JPH02724U - - Google Patents
Info
- Publication number
- JPH02724U JPH02724U JP7724388U JP7724388U JPH02724U JP H02724 U JPH02724 U JP H02724U JP 7724388 U JP7724388 U JP 7724388U JP 7724388 U JP7724388 U JP 7724388U JP H02724 U JPH02724 U JP H02724U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- pipe
- substrate
- window
- discharging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Description
第１図は本考案の実施例を示す図、第２図は本
考案の他の実施例を示す図である。
図において、１は密閉容器、２は基板、３は窓
、４は空気抜孔、５，５′，５″は開閉弁、６は
処理液供給パイプ、７は処理液排出パイプ、８は
チヤツク、９は処理液、１０は真空吸引パイプ、
１１は真空ポンプ、を示す。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing another embodiment of the present invention. In the figure, 1 is a sealed container, 2 is a substrate, 3 is a window, 4 is an air vent, 5, 5', 5'' are on-off valves, 6 is a processing liquid supply pipe, 7 is a processing liquid discharge pipe, 8 is a chuck, 9 is a processing liquid, 10 is a vacuum suction pipe,
11 indicates a vacuum pump.
Claims (1)
にして取付けることができる窓３を有し、底部の
壁１ｂに処理液を供給するパイプ６及び処理液を
排出するパイプ７が設けられた密閉容器１を具備
したことを特徴とする基板処理装置。 The upper wall 1a has a window 3 that can be attached with the surface to be processed of the substrate 2 facing downward, and the bottom wall 1b is provided with a pipe 6 for supplying a processing liquid and a pipe 7 for discharging the processing liquid. A substrate processing apparatus characterized by comprising a closed container 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7724388U JPH02724U (en) | 1988-06-13 | 1988-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7724388U JPH02724U (en) | 1988-06-13 | 1988-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02724U true JPH02724U (en) | 1990-01-05 |
Family
ID=31302240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7724388U Pending JPH02724U (en) | 1988-06-13 | 1988-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02724U (en) |
-
1988
- 1988-06-13 JP JP7724388U patent/JPH02724U/ja active Pending
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