JPH0264031A - Manufacturing method of lump glass - Google Patents
Manufacturing method of lump glassInfo
- Publication number
- JPH0264031A JPH0264031A JP21443588A JP21443588A JPH0264031A JP H0264031 A JPH0264031 A JP H0264031A JP 21443588 A JP21443588 A JP 21443588A JP 21443588 A JP21443588 A JP 21443588A JP H0264031 A JPH0264031 A JP H0264031A
- Authority
- JP
- Japan
- Prior art keywords
- gel
- wet gel
- glass
- sol
- liquid sol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000011240 wet gel Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010419 fine particle Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 239000000499 gel Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 238000003980 solgel method Methods 0.000 claims description 4
- 150000004703 alkoxides Chemical class 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 239000002419 bulk glass Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 235000019270 ammonium chloride Nutrition 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- -1 Vickers hardness Chemical compound 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野1
本発明は、ゾル−ゲル法によるガラスの製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application 1] The present invention relates to a method for producing glass by a sol-gel method.
[従来の技術]
従来のゾル−ゲル法によるガラスの製造においては、金
属アルコキシドおよび金属酸化物の微粒子と主原料とし
て、目的ガラス成分組成の液状ゾルを調製し、該液状ゾ
ルを所望形状の密閉容器中にてゲル化させ、ウェットゲ
ルを作製した後、該ウェットゲルをH,O中に浸漬し、
ウェットゲル中のエタノールを820に置換、およびウ
ェットゲル中の塩化アンモニウムと820中に溶出させ
た後、HtO中から取り出し、熱処理を加え、ガラス化
するものであった。[Prior art] In the production of glass by the conventional sol-gel method, a liquid sol having a desired glass component composition is prepared using fine particles of metal alkoxides and metal oxides as main raw materials, and the liquid sol is sealed into a desired shape. After gelling in a container to produce a wet gel, the wet gel is immersed in H, O,
The ethanol in the wet gel was replaced with 820, and the ammonium chloride in the wet gel was eluted into the 820, then taken out from HtO, heat treated, and vitrified.
〔発明が解決しようとする課題)
しかし、前述の従来技術では、ウェットゲルな820中
に浸漬する際、エタノールの置換および塩化アンモニウ
ムの溶出量に、ウェットゲル内部で差が生じ、これが原
因となり、後プロセスの熱処理において、ゲルに割れ、
クラック等が発生し、大きな塊状ガラスと作製するのが
極めて困難であるという問題点を有する。[Problem to be Solved by the Invention] However, in the above-mentioned conventional technology, when immersing in the wet gel 820, a difference occurs in the amount of ethanol substitution and ammonium chloride elution inside the wet gel, which causes During the post-process heat treatment, the gel cracks,
There are problems in that cracks etc. occur and it is extremely difficult to produce large lumps of glass.
そこで本発明の目的は、ウェットゲルをHiO中に浸漬
する際のウェットゲル内部に生じるエタノールおよび塩
化アンモニウム量の分布を緩和し、大型の塊状ガラスを
容易に作製する方法を提供するところにある。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a method for easily producing large glass blocks by relaxing the distribution of the amount of ethanol and ammonium chloride generated inside a wet gel when the wet gel is immersed in HiO.
〔課題を解決するための手段1
本発明のゾル−ゲル法による塊状ガラスの製造方法は、
金属アルコキシドおよび金属酸化物の微粒子を主原料と
して、目的ガラス成分組成の液状ゾルを調製し、該液状
ゾルを所望形状の密閉容器中にてゲル化させ、ウェット
ゲルを作製した後、該ウェットゲルを、乾燥、焼結など
の熱処理をする製造方法に右いて、ウェットゲルをH□
O中に浸漬する際、超音波と照射することを特徴とする
。[Means for Solving the Problems 1 The method for producing bulk glass by the sol-gel method of the present invention is as follows:
A liquid sol with a desired glass component composition is prepared using metal alkoxide and metal oxide fine particles as main raw materials, and the liquid sol is gelled in a sealed container of a desired shape to produce a wet gel. Depending on the manufacturing method that involves heat treatment such as drying and sintering, the wet gel is
It is characterized by being irradiated with ultrasonic waves when immersed in O.
