JPH0234553A - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
- Publication number
- JPH0234553A JPH0234553A JP63183113A JP18311388A JPH0234553A JP H0234553 A JPH0234553 A JP H0234553A JP 63183113 A JP63183113 A JP 63183113A JP 18311388 A JP18311388 A JP 18311388A JP H0234553 A JPH0234553 A JP H0234553A
- Authority
- JP
- Japan
- Prior art keywords
- mol
- point
- dielectric
- temperature
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims description 36
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 9
- 239000000654 additive Substances 0.000 claims abstract description 22
- 230000000996 additive effect Effects 0.000 claims abstract description 22
- 238000010586 diagram Methods 0.000 claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims description 22
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052681 coesite Inorganic materials 0.000 abstract description 7
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 7
- 229910052682 stishovite Inorganic materials 0.000 abstract description 7
- 229910052905 tridymite Inorganic materials 0.000 abstract description 7
- 239000000377 silicon dioxide Substances 0.000 abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 6
- 239000003990 capacitor Substances 0.000 abstract description 5
- 239000010953 base metal Substances 0.000 abstract description 4
- 229910052725 zinc Inorganic materials 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 19
- 238000010304 firing Methods 0.000 description 13
- 239000003985 ceramic capacitor Substances 0.000 description 12
- 229910052759 nickel Inorganic materials 0.000 description 9
- 230000001590 oxidative effect Effects 0.000 description 9
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 6
- 238000005245 sintering Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 239000004615 ingredient Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- XYZZKVRWGOWVGO-UHFFFAOYSA-N Glycerol-phosphate Chemical compound OP(O)(O)=O.OCC(O)CO XYZZKVRWGOWVGO-UHFFFAOYSA-N 0.000 description 1
- 229910019639 Nb2 O5 Inorganic materials 0.000 description 1
- 229910019704 Nb2O Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000001089 mineralizing effect Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Ceramic Capacitors (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、ニッケル等の卑金属を内部電極とする積層磁
器コンデンサの誘電体として好適な誘電体磁器組成物に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a dielectric ceramic composition suitable as a dielectric of a multilayer ceramic capacitor whose internal electrodes are made of a base metal such as nickel.
[従来の技術]
従来、積層磁器コンデンサを製造する際には、誘電体磁
器原料粉末から成るグリーンシート(未焼結磁器シート
)に白金又はパラジウム等の貴金属の導電性ペーストを
所望パターンに印刷し、これを複数枚積み重ねて圧着し
、1300〜1600℃の酸化性雰囲気中で焼結させた
。これにより、誘電体磁器と内部電極とが同時に得られ
る。上述の如く、貴金属を使用すれば、酸化性雰囲気中
で高温で焼結させても目的とする内部電極を得ることが
できる。しかし、白金、パラジウム等の貴金属は高価で
あるため、必然的に積層磁器コンデンサがコスト高にな
った。[Prior Art] Conventionally, when manufacturing multilayer ceramic capacitors, a conductive paste of noble metal such as platinum or palladium is printed in a desired pattern on a green sheet (unsintered ceramic sheet) made of dielectric ceramic raw material powder. A plurality of these sheets were stacked and pressed together, and sintered in an oxidizing atmosphere at 1300 to 1600°C. Thereby, the dielectric ceramic and the internal electrode can be obtained at the same time. As mentioned above, if a noble metal is used, the intended internal electrode can be obtained even if it is sintered at high temperature in an oxidizing atmosphere. However, since precious metals such as platinum and palladium are expensive, the cost of multilayer ceramic capacitors has inevitably increased.
この種の問題を解決するために、Ca Z r O3と
M n O2とから成る磁器組成物をコンデンサの誘電
体として使用することが、例えば特開昭53−9809
9号公報に開示されている。ここに開示されている誘電
体磁器組成物は還元性雰囲気中で焼成可能であるので、
ニッケル等の卑金属の酸化が生じない。In order to solve this kind of problem, the use of a ceramic composition consisting of Ca Z r O 3 and M n O 2 as a dielectric material of a capacitor has been proposed, for example, in JP-A-53-9809.
It is disclosed in Publication No. 9. Since the dielectric ceramic composition disclosed herein can be fired in a reducing atmosphere,
Oxidation of base metals such as nickel does not occur.
[発明が解決しようとする課題]
ところで、上記のCa Z r O3とM n O2と
から成る誘電体磁器組成物は高温(1350℃〜138
0℃)で焼成しなければならない、このため、グリーン
シートにニッケルを主成分とする導電性ペーストを印刷
して焼成すると、たとえ非酸化性雰囲気中での焼成であ
っても、ニッケル粒子の溶融凝集が生じ、ニッケルが玉
状に分布する。また、高温焼成のためにニッケルが誘電
体磁器中に拡散し、誘電体磁器の絶縁劣化が生じる。こ
の結果、所望の静電容量及び絶縁抵抗を有する磁器コン
デンサを得ることが困難であった。[Problems to be Solved by the Invention] By the way, the above-mentioned dielectric ceramic composition composed of Ca Z r O 3 and M n O 2 is
For this reason, if a conductive paste containing nickel as a main component is printed on a green sheet and fired, even if the firing is done in a non-oxidizing atmosphere, the nickel particles will melt. Agglomeration occurs and nickel is distributed in beads. Further, due to high temperature firing, nickel diffuses into the dielectric ceramic, causing insulation deterioration of the dielectric ceramic. As a result, it has been difficult to obtain a ceramic capacitor with desired capacitance and insulation resistance.
