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JPH0265656A - Coreless linear motor - Google Patents

Coreless linear motor

Info

Publication number
JPH0265656A
JPH0265656A JP21659088A JP21659088A JPH0265656A JP H0265656 A JPH0265656 A JP H0265656A JP 21659088 A JP21659088 A JP 21659088A JP 21659088 A JP21659088 A JP 21659088A JP H0265656 A JPH0265656 A JP H0265656A
Authority
JP
Japan
Prior art keywords
coreless
magnetic
field magnet
flat plate
linear motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21659088A
Other languages
Japanese (ja)
Inventor
Yoshihiro Akiyama
秋山 吉宏
Takeshi Shimamoto
嶋本 健
Kazuyuki Murata
和行 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21659088A priority Critical patent/JPH0265656A/en
Publication of JPH0265656A publication Critical patent/JPH0265656A/en
Pending legal-status Critical Current

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  • Linear Motors (AREA)

Abstract

PURPOSE:To generate smooth thrust by arranging coreless coils and conducting them to the magnet plate facing a field magnet having N and S poles alternately held by a magnetic substance and by moving it parallel to the field magnet. CONSTITUTION:A plurality of field magnets 2 in length L are arranged on a magnetic substance 1 forming a rail with the direction of poles alternately reverse. A magnetic plate 4 facing the field magnet 2 is provided as a mover. A plurality of coreless coils 3 are installed to the plate 4 at the pitch of 4/3 L. In the center of a coreless coil 3 a Hall element 6 is provided, with which the movement of the plate 4 is detected. Conduction switching of coils 3 is performed by a control device 7. On both sides of the plate 4 isosceles triangles of height L are formed, which are moved by bearings 5 along the rail 1. The thrust received by the plate 4 is thereby unified and smoothly moved, so that constant speed with high precision is obtained. It is suitable for a copying machine and an image scanner.

Description

【発明の詳細な説明】 卒業上の利用分野 一ト発明は、複写機、イメージスキャナーなどの高ty
度の定速性が要求される11!線駆動源に通したコアレ
スリニアモーターに関する。
[Detailed Description of the Invention] The invention is applicable to high-quality copying machines, image scanners, etc.
11 which requires a constant speed of 11 degrees! This invention relates to a coreless linear motor connected to a linear drive source.

従来の技術 近年リニアモーターは、高速応答性、高精度位置決め特
性1.ンブルメカニズム等の特徴を生かして、iff気
記録ハードディスク、光ディスクなどのビックアンプ駆
動部に多く製品化されている。
Conventional technology In recent years, linear motors have been developed with high-speed response and high-precision positioning characteristics.1. Taking advantage of features such as the embedding mechanism, many products have been commercialized as big amplifier drive parts for IF recording hard disks, optical disks, etc.

これらの用途に多く用いられているのは米国登録特許4
151447号公報、特公昭61−2 =1907号公
報等に開示されているコアレスコイルを用いたコアレス
リニアモーターである。前者について第3図を用いて簡
単に説明する。
U.S. registered patents 4 are often used for these purposes.
This is a coreless linear motor using a coreless coil disclosed in Japanese Patent Publication No. 151447, Japanese Patent Publication No. 1907, etc. The former will be briefly explained using FIG.

磁性体A I 2に長手方向にN、S交互に配置された
磁極列A14と、これに対向してかつ位相がずわて磁性
体B13に配置された磁極列B14と、この間隙を磁極
配列方向に移動可能なコイルを有し、磁極に応じてコイ
ルに通電切り替えすることにより移動するものである0
本構成ではコイルの移動にかかわらず磁気回路が変化し
ないためコギングが発生せず、滑らかな推力が得られる
0反面、磁気回路を構成する磁性体A、B間には大きな
吸引力が発生し、これらを支持する構造体11には非常
に高い剛性が要求される。
The magnetic pole array A14 is arranged alternately N and S in the longitudinal direction on the magnetic body A I 2, and the magnetic pole array B14 is arranged on the magnetic body B13 opposite to this and out of phase with the magnetic pole array A14, and this gap is used as a magnetic pole array. It has a coil that can be moved in the direction, and moves by switching the energization to the coil according to the magnetic pole.
In this configuration, the magnetic circuit does not change regardless of the movement of the coil, so cogging does not occur and a smooth thrust is obtained.However, on the other hand, a large attractive force is generated between the magnetic bodies A and B that make up the magnetic circuit. The structure 11 that supports these is required to have extremely high rigidity.