[作 用]
本発明は、ウェットゲルをH3O中に浸漬させる際、超
音波を照射し、H,Oとエタノールの置換および塩化ア
ンモニウムの溶出速度を大きくし、前述の置換と溶出を
完全に行なわせるもので、これにより、均質なウェット
ゲルの作製が可能となり、熱処理工程における割、クラ
ックの発生を防止できるもの・である。[Function] In the present invention, when a wet gel is immersed in H3O, ultrasonic waves are irradiated to increase the displacement of H, O and ethanol and the elution rate of ammonium chloride, thereby completely performing the above-mentioned displacement and elution. This makes it possible to produce a homogeneous wet gel and prevents cracks from occurring during the heat treatment process.
〔実 施 例1
エチルシリケート、エタノール、水、アンモニア水(2
9%)をモル比でlニア、6:4:0゜08の割合にな
るように混合し約3時間撹拌した後、室温にて、静置し
、粒子を成長、熟成させた。この後、減圧濃縮すること
により、分散性の良好なシリカ微粒子分散液を調製した
、なお、遠心沈降法で粒度分布を測定したところ、平均
粒子径は、0.54μmであった。[Example 1 Ethyl silicate, ethanol, water, ammonia water (2
9%) were mixed in a molar ratio of 6:4:0°08, stirred for about 3 hours, and then allowed to stand at room temperature to grow and ripen the particles. Thereafter, by concentrating under reduced pressure, a silica fine particle dispersion with good dispersibility was prepared.The particle size distribution was measured by a centrifugal sedimentation method, and the average particle size was 0.54 μm.
次に、先のエチルシリケートの174量のエチルシリケ
ートを用い、重量比で1:lになるように0.02規定
の塩酸を加え、水冷しながら約2時間撹拌することによ
り加水分解溶液を調製した。Next, using 174 amounts of ethyl silicate, add 0.02N hydrochloric acid to give a weight ratio of 1:1, and stir for about 2 hours while cooling with water to prepare a hydrolyzed solution. did.
ここで、前記シリカ微粒子分散液のp)(値を2規定の
塩酸を添加し、4.5に調製した後、エチルシリケート
の加水分解溶液と混合し、均質な液状ゾルになるまで゛
十分に撹拌した、その後、該液状ゾルに0.2規定のア
ンモニア水を添加し、pH値を5.0に調製し、直径3
0cmの円筒状の型に10cmの高さまで該液状ゾルを
注入した、更にツクをして密閉状態にてゲル化させウェ
ットゲルを作製した、このウェットゲルをH2O中に浸
漬し、超音波を照射した後、乾燥容器に移し入れ、70
°Cに保持した恒温乾燥機にて乾燥し、はぼ2週間で乾
燥が終了し、直径21cm、高さ7cmの白色ゲルが得
られた、ところが、HzO浸漬中に超音波を照射しなか
ったウェットゲルは、割れてしまった。Here, the value of p) of the silica fine particle dispersion was adjusted to 4.5 by adding 2N hydrochloric acid, and then mixed with a hydrolyzed solution of ethyl silicate, and thoroughly heated until it became a homogeneous liquid sol. After stirring, 0.2N ammonia water was added to the liquid sol to adjust the pH value to 5.0, and a diameter of 3
The liquid sol was injected into a 0 cm cylindrical mold to a height of 10 cm, and the mold was further sealed and gelled to produce a wet gel. This wet gel was immersed in H2O and irradiated with ultrasound. After that, transfer it to a drying container and dry it for 70 minutes.
It was dried in a constant temperature dryer kept at °C, and the drying was completed in about 2 weeks, yielding a white gel with a diameter of 21 cm and a height of 7 cm. However, no ultrasound was applied during immersion in HzO. The wet gel has cracked.