上記問題点を解決するために、本件出願人は、特開昭6
2−131415号公報(特願昭60−270540号
)で(Cab) −(Zr (1,。In order to solve the above problems, the applicant has
No. 2-131415 (Japanese Patent Application No. 60-270540) discloses (Cab) -(Zr (1,).
Tix)o2から成る基本成分と、L120と5102
とMO(但し、MOはBaOlMgO,Zno、SrO
及びCaOの少なくとも1種)とから成る添加成分とを
含む誘電体磁器組成物を開示し、また特開昭62−13
1412号公報(特願昭60−270541号)で{S
rO) −1ZTi 10 から成る基本成分と
、Br(1−x) x 2
2 と810□とMOから成る添加成分とを含む誘電
体磁器組成物を開示し、また特開昭62−131413
号公報(特願昭60−270542号)で{SrO)
H(Zr <1−x> Tt l Ok
x2から成る基本成分と
、Li2Oと5i02とMoとから成る添加成分とを含
む誘電体磁器組成物を開示し、特開昭62−13141
4号公報(特願昭60−270543号)で(Cab)
、L Z r < 1−x > Tt x) o 2か
ら成る基本成分と、B OとSlO□とMOから成る添
加成分とを含む誘電体磁器組成物を開示した。ここに開
示されている誘電体磁器組成物は還元性雰囲気、120
0℃以下の条件の焼成で得ることができる。しかし、比
誘電率の温度係数が09tll付近における比誘電率が
約35とやや低い。Tix) Basic components consisting of o2, L120 and 5102
and MO (however, MO is BaOlMgO, Zno, SrO
and at least one kind of CaO), and discloses a dielectric ceramic composition containing an additive component consisting of at least one of CaO and
In Publication No. 1412 (Japanese Patent Application No. 60-270541) {S
Discloses a dielectric ceramic composition comprising a basic component consisting of rO) -1ZTi 10 and additive components consisting of Br(1-x) x 2 2 , 810□ and MO;
In the publication (Japanese Patent Application No. 60-270542) {SrO)
H(Zr <1-x> Tt l Ok
Discloses a dielectric ceramic composition containing a basic component consisting of
In Publication No. 4 (Japanese Patent Application No. 60-270543) (Cab)
, LZr<1-x>Ttx)o2, and additive components consisting of B2O, SlO□, and MO. The dielectric ceramic composition disclosed herein can be used in a reducing atmosphere, 120
It can be obtained by firing under conditions of 0°C or lower. However, when the temperature coefficient of the relative permittivity is around 09 tll, the relative permittivity is a little low at about 35.
また、本件出願人は上記誘電体磁器組成物よりも高い比
誘電率を示すものとして特開昭62−222514号で
1−xモル部(但しXは0.2〜0゜7の範囲の数値)
のCa T i O3とXモル部のCa T i S
105とから成る基本成分と、L120と5102とM
O(但し、MOはBaO1Mg01ZnO1SrO及び
CaOの内の少なくとも1種の金属酸化物)との内の少
なくとも2種から成る添加成分とを含む誘電体磁器組成
物を開示した。In addition, the present applicant has disclosed in Japanese Patent Application Laid-Open No. 62-222514 that 1-x mole part (where X is a numerical value in the range of 0.2 to 0.7 )
of Ca T i O3 and X molar parts of Ca T i S
105, L120, 5102 and M
The present invention discloses a dielectric ceramic composition containing an additive component consisting of at least two of O (where MO is at least one metal oxide of BaO1Mg01ZnO1SrO and CaO).
ここに開示されている誘電体磁器組成物は還元性雰囲気
10う0℃以下の条件の焼成で得ることができ、比誘電
率が65以上、静電容量の温度変化率ΔCが−6,21
%〜+6.25%の範囲の特性を有する。しかし、静電
容量の温度特性の直線性が十分でない。The dielectric ceramic composition disclosed herein can be obtained by firing in a reducing atmosphere at 10°C or lower, has a relative permittivity of 65 or more, and a capacitance temperature change rate ΔC of -6.21.
% to +6.25%. However, the linearity of the temperature characteristics of capacitance is not sufficient.
そこで、本発明の目的は非酸化性雰囲気、1200℃以
下の温度による焼成で得ることができ、比較的高い比誘
電率を示し、比誘電率の温度特性の直線性のよい誘電体
磁器組成物を提供することにある。Therefore, the object of the present invention is to provide a dielectric ceramic composition that can be obtained by firing in a non-oxidizing atmosphere at a temperature of 1200°C or less, exhibits a relatively high dielectric constant, and has good linearity in the temperature characteristics of the dielectric constant. Our goal is to provide the following.