他の構成としては、特開昭61−9161号公報に示さ
れる片側磁極のコアレスリニアモーターがある。第4図
(a)、 (bL [C)にこれを示し簡単に説明する
。磁気回路は、界磁マグネット6、電機子コイル3、走
行磁性体7および磁性体板2で構成される。かかる構成
の場合磁気的吸引力は走行磁性体7のみにかかり、基台
lに対する剛性は不用であり、組み立ても容易である。
Another configuration is a coreless linear motor with a magnetic pole on one side, as disclosed in Japanese Patent Laid-Open No. 61-9161. This is shown in FIGS. 4(a) and (bL[C) and will be briefly explained. The magnetic circuit includes a field magnet 6, an armature coil 3, a traveling magnetic body 7, and a magnetic plate 2. In such a configuration, the magnetic attraction force is applied only to the traveling magnetic body 7, no rigidity is required for the base l, and assembly is easy.

発明が解決しようとする課題 しかし、米国登録特許4151447号公報に開示され
ている構成の場合、とくに複写機の原稿走査機構のよう
に移動距離が長く磁性体A、Bが長尺の1合には、構造
体11に要求される剛性は非常に大きくなる一方、吸着
力の働く磁性体A。
Problems to be Solved by the Invention However, in the case of the configuration disclosed in US Pat. Although the rigidity required for the structure 11 is extremely large, the magnetic material A has an attractive force.

Bの組み立てが非常に困難である。B is very difficult to assemble.

また、特開昭61−9161号公報に開示されているコ
アレスリニアモーターでは、走行磁性体7と界もnマグ
ネット6の位置関係により走行方向にそって可動部に作
用する磁気的吸引力が変化するため、磁極ピンチでコギ
ングが発生し、清らがな走行は期待できない0本発明は
これらの問題点に鑑み、移動距離が大きくとも構造的に
剛性を必要とせず、組み立てが容易であり、かつコギン
グが発生しないコアレスリニアモーターを掃供するもの
である。
In addition, in the coreless linear motor disclosed in JP-A-61-9161, the magnetic attraction force acting on the movable part along the running direction changes depending on the positional relationship between the running magnetic body 7 and the n magnet 6. Therefore, cogging occurs due to magnetic pole pinch, and clean running cannot be expected. In view of these problems, the present invention does not require structural rigidity even if the moving distance is large, and is easy to assemble. Moreover, the present invention provides a coreless linear motor that does not cause cogging.

課題を解決するための手段 上記課題を解決するために本発明のコアレスリニアモー
ターは、長さしのN、S磁極を交互に有する界磁マグネ
ットと、界磁マグネットを密着保持する磁性体と、界磁
マグ不ントと対向するコアレスコイルと、コアし・スコ
イルヲ保持スる磁性平板と、磁性平板を界磁マグネット
に対して平行移動可能に支持するガイド手段と、界磁マ
グネットの磁極に応してコアレスコイルに通電する制御
手段とを存したものである。特に磁性平板の移動方向端
面ば前記界磁マグネットに対向する面の幅が移動方向に
減少する形状であり、望ましくは界磁マグネットの着磁
中心の上方に頂点を持ち移動方向に高さLの2等辺3角
形状であるよう構成したものである。
Means for Solving the Problems In order to solve the above problems, the coreless linear motor of the present invention includes: a field magnet having alternating lengths of N and S magnetic poles; a magnetic body that holds the field magnet in close contact with each other; A coreless coil facing the field magnet, a magnetic flat plate holding the core and the coil, a guide means supporting the magnetic flat plate so as to be movable parallel to the field magnet, and a coreless coil facing the field magnet. and control means for energizing the coreless coil. In particular, the end face of the magnetic flat plate in the moving direction has a shape in which the width of the surface facing the field magnet decreases in the moving direction, and preferably has an apex above the magnetization center of the field magnet and has a height L in the moving direction. It is configured to have an isosceles triangular shape.