得られたゲル体と、酸素/窒素、雰囲気中で一旦800
℃まで加熱し、縮合反応の促進、脱水、脱有機残基など
の各種処理を行なった後、減圧下で1350℃まで加熱
しガラス化させた、更に窒素雰囲気中で1750℃まで
昇温し、30分間保持した後、徐冷した。The obtained gel body was once heated to 800 °C in an oxygen/nitrogen atmosphere.
℃, and various treatments such as promotion of condensation reaction, dehydration, removal of organic residues, etc., then heating to 1350℃ under reduced pressure to vitrify, further heating to 1750℃ in a nitrogen atmosphere, After holding for 30 minutes, it was slowly cooled.
こうして、得られたガラス体は透明性の高い無色の円柱
であり、直径15cm高さ5cI11重量1940gで
あった。The glass body thus obtained was a colorless cylinder with high transparency, and had a diameter of 15 cm, a height of 5 cI11, and a weight of 1940 g.
また、得られたガラスの諸物性は、ビッカース硬度、比
重、熱膨張係数、赤外および近赤外吸収スペクトル、屈
折率など、石英ガラスと一致していた。In addition, the physical properties of the obtained glass were consistent with those of silica glass, including Vickers hardness, specific gravity, coefficient of thermal expansion, infrared and near-infrared absorption spectra, and refractive index.
以上のように、本発明の方法によれば、光学的均質性に
優れた大型塊状ガラスの作製が容易である。As described above, according to the method of the present invention, it is easy to produce a large lump of glass with excellent optical homogeneity.
したがって、これまで石英ガラスと使用していた分野で
はもちろんのこと、特に高品質を要求されるIC用フォ
トマスク基板、光フアイバー母材、特殊光学用途など種
々の分野に応用が広がるものと考える。Therefore, we believe that its application will expand not only to fields where quartz glass has been used up until now, but also to various fields that require particularly high quality, such as photomask substrates for ICs, optical fiber base materials, and special optical applications.
また、ゾル調製工程において、B、Ti、Ge、Na、
Ca、LL、A1.Te、Zr、Ce、Nd、Crなど
種々の元素の添加が可能であることより、多種の多成分
系ガラスおよび既存組成ではないガラスの製造も容易で
ある。In addition, in the sol preparation step, B, Ti, Ge, Na,
Ca, LL, A1. Since it is possible to add various elements such as Te, Zr, Ce, Nd, and Cr, it is easy to manufacture a wide variety of multicomponent glasses and glasses that do not have existing compositions.
以上that's all
Claims (1)
料として、目的ガラス成分組成の液状ゾルを調製し、該
液状ゾルを所望形状の密閉容器中にてゲル化させ、ウェ
ットゲルを作製した後、該ウェットゲルを、乾燥、焼結
などの熱処理によりガラス化するゾル−ゲル法による製
造方法においてウェットゲルをH_2O中に浸漬する際
、超音波を照射することを特徴とする塊状ガラスの製造
方法。1) Prepare a liquid sol with the desired glass component composition using metal alkoxide and metal oxide fine particles as main raw materials, gel the liquid sol in a sealed container of a desired shape to produce a wet gel, and then A method for producing bulk glass, which comprises irradiating ultrasonic waves when a wet gel is immersed in H_2O in a production method using a sol-gel method in which wet gel is vitrified by heat treatment such as drying and sintering.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21443588A JPH0264031A (en) | 1988-08-29 | 1988-08-29 | Manufacturing method of lump glass |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21443588A JPH0264031A (en) | 1988-08-29 | 1988-08-29 | Manufacturing method of lump glass |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0264031A true JPH0264031A (en) | 1990-03-05 |
Family
ID=16655735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21443588A Pending JPH0264031A (en) | 1988-08-29 | 1988-08-29 | Manufacturing method of lump glass |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0264031A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US12211663B2 (en) | 2021-06-17 | 2025-01-28 | scia Systems GmbH | Charge carrier generation source |
-
1988
- 1988-08-29 JP JP21443588A patent/JPH0264031A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US12211663B2 (en) | 2021-06-17 | 2025-01-28 | scia Systems GmbH | Charge carrier generation source |
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