[課題を解決するための手段]
上記目的を達成するための本発明は、100重量部の基
本成分と、0.2〜10.0重量部の添加成分とから成
り、前記基本成分が、(S r (2−xCa Ol
・Nb 20s (但し、Xは0.00)x2に
5≦X≦1.995.には0.7≦に≦1.2の範囲の
数値)であり、前記添加成分がB2O3とSiO□とM
O(但し、MOはBaO1Mg01ZnO1SrO及び
CaOの内部なくとも1種の金属酸化物)との組成を示
す三角図における前記B203が1モル%、前記S I
O2が80モル%、前記MOが19モル%の点(A)
と、前記B 203が1モル%、前記S l 02が3
9モ/l/%、前記MOが60モル%の点(B)と、前
記B 20 sが30モル%、前記S iO2が0モル
%、前記MOが70モル%の点(C)と、前記B2O3
が90モル%、前記S i O2が0モル%、前記MO
が10モル%の点(D>と、前記B2O3が90モル%
、前記5102が10モル%、前記MOが0モル%の点
(E)と、前記B Oが20モル%、前記S10□が8
0モル%、前記MOが0モル%の点(F)とを順に結ぶ
6本の直線で囲まれた領域内のものである誘電体磁器組
成物に係わるものである。[Means for Solving the Problems] The present invention for achieving the above object consists of 100 parts by weight of a basic component and 0.2 to 10.0 parts by weight of an additional component, and the basic component is ( S r (2-xCaOl
・Nb 20s (However, X is 0.00) 5≦X≦1.995 for x2. (in the range of 0.7≦≦1.2), and the additive components are B2O3, SiO□ and M
In the triangular diagram showing the composition with O (however, MO is BaO1Mg01ZnO1SrO and at least one metal oxide inside CaO), the B203 is 1 mol%, the S I
Point (A) where O2 is 80 mol% and the MO is 19 mol%
, the B 203 is 1 mol%, and the S l 02 is 3
9 mo/l/%, a point (B) where the MO is 60 mol%, and a point (C) where the B 20 s is 30 mol%, the SiO2 is 0 mol%, and the MO is 70 mol%. Said B2O3
is 90 mol%, the S i O2 is 0 mol%, the M.O.
is 10 mol% (D>, and the point where B2O3 is 90 mol%
, the point (E) where the 5102 is 10 mol% and the MO is 0 mol%, and the point (E) where the BO is 20 mol% and the S10□ is 8
This relates to a dielectric ceramic composition that is within a region surrounded by six straight lines sequentially connecting the point (F) where MO is 0 mol %.
[発明の作用効果コ
上記発明の誘電体磁器組成物は、非酸化性雰囲気120
0℃以下の焼成で得られるので、ニッケル等の卑金属を
内部電極とする温度補償用積層磁器コンデンサの誘電体
として好適なものである。[Operations and Effects of the Invention] The dielectric ceramic composition of the invention described above is produced in a non-oxidizing atmosphere of 120
Since it can be obtained by firing at temperatures below 0°C, it is suitable as a dielectric for temperature-compensating multilayer ceramic capacitors whose internal electrodes are made of base metals such as nickel.
また、温度係数TCが0ppl/”C近傍で比誘電率が
45〜54と比較的大きく、比誘電率の温度特性の直線
性に優れ、温度係数TCが+350〜−310 DEI
ll /”ClIMHzにおけるQが2000以上、抵
抗率ρがlX107MΩ・1以上の誘電体磁器組成物を
提供することができる。In addition, the relative permittivity is relatively large at 45 to 54 when the temperature coefficient TC is around 0 ppl/''C, and the linearity of the temperature characteristic of the relative permittivity is excellent, and the temperature coefficient TC is +350 to -310 DEI
It is possible to provide a dielectric ceramic composition having a Q of 2000 or more and a resistivity ρ of 1×107 MΩ·1 or more at ll/”ClI MHz.
[実施例] 次に本発明の詳細な説明する。[Example] Next, the present invention will be explained in detail.
第1表の試料No、1の基本成分を得るために純度99
%以上の5rCO3(炭酸ストロンチウム)、CaC0
(炭酸カルシウム)、Nb2O5(酸化ニオブ)を出発
原料として用意し、不純物を目方に入れないで、S r
CO3を338.71g (1、2モル部)、CaC
O3を153.09g (0,8モル部)、Nb2O5
を508.20g (1、0モル部)秤量し、これ等を
15時時間式混合した0次に、上記原料混合物を150
℃で4時間乾燥した後、粉砕して大気巾約1050℃で
2時間仮焼し、{Sr1.2Ca O) ・Nb2
O5粉末を得た。Purity 99 to obtain the basic components of Sample No. 1 in Table 1
% or more of 5rCO3 (strontium carbonate), CaC0
(calcium carbonate) and Nb2O5 (niobium oxide) as starting materials, and without adding impurities to the grain, S r
338.71g (1.2 mol parts) of CO3, CaC
153.09g (0.8 mole part) of O3, Nb2O5
Weighed out 508.20g (1.0 mol parts) and mixed them for 15 hours.Next, the above raw material mixture was mixed for 150 hours.
After drying at ℃ for 4 hours, it was crushed and calcined for 2 hours at an atmospheric width of about 1050℃ to produce {Sr1.2CaO) ・Nb2
O5 powder was obtained.