作用 本発明は上記した構成により、磁゛性体の機械的剛性を
増すことなく長尺化可能かつ組み立て性に優れ複写機の
原稿走査機構等にも使用可能とすることができる。さら
に、磁性体端面形状により磁性体、磁性平板間の走行方
向に沿って作用する磁気的吸引力変動を平均化すること
が可能である。
Effects of the present invention With the above-described configuration, it is possible to increase the length of the magnetic body without increasing the mechanical rigidity, and it is easy to assemble and can be used in the document scanning mechanism of a copying machine. Furthermore, it is possible to average out fluctuations in the magnetic attraction force acting along the running direction between the magnetic body and the magnetic flat plate by the shape of the end face of the magnetic body.

実施例 以下本発明の一実施例のコアレスリニアモーターについ
て図面を参照しながら説明する。
EXAMPLE Hereinafter, a coreless linear motor according to an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例のコアレスリニアモーターの
構成を示す概略図、第2回は界磁マグネント、磁性平板
およびコアレスコイルの平面図テある。第1図、第2図
において、1は磁性体を兼ねたレール、2はレール1に
接着されN、 S交互に磁極を有した界磁マグネシト、
3は3個のコアレスコイル、4はコアレスコイルを接着
保持した磁性平板を兼ねる可動部フレーム、5は可動部
フレームをレールに対して平行に移動可能に支持するた
めのヘアリング、6は各コイルの中央に位置し対向する
界磁マグネシトの磁束を検出するホール素子、7は制御
装置、8はコイル、ホール素子と制御装置を結ぶハーネ
スである。ここで磁性平板の端面ば、底辺が界磁マグネ
シトの幅、かつ高さが界磁マグネシトの長さLの2等辺
三角形状となっている。
Fig. 1 is a schematic diagram showing the configuration of a coreless linear motor according to an embodiment of the present invention, and Fig. 2 is a plan view of a field magnet, a magnetic flat plate, and a coreless coil. In Figures 1 and 2, 1 is a rail that also serves as a magnetic material, 2 is a field magnetite that is glued to the rail 1 and has N and S magnetic poles alternately;
3 is three coreless coils, 4 is a movable part frame that also serves as a magnetic flat plate to which the coreless coils are adhered and held, 5 is a hair ring for supporting the movable part frame so that it can move parallel to the rail, and 6 is each coil. 7 is a control device, 8 is a coil, and a harness connecting the Hall element and the control device. Here, the end face of the magnetic flat plate has an isosceles triangular shape with the base being the width of the field magnetite and the height being the length L of the field magnetite.

さて、各ホール素子が各コイル位置での界磁マグネット
による磁束密度を検出し、制御回路ではこの信号を用い
て、各コイルの通電切り替えを行う。コイルの通電によ
り推力が発生し可動部フレームはレール上を移動する0
通電切り替え方式については、3相半半波式、3相全波
力式など公知の方法が多数存在する。34[全波方式の
ドライバーを使用した場合には、長方形コイルの移動方
向に対向する2辺間の距離有し、各コイルの中心間隔を
4L/3とすることにより、コイルと界磁マグネットの
相対的位置関係によらず発生推力を均一にすることがで
きる。
Now, each Hall element detects the magnetic flux density due to the field magnet at each coil position, and the control circuit uses this signal to switch the energization of each coil. When the coil is energized, thrust is generated and the movable frame moves on the rail.
Regarding the energization switching method, there are many known methods such as a three-phase half-wave method and a three-phase full-wave power method. 34 [When using a full-wave type driver, the distance between the two sides facing the rectangular coil in the moving direction is set, and the distance between the centers of each coil is 4L/3, so that the distance between the coil and the field magnet is The generated thrust can be made uniform regardless of the relative positional relationship.

