JPH0241144A - ultrasonic probe - Google Patents
ultrasonic probeInfo
- Publication number
- JPH0241144A JPH0241144A JP63190290A JP19029088A JPH0241144A JP H0241144 A JPH0241144 A JP H0241144A JP 63190290 A JP63190290 A JP 63190290A JP 19029088 A JP19029088 A JP 19029088A JP H0241144 A JPH0241144 A JP H0241144A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- axis direction
- short axis
- ultrasonic probe
- array transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims description 13
- 230000010287 polarization Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 6
- 238000002604 ultrasonography Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 239000011888 foil Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 5
- 239000011358 absorbing material Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- -1 titanium oxide Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔概 要〕
配列振動子により超音波ビームを制御する超音波探触子
に関し、
短軸方向における配列振動子の圧電体の端部に行くに従
って分極を小さくなどして当該端部の放射を小さくし、
超音波ビームの短軸方向の放射特性を改善することを目
的とし、
配列振動子の配列方向と直交する方向（以下、短軸方向
という）における当該配列振動子の振幅重み付けを行う
手段として、各配列振動子の圧電体の分極を短軸方向に
おいて中央部から端部に行くに従って小さくするように
構成、各配列振動子の圧電体の表面と電極との間の距離
を短軸方向において中央部から端部に行くに従って大き
くするように構成、更に各配列振動子の短軸方向におい
て当該各配列振動子の圧電体を方向の異なる２方向に切
断して中央部から端部に行くに従って幅が小さくなるよ
うに構成する。また、上記各配列振動子の圧電体の短軸
方向の中央部と端部との間を複数個に分割し、開口値を
変えて制御し得るように構成する。[Detailed Description of the Invention] [Summary] Regarding an ultrasonic probe that controls an ultrasonic beam using an array transducer, the polarization is decreased toward the end of the piezoelectric body of the array transducer in the short axis direction. Reduce the radiation at the end,
For the purpose of improving the radiation characteristics of the ultrasonic beam in the short axis direction, each transducer array is used as a means to weight the amplitude of the transducer array in a direction perpendicular to the direction in which the transducers are arranged (hereinafter referred to as the short axis direction). The polarization of the piezoelectric body of the arrayed vibrator is configured to decrease from the center to the end in the short axis direction, and the distance between the surface of the piezoelectric body of each array vibrator and the electrode is set to decrease in the short axis direction from the center to the end. The piezoelectric material of each arrayed vibrator is cut in two different directions in the short axis direction of each arrayed vibrator, and the width increases as it goes from the center to the end. Configure it to be smaller. Furthermore, the piezoelectric body of each of the arrayed vibrators is divided into a plurality of parts between the central part and the end part in the short axis direction, so that the aperture value can be changed and controlled.
〔産業上の利用分野）
本発明は、配列振動子により超音波ビームを制御する超
音波探触子に関するものである。特に、高画質の超音波
診断装置を実現するために、短軸方向の超音波ビームの
改善に関するものである。[Industrial Application Field] The present invention relates to an ultrasonic probe that controls an ultrasonic beam using an array transducer. In particular, the present invention relates to improvement of the ultrasonic beam in the short axis direction in order to realize a high-image-quality ultrasonic diagnostic apparatus.
〔従来の技術と発明が解決しようとする課題〕従来、超
音波診断装置における配列振動子の配列方向と直交する
方向に対する超音波探触子ビームの方向特性の改善とし
て、特開昭６１−７６９４９号に記載する技術がある。[Prior art and problems to be solved by the invention] Conventionally, as an improvement of the directional characteristics of an ultrasound probe beam in a direction orthogonal to the arrangement direction of array transducers in an ultrasound diagnostic apparatus, Japanese Patent Application Laid-Open No. 61-76949 has been proposed. There is a technology described in the issue.
