JPH0256242A - Adsorbent for gaseous organic halogen compound - Google Patents
Adsorbent for gaseous organic halogen compoundInfo
- Publication number
- JPH0256242A JPH0256242A JP63205740A JP20574088A JPH0256242A JP H0256242 A JPH0256242 A JP H0256242A JP 63205740 A JP63205740 A JP 63205740A JP 20574088 A JP20574088 A JP 20574088A JP H0256242 A JPH0256242 A JP H0256242A
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- organic halogen
- type
- adsorption
- halogen compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003463 adsorbent Substances 0.000 title claims abstract description 11
- 150000002896 organic halogen compounds Chemical class 0.000 title claims description 11
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 6
- 150000001340 alkali metals Chemical class 0.000 claims abstract description 6
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 6
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 6
- 229910000323 aluminium silicate Inorganic materials 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000010457 zeolite Substances 0.000 abstract description 12
- 229910021536 Zeolite Inorganic materials 0.000 abstract description 9
- 229910052736 halogen Inorganic materials 0.000 abstract description 4
- 150000002367 halogens Chemical class 0.000 abstract description 4
- 229910052792 caesium Inorganic materials 0.000 abstract description 2
- 239000012013 faujasite Substances 0.000 abstract description 2
- 238000005470 impregnation Methods 0.000 abstract description 2
- 238000005342 ion exchange Methods 0.000 abstract description 2
- 238000004898 kneading Methods 0.000 abstract description 2
- 229910052700 potassium Inorganic materials 0.000 abstract description 2
- 229910052701 rubidium Inorganic materials 0.000 abstract description 2
- 229910052708 sodium Inorganic materials 0.000 abstract description 2
- 238000001179 sorption measurement Methods 0.000 description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004338 Dichlorodifluoromethane Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 3
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 206010007269 Carcinogenicity Diseases 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 101000870345 Vasconcellea cundinamarcensis Cysteine proteinase 1 Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000007670 carcinogenicity Effects 0.000 description 1
- 231100000260 carcinogenicity Toxicity 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- -1 mesh Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
フロンガス、トリクロロエチレン等有機化合物中にフッ
素、塩素、及び臭素を含む有機ハロゲン１ヒ合物は揮発
性が高く、産業で使用される多くが大気中へ放出され、
その結果オゾン層破壊、発がん性等深刻な環境影響を与
えることが指摘されている。しかし、一方でこれらの化
合物は溶剤等に広く使われ−Ｃおり産業における重要性
が高いため、その使用を直ちに中止することはできない
。従って、これらの化合物について環境への影響を抑制
するには、各産業で発生ずる気体を捕集することが最も
妥当な方法である。本発明は、当該有機ハロゲン気体を
捕捉するための高性能な吸着剤に関するものであり、当
該気体の大気放出を１１４１制し、再利用を可能にする
ことを目的としている。Detailed Description of the Invention [Industrial Application Field] Organic halogen compounds containing fluorine, chlorine, and bromine in organic compounds such as chlorofluorocarbon gas and trichlorethylene are highly volatile, and most of them used in industry are released into the
It has been pointed out that this results in serious environmental impacts such as ozone layer depletion and carcinogenicity. However, on the other hand, these compounds are widely used as solvents and have great importance in the -C industry, so their use cannot be stopped immediately. Therefore, in order to suppress the impact of these compounds on the environment, the most appropriate method is to collect the gases generated in each industry. The present invention relates to a high-performance adsorbent for capturing the organic halogen gas, and aims to prevent the gas from being released into the atmosphere and to enable reuse.
吸着剤として従来より報告されているものは、活性炭及
び活性炭素繊維である。しかし、これらの材料では上記
有機ハロゲン化合物の高４度気体に対する吸着量は多い
が、低濃度の場合の吸６ｒＬが少なく、従って分圧の低
い当該気体に対する吸着力が低い。また、共存する物質
が優先的に吸着するため、有機ハロゲン自体の吸着が阻
害される場合がある。Activated carbon and activated carbon fiber are conventionally reported adsorbents. However, although these materials have a large amount of adsorption of the organic halogen compound to high-4 degree gases, the amount of absorption 6rL at low concentrations is small, and therefore the adsorption power to the gases with low partial pressures is low. Furthermore, since coexisting substances are preferentially adsorbed, adsorption of the organic halogen itself may be inhibited.
発明者らはこれらの化合物を捕集できる物質について鋭
意研究した結果、ゼオライト等の多孔性の結晶性アルミ
ノシリケートにアルカリ金属またはアルカリ土類金属を
含有させた物質がこれらの有機ハロゲン化合物を効率よ
く吸着できることを見い出した。As a result of intensive research into materials that can collect these compounds, the inventors found that a material containing alkali metals or alkaline earth metals in porous crystalline aluminosilicate such as zeolite can efficiently collect these organic halogen compounds. I discovered that it can be absorbed.