一方、界磁マグネットにより磁性平板の受ける吸引力は
、両者の相対位置関係によって変化する。
On the other hand, the attractive force exerted on the magnetic flat plate by the field magnet changes depending on the relative positional relationship between the two.

特に磁性平板の移動方向端面を透過する磁力線が磁性平
板の移動方向に対して鋭角をなす場合、この吸引力が磁
性平板の移動方向に作用する。磁性平板の端面形状が移
動方向に垂直な直線の場合、磁性平板のうける移動方向
の力が界磁マグネシトの磁極ピッチして変化する。この
ため、コイルの発生推力が均一であるにも関わらず、モ
ーターの推力としてはむらが発生することになる。
In particular, when the lines of magnetic force passing through the end face of the magnetic flat plate in the moving direction make an acute angle with respect to the moving direction of the magnetic flat plate, this attractive force acts in the moving direction of the magnetic flat plate. When the end face shape of the magnetic flat plate is a straight line perpendicular to the direction of movement, the force applied to the magnetic flat plate in the direction of movement changes with the pitch of the magnetic poles of the magnetite field. Therefore, although the thrust generated by the coil is uniform, the thrust of the motor is uneven.

本発明の磁性平板の端面形状によると、この移動方向の
作用力を約115とすることができる。
According to the end face shape of the magnetic flat plate of the present invention, the acting force in this moving direction can be about 115.

発明の効果 以上のように本発明は、長さしのN、S磁極を交互に有
する界磁マグネットと、界磁マグネットを密着保持する
磁性体と、界磁マグネットと対向するコアレスコイルと
、コアレスコイルを保持する磁性平板と、磁性平板を界
磁マグネットに対して平行移動可能に支持するガイド手
段と、界磁マグネシトの磁極に応じてコアレスコイルに
通電する制御手段とを存し、特に磁性平板の移動方向端
面は界磁マグネ7トに対向する面の幅が移動方向に減少
する形状であることにより、界磁マグネットの!ff極
とッチLで変化する磁性平板のうける移動方向の力を平
均化することが可能となり、滑らかな推力を得ることが
できる。
Effects of the Invention As described above, the present invention provides a field magnet having alternating long N and S magnetic poles, a magnetic body that closely holds the field magnet, a coreless coil facing the field magnet, and a coreless coil that faces the field magnet. It includes a magnetic flat plate that holds the coil, a guide means that supports the magnetic flat plate so as to be movable parallel to the field magnet, and a control means that energizes the coreless coil according to the magnetic pole of the field magnet. The end face in the moving direction of the field magnet 7 has a shape in which the width of the face facing the field magnet 7 decreases in the moving direction. It becomes possible to average the force in the moving direction applied to the magnetic flat plate that varies between the ff pole and the switch L, and a smooth thrust force can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例のコアレスリニアモーターの
構成を示す概略図、第2図は磁性平板およびコアレスコ
イルの平面図、第3図、第4図は従来のコアレスリニア
モーターを示した説明図である。 l・・・・・・レール、2・・・・・・界磁マグネット
、3・・・・・・コアレスコイル、4・・・・・・可動
部フレーム、5・・・・・・ヘアリング、6・・・・・
・ホール素子、7・・・・・・制御装置、8・・・・・
・ハーネス。
Fig. 1 is a schematic diagram showing the configuration of a coreless linear motor according to an embodiment of the present invention, Fig. 2 is a plan view of a magnetic flat plate and a coreless coil, and Figs. 3 and 4 show a conventional coreless linear motor. It is an explanatory diagram. l...Rail, 2...Field magnet, 3...Coreless coil, 4...Moving part frame, 5...Hair ring , 6...
・Hall element, 7... Control device, 8...
·Harness.