これは第７図（イ）に示すように、圧電体２１上に形成
する電極２２の両端部分の面積を図示のように小さくし
たり、あるいは同図（ロ）に示すように、圧電体２１の
両端部分に行くに従って厚くなる吸音材２３を設けたり
するものである。しかし、前者の場合、電極２２のパタ
ーンの幅を配列された各振動子の幅である約０．５ｍｍ
以下に形成する必要があるが、従来の銀焼き付は電極を
上記の形状に形成することは困難であるという問題があ
った。また、後者の場合、圧電体２１から放射される超
音波が吸収材２３と人体との間で反射されないように人
体の音響インピーダンス値と等しい吸音材２３を選ぶ必
要がある。この条件に適合する吸音材２３としては、シ
リコン樹脂に酸化チタン等の金属酸化物を混合したもの
などがあるが、この材料は音速が人体よりも小さいため
に、圧電体２１面上で中央部を薄く、端部を厚く形成す
ると超音波を拡散するレンズの効果が生じてしまい不都
合が発生するという問題があった。This can be done by reducing the area of both ends of the electrode 22 formed on the piezoelectric body 21 as shown in FIG. A sound absorbing material 23 is provided which becomes thicker toward both end portions. However, in the former case, the width of the pattern of the electrode 22 is set to about 0.5 mm, which is the width of each arrayed vibrator.
Although it is necessary to form the electrode in the following manner, there is a problem in that it is difficult to form the electrode in the above shape using conventional silver baking. In the latter case, it is necessary to select a sound absorbing material 23 having an acoustic impedance value equal to that of the human body so that the ultrasonic waves emitted from the piezoelectric body 21 are not reflected between the absorbing material 23 and the human body. Sound-absorbing materials 23 that meet this condition include those made of silicone resin mixed with metal oxides such as titanium oxide, but since the sound velocity of this material is lower than that of the human body, There is a problem in that if the end portion is made thin and the end portion is made thick, a lens effect that diffuses the ultrasonic waves will occur, causing problems.
本発明は、短軸方向における配列振動子の圧電体の端部
に行くに従って分極を小さ（などして当該端部の放射を
小さくし、超音波ビームの短軸方向の放射特性を改善す
ることを目的としている。The present invention improves the radiation characteristics of the ultrasonic beam in the short axis direction by decreasing the polarization toward the ends of the piezoelectric body of the array transducer in the short axis direction (for example, reducing the radiation at the ends). It is an object.
第１図ないし第４図を参照して課題を解決する手段を説
明する。Means for solving the problem will be explained with reference to FIGS. 1 to 4.
第１図において、圧電体１は、高周波電界を印加して超
音波を放射、および超音波を受信して高周波信号に変換
するものである。In FIG. 1, a piezoelectric body 1 applies a high-frequency electric field to emit ultrasonic waves, and receives ultrasonic waves and converts them into high-frequency signals.
電極２は、圧電体ｌに高周波電界を印加、および超音波
を受信して圧電体ｌに発生した高周波信号を取り出すた
めのものである。The electrode 2 is used to apply a high frequency electric field to the piezoelectric body 1, receive ultrasonic waves, and extract a high frequency signal generated in the piezoelectric body 1.
第２図において、誘電体（あるいは抵抗体）１１は、圧
電体１の表面と、電極２との間の距離を、端部に行くに
従って大きくするためのものである。In FIG. 2, a dielectric (or resistor) 11 is used to increase the distance between the surface of the piezoelectric material 1 and the electrode 2 toward the end.
第３図および第４図において、分割溝４は、圧電体１な
どを短軸方向について異なる２方向に切断した溝である
。In FIGS. 3 and 4, the dividing grooves 4 are grooves obtained by cutting the piezoelectric body 1 or the like in two different directions with respect to the minor axis direction.
本発明は、第１図に示すように、圧電体１の短軸方向の
端部に行くに従って分極を小さくするようにしている。In the present invention, as shown in FIG. 1, polarization is made smaller toward the ends of the piezoelectric body 1 in the short axis direction.
また、第２図に示すように、圧電体１の短軸方向の端部
に行くに従って圧電体１と電極２との間に挿入した誘電
体（あるいは抵抗体）１１の厚さを大きくして両者の間
の距離を大きくするようにしている。更に、第３図およ
び第４図に示すように、圧電体１を短軸方向に対して異
なる２つの方向に切断して、端部に行くに従って幅が狭
くなるようにしている。Furthermore, as shown in FIG. 2, the thickness of the dielectric (or resistor) 11 inserted between the piezoelectric body 1 and the electrode 2 is increased toward the end of the piezoelectric body 1 in the short axis direction. I am trying to increase the distance between the two. Further, as shown in FIGS. 3 and 4, the piezoelectric body 1 is cut in two different directions with respect to the minor axis direction, so that the width becomes narrower toward the ends.