0.8 2 1.0
一方、試料懇1の添加成分を得るなめに8203
0.93g
5i02 64.48g
BaC01う、09g
MgO1,03g
ZnO2,07g
5rCO11,29g
CaC05,10g
を秤量し、これにアルコールを300cc加え、ポリエ
チレンポットにてアルミナボールを用いて10時間撹拌
した後、大気中1000℃で2時間仮焼成し、これを3
00ccの水と共にアルミナポットに入れ、アルミナボ
ールで15時間粉砕し、しかる後、150℃で4時間乾
燥させて、B2O3が1モル%、S 102が80モル
%、MOが19モル%(BaOが5.7モル%、IV[
gOが1゜9モル%、ZnOが1.9モル%、SrOが
5゜7モル%、CaOが3.8モル%)の組成の添加成
分の粉末を得た。0.8 2 1.0 On the other hand, in order to obtain the additional components of sample group 1, 8203
0.93g 5i02 64.48g BaC01, 09g MgO1,03g ZnO2,07g 5rCO11,29g CaC05,10g was weighed, 300cc of alcohol was added thereto, and after stirring for 10 hours using an alumina ball in a polyethylene pot, air Temporarily baked at 1000℃ for 2 hours, then baked for 3
It was placed in an alumina pot with 00 cc of water, crushed with an alumina ball for 15 hours, and then dried at 150°C for 4 hours to obtain 1 mol% of B2O3, 80 mol% of S102, and 19 mol% of MO (BaO 5.7 mol%, IV[
A powder of additive components having a composition of 1.9 mol % gO, 1.9 mol % ZnO, 5 7 mol % SrO, and 3.8 mol % CaO was obtained.
上記の基本成分1000g (100重量部)に対して
上記の添加成分を30g(3重量部)加え、更にアクリ
ル酸エステルポリマーグリセリン締金リン酸塩の水溶液
から成る有機バインダを基本成分と添加成分との合計重
量に対して1う2重量%添加し、更に50重量%の水を
加え、これ等をボールミルに入れて粉砕及び混合して磁
器原料のスラリーを作製した。Add 30g (3 parts by weight) of the above additive ingredients to 1000g (100 parts by weight) of the above basic ingredients, and then add an organic binder consisting of an aqueous solution of acrylic acid ester polymer glycerin phosphate to the basic ingredients and additive ingredients. 1 to 2% by weight based on the total weight of the powder and 50% by weight of water were further added, and these were placed in a ball mill and pulverized and mixed to prepare a slurry of porcelain raw material.
次に、上記スラリーを真空脱泡機に入れて脱泡し、この
スラリーをリバースロールコータ−に入れ、これを使用
してポリエステルフィルム上にスラリーに基づく薄膜を
形成し、この薄膜をフィルム上で100℃に加熱して乾
燥させ、厚さ約25μmのグリーンシートを得た。この
シートは、長尺なものであるが、これを10a11角の
正方形に打ち抜いて使用する。Next, the above slurry is put into a vacuum deaerator to defoam, and this slurry is put into a reverse roll coater, which is used to form a thin film based on the slurry on a polyester film, and this thin film is applied onto the film. It was heated to 100° C. and dried to obtain a green sheet with a thickness of about 25 μm. This sheet is long and is used by punching out a square with 10x11 sides.
一方、内部電極用の導電ペーストは、粒径平均1.5μ
mのニッケル粉末10gと、エチルセルローズ0.9g
をブチルカルピトール9.1gに溶解させたものとを撹
拌機に入れ、10時間撹拌することにより得た。この導
電ペーストを長さ14M、幅711LI11のパターン
を50個有するスクリーンを介して上記グリーンシート
の片面に印刷した後、これを乾燥させた。On the other hand, the conductive paste for internal electrodes has an average particle size of 1.5 μm.
10g of nickel powder and 0.9g of ethyl cellulose
was dissolved in 9.1 g of butylcarpitol and placed in a stirrer and stirred for 10 hours. This conductive paste was printed on one side of the green sheet through a screen having 50 patterns each having a length of 14M and a width of 711LI11, and then dried.
次に、上記印刷面を上にしてグリーンシートを2枚¥f
I層しな、この際、隣接する上下のシートにおいて、そ
の印刷面がパターンの長手方向に約手程度ずれるように
配置した。更に、この積層物の上下両面にそれぞれ4枚
ずつ厚さ60μmのグリーンシートを積層した6次いで
、この積層物を約50℃の温度で厚さ方向に約40トン
の圧力を加えて圧着させた。しかる後、この積層物を格
子状に裁断し、100個の積層チップを得た。Next, place two green sheets with the printed side facing up.
At this time, the adjacent upper and lower sheets were arranged so that their printed surfaces were shifted by about a hand in the longitudinal direction of the pattern. Furthermore, four green sheets each having a thickness of 60 μm were laminated on both the top and bottom surfaces of this laminate.6 Next, this laminate was crimped by applying approximately 40 tons of pressure in the thickness direction at a temperature of approximately 50°C. . Thereafter, this laminate was cut into a grid shape to obtain 100 laminate chips.
次に、この積層体チップを雰囲気焼成が可能な炉に入れ
、大気雰囲気中で100℃/hの速度で600℃まで昇
温して、有機バインダを燃焼させた。しかる後、炉の雰
囲気を大気からH22体積%+N298体積%の還元性
雰囲気に変えた。そして炉を上述の如き還元性雰囲気と
した状態を保って、積層体チップの加熱温度を600℃
から焼結温度1180℃まで100℃/hの速度で昇温
しで1180℃(最高温度ンを3時間保持した後、10
0℃/hの速度で600℃まで降温し、雰囲気を大気雰
囲気(酸化性雰囲気)に置き換えて、600℃を30分
間保持して酸化処理を行い、その後、室温まで冷却して
焼結体チップを作製した。Next, this laminate chip was placed in a furnace capable of firing in an atmosphere, and the temperature was raised to 600° C. at a rate of 100° C./h in an air atmosphere to burn the organic binder. Thereafter, the atmosphere in the furnace was changed from air to a reducing atmosphere of H22 volume % + N2 98 volume %. Then, while maintaining the reducing atmosphere in the furnace as described above, the heating temperature of the stacked chips was increased to 600°C.
