JPH0244171U

JPH0244171U -

Info

Publication number: JPH0244171U
Application number: JP12281388U
Authority: JP
Priority date: 1988-09-21
Filing date: 1988-09-21
Publication date: 1990-03-27

Description

[Brief explanation of the drawing]

図面はこの考案の第一実施例を示すものであつ
て、第１図は真空用二重シールバルブにおけるメ
タルシール部およびＯリングシール部が開放され
ている状態を示す縦断側面図、第２図は真空用二
重シールバルブにおけるメタルシール部が閉じら
れると共にＯリングシール部が開放されている状
態を示す縦断側面図、第３図は第１図におけるシ
ールリングおよびＯリング付近を拡大して示す縦
断側面図である。図において、１は中空室、２は真空側流路、３
は排気低真空側流路、４は弁箱、５は弁座、６は
内側環状溝、７は外側環状溝、８はメタルシール
リング、９はゴム製Ｏリング、１０はメタルシー
ル開閉用駆動軸、１１は押圧面、１２はメタルシ
ール用弁体、１３は環状端面、１４はＯリングシ
ール開閉用駆動軸、１５は伝動部材、１６はＯリ
ングシール用弁体、１７はシール用第１ベローズ
、１８はシール用第２ベローズ、２１は円環状シ
ール本体、２２は耐圧用螺旋状スプリング、２３
はガイド筒、２６は軸受、２７はボルト、２８は
駆動軸移動部材、３０は回動工具係合用角軸部、
３１はキー、３２はキー溝、３５は雄ねじ部、３
６は回動工具係合用角軸部、３７は雌ねじ孔、３
８は透孔である。 The drawings show a first embodiment of this invention, in which Fig. 1 is a longitudinal cross-sectional side view showing the state in which the metal seal part and O-ring seal part of the vacuum double seal valve are open, and Fig. 2 3 is a longitudinal side view showing a state in which the metal seal part of a double seal valve for vacuum is closed and the O-ring seal part is open, and FIG. 3 is an enlarged view of the seal ring and O-ring vicinity in FIG. 1. FIG. In the figure, 1 is a hollow chamber, 2 is a vacuum side flow path, and 3 is a hollow chamber.
is the exhaust low vacuum side flow path, 4 is the valve box, 5 is the valve seat, 6 is the inner annular groove, 7 is the outer annular groove, 8 is the metal seal ring, 9 is the rubber O-ring, and 10 is the drive for opening and closing the metal seal. 11 is a pressure surface, 12 is a valve body for metal seal, 13 is an annular end face, 14 is a drive shaft for opening and closing O-ring seal, 15 is a transmission member, 16 is a valve body for O-ring seal, 17 is a first seal Bellows, 18 is a second bellows for sealing, 21 is an annular seal body, 22 is a pressure-resistant helical spring, 23
is a guide cylinder, 26 is a bearing, 27 is a bolt, 28 is a drive shaft moving member, 30 is a square shaft portion for engaging a rotary tool,
31 is a key, 32 is a keyway, 35 is a male threaded portion, 3
6 is a square shaft portion for engaging a rotary tool, 37 is a female threaded hole, 3
8 is a through hole.

Claims

[Scope of utility model registration request]

The hollow space in the valve box 4 includes a hollow chamber 1, a vacuum side flow path 2 communicating with the center of one end of the hollow chamber 1, and an exhaust low vacuum side flow path 3 communicating with the side of the hollow chamber 1. An inner annular groove 6 and an outer annular groove 7 are provided in the valve seat 5 at one end of the chamber 1, and a metal seal ring 8 is fitted into the inner annular groove 6.
A rubber O-ring 9 is fitted into the outer annular groove 7, and the metal seal opening/closing drive shaft 10 is disposed on the center line of the valve box 4 and is moved forward and backward toward the metal seal ring 8 side. A metal seal valve body 12 is attached, which has a truncated conical pressing surface 11 that is pressed against the metal seal ring 8, and has an annular end surface 13 that is pressed against the rubber O-ring 9, and which opens and closes the O-ring seal. The O-ring seal valve body 16 is moved by the metal seal opening/closing drive shaft 1 via the transmission member 15 by the metal seal opening/closing drive shaft 14.
0, and is slidably fitted in the middle part of the sealing part.
One end and the other end of the bellows 17 are hermetically fixed to the metal seal valve body 12 and the O-ring seal valve body 16, and one end and the other end of the second seal bellows 18 are connected to the O-ring seal valve. body 16
and a double seal valve for vacuum airtightly fixed to the end of the valve body 4 opposite to the valve seat 5.