 1 has a thickness of 5 pieces and a size of 210 m+a', and a bank-like protrusion 1-2 with a height of 2 m- is attached to a portion with a circumference of 5 m+a. This bank-like protrusion 1-2 is for preventing the ceramic substrate from falling from the setter 1 when it is lifted up by the air flow from the microhole 1-1. The setter 1 is polished so that the surface roughness is 10 μm or less and the warpage is 50 μm or less.

Figure 3 is a sectional view showing the setting process when actually firing a ceramic substrate using this setter. The setter 1 with micro holes is stacked on the auxiliary setter 2 for air intake, and is always used in sets of two. The shapes of the edges of both setters are as shown in Figure 2, and the setter 1 with micro holes can be used on either the front or the back. The air intake hole 2-1 of the auxiliary setter has a diameter of 2 cm. The size of the ceramic green sheet laminate 3 placed on the setter 1 is 200mm, and the thickness is 10s+s
It is.

After setting as above, air intake hole 2-1
When air is sent to the setter 1, the air blows out from the micro holes 1-1 toward the bottom surface of the ceramic green sheet laminate 3, causing the ceramic green sheet laminate 3 to rise.
A gap is created between the two. When removing the binder in this state, the binder combustion exhaust is also carried out from the bottom of the substrate, so even if the time is reduced by about 20% compared to when using a conventional setter, peeling or cracking of the substrate will not occur.

Furthermore, in the sintering process, the substrate floats up, so that when shrinking during sintering, the sliding friction, particularly around the substrate periphery, becomes extremely small, and the shrinkage occurs smoothly. As a result, it was possible to reduce the time by about 30% compared to when using a conventional setter.

In this way, the microhole setter has the effect of significantly shortening the firing time.

〔Effect of the invention〕

As explained above, the present invention has a great effect in shortening the binder removal time and sintering time of a ceramic substrate by providing microholes in the setter.

[Brief explanation of the drawing]

FIGS. 1 and 2 are a plan view and a cross-sectional view of an embodiment of the present invention, respectively, showing the setting during firing. l...Microhole setter, 1-1...Micropore, 1-2
... Bank-like projection, 2... Auxiliary setter, 3... Ceramic green sheet laminate.

Claims (1)

[Claims] A ceramic substrate firing setter on which the ceramic green sheet laminate is placed when producing a ceramic substrate by firing the ceramic green sheet laminate is provided with a plurality of micropores for blowing out air or other gas. A setter for firing ceramic substrates.