The temperature was raised at a rate of 100°C/h to the sintering temperature of 1180°C.
The temperature is lowered to 600°C at a rate of 0°C/h, the atmosphere is replaced with an air atmosphere (oxidizing atmosphere), 600°C is maintained for 30 minutes to perform oxidation treatment, and then the sintered chip is cooled to room temperature. was created.
次に、電極が露出する焼結体チップの側面に亜鉛とガラ
スフリットとビヒクルとから成る導電性ペーストを塗布
して乾燥し、これを大気中で550℃の温度で15分間
焼付け、亜鉛電極層を形成し、更にこの上に銅を無電解
メツキで被着させて、さらにこの上に電気メツキ法でP
b−3n半田層を設けて、一対の外部電極を形成した。Next, a conductive paste consisting of zinc, glass frit, and vehicle is applied to the side surface of the sintered chip where the electrodes are exposed, dried, and baked in the air at a temperature of 550°C for 15 minutes to form a zinc electrode layer. Copper is deposited on top of this by electroless plating, and then P is deposited on top of this by electroplating.
A b-3n solder layer was provided to form a pair of external electrodes.
これにより、第1図に示す如く、誘電体磁器層1.2.
3と、内部電極4.5と、外部電極6.7から成る積層
磁器コンデンサ10が得られた。As a result, as shown in FIG. 1, the dielectric ceramic layers 1.2.
A multilayer ceramic capacitor 10 was obtained, which consisted of a capacitor 3, an internal electrode 4.5, and an external electrode 6.7.
なお、このコンデンサ10の誘電体磁器層2の厚さは0
.02mm、内部電極4.5の対向面積は5mmX5w
=25mrr?である。また、焼成後の磁器層1.2.
3の組成は焼結前の基本成分と添加成分との混合組成と
実質的に同じであり、基本成分のSr Ca O−
Nb2o5から成る結1.2 0.8 2
晶粒子間にBOIモル%とS iO280モル%とBa
O3,7モル%とMgO1,95モル%とZnO1,9
5モル%とSrO5゜7モル%とCaO3,8モル%と
から成る添加成分が均一に分布したものが得られる。な
お、試料量1のMO19モル%はBaOlMgO,Zn
o、5rO1CaOをそれぞれ5,7モル%、1.9モ
ル%、1.9モル%、5.7モル%、3゜8モル%にし
たことに対応する。Note that the thickness of the dielectric ceramic layer 2 of this capacitor 10 is 0.
.. 02mm, the opposing area of internal electrode 4.5 is 5mm x 5w
=25mrr? It is. Moreover, the porcelain layer after firing 1.2.
The composition of No. 3 is substantially the same as the mixed composition of the basic component and the additive component before sintering, and the basic component Sr Ca O-
BOI mol%, SiO2 80 mol%, and Ba between crystal grains consisting of Nb2o5
O3, 7 mol%, MgO 1,95 mol% and ZnO 1,9
A uniform distribution of the additive components consisting of 5.5 mol %, SrO 5.7 mol % and CaO 3.8 mol % is obtained. In addition, MO19 mol% of sample amount 1 is BaOlMgO, Zn
This corresponds to 5.7 mol%, 1.9 mol%, 1.9 mol%, 5.7 mol%, and 3.8 mol% of o, 5rO1CaO, respectively.
次に完成した[/IF磁器コンデンサの比誘電率ε5、
比誘電率の温度係数TC,Q、抵抗率ρを測定したとこ
ろ第2表の試料No、 iに示す如く、C9は45、T
Cは+20 Ell)l /”C1Qは3400、ρは
2.OX107MΩ・儂であった。Next, the dielectric constant ε5 of the completed [/IF ceramic capacitor,
When we measured the temperature coefficient of dielectric constant TC, Q, and resistivity ρ, as shown in sample No. i in Table 2, C9 was 45, T
C was +20Ell)l/"C1Q was 3400, and ρ was 2.OX107MΩ・I.
なお、上記電気的特性は次の要領で測定した。Note that the above electrical characteristics were measured in the following manner.
(A) 比誘電率ε は、温度25℃、周波数IMH
z、交流電圧(実効値)0.うVの条件で静電容量を測
定し、この測定値と一対の内部電極4.5の対向面積2
5m♂と磁器層2の厚さ0゜05mff1から計算で求
めた。(A) The relative permittivity ε is at a temperature of 25°C and a frequency of IMH.
z, AC voltage (effective value) 0. The capacitance is measured under the condition of
It was calculated from 5 m♂ and the thickness of the porcelain layer 2, 0°05 mff1.
(B) 比誘電率の温度係数TC(9111/”C)
は85℃の静電容量(Cl15)と25℃の静電容量(
C25)とを測定し、次式で算出した。(B) Temperature coefficient of dielectric constant TC (9111/”C)
is the capacitance at 85°C (Cl15) and the capacitance at 25°C (
C25) was measured and calculated using the following formula.
[(C−C)/(C25X60)]XIO(ppH/”
C)
(C) Qは温度25℃において、周波数IMHz、
電圧(実効値)0.5Vの交流でQメータにより測定し
た。[(C-C)/(C25X60)]XIO(ppH/”
C) (C) Q is the frequency IMHz at a temperature of 25°C,
Measurement was performed using a Q meter at an AC voltage (effective value) of 0.5V.