従って、各配列振動子を構成する圧電体１の短軸方向の
端部に行くに従って、分極を小さく、圧電体１と電極２
との間の距離を大きく、あるいは圧電体１の面積を小さ
くすることにより、短軸方向における超音波の放射特性
を改善することが可能となる。これにより、良質な高分
解能の超音波画像を得ることができる。Therefore, the polarization decreases toward the ends of the piezoelectric body 1 in the short axis direction of the piezoelectric body 1 constituting each array vibrator, and the piezoelectric body 1 and the electrode 2
By increasing the distance between the piezoelectric body 1 or decreasing the area of the piezoelectric body 1, it is possible to improve the ultrasonic radiation characteristics in the short axis direction. This makes it possible to obtain high-quality, high-resolution ultrasound images.
次に第１図から第６図を用いて本発明の実施例の構成お
よび製造方法などを説明する。Next, the structure and manufacturing method of an embodiment of the present invention will be explained using FIGS. 1 to 6.
第１図は、振動子を構成する圧電体１の短軸方向の端部
に行くに従って、分極を小さくした実施例構成を示す。FIG. 1 shows an embodiment configuration in which polarization decreases toward the ends of the piezoelectric body 1 in the short axis direction of the piezoelectric body 1 constituting the vibrator.
第１図において、振動子による電気音響変換は、−船釣
にセラミンクの焼結体に電界を加えて分極を施した圧電
体１を用いている。−様に分極された圧電体の両端の部
分を温度制御可能な溶接器などを用いて圧電体１のキ二
−リ点以上に加熱することにより、端の部分の分極を小
さくすることができる。この結果として、第１図（ロ）
に示すように、圧電体ｌの電気音響変換効率を表す結合
係数について、中央部を大きく、端部を小さくして短軸
方向の重みを与えることができる。第１図（ロ）は、こ
のようにして製作した振動子の結合係数の分布の実測値
を示す。尚、以上は圧電体１を分極した後に分極を小さ
くする方法を述べたが、分極の際に加える電界を中央部
を大きく、端部を小さくすることにより、振動子の電気
音響変換効率を第１図（ロ）に示すようにしてもよい。In FIG. 1, electroacoustic conversion by a vibrator uses a piezoelectric body 1 which is polarized by applying an electric field to a ceramic sintered body. By heating both ends of the piezoelectric body polarized in the same manner as above to the Keny point of the piezoelectric body 1 using a temperature-controllable welder or the like, the polarization at the end portions can be reduced. . As a result of this, Figure 1 (b)
As shown in FIG. 2, the coupling coefficient representing the electroacoustic conversion efficiency of the piezoelectric body 1 can be weighted in the short axis direction by making the center part larger and the end parts smaller. FIG. 1(b) shows actual measured values of the coupling coefficient distribution of the vibrator thus manufactured. The method described above is to reduce the polarization after polarizing the piezoelectric body 1, but by increasing the electric field applied during polarization at the center and decreasing it at the ends, the electroacoustic conversion efficiency of the vibrator can be increased. It may be configured as shown in FIG. 1 (b).
第２図は、振動子を構成する圧電体１の短軸方向の端部
に行くに従って、誘電体（あるいは抵抗体）１１の厚さ
を大きくした実施例構成を示す。FIG. 2 shows an embodiment configuration in which the thickness of the dielectric (or resistor) 11 increases toward the end in the short axis direction of the piezoelectric body 1 constituting the vibrator.
第２図において、圧電体１の表面と電極２との間にエポ
キシ樹脂等の誘電体１１を設け、その厚みを端部に行く
に従って厚くすることにより、当該端部の圧電体ｌに加
わる電界を小さくして短軸方向の重みを与える。圧電体
１の比誘電率は約８００程度であり、エポキシ樹脂を用
いて作成した誘電体１１の比誘電率は約４であるので、
例えばエポキシ樹脂による誘電体１１の厚みを圧電体１
の２００分の１きすれば、圧電体に加わる電界は２分の
１となり、放射される超音波の強さが小さくなる。尚、
以上において例としてエポキシ樹脂を示したが、誘電率
を有する物質であれば良い。In FIG. 2, a dielectric material 11 such as epoxy resin is provided between the surface of the piezoelectric material 1 and the electrode 2, and the thickness of the dielectric material 11 is increased toward the end, so that an electric field is applied to the piezoelectric material 1 at the end. is made smaller to give weight in the short axis direction. The dielectric constant of the piezoelectric body 1 is about 800, and the dielectric constant of the dielectric body 11 made using epoxy resin is about 4.
