JPH0238554A - Preheating equipment in continuous dry plating installation - Google Patents

Abstract

PURPOSE:To efficiently prevent the deformation of foil at the time of heating by providing electron beam heating devices and hot rollers to preheating equipment for foil and applying slow heating to the foil. CONSTITUTION:In continuous dry plating installations consisting of an inlet-side differential pressure chamber A, a preheating equipment B, and a coating apparatus C, a film is formed on a long-size steel sheet S. At this time, in the preheating chamber B, first the steel sheet S is heated to about 100-200 deg.C by means of a hot roller b-1 on the former-stage side, and then, both surfaces of the steel sheet S are irradiated with beams by means of EB heating devices b-2, b-3, respectively, and the beams are scanned across both surfaces, by which the temp. of the steel sheet S is raised up to about 200-800 deg.C and also the surfaces of the steel sheet S are cleaned. Further, the temp. of the steel sheet S is raised up to coating treatment temp. by means of a hot roller b-4 on the latter-stage side. By this method, the steel sheet S is slowly heated, and the deformation of the steel sheet S can be effectively prevented, and further, adhesive strength between the steel sheet S and a vapor deposited film can be improved.

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a preheating device as a pretreatment equipment for continuous dry plating equipment for long thin plates, and in particular, by adding an ingenuity to the arrangement of preheating means. The purpose is to make it possible to form a coating film that does not change the shape of the plate and has excellent adhesion.

(Prior Art) In recent years, coating technology using plasma has made significant progress, and its use is becoming widespread in various fields. Applications of such coating technology include, for example, magnetic recording thin films, various wear-resistant and corrosion-resistant coatings, and decorative coatings.

Normally, when plasma is used, it is possible to ionize or activate vaporized substances such as metals and semimetals, and to impart high kinetic energy, resulting in high adhesion between the vapor-deposited film and the substrate and good film quality. can get.

Plasma coating methods include magnetron sputtering, ion blating, and plasma CVD.
Arc method and Hollow Cath
ode discharge (HCD) method, etc. have been developed.

(Problems to be Solved by the Invention) The present invention provides continuous air-to-air plating of a long thin plate having a large surface area by the dry plating method as described above.
- In the case of processing using the Air method, research results regarding preheating before coating, which has not been sufficiently studied in the past, are disclosed.

In other words, conventionally, in continuous air-to-air dry plating equipment, heat treatment was performed on the substrate surface using an electron beam (EB) as a preliminary heat treatment before coating. When EB heat treatment is applied to the surface of a thin plate, deformation of the thin plate, such as bulging or bulging, occurs due to a rapid temperature rise in a localized area of the thin plate surface.

The occurrence of shape defects as described above is extremely harmful to, for example, the coating treatment of unidirectional silicon steel sheets whose magnetic properties are to be evaluated, and the negative effects are significant, such as deterioration of magnetic flux density. Therefore, before starting the coating process,
Solving this problem is especially important for thin steel sheets with large surface areas.

(Means for Solving the Problem) The inventors have based on the basic recognition that at least an EB heating device is indispensable from the viewpoint of improving the adhesion of the coating film in continuous air-to-air dry plating. Therefore, various studies were conducted regarding the preheating device.

As a result, it was found that by placing hot rollers before and after the EB heating device and gradually heating the steel plate, deformation of the thin plate during heating can be effectively prevented.

This invention is based on the above knowledge.

That is, the present invention is a thin strip preheating device disposed between an inlet side differential pressure chamber and a first coating chamber of a continuous dry plating apparatus that continuously applies dry plating to long thin sheets, the device comprising: This is a preheating device for continuous dry plating equipment, which consists of one electron beam heating device and hot rollers placed before and after the electron beam heating device.

This invention will be specifically explained below.

FIG. 1 schematically shows the main parts of continuous dry plating equipment incorporating a preferred example of the preheating device according to the present invention. In the figure, symbols A, B, and C indicate the inlet differential pressure chamber, preheating device, and coating device, respectively, and S indicates the steel plate,
G is a guide roll, and a-1 to a-7 are seal rolls for vacuum differential pressure. This seal roll also serves as a guide roll for the steel plate S, and as shown in the figure, the degree of vacuum is increased while guiding the steel plate S into the interior (^ir -to -Ai
r method), it is possible to realize a high vacuum of about lo-4 to 10-'Torr.

and b-1 and b-4 are hot rollers,
These hot rollers b-1 and b-4 are 2 in this example.
The EB heating devices b-2 and b-3 for heating the upper and lower surfaces of the base-arranged steel plates are disposed in front and behind the EB heating devices b-2 and b-3, and the heating devices b-1 to b-4 constitute a heating device.

Note that c-1 is a focusing coil, c-2 is a crucible, c-3 is a rod-shaped evaporation substance, and c-4 is an L-shaped HCD gun.