(D) 抵抗率p<MΩ・all)は、温度20℃に
おいて、DC50Vを1分間印加した後に一対の外部電
極6.7間の抵抗値を測定し、この測定値と寸法とに基
づいて計算で求めた。(D) Resistivity p<MΩ・all) is calculated based on the measured value and dimensions by measuring the resistance value between the pair of external electrodes 6.7 after applying DC 50V for 1 minute at a temperature of 20°C. I asked for it.
以上、試料N011の作製方法及びその特性について述
べたが、その他の試料No、 2〜58についても、基
本成分及び添加成分の組成、これ等の割合、及び還元性
雰囲気(非酸化性雰囲気)での焼成温度を第1表及び第
2表に示すように変えた伯は、試料量、1と全く同一の
方法で積層磁器コンデンサを作製し、同一方法で電気的
特性を測定した。The preparation method of sample No. 011 and its characteristics have been described above, but the compositions of the basic components and additive components, their ratios, and the reducing atmosphere (non-oxidizing atmosphere) were also explained for the other samples Nos. 2 to 58. By changing the firing temperature as shown in Tables 1 and 2, a multilayer ceramic capacitor was prepared using the same method as in 1, and the electrical characteristics were measured using the same method.
第1表は、それぞれの試料の基本成分{Sr(2−x)
Cax02 )k ・Nb2O,と添加成分との組成
を示し、第2表はそれぞれの試料の還元性雰囲気におけ
る焼結のための焼成温度、及び電気的特性を示す、なお
、第1表の基本成分の欄には、組成式(S r (2−
x) Cax02 ) (’ Nb2O5のX及びkの
値が示されている。添加成分の添加量は基本成分100
重量部に対する重量部で示されている。また、第1表の
添加成分におけるMOの内容の欄にはBaO1Mg01
ZnO1SrO1CaOの割合がモル%で示されている
。Table 1 shows the basic components of each sample {Sr(2-x)
Cax02)k ・Nb2O, and the additive components are shown in Table 2. Table 2 shows the firing temperature for sintering each sample in a reducing atmosphere and the electrical characteristics. In the column, the composition formula (S r (2-
x) Cax02 ) (' The values of X and k of Nb2O5 are shown. The amount of added components is 100% of the basic component.
Parts by weight are given in parts by weight. In addition, in the column of MO content in the additive components of Table 1, BaO1Mg01
The proportion of ZnO1SrO1CaO is shown in mol%.
第1表及び第2表から明らかな如く、本発明に従う試料
では、非酸化性雰囲気、1200℃以下の焼成で、比誘
電率ε が34〜62、比誘電率の温度係数TCが+3
50〜−310 (ppn /’C)、Qが2000以
上、抵抗率ρが1×107MΩ・1以上となった。また
、試料No、 1の比誘電率の温度特性を示す第2図か
ら明らかなように十分な直線性が得られる。第2図には
本発明に従う試料NQIのみを示したが本発明に従うす
べての試料の比誘電率の温度特性の直線性が優れている
0以上のように本発明に従う試料では所望の温度補償用
コンデンサを得ることができる。As is clear from Tables 1 and 2, in the samples according to the present invention, when fired in a non-oxidizing atmosphere at 1200°C or less, the relative permittivity ε was 34 to 62, and the temperature coefficient TC of the relative permittivity was +3.
50 to -310 (ppn/'C), Q was 2000 or more, and resistivity ρ was 1×10 7 MΩ·1 or more. Furthermore, as is clear from FIG. 2, which shows the temperature characteristics of the dielectric constant of sample No. 1, sufficient linearity can be obtained. Although only the sample NQI according to the present invention is shown in FIG. 2, the linearity of the relative dielectric constant temperature characteristic of all the samples according to the present invention is excellent. You can get a capacitor.
一方、試料NQ11.12.13.14.15.23.
28.29.34.35.40.41.46.47.5
0.51.54.55.58では本発明の目的を達成す
ることはできない、従って、これ等は本発明の範囲外の
ものである。On the other hand, sample NQ11.12.13.14.15.23.
28.29.34.35.40.41.46.47.5
0.51.54.55.58 cannot achieve the purpose of the present invention, and therefore they are outside the scope of the present invention.
次に組成の限定理由ついて述べる。Next, the reasons for limiting the composition will be described.
添加成分の添加量が零の場合には試料No、 23.2
9.35.41から明らかな如く焼成温度が1250℃
であっても緻密な焼結体が得られないが、試料間24.
30.36.42に示す如く添加量が100重量部の基
本成分に対して0.2重量部の場合には1180℃の焼
成で所望の電気的特性を有する焼結体が得られる。従っ
て、添加成分の下限は0.2重量部である。一方、試料
間28.34.40.46に示す如く添加量が12重量
部の場合にはQが2000未満となり、所望特性よりも
悪くなるが、試料間、27.33.39.45に示す如
く添加量が10重量部の場合には所望特性を得ることが
できる。従って、添加量の上限は10重量部である。If the amount of added component is zero, sample No. 23.2
As is clear from 9.35.41, the firing temperature is 1250℃
Although a dense sintered body cannot be obtained even if the distance between samples is 24.