For example, the thickness of the dielectric material 11 made of epoxy resin is the thickness of the piezoelectric material 1
If the value is 1/200, the electric field applied to the piezoelectric body becomes 1/2, and the intensity of the emitted ultrasonic waves becomes smaller. still,
Although epoxy resin is shown as an example above, any material having a dielectric constant may be used.
また抵抗体を使用して圧電体１に印加される電圧を低下
させるようにしてもよい。Alternatively, a resistor may be used to reduce the voltage applied to the piezoelectric body 1.
第３図は、振動子を構成する圧電体１の短軸方向の端部
に行くに従って、圧電体１の面積を小さくした実施例構
成を示す。第３図（イ）は斜視図を示し、第３図（ロ）
は右側面の断面図を示す。FIG. 3 shows an embodiment configuration in which the area of the piezoelectric body 1 is reduced toward the ends of the piezoelectric body 1 in the short axis direction of the vibrator. Figure 3 (a) shows a perspective view, and Figure 3 (b)
shows a cross-sectional view of the right side.
第３図において、まず圧電体１の一方の面にフレキシブ
ルプリント板（以下ＦＰＣという）６上に配置された信
号取出パターン７を半田付けにより図示のように接合し
、このＦＰＣ６と共に背面支持体５を形成する。次に、
圧電体１のＦＰＣ６が接合されている反対側の面に金属
′１ｔｉａを半田付けにより接合する。更に金属箔８を
取付けた圧電体１の上に１／４波長厚整合Ｎ３を形成す
る。その後、１／４波長波長厚層３、金属箔８および圧
電体１を一緒にグイシングツ−を用いて図示のように、
方向の異なる２方向に切断して、所定数にアレイ分割を
行い、探触子を完成する。これにより、第３図（イ）図
示のように、短軸方向に行くに従って、圧電体１から超
音波信号が放射される面積が小さくなるように作成され
る。尚、分割溝４は上記異なる２方向の切断によってで
きた切削溝である。In FIG. 3, first, a signal extraction pattern 7 arranged on a flexible printed board (hereinafter referred to as FPC) 6 is joined to one surface of the piezoelectric body 1 by soldering as shown in the figure, and together with this FPC 6, a back support 5 is form. next,
A metal '1tia is joined by soldering to the surface of the piezoelectric body 1 on the opposite side to which the FPC 6 is joined. Furthermore, a 1/4 wavelength thickness matching N3 is formed on the piezoelectric body 1 to which the metal foil 8 is attached. Thereafter, as shown in the figure, the 1/4 wavelength thick layer 3, the metal foil 8, and the piezoelectric body 1 are assembled together using a guising tool.
The probe is completed by cutting in two different directions and dividing into a predetermined number of arrays. As a result, as shown in FIG. 3(a), the piezoelectric body 1 is made so that the area from which the ultrasonic signal is radiated becomes smaller as it goes in the short axis direction. Incidentally, the dividing groove 4 is a cutting groove formed by cutting in the two different directions.
第４図は、振動子を構成する圧電体１の短軸方向の端部
に行くに従って、圧電体１の面積を小さくした実施例構
成を示す。第４図（イ）は斜視図を示し、第４図（ロ）
は右側面の断面図を示す。FIG. 4 shows an embodiment structure in which the area of the piezoelectric body 1 becomes smaller toward the end in the short axis direction of the piezoelectric body 1 constituting the vibrator. Figure 4 (a) shows a perspective view, and Figure 4 (b)
shows a cross-sectional view of the right side.
この第４図は、第３図の圧電体１、金属箔８および１／
４波長波長厚層３を一体に切断する代わりに、圧電体１
を切断した後、この上に金属箔８および１／４波長厚整
合Ｎ３を接合したものである。This FIG. 4 shows the piezoelectric body 1, metal foil 8 and 1/
Instead of cutting the four-wavelength thick layer 3 into one piece, the piezoelectric body 1
After cutting, a metal foil 8 and a quarter-wave thickness matching N3 are bonded thereon.