アルカリ金属及びアルカリ土類金属は一種類または多種
類を同時に上記結晶性物質に付与してよく、付与の方法
は含浸法、混練法、好ましくはイオン交換法により、含
有量は０． １から５０！！１パーセント、好ましくは
５から２０重量パーセントの靭囲内が適当である。また
、結晶性アルミノシリケートは公知の各種ゼオライト類
、好ましくはフォージャサイト型（Ｘ型及びＹ型）が使
用できる。One or more types of alkali metals and alkaline earth metals may be applied to the crystalline material at the same time, and the application method is an impregnation method, a kneading method, preferably an ion exchange method, and the content is 0. 1 to 50! ! A viscosity of 1 percent, preferably 5 to 20 percent by weight, is suitable. Further, various known zeolites, preferably faujasite type (X type and Y type) can be used as the crystalline aluminosilicate.
本発明の吸着剤を用いると、大気中に放出されたフロン
、トリクレン等の有機ハロゲン化合物気体を低濃度から
高効率で吸着することができ、環境破壊を防止するとと
もに、当該有機ハロゲン化合物を再利用することができ
る− 吸着性能の向上により装置の小型化、簡易化、及
び可搬性をもたせることが可能となる。また、骨格のゼ
オライトの細孔径を利用してそれより大きな分子径であ
る共存物質をＩＪＩ：除することができるため、従来吸
着を阻害していた物質の共存する排気ガスに対しても有
機ハロゲンだけを選択的に捕捉することができる。By using the adsorbent of the present invention, organic halogen compound gases such as fluorocarbons and trichlene released into the atmosphere can be adsorbed with high efficiency even at low concentrations, preventing environmental damage and recycling the organic halogen compounds. - Improved adsorption performance makes it possible to make the device smaller, simpler, and more portable. In addition, since it is possible to remove coexisting substances with larger molecular diameters using the pore size of the zeolite skeleton, organic halogen can be selectively captured.
本吸着剤は、溶剤、発２Ｂ剤、冷媒、噴射剤として利用
される各種の有機ハロゲン化合物の発生源での排出抑制
に利用できる。また、吸着剤は粉末状、粒状、膜状、編
目状、中空糸状等の各種形状で使用できる。This adsorbent can be used to suppress emissions at the source of various organic halogen compounds used as solvents, 2B-producing agents, refrigerants, and propellants. Further, the adsorbent can be used in various shapes such as powder, granules, membrane, mesh, and hollow fiber.
実施例１
表１はＸ型及びＹ型ゼオライトにアルカリ金属、アルカ
リ土類金属、または水素を付与した吸着剤によるジクロ
ロジフルオロメタンの吸着の例である。付与した金属で
はＮａ、 Ｋ、 Ｒｂ、 及びＣｓが特に吸着量
が多い。Example 1 Table 1 shows an example of the adsorption of dichlorodifluoromethane using an adsorbent prepared by adding an alkali metal, an alkaline earth metal, or hydrogen to X-type and Y-type zeolites. Among the applied metals, Na, K, Rb, and Cs have particularly large amounts of adsorption.
実施例２
表２はＫＹ型ゼオライトの排気処理温度によるジクロロ
ジフルオロメタンの吸着性能変化を示した例である。ゼ
オライト試料は放置しておくと空気中の水、炭酸ガス等
を吸収するため、有機ハロゲン化合物の吸着を阻害する
とされる。しかし、加熱処理によって吸収した水、炭酸
ガス等を除去すれば、有機ハロゲン化合物を吸着できる
。表に示した結果によれば、１００℃の加熱処理でほぼ
満足できる吸着性能となり、これより高温の処理では徐
々に性能が向上する程度であった。Example 2 Table 2 is an example showing the change in adsorption performance of dichlorodifluoromethane depending on the exhaust treatment temperature of KY type zeolite. If zeolite samples are left alone, they absorb water, carbon dioxide, etc. from the air, which is said to inhibit the adsorption of organic halogen compounds. However, if absorbed water, carbon dioxide, etc. are removed by heat treatment, organic halogen compounds can be adsorbed. According to the results shown in the table, almost satisfactory adsorption performance was obtained with heat treatment at 100° C., and performance improved gradually with treatment at higher temperatures.
類の方が有効である。type is more effective.