As shown in 30.36.42, when the amount added is 0.2 parts by weight per 100 parts by weight of the basic components, a sintered body having desired electrical properties can be obtained by firing at 1180°C. Therefore, the lower limit of the additive component is 0.2 parts by weight. On the other hand, as shown in 28.34.40.46 between samples, when the amount added is 12 parts by weight, Q becomes less than 2000, which is worse than the desired characteristics, but as shown in 27.33.39.45 between samples. When the amount added is 10 parts by weight, desired characteristics can be obtained. Therefore, the upper limit of the amount added is 10 parts by weight.
kの値が試料間47.51.55に示す如く、0.6の
場合には、ρが1×107MΩ未満となり、所望の特性
よりも悪くなるが、試料間48.52.56に示す如く
、kの値が0.7の場合には所望の特性を得ることがで
きる。従ってkの下限は0.7である。一方、試料間5
0.54.58に示す如くkの値が1.3の場合には緻
密な焼結体が得られないが、試料間、49.53.57
に示す如く、kの値が1.2の場合には所望の特性が得
られる。従ってkの値の上限は1.2である。If the value of k is 0.6, as shown in Sample Interval 47.51.55, ρ will be less than 1 x 107 MΩ, which will be worse than the desired characteristics, but as shown in Sample Interval 48.52.56. , k is 0.7, desired characteristics can be obtained. Therefore, the lower limit of k is 0.7. On the other hand, between samples 5
As shown in 0.54.58, when the value of k is 1.3, a dense sintered body cannot be obtained, but between the samples, 49.53.57
As shown in FIG. 2, desired characteristics can be obtained when the value of k is 1.2. Therefore, the upper limit of the value of k is 1.2.
添加成分の好ましい組成は第3図の8203S i 0
2 M Oの組成比を示す三角図に基づいて決定する
ことができる。三角図の第1の点(A)は、試料No、
17)B203が1モル%、S iO2が80モル%、
MOが19モル%の組成を示し、第2の点(B)は、試
料NO12のB2O3が1モル%、S iO2が39モ
ル%、MOが60モル%の組成を示し、第3の点(C)
は、試料層3のB2O3が30モル%、S t O2が
0モル%、MOが70モル%の組成を示し、第4の点(
D>は、試料層4のB Oが90モル%、S iO2が
0モル%、MOが10モル%の組成を示し、第5の点(
E)は、試料層5のB2O3が90モル%、S I O
2が10モル%、MOが0モル%の組成を示し、第6の
点(F)は試料NQ6のB2O3が20モル%、S i
O2が80モル%、MOが0モル%の組成を示す。The preferred composition of the additive components is 8203S i 0 in Figure 3.
It can be determined based on a triangular diagram showing the composition ratio of 2M O. The first point (A) in the triangular diagram is sample No.
17) B203 is 1 mol%, SiO2 is 80 mol%,
The second point (B) shows the composition of sample NO12 with 19 mol% of MO, 1 mol% of B2O3, 39 mol% of SiO2, and 60 mol% of MO, and the third point (B) shows the composition of sample NO12 with 19 mol% of MO. C)
indicates a composition of sample layer 3 with 30 mol% B2O3, 0 mol% S t O2, and 70 mol% MO, and the fourth point (
D> indicates a composition of sample layer 4 with 90 mol% of B O, 0 mol% of SiO2, and 10 mol% of MO, and the fifth point (
E), B2O3 in sample layer 5 is 90 mol%, SIO
2 is 10 mol%, MO is 0 mol%, and the sixth point (F) is sample NQ6 with 20 mol% B2O3 and Si
The composition is 80 mol% O2 and 0 mol% MO.
本発明の範囲に属する試料の添加成分の組成は三角図の
第1〜6の点(A)〜(F)を順に結ぶ6本の直線で囲
まれた領域以内の組成になっている。この領域内の組成
とすれば、所望の電気的特性を得ることができる。一方
試料恥、11〜15のように、添加成分の組成が本発明
で特定した範囲外となれば、緻密な焼結体を得ることが
できない。The composition of the additive components of the sample that falls within the scope of the present invention is within the region surrounded by six straight lines connecting points 1 to 6 (A) to (F) in the triangular diagram in order. If the composition is within this range, desired electrical characteristics can be obtained. On the other hand, if the composition of the additive components falls outside the range specified in the present invention, as in Samples Nos. 11 to 15, a dense sintered body cannot be obtained.
なお、MO酸成分例えば試料No、 16〜20に示す
如(BaOlMgO,ZnO1SrO1CaOのいずれ
か一つであってもよいし、又は他の試料で示すように適
当な比率としてもよい。The MO acid component may be one of BaOlMgO, ZnO1SrO1CaO, as shown in samples No. 16 to 20, or may be in an appropriate ratio as shown in other samples.
[変形例]
以上、本発明の実施例について述べたが、本発明はこれ
に限定されるものではなく、例えば次の変形例が可能な
ものである。[Modifications] Although the embodiments of the present invention have been described above, the present invention is not limited thereto, and, for example, the following modifications are possible.
(a> 基本成分の中に、本発明の目的を阻害しない
範囲で微量のM n O2(好ましくは0.05〜0.
1重量%)等の鉱化剤を添加し、焼結性を゛向上させて
もよい、また、その他の物質を必要に応じて添加しても
よい。(a> A trace amount of M n O2 (preferably 0.05-0.
A mineralizing agent such as 1% by weight) may be added to improve the sinterability, and other substances may be added as necessary.
(b) 出発原料を、実施例で示したちの以外の酸化
物又は水酸化物又はその他の化合物としてもよい。(b) The starting materials may be oxides or hydroxides or other compounds other than those shown in the examples.