Claims (9)

【特許請求の範囲】[Claims] (1)長さLのN、S磁極を交互に有する界磁マグネッ
トと、前記界磁マグネットを密着保持する磁性体と、前
記界磁マグネットと対向するコアレスコイルと、前記コ
アレスコイルを保持する磁性平板と、前記磁性平板を前
記界磁マグネットに対して、平行移動可能に支持するガ
イド手段と、前記界磁マグネットの磁束密度を検出して
前記コアレスコイルに通電する制御手段とを有し、前記
磁性平板の移動方向端面は前記界磁マグネットに対向す
る面の幅が移動方向に減少する形状であることを特徴と
するコアレスリニアモーター。
(1) A field magnet having alternating N and S magnetic poles of length L, a magnetic body that holds the field magnet in close contact, a coreless coil facing the field magnet, and a magnet that holds the coreless coil. a flat plate; a guide means for supporting the magnetic flat plate so as to be movable in parallel with respect to the field magnet; and a control means for detecting the magnetic flux density of the field magnet and energizing the coreless coil; A coreless linear motor characterized in that the end face of the magnetic flat plate in the moving direction has a shape such that the width of the face facing the field magnet decreases in the moving direction.
(2)磁性平板の移動方向端面の形状が、移動方向に高
さLの3角形状であることを特徴とする請求項(1)記
載のコアレスリニアモーター。
(2) The coreless linear motor according to claim 1, wherein the end face of the magnetic flat plate in the moving direction has a triangular shape with a height L in the moving direction.
(3)磁性平板の移動方向端面の形状が、界磁マグネッ
トの着磁中心の上方に頂点を持つ2等辺3角形状である
ことを特徴とする請求項(2)記載のコアレスリニアモ
ーター。
(3) The coreless linear motor according to claim (2), wherein the shape of the end face in the moving direction of the magnetic flat plate is an isosceles triangular shape having an apex above the magnetization center of the field magnet.
(4)磁性平板の移動方向全長が長さLの整数倍である
ことを特徴とする請求項(1)記載のコアレスリニアモ
ーター。
(4) The coreless linear motor according to claim (1), wherein the total length of the magnetic flat plate in the moving direction is an integral multiple of the length L.
(5)界磁マグネットは磁性平板よりも移動方向に対し
て長いことを特徴とする請求項(1)記載のコアレスリ
ニアモーター。
(5) The coreless linear motor according to claim (1), wherein the field magnet is longer than the magnetic flat plate in the moving direction.
(6)コアレスコイルは長方形状であって、移動方向に
直交する辺の中心間隔は長さLであることを特徴とする
請求項(1)記載のコアレスリニアモーター。
(6) The coreless linear motor according to claim (1), wherein the coreless coil has a rectangular shape, and the distance between the centers of the sides perpendicular to the direction of movement is L.
(7)コアレスコイルは磁性平板に接着支持されている
ことを特徴とする請求項(1)記載のコアレスリニアモ
ーター。
(7) The coreless linear motor according to claim (1), wherein the coreless coil is adhesively supported on a magnetic flat plate.
(8)磁性平板はコアレスコイル給電用の導体パターン
を有することを特徴とする請求項(1)記載のコアレス
リニアモーター。
(8) The coreless linear motor according to claim (1), wherein the magnetic flat plate has a conductor pattern for feeding power to the coreless coil.
(9)制御手段はコアレスコイルの中央に配置されたホ
ール素子を有することを特徴とする請求項(1)記載の
コアレスリニアモーター。
(9) The coreless linear motor according to claim (1), wherein the control means includes a Hall element placed at the center of the coreless coil.
JP21659088A 1988-08-31 1988-08-31 Coreless linear motor Pending JPH0265656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21659088A JPH0265656A (en) 1988-08-31 1988-08-31 Coreless linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21659088A JPH0265656A (en) 1988-08-31 1988-08-31 Coreless linear motor