第４図において、まず圧電体１の一方の面にＦＰＣ６上
に配置された信号取出パターン７を半田付けにより図示
のように接合し、このＦＰＣ６と共に背面支持体５を形
成する。次に、圧電体１をダイシングソーにより方向の
異なる２方向に切断することにより、所定数にアレイ分
割を行う。分割溝４は上記異なる２方向の切断によって
できた切削溝である。その後、圧電体ｌのＦＰＣ６が接
合されている反対側の所定位置に金属箔を半田付けによ
り接合すると共に共通アース電極８−１を半田づけして
図示のように外部に取り出し、更にこの上に１／４波長
波長厚層３を形成することにより、探触子を完成する。In FIG. 4, first, the signal extraction pattern 7 arranged on the FPC 6 is joined to one surface of the piezoelectric body 1 by soldering as shown in the figure, and the back support 5 is formed together with this FPC 6. Next, the piezoelectric body 1 is divided into a predetermined number of arrays by cutting it in two different directions using a dicing saw. The dividing groove 4 is a cut groove formed by cutting in the two different directions. After that, a metal foil is soldered to a predetermined position on the opposite side of the piezoelectric body 1 to which the FPC 6 is bonded, and a common ground electrode 8-1 is soldered and taken out to the outside as shown in the figure. By forming the 1/4 wavelength thick layer 3, the probe is completed.
第５図（イ）は、第３図あるいは第４図で形成した１素
子分の圧電体ｌの形状を示す。この圧電体１に対して、
更に第５図（ロ）に示すようにサブダイス溝９を設け、
所望の振動モードを得られるように、圧電体１のｗ／を
比を下げるようにする。FIG. 5(A) shows the shape of the piezoelectric body l for one element formed in FIG. 3 or FIG. 4. For this piezoelectric body 1,
Furthermore, as shown in FIG. 5(b), a sub die groove 9 is provided,
In order to obtain a desired vibration mode, the w/ ratio of the piezoelectric body 1 is lowered.
第６図は、短軸方向に圧電体１を３分割した例を示す。FIG. 6 shows an example in which the piezoelectric body 1 is divided into three parts in the short axis direction.
第６図（イ）は第３図圧電体１を３分割した断面図を示
し、第６図（ロ）は第４図圧電体１を３分割した断面図
を示す。図示のように、中央部分と、端部との間を３分
割することにより、短軸方向の開口値を任意に選択する
ことが可能となる。尚、分割数は、３分割に限られるこ
となく、例えば中央部と、端部との間を複数個に分割し
、中央部を中心に任意の分割部分を外部で電気的に接続
して任意の開口値を得るようにする０図示短軸方向に３
分割した例は、圧電体１の一方の面に信号取出パターン
７ａ、７ｂ、７ｂ’ を持つＦＰＣ６ａ、６ｂ、６ｂ’
を半田付けにより接合した後、圧電体１をグイシング
ツ−により短軸方向に３分割し、ＦＰＣ６ａ、６ｂ、６
ｂ’ と共に圧電体１の背面に背面支持体５を形成した
後、上記同様の製作工程を辿ることにより探触子を完成
する。6(a) shows a sectional view of the piezoelectric body 1 of FIG. 3 divided into three parts, and FIG. 6(b) shows a sectional view of the piezoelectric body 1 of FIG. 4 divided into three parts. As shown in the figure, by dividing the center portion and the end portion into three parts, it becomes possible to arbitrarily select the aperture value in the short axis direction. Note that the number of divisions is not limited to three; for example, the center part and the end part may be divided into multiple parts, and any divided part may be electrically connected externally around the center part. 3 in the direction of the short axis shown in the figure to obtain an aperture value of
The divided example is FPC 6a, 6b, 6b' which has signal extraction patterns 7a, 7b, 7b' on one side of piezoelectric body 1.
After joining by soldering, the piezoelectric body 1 is divided into three parts in the short axis direction with a guiding tool, and the FPCs 6a, 6b, 6
After forming the back support 5 on the back surface of the piezoelectric body 1 together with b', the probe is completed by following the same manufacturing steps as described above.
以上説明したように、本発明によれば、各配列振動子を
構成する圧電体１の短軸方向の端部に行くに従って、分
極を小さく、圧電体１と電極２との距離を大きく、ある
いは圧電体１の面積を小さく、更に短軸方向に圧電体１
を複数個に分割する構成を採用しているため、短軸方向
における超音波の放射特性を改善することができる。こ
れにより、良質な高分解能の超音波画像を得ることがで
き、臨床上極めて有効となる。As explained above, according to the present invention, the polarization is decreased and the distance between the piezoelectric body 1 and the electrode 2 is increased or The area of the piezoelectric body 1 is reduced, and the piezoelectric body 1 is further expanded in the short axis direction.
Since the configuration is such that the beam is divided into a plurality of pieces, the radiation characteristics of the ultrasonic wave in the short axis direction can be improved. This makes it possible to obtain high-quality, high-resolution ultrasound images, which is extremely effective clinically.
第１図は本発明の１実施例構成図、第２図から第６図は
本発明の他の実施例構成図、第７図は従来例を示す。
図中、ｌは圧電体、２は電極、３は１／４波長波長厚層
、４は分割溝、５は背面支持体、６はフレキシブルプリ
ント板（ＦＰＣ） 、７は信号取出パターン、８は金属
箔、８＝１は共通アース電極、９はサブダイス溝、１０
は短軸方向の分割溝、１１は誘電体（あるいは抵抗体）
を表す。
本発明の１実施例構成図
第 １ 図FIG. 1 is a block diagram of one embodiment of the present invention, FIGS. 2 to 6 are block diagrams of other embodiments of the present invention, and FIG. 7 is a conventional example. In the figure, l is a piezoelectric body, 2 is an electrode, 3 is a 1/4 wavelength thick layer, 4 is a dividing groove, 5 is a back support, 6 is a flexible printed board (FPC), 7 is a signal extraction pattern, and 8 is a Metal foil, 8=1 is common ground electrode, 9 is sub die groove, 10
is a dividing groove in the short axis direction, 11 is a dielectric (or resistor)
represents. Figure 1: Configuration diagram of one embodiment of the present invention
Claims (4)
探触子において、 配列振動子の配列方向と直交する方向（以下、短軸方向
という）における当該配列振動子の振幅重み付けを行う
手段として、各配列振動子の圧電体（１）の分極を、短
軸方向において、中央部から端部に行くに従って小さく
するように構成したことを特徴とする超音波探触子。(1) In an ultrasonic probe that controls an ultrasound beam using an array transducer, as a means for weighting the amplitude of the array transducer in a direction perpendicular to the array direction of the array transducer (hereinafter referred to as the short axis direction). An ultrasonic probe characterized in that the polarization of the piezoelectric body (1) of each arrayed vibrator is configured to decrease in the short axis direction from the center to the ends.
探触子において、 短軸方向に振幅重み付けを行う手段として、各配列振動
子の圧電体（１）の表面と電極（２）との間の距離を、
短軸方向において、中央部から端部に行くに従って大き
くするように構成したことを特徴とする超音波探触子。(2) In an ultrasonic probe that controls an ultrasonic beam using an array transducer, as a means to weight the amplitude in the short axis direction, the surface of the piezoelectric body (1) of each array transducer and the electrode (2) are connected. the distance between
An ultrasonic probe characterized in that it is configured to increase in size from the center to the ends in the short axis direction.
探触子において、 短軸方向に振幅重み付けを行う手段として、各配列振動
子の短軸方向において、当該各配列振動子の圧電体（１
）を方向の異なる２方向に切断し、中央部から端部に行
くに従って幅が小さくなるように構成したことを特徴と
する超音波探触子。(3) In an ultrasonic probe that controls an ultrasound beam using an array transducer, as a means of amplitude weighting in the short axis direction, the piezoelectric material ( 1
) is cut in two different directions so that the width decreases from the center to the ends.
央部と端部との間を複数個に分割し、開口値を変えて制
御し得るように構成したことを特徴とする第（１）項、
第（２）項、および第（３）項記載の超音波探触子。(4) The piezoelectric body (1) of each of the arrayed vibrators is divided into a plurality of pieces between the center and the end in the short axis direction, and is configured to be controlled by changing the aperture value. Paragraph (1),
The ultrasonic probe according to paragraphs (2) and (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63190290A JPH0241144A (en) | 1988-07-29 | 1988-07-29 | ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63190290A JPH0241144A (en) | 1988-07-29 | 1988-07-29 | ultrasonic probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241144A true JPH0241144A (en) | 1990-02-09 |
Family
ID=16255710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63190290A Pending JPH0241144A (en) | 1988-07-29 | 1988-07-29 | ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241144A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02156934A (en) * | 1988-12-09 | 1990-06-15 | Toshiba Corp | Array type ultrasonic probe and manufacture of piezoelectric body used for it |
| US9656300B2 (en) | 2013-03-28 | 2017-05-23 | Fujifilm Corporation | Unimorph-type ultrasound probe |
-
1988
- 1988-07-29 JP JP63190290A patent/JPH0241144A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02156934A (en) * | 1988-12-09 | 1990-06-15 | Toshiba Corp | Array type ultrasonic probe and manufacture of piezoelectric body used for it |
| US9656300B2 (en) | 2013-03-28 | 2017-05-23 | Fujifilm Corporation | Unimorph-type ultrasound probe |
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