(C) 酸化温度を600℃以外の焼結温度よりも低
い温度(好ましくは500℃〜1000℃の範囲)とし
てもよい、即ち、ニッケル等の電極と磁器の酸化とを考
慮して種々変更することが可能である。(C) The oxidation temperature may be set to a temperature lower than the sintering temperature other than 600°C (preferably in the range of 500°C to 1000°C), that is, various changes may be made in consideration of the oxidation of the electrode such as nickel and the porcelain. Is possible.
(d) 非酸化性雰囲気中の焼成温度を、電極材料を
考慮して種々変えることができる。ニッケルを内部電極
とする場合には、1050℃〜1200℃の範囲で溶融
凝集がほとんど生じない。(d) The firing temperature in a non-oxidizing atmosphere can be varied depending on the electrode material. When nickel is used as the internal electrode, almost no melt aggregation occurs in the range of 1050°C to 1200°C.
(e) 焼結を中性雰囲気で行ってもよい。(e) Sintering may be performed in a neutral atmosphere.
(f) 積層磁器コンデンサ以外の一般的な磁器コン
デンサにも勿論適用可能である。(f) It is of course applicable to general ceramic capacitors other than laminated ceramic capacitors.
第1図は本発明の実施例に係わる積層型磁器コンデンサ
を示す断面図、
第2図は磁器コンデンサの温度と比誘電率の関係を示す
図、
第3図は添加成分の組成範囲を示す三角図である。
1.2.3・・・磁器層、4.5・・・内部電極、6.
7・・・外部電極。Figure 1 is a sectional view showing a multilayer ceramic capacitor according to an embodiment of the present invention, Figure 2 is a diagram showing the relationship between temperature and dielectric constant of the ceramic capacitor, and Figure 3 is a triangle showing the composition range of additive components. It is a diagram. 1.2.3...Porcelain layer, 4.5...Internal electrode, 6.
7...External electrode.
Claims (1)
の添加成分とから成り、 前記基本成分が、 {Sr_(_2_−_x_)Ca_xO_2}_k・N
b_2O_5(但しxは0.005≦x≦1.995,
kは0.7≦k≦1.2の範囲の数値)であり、 前記添加成分がB_2O_3とSiO_2とMO(但し
、MOはBaO、MgO、ZnO、SrO及びCaOの
内少なくとも1種の金属酸化物)との組成を示す三角図
における 前記B_2O_3が1モル%、前記SiO_2が80モ
ル%、前記MOが19モル%の点(A)と、前記B_2
O_3が1モル%、前記SiO_2が39モル%、前記
MOが60モル%の点(B)と、前記B_2O_3が3
0モル%、前記SiO_2が0モル%、前記MOが70
モル%の点(C)と、前記B_2O_3が90モル%、
前記SiO_2が0モル%、前記MOが10モル%の点
(D)と、前記B_2O_3が90モル%、前記SiO
_2が10モル%、前記MOが0モル%の点(E)と、
前記B_2O_3が20モル%、前記SiO_2が80
モル%、前記MOが0モル%の点(F)と、を順に結ぶ
6本の直線で囲まれた領域内のものである誘電体磁器組
成物。[Scope of Claims] Consisting of 100 parts by weight of a basic component and 0.2 to 10.0 parts by weight of additional components, the basic component being {Sr_(_2_-_x_)Ca_xO_2}_k・N
b_2O_5 (however, x is 0.005≦x≦1.995,
k is a numerical value in the range of 0.7≦k≦1.2), and the additive components are B_2O_3, SiO_2, and MO (however, MO is a metal oxide of at least one of BaO, MgO, ZnO, SrO, and CaO). A point (A) in the triangular diagram showing the composition of B_2O_3, 80 mol%, and 19 mol% of B_2O_3, and 19 mol% of MO, respectively, and B_2
The point (B) where O_3 is 1 mol%, the SiO_2 is 39 mol%, and the MO is 60 mol%, and the B_2O_3 is 3
0 mol%, the SiO_2 is 0 mol%, the MO is 70
Point (C) of mol% and the above B_2O_3 is 90 mol%,
Point (D) where the SiO_2 is 0 mol% and the MO is 10 mol%, and the point (D) where the B_2O_3 is 90 mol% and the SiO
A point (E) where _2 is 10 mol% and the MO is 0 mol%,
The B_2O_3 is 20 mol%, and the SiO_2 is 80 mol%.
mol%, and the dielectric ceramic composition is within a region surrounded by six straight lines sequentially connecting the point (F) where MO is 0 mol%.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63183113A JPH0234553A (en) | 1988-07-22 | 1988-07-22 | Dielectric porcelain composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63183113A JPH0234553A (en) | 1988-07-22 | 1988-07-22 | Dielectric porcelain composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0234553A true JPH0234553A (en) | 1990-02-05 |
Family
ID=16130006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63183113A Pending JPH0234553A (en) | 1988-07-22 | 1988-07-22 | Dielectric porcelain composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0234553A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10472196B2 (en) | 2014-06-30 | 2019-11-12 | Zuiko Corporation | Sheet delivery system and sheet delivery method using same |
-
1988
- 1988-07-22 JP JP63183113A patent/JPH0234553A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10472196B2 (en) | 2014-06-30 | 2019-11-12 | Zuiko Corporation | Sheet delivery system and sheet delivery method using same |
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