Publications (1)

Publication Number Publication Date
JPH0265656A true JPH0265656A (en) 1990-03-06

Family

ID=16690804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21659088A Pending JPH0265656A (en) 1988-08-31 1988-08-31 Coreless linear motor

Country Status (1)

Country Link
JP (1) JPH0265656A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5793128A (en) * 1995-03-31 1998-08-11 Minolta Co., Ltd. Encoder and motor with an encoder
US5796186A (en) * 1995-03-31 1998-08-18 Minolta Co., Ltd. Linear motor
US5801462A (en) * 1995-03-31 1998-09-01 Minolta Co., Ltd. Linear motor and image reading apparatus
US5872407A (en) * 1995-03-31 1999-02-16 Minolta Co., Ltd. Linear motor
US5909066A (en) * 1995-03-31 1999-06-01 Minolta Co., Ltd. Linear motor apparatus employing linear motor as drive source
US5955798A (en) * 1995-03-31 1999-09-21 Minolta Co., Ltd. Linear motor
JP2002165434A (en) * 2000-11-21 2002-06-07 Yaskawa Electric Corp Coreless linear motor
JP2005102487A (en) * 2003-08-29 2005-04-14 Sanyo Denki Co Ltd Linear motor
KR100485968B1 (en) * 2001-09-27 2005-05-03 도시바 기카이 가부시키가이샤 Linear m0t0r driving device
DE10135540B4 (en) * 2001-07-20 2007-03-15 Siemens Ag Method for controlling electric motors
US7332839B2 (en) 2003-06-27 2008-02-19 Siemens Aktiengesellschaft Electric machine having a laminated core with a portion jutting from the outer surface to form a gap for a flux sensor
JP2009170527A (en) * 2008-01-11 2009-07-30 Yamaha Motor Co Ltd Component recognizing device, component mounting device and component test device
JP2014137233A (en) * 2013-01-15 2014-07-28 Yaskawa Electric Corp Motor
JP2014137232A (en) * 2013-01-15 2014-07-28 Hirose Electric Co Ltd Rotation detection device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01278252A (en) * 1988-04-28 1989-11-08 Fujitsu Ltd Multipolar linear DC motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01278252A (en) * 1988-04-28 1989-11-08 Fujitsu Ltd Multipolar linear DC motor

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US5796186A (en) * 1995-03-31 1998-08-18 Minolta Co., Ltd. Linear motor
US5801462A (en) * 1995-03-31 1998-09-01 Minolta Co., Ltd. Linear motor and image reading apparatus
US5872407A (en) * 1995-03-31 1999-02-16 Minolta Co., Ltd. Linear motor
US5909066A (en) * 1995-03-31 1999-06-01 Minolta Co., Ltd. Linear motor apparatus employing linear motor as drive source
US5955798A (en) * 1995-03-31 1999-09-21 Minolta Co., Ltd. Linear motor
JP2002165434A (en) * 2000-11-21 2002-06-07 Yaskawa Electric Corp Coreless linear motor
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US7332839B2 (en) 2003-06-27 2008-02-19 Siemens Aktiengesellschaft Electric machine having a laminated core with a portion jutting from the outer surface to form a gap for a flux sensor
JP2005102487A (en) * 2003-08-29 2005-04-14 Sanyo Denki Co Ltd Linear motor
JP4522192B2 (en) * 2003-08-29 2010-08-11 山洋電気株式会社 Linear motor
JP2009170527A (en) * 2008-01-11 2009-07-30 Yamaha Motor Co Ltd Component recognizing device, component mounting device and component test device
JP2014137233A (en) * 2013-01-15 2014-07-28 Yaskawa Electric Corp Motor
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