比較例１
表３は、Ｋ Ｙ型ゼオライトと活性炭との吸着性能の比
較である。吸着平衡圧力が高い領域ては活性炭の方が吸
着量が多いが、その圧力が低い場合には当該のゼオライ
トが活性炭を越える性能を示した。従って、有機ハロゲ
ン化合物の濃度が低い廃ガスから吸着させる場合には当
該のゼオライト表
Ｙ型ゼオライ
Ｈ′
ＬＩ＋
Ｎａ“
Ｋ′
Ｒｂ”
Ｃｓゝ
ト
Ｘ型ゼオライ
Ｎａ’
Ｋ ’
Ｒｂ’
ト
の吸＠同
表２
排気温度
（℃）
フロンガス吸着１
（ｍｇ／ｇ−吸着剤）
す
ａ） ０℃、＋ｔｏｒｒ（大気圧換算ａ度１３１６ ｐ
ｐ ｍ ）におけるジクロロジフルオロメタン（ＣＣ
Ｉ。Ｆ２）のＫ Ｙ型ゼオライトへの吸着量Comparative Example 1 Table 3 is a comparison of adsorption performance between KY type zeolite and activated carbon. In the region where the adsorption equilibrium pressure is high, activated carbon has a higher adsorption amount, but when the pressure is low, the zeolite showed performance exceeding activated carbon. Therefore, when adsorbing from waste gas with a low concentration of organic halogen compounds, the adsorption of the relevant zeolite table Y-type zeolite H' LI+ Na"K'Rb" Cs Table 2 Exhaust temperature (°C) Freon gas adsorption 1 (mg/g-adsorbent) a) 0°C, +torr (atmospheric pressure equivalent to a degree 1316 p
dichlorodifluoromethane (CC
I. Amount of F2) adsorbed on K Y type zeolite
Claims (1)
リ土類金属を含有させた物質で、金属の含有量が０．１
から５０重量パーセントを占める有機ハロゲン化合物気
体の吸着剤。A substance containing an alkali metal or alkaline earth metal in crystalline aluminosilicate, with a metal content of 0.1
An adsorbent for organic halogen compound gases comprising 50% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63205740A JPH0624624B2 (en) | 1988-08-19 | 1988-08-19 | Adsorbent for gaseous organic halogen compounds |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63205740A JPH0624624B2 (en) | 1988-08-19 | 1988-08-19 | Adsorbent for gaseous organic halogen compounds |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256242A true JPH0256242A (en) | 1990-02-26 |
| JPH0624624B2 JPH0624624B2 (en) | 1994-04-06 |
Family
ID=16511875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63205740A Expired - Lifetime JPH0624624B2 (en) | 1988-08-19 | 1988-08-19 | Adsorbent for gaseous organic halogen compounds |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624624B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003159513A (en) * | 2001-09-13 | 2003-06-03 | Seiko Epson Corp | Method for removing organic halogen compound gas, apparatus for removing organic halogen compound gas, semiconductor device manufacturing system, and semiconductor device manufacturing method |
| EP1967254A1 (en) | 2007-02-21 | 2008-09-10 | Tosoh Corporation | Agent for rendering halogen-containing gas harmless, and method of rendering halogen-containing gas harmless using same |
| JP2008229610A (en) * | 2007-02-21 | 2008-10-02 | Tosoh Corp | Halogen-based gas scavenger and halogen-based gas scavenging method using the same |
| JP2010137174A (en) * | 2008-12-12 | 2010-06-24 | Tosoh Corp | Detoxifying agent for halogen gas and method for detoxifying halogen gas using the same |
| JP2015502241A (en) * | 2011-09-29 | 2015-01-22 | ジョンソン、マッセイ、パブリック、リミテッド、カンパニーＪｏｈｎｓｏｎ Ｍａｔｔｈｅｙ Ｐｕｂｌｉｃｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ | Purification method |
-
1988
- 1988-08-19 JP JP63205740A patent/JPH0624624B2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003159513A (en) * | 2001-09-13 | 2003-06-03 | Seiko Epson Corp | Method for removing organic halogen compound gas, apparatus for removing organic halogen compound gas, semiconductor device manufacturing system, and semiconductor device manufacturing method |
| EP1967254A1 (en) | 2007-02-21 | 2008-09-10 | Tosoh Corporation | Agent for rendering halogen-containing gas harmless, and method of rendering halogen-containing gas harmless using same |
| JP2008229610A (en) * | 2007-02-21 | 2008-10-02 | Tosoh Corp | Halogen-based gas scavenger and halogen-based gas scavenging method using the same |
| US8282900B2 (en) | 2007-02-21 | 2012-10-09 | Tosoh Corporation | Agent for rendering halogen-containing gas harmless, and method of rendering halogen-containing gas harmless using same |
| TWI406702B (en) * | 2007-02-21 | 2013-09-01 | Tosoh Corp | Agent for rendering halogen-containing gas harmless, and method of rendering halogen-containing gas harmless using same |
| JP2010137174A (en) * | 2008-12-12 | 2010-06-24 | Tosoh Corp | Detoxifying agent for halogen gas and method for detoxifying halogen gas using the same |
| JP2015502241A (en) * | 2011-09-29 | 2015-01-22 | ジョンソン、マッセイ、パブリック、リミテッド、カンパニーＪｏｈｎｓｏｎ Ｍａｔｔｈｅｙ Ｐｕｂｌｉｃｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ | Purification method |
| US10252211B2 (en) | 2011-09-29 | 2019-04-09 | Johnson Matthey Public Limited Company | Purification process |
| US10722833B2 (en) | 2011-09-29 | 2020-07-28 | Johnson Matthey Public Limited Company | Purification process |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0624624B2 (en) | 1994-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |