JPH0265341U - - Google Patents
Info
- Publication number
- JPH0265341U JPH0265341U JP14349388U JP14349388U JPH0265341U JP H0265341 U JPH0265341 U JP H0265341U JP 14349388 U JP14349388 U JP 14349388U JP 14349388 U JP14349388 U JP 14349388U JP H0265341 U JPH0265341 U JP H0265341U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing stage
- rotation processing
- transfer arm
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Description
第１図は、本考案のウエハ回転処理装置の実施
例としてのウエハ周辺露光装置の概略説明図、第
２図は、第１図のウエハ回転処理ステージの斜視
外観図、第３図は、第１図のウエハ回転処理ステ
ージにウエハ搬送アームがウエハを載置した状態
をしめす側断面図、第４図及び第５図は従来のウ
エハ回転処理装置の概略図である。
図中、Ｗ……ウエハ、１，１′……ウエハ搬送
アーム、２，２′……ウエハ回転処理ステージ、
１′ａ……ウエハ搬送アームの真空吸着孔、２′
ａ……ウエハ回転処理ステージの真空吸着孔、２
′ｂ……側面、１８……凹部を示す。
FIG. 1 is a schematic explanatory diagram of a wafer peripheral exposure device as an embodiment of the wafer rotation processing apparatus of the present invention, FIG. 2 is a perspective external view of the wafer rotation processing stage of FIG. 1, and FIG. FIG. 1 is a side sectional view showing a state in which a wafer transfer arm places a wafer on a wafer rotation processing stage, and FIGS. 4 and 5 are schematic diagrams of a conventional wafer rotation processing apparatus. In the figure, W...wafer, 1, 1'... wafer transfer arm, 2, 2'... wafer rotation processing stage,
1'a...vacuum suction hole of wafer transfer arm, 2'
a... Vacuum suction hole of wafer rotation processing stage, 2
'b... side surface, 18... indicates a recessed portion.
Claims (1)
真空吸着孔を備えウエハの裏面において支持しウ
エハを該ウエハ回転処理ステージに搬送するウエ
ハ搬送アームとを有し、 ウエハ回転処理ステージの側面は、ウエハが前
記ウエハ処理ステージ上に載置された際にウエハ
搬送アームの退避スペースとなる凹部を有するこ
とを特徴とするウエハ回転処理装置。[Claims for Utility Model Registration] A wafer rotation processing stage having a wafer rotation processing stage equipped with a vacuum suction hole and a wafer transfer arm equipped with a vacuum suction hole and supporting the wafer on the back side of the wafer and transporting the wafer to the wafer rotation processing stage. A wafer rotation processing apparatus characterized in that a side surface of the processing stage has a recess that serves as a retreat space for a wafer transfer arm when a wafer is placed on the wafer processing stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988143493U JP2532708Y2 (en) | 1988-11-04 | 1988-11-04 | Wafer rotation processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988143493U JP2532708Y2 (en) | 1988-11-04 | 1988-11-04 | Wafer rotation processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0265341U true JPH0265341U (en) | 1990-05-16 |
| JP2532708Y2 JP2532708Y2 (en) | 1997-04-16 |
Family
ID=31410371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988143493U Expired - Lifetime JP2532708Y2 (en) | 1988-11-04 | 1988-11-04 | Wafer rotation processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2532708Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199245A (en) * | 2009-02-24 | 2010-09-09 | Yaskawa Electric Corp | Wafer conveyance system equipped with prealigner device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121930U (en) * | 1988-02-12 | 1989-08-18 |
-
1988
- 1988-11-04 JP JP1988143493U patent/JP2532708Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121930U (en) * | 1988-02-12 | 1989-08-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010199245A (en) * | 2009-02-24 | 2010-09-09 | Yaskawa Electric Corp | Wafer conveyance system equipped with prealigner device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2532708Y2 (en) | 1997-04-16 |