In the preheating device of the present invention, the steel plate is first heated to about 100 to 200°C using the hot roller b-1 in the previous stage. Next, using an EB device, the temperature of the steel plate is raised to 200 to 800 by irradiating and scanning a beam on the surface of the steel plate.
The surface of the steel plate is cleaned to improve the adhesion between the steel plate and the deposited film in the subsequent coating process.

Then, the hot roller b-4 in the latter stage needs to be heated to the coating processing temperature without causing plate deformation.
For this purpose, it is preferable to use a hot roller that has small temperature variations and can control temperature distribution with high precision.

FIG. 2 shows a preferred example of such a hot roller in cross section. In the figure, 1, 10, and 11 are roll shafts, 2, 36, 7 are roll body end faces, 4 and 5 are roll bodies, 816 is the atmosphere inside the rolls, and 9 is a heater for heating inside the rolls, which is connected to both ends. The mechanism allows for separate control from the central part. 12.1
3.14 is a sliding ring, and 15 is a pipe. In the above-mentioned hot roller, it is extremely advantageous to divide the heater 9 into three parts, one at each end and one at the center, and to control each part individually, in order to uniformly heat the steel plate across its width.

(Function) The major feature of the preheating device of the present invention is that sheet deformation is avoided by gradually heating the steel sheet with hot rollers disposed before and after the EB heating device. There is also the advantage that the surface of the steel plate can be cleaned by heating and the adhesion between the steel plate and the coating film can be improved.

(Example) Example I C: 0.043%, Mn: 0.33%, S:
After degreasing the surface of a low carbon cold rolled steel plate (thickness: 0.3 mm) containing 0.012% and P: 0.008%, continuous dry plating was performed using the Air-to-Air method shown in Figure 1 above. After preheating using the equipment under the following conditions, the HCD method (vacuum degree of the coating chamber;
CrN to 0.8 μm by
Thickly coated.

・Heating temperature by front stage real roller: 150°C ・Heating temperature by EB for upper surface heating: 300°C ・Heating temperature by EB for lower surface heating: 450°C ・Heating temperature by ilt stage hot roller: 460°C Above coating During the treatment, there was no plate deformation at all, and the adhesion was extremely good, with no peeling occurring even after 180° bending three times.

Example 2 C: 0.048%, Si: 3.39%, Mn:
0.072%, 8l: 0.026%, S
: 0.022%, N: 0.0065
%, Sn: 0.05% and Cu: 0.1%
A hot rolled sheet for silicon steel (thickness: 20 mm) containing 1
Cold rolling was performed twice with intermediate annealing at 100'C for 13 minutes to give a final plate thickness of 0.20 mm. Then 84
After primary recrystallization annealing that also serves as decarburization in wet hydrogen at 0°C, the temperature is raised from 850°C to 1150°C at a rate of 8°C/h to undergo secondary recrystallization of the Goss orientation. The grains were developed and a subsequent purification annealing was performed at 1230°C for 8 hours.

Thereafter, oxides on the surface of the steel plate were removed by pickling, and then electropolishing was performed to give the steel plate a mirror-like finish with a center line average roughness Ra of 0.06μ.

Then, using the air-to-air continuous dry plating equipment shown in Figure 1 above, approximately 1.2
A μm thick TiN tension coating was applied.

Preheating at this time is 100° with the hot roller at the front stage.
The temperature was raised to C, then the temperature was raised to 250°C with the upper surface heating EB, and 400°C with the lower surface heating EB, and then the temperature was raised to 420°C with the latter hot roller. The temperature difference between the ends of the steel plate and the center was within 5°C, and at this time there was no deformation of the plate.

The magnetic properties and adhesion of the grain-oriented silicon steel sheet obtained as described above were as follows.

・Magnetic properties--B+o: 1.94T,
W+7zso: 0.64W/kg・Adhesion ---
Even when the film was bent by 180° with a diameter of -20 mm, there was no peeling of the film at all.

(Effects of the Invention) Thus, according to the present invention, when preheating a long thin plate during continuous dry plating, the thin plate can be effectively preheated without damaging the shape of the plate. Moreover, it is also possible to improve the adhesion between the steel plate and the coating film by cleaning the plate surface.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of a continuous dry plating equipment incorporating a preheating device according to the present invention, and FIG. 2 is a sectional view of a hot roller. S... Steel plate G... Guide roll a-
1 to a-7... Seal rolls for vacuum differential pressure b-1, b-
4...Hot rollers b-2, b-3...EB heating device for upper and lower surface heating c-1...Focusing coil c-2...Crucible c-3...Evaporation material c- 4...HCD gun 110.11...Roll shaft 2.3, 6.7...Roll body end surface 4.5. ... Roll body 816 ... Atmosphere inside the roll 9 ... Heating heater 12.13.14 ... Sliding ring 15 ... Pipe

Claims (1)

[Claims] 1. A thin strip preheating device disposed between the inlet side differential pressure chamber and the first coating chamber of a continuous dry plating device that continuously applies dry plating to a long thin plate, comprising at least one A preheating device for continuous dry plating equipment, comprising an electron beam heating device and hot rollers placed before and after the electron